KR960042910A - Semiconductor Device Formation Method - Google Patents
Semiconductor Device Formation Method Download PDFInfo
- Publication number
- KR960042910A KR960042910A KR1019950010734A KR19950010734A KR960042910A KR 960042910 A KR960042910 A KR 960042910A KR 1019950010734 A KR1019950010734 A KR 1019950010734A KR 19950010734 A KR19950010734 A KR 19950010734A KR 960042910 A KR960042910 A KR 960042910A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- alignment mark
- semiconductor device
- forming
- pedestal
- Prior art date
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 발명은 반도체소자 형성방법에 관한 것으로, 하부에 중첩정렬마크가 형성된 완전한 구형의 웨이퍼를 상기 웨이퍼보다 작게 형성된 웨이퍼 받침대 상부에 상기 중첩정렬마크가 노출되도록 형성하고 상기 웨이퍼 받침대 하부에 중첩정렬마크 판독기를 형성한 다음, 이를 이용한 후공정으로 반도체소자를 형성함으로써 반도체소자의 신뢰성을 향상시키고 반도체소자의 수율을 향상시킬 수 있는 기술이다.The present invention relates to a method of forming a semiconductor device, wherein a completely spherical wafer having an overlapping alignment mark formed at a lower portion thereof is formed to expose the overlapping alignment mark at an upper portion of a wafer pedestal formed smaller than the wafer, and an overlapping alignment mark reader under the wafer pedestal. After the formation of the semiconductor device, the semiconductor device is formed in a subsequent process using the same, thereby improving the reliability of the semiconductor device and improving the yield of the semiconductor device.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1A도 및 제1B도는 본 발명의 실시예에 따른 반도체소자 형성방법을 도시한 개략도.1A and 1B are schematic diagrams showing a method of forming a semiconductor device in accordance with an embodiment of the present invention.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950010734A KR960042910A (en) | 1995-05-02 | 1995-05-02 | Semiconductor Device Formation Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950010734A KR960042910A (en) | 1995-05-02 | 1995-05-02 | Semiconductor Device Formation Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960042910A true KR960042910A (en) | 1996-12-21 |
Family
ID=66523249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950010734A KR960042910A (en) | 1995-05-02 | 1995-05-02 | Semiconductor Device Formation Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960042910A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170139263A (en) * | 2016-06-09 | 2017-12-19 | 주식회사 디비하이텍 | Wafer with align key and method of fabricating the same |
-
1995
- 1995-05-02 KR KR1019950010734A patent/KR960042910A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170139263A (en) * | 2016-06-09 | 2017-12-19 | 주식회사 디비하이텍 | Wafer with align key and method of fabricating the same |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |