KR960035941A - Scan type photoorganic current analysis device capable of detecting photoorganic currents in samples in non-biased state - Google Patents

Abstract

In this photoorganic current analysis device, one edge of the semiconductor integrated circuit wiring, which is the sample 6 to be measured, is connected to, for example, a ground potential, and the other edge thereof is connected to the ground-up current 10 through the ground. It is connected to the potential.

When the laser light is scanned on the wiring, when the laser light is irradiated to a portion of the wiring with poor thermal conductivity, for example, a portion having voids in the wiring, a local imbalance occurs in the temperature distribution in the wiring.

As a result of this temperature distribution imbalance, self-generated thermal power is generated and current is induced in accordance with the J-Back effect during wiring.

This induced current is amplified in accordance with the current up 10, and is converted and output by the image information converting apparatus 12 into image information synchronized with the scanning of the laser light.

For this reason, since the photoorganic current can be measured in a state in which no current bias is applied to the sample 6 under test, the current image image corresponding to the photoorganic current also appears in the sample 6 having high resistance. Can be obtained, and the position of the void can be determined in particular.

Description

Scan type photoorganic current analysis device capable of detecting photoorganic currents in samples in non-biased state

As this is a public information case, the full text was not included.

1 is a schematic block diagram of a scanning type photoorganic current analyzing apparatus according to a first embodiment of the present invention. 2 is a schematic view of the main part of the first embodiment including an object to be measured. 3 is a schematic view showing the operation of the first embodiment. (A) is a cross-sectional view of the object to be measured with respect to the scanning area of the laser. (b) is a waveform diagram which shows the change of the electric current value at the time of scanning laser light. (c) shows the image image output based on the waveform diagram of (d).

Claims (15)

In the scanning photoorganic current analysis device which detects the photoorganic current induced in the sample to be measured by irradiating with scanning the focused laser light, the laser light source 100 which generate | occur | produces the said laser light, 1st control A light beam scanning means 102 for scanning the laser light in an area corresponding to the signal, a light focusing means 106 for focusing the laser light on the sample to be measured, and a control means for outputting the first control signal ( 20) current amplification means 10 connected to both ends of the sample 6 to be measured to amplify a current flowing through the sample to be measured and outputting an output signal corresponding to the amplified current, and scanning of the laser light The optical organic device characterized by the image changing means 12 which converts the output signal of the said current amplifying means into corresponding image information, and outputs it, and the output means 14 which outputs the image according to the said image information. Scan type photoorganic current analysis device for detecting a flow rate. The image converting means (12) according to claim 1, further comprising image forming means (104) for forming reflected light from said sample under test and outputting image forming information to said image converting means, and said image converting means (12) includes a second control signal. The control means 20 further comprises means for exchanging a first state for outputting the image information to the output means and a second state for outputting the imaging information. Scan type photoorganic current analysis device, characterized in that for outputting a control signal. The first state 8 according to claim 1, wherein the first power source 8 for supplying the first potential, the first state to which both ends of the sample 6 to be measured and the current amplifying means 10 are connected and the sample to be measured. (6) and means (34) for switching a second state connected in series with said first power source (8) and said current amplifying means (10). The scanning photoorganic current analysis device according to claim 1, further comprising a resistor (36) connected in series between one end of the sample to be measured and the current amplifying means. The scanning type photoorganic current analysis device according to claim 1, further comprising a capacitor (38) connected in parallel between one end of the sample to be measured and the current amplifying means. A scanning type photoorganic current analyzing apparatus which detects a photoorganic current induced in a sample to be measured by scanning while irradiating focused laser light, the light source 100 generating the laser light and a first control signal A light beam scanning means 102 for scanning the laser light in an area according to the above, an optical connecting means 106 for focusing the laser light onto the sample under test, and a control means for outputting the first control signal. ), A first power source 9 for supplying a first potential, connected between the other edge of the sample to be measured and the first power source having one edge electrically open. Current amplifying means (10) for amplifying a current flowing through the signal and outputting a corresponding signal, and converting the output signal of the current amplifying means into corresponding image information by registering the laser light scan and outputting the corresponding signal. Ring means 12, a scanning optical organic current analyzer for detecting the light induced currents, characterized in the image output section 14 for outputting an image corresponding to the image information. 7. The image converting means (12) according to claim 6, further comprising image forming means (104) for forming reflected light from the sample under test and outputting image forming information to the image converting means, wherein the image converting means (12) has a second control. Means for exchanging to the first state for outputting the image information to the image output means and to a second state for outputting the imaging information in accordance with a signal, wherein the control means includes the second control signal. Scanning optical organic current analysis device, characterized in that for outputting. 7. The scanning photoorganic current analysis device according to claim 6, further comprising a resistor (36) connected to one edge of the sample under test in the open state. 7. The scan type photoorganic current analyzing apparatus according to claim 6, further comprising a capacitor (38) connected between one edge of the sample under test and the first power source. The scanning type according to claim 6, further comprising an electron shield covering at least the laser light source 100, the light beam scanning means 102, the light converging means 106, and the sample 6 to be measured. Mineral organic current analyzer. 7. The scanning optical organic current analysis device according to claim 6, wherein the luminous flux scanning means (102) further comprises means (42) for changing the scanning speed of the laser light. 7. The scanning type photo-organic current analysis device according to claim 6, further comprising cooling means (46) for cooling the sample under test to be below an environmental temperature. The scan type photoorganic current according to claim 6, wherein when the sample to be measured contains a semiconductor, the laser light generated by the laser light source has a wavelength longer than a wavelength corresponding to a band gap energy of the semiconductor. Analyzer. 8. The control apparatus as claimed in claim 7, wherein said control means further comprises means (48) for generating said first control signal for scanning said laser light in an area corresponding to a part of said imaging information. Sand-type photoorganic current analysis device. 8. The control unit as set forth in claim 7, wherein said control means further comprises means (49) for outputting an area designation signal for designating an area corresponding to a part of said imaging information, and said image conversion means (12) specifies said area designation. And a means for outputting said image information corresponding to an area according to a signal. ※ Note: The disclosure is based on the initial application.