TW279929B - Scanning type photo-induced current analyzer - Google Patents

Scanning type photo-induced current analyzer

Info

Publication number
TW279929B
TW279929B TW084112826A TW84112826A TW279929B TW 279929 B TW279929 B TW 279929B TW 084112826 A TW084112826 A TW 084112826A TW 84112826 A TW84112826 A TW 84112826A TW 279929 B TW279929 B TW 279929B
Authority
TW
Taiwan
Prior art keywords
laser
test sample
current
scanning
induced current
Prior art date
Application number
TW084112826A
Other languages
Chinese (zh)
Inventor
Toru Oyama
Original Assignee
Mitsubishi Electric Machine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Machine filed Critical Mitsubishi Electric Machine
Application granted granted Critical
Publication of TW279929B publication Critical patent/TW279929B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A scanning type photo-induced current analyzer. This analyzer measures the photo induced current of the test sample illuminated by a scanning and focusing laser. What is claimed is : - A laser light source; - A laser scanning mechanism which activates the laser to scan an area corresponding with the first control signal; - A laser focusing mechanism which activates the laser to focus on the test sample; - A current amplifier which connects the two ends of the test sample and magnifies the current that flows through the test sample. The output signal of the current amplifier is correspondent with the magnified current; - A resistance which is connected between the test sample and the current amplifier; - An image conversion mechanism which synchronizes with the scanning laser and converts the output signal from the current amplifier into corresponding image data; - An image output mechanism which performs images corresponding with the image data.
TW084112826A 1995-03-16 1995-12-01 Scanning type photo-induced current analyzer TW279929B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950005493A KR0169158B1 (en) 1995-03-16 1995-03-16 Apparatus for analyzing optical beam induced current of sample

Publications (1)

Publication Number Publication Date
TW279929B true TW279929B (en) 1996-07-01

Family

ID=19409919

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112826A TW279929B (en) 1995-03-16 1995-12-01 Scanning type photo-induced current analyzer

Country Status (2)

Country Link
KR (1) KR0169158B1 (en)
TW (1) TW279929B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100711922B1 (en) * 2005-12-14 2007-04-27 동부일렉트로닉스 주식회사 Method for monitoring a void

Also Published As

Publication number Publication date
KR0169158B1 (en) 1999-02-01
KR960035941A (en) 1996-10-28

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