KR960035605U - 반도체 제조장비의 리드프레임 세팅 검지장치 - Google Patents

반도체 제조장비의 리드프레임 세팅 검지장치

Info

Publication number
KR960035605U
KR960035605U KR2019950007506U KR19950007506U KR960035605U KR 960035605 U KR960035605 U KR 960035605U KR 2019950007506 U KR2019950007506 U KR 2019950007506U KR 19950007506 U KR19950007506 U KR 19950007506U KR 960035605 U KR960035605 U KR 960035605U
Authority
KR
South Korea
Prior art keywords
detection device
lead frame
semiconductor manufacturing
manufacturing equipment
frame setting
Prior art date
Application number
KR2019950007506U
Other languages
English (en)
Other versions
KR0121877Y1 (ko
Inventor
곽용상
정재진
Original Assignee
아남산업주식회사
아남정공주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남산업주식회사, 아남정공주식회사 filed Critical 아남산업주식회사
Priority to KR2019950007506U priority Critical patent/KR0121877Y1/ko
Publication of KR960035605U publication Critical patent/KR960035605U/ko
Application granted granted Critical
Publication of KR0121877Y1 publication Critical patent/KR0121877Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR2019950007506U 1995-04-14 1995-04-14 반도체 제조장비의 리드프레임 세팅 검지장치 KR0121877Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950007506U KR0121877Y1 (ko) 1995-04-14 1995-04-14 반도체 제조장비의 리드프레임 세팅 검지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950007506U KR0121877Y1 (ko) 1995-04-14 1995-04-14 반도체 제조장비의 리드프레임 세팅 검지장치

Publications (2)

Publication Number Publication Date
KR960035605U true KR960035605U (ko) 1996-11-21
KR0121877Y1 KR0121877Y1 (ko) 1998-08-17

Family

ID=19411286

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950007506U KR0121877Y1 (ko) 1995-04-14 1995-04-14 반도체 제조장비의 리드프레임 세팅 검지장치

Country Status (1)

Country Link
KR (1) KR0121877Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100743466B1 (ko) * 2001-06-04 2007-07-30 주식회사 케이씨텍 기판 이송 장치용 기판 감지 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100743466B1 (ko) * 2001-06-04 2007-07-30 주식회사 케이씨텍 기판 이송 장치용 기판 감지 장치

Also Published As

Publication number Publication date
KR0121877Y1 (ko) 1998-08-17

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