KR960035605U - 반도체 제조장비의 리드프레임 세팅 검지장치 - Google Patents
반도체 제조장비의 리드프레임 세팅 검지장치Info
- Publication number
- KR960035605U KR960035605U KR2019950007506U KR19950007506U KR960035605U KR 960035605 U KR960035605 U KR 960035605U KR 2019950007506 U KR2019950007506 U KR 2019950007506U KR 19950007506 U KR19950007506 U KR 19950007506U KR 960035605 U KR960035605 U KR 960035605U
- Authority
- KR
- South Korea
- Prior art keywords
- detection device
- lead frame
- semiconductor manufacturing
- manufacturing equipment
- frame setting
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950007506U KR0121877Y1 (ko) | 1995-04-14 | 1995-04-14 | 반도체 제조장비의 리드프레임 세팅 검지장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950007506U KR0121877Y1 (ko) | 1995-04-14 | 1995-04-14 | 반도체 제조장비의 리드프레임 세팅 검지장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960035605U true KR960035605U (ko) | 1996-11-21 |
KR0121877Y1 KR0121877Y1 (ko) | 1998-08-17 |
Family
ID=19411286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950007506U KR0121877Y1 (ko) | 1995-04-14 | 1995-04-14 | 반도체 제조장비의 리드프레임 세팅 검지장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0121877Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100743466B1 (ko) * | 2001-06-04 | 2007-07-30 | 주식회사 케이씨텍 | 기판 이송 장치용 기판 감지 장치 |
-
1995
- 1995-04-14 KR KR2019950007506U patent/KR0121877Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100743466B1 (ko) * | 2001-06-04 | 2007-07-30 | 주식회사 케이씨텍 | 기판 이송 장치용 기판 감지 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR0121877Y1 (ko) | 1998-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20010407 Year of fee payment: 4 |
|
LAPS | Lapse due to unpaid annual fee |