KR960032566A - Method of forming planarization insulating film - Google Patents
Method of forming planarization insulating film Download PDFInfo
- Publication number
- KR960032566A KR960032566A KR1019950003730A KR19950003730A KR960032566A KR 960032566 A KR960032566 A KR 960032566A KR 1019950003730 A KR1019950003730 A KR 1019950003730A KR 19950003730 A KR19950003730 A KR 19950003730A KR 960032566 A KR960032566 A KR 960032566A
- Authority
- KR
- South Korea
- Prior art keywords
- forming
- ozone
- oxide film
- teos oxide
- insulating film
- Prior art date
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- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
본 발명은 금속배선간 절연막 형성시 보이드 발생을 억제하기 위한 평탄화 절연막 형성방법에 관한 것으로, 1차 오존-TEOS 산화막을 형성한 후 전면 스퍼터 식각하는 단계; 2차 오존-TEOS 산화막을 형성하되 원하는 두께의 일부를 형성한 후 증착온도 및 오존의 농도를 달리하여 나머지 두께를 형성하는 단계를 포함하여 이루어지는 것을 특징으로 한다.The present invention relates to a method of forming a planarization insulating film for suppressing the generation of voids when forming an insulating film between metal wirings, comprising: forming a primary ozone-TEOS oxide film and then etching the entire surface by sputter etching; Forming a secondary ozone-TEOS oxide film, but after forming a portion of the desired thickness, characterized in that it comprises the step of forming the remaining thickness by varying the deposition temperature and the concentration of ozone.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2A도 내지 제2E도는 본 발명의 일실시예에 따른 평탄화 절연막 형성 과정을 나타내는 공정 단면도.2A through 2E are cross-sectional views illustrating a process of forming a planarization insulating film according to an embodiment of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950003730A KR960032566A (en) | 1995-02-24 | 1995-02-24 | Method of forming planarization insulating film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950003730A KR960032566A (en) | 1995-02-24 | 1995-02-24 | Method of forming planarization insulating film |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960032566A true KR960032566A (en) | 1996-09-17 |
Family
ID=66549131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950003730A KR960032566A (en) | 1995-02-24 | 1995-02-24 | Method of forming planarization insulating film |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960032566A (en) |
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1995
- 1995-02-24 KR KR1019950003730A patent/KR960032566A/en not_active Application Discontinuation
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