KR960019151U - 웨이퍼 이송 로보트의 상태 측정용 지그 - Google Patents
웨이퍼 이송 로보트의 상태 측정용 지그Info
- Publication number
- KR960019151U KR960019151U KR2019940031747U KR19940031747U KR960019151U KR 960019151 U KR960019151 U KR 960019151U KR 2019940031747 U KR2019940031747 U KR 2019940031747U KR 19940031747 U KR19940031747 U KR 19940031747U KR 960019151 U KR960019151 U KR 960019151U
- Authority
- KR
- South Korea
- Prior art keywords
- jig
- measuring
- state
- transfer robot
- wafer transfer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940031747U KR200167582Y1 (ko) | 1994-11-29 | 1994-11-29 | 웨이퍼 이송 로보트의 상태 측정용 지그 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940031747U KR200167582Y1 (ko) | 1994-11-29 | 1994-11-29 | 웨이퍼 이송 로보트의 상태 측정용 지그 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960019151U true KR960019151U (ko) | 1996-06-19 |
KR200167582Y1 KR200167582Y1 (ko) | 2000-02-01 |
Family
ID=19399472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940031747U KR200167582Y1 (ko) | 1994-11-29 | 1994-11-29 | 웨이퍼 이송 로보트의 상태 측정용 지그 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200167582Y1 (ko) |
-
1994
- 1994-11-29 KR KR2019940031747U patent/KR200167582Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200167582Y1 (ko) | 2000-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20051019 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |