KR960019151U - 웨이퍼 이송 로보트의 상태 측정용 지그 - Google Patents

웨이퍼 이송 로보트의 상태 측정용 지그

Info

Publication number
KR960019151U
KR960019151U KR2019940031747U KR19940031747U KR960019151U KR 960019151 U KR960019151 U KR 960019151U KR 2019940031747 U KR2019940031747 U KR 2019940031747U KR 19940031747 U KR19940031747 U KR 19940031747U KR 960019151 U KR960019151 U KR 960019151U
Authority
KR
South Korea
Prior art keywords
jig
measuring
state
transfer robot
wafer transfer
Prior art date
Application number
KR2019940031747U
Other languages
English (en)
Other versions
KR200167582Y1 (ko
Inventor
양승호
전광호
이인한
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940031747U priority Critical patent/KR200167582Y1/ko
Publication of KR960019151U publication Critical patent/KR960019151U/ko
Application granted granted Critical
Publication of KR200167582Y1 publication Critical patent/KR200167582Y1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
KR2019940031747U 1994-11-29 1994-11-29 웨이퍼 이송 로보트의 상태 측정용 지그 KR200167582Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940031747U KR200167582Y1 (ko) 1994-11-29 1994-11-29 웨이퍼 이송 로보트의 상태 측정용 지그

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940031747U KR200167582Y1 (ko) 1994-11-29 1994-11-29 웨이퍼 이송 로보트의 상태 측정용 지그

Publications (2)

Publication Number Publication Date
KR960019151U true KR960019151U (ko) 1996-06-19
KR200167582Y1 KR200167582Y1 (ko) 2000-02-01

Family

ID=19399472

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940031747U KR200167582Y1 (ko) 1994-11-29 1994-11-29 웨이퍼 이송 로보트의 상태 측정용 지그

Country Status (1)

Country Link
KR (1) KR200167582Y1 (ko)

Also Published As

Publication number Publication date
KR200167582Y1 (ko) 2000-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20051019

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee