KR960012423A - Device Separation Method of Semiconductor Device - Google Patents
Device Separation Method of Semiconductor Device Download PDFInfo
- Publication number
- KR960012423A KR960012423A KR1019940021995A KR19940021995A KR960012423A KR 960012423 A KR960012423 A KR 960012423A KR 1019940021995 A KR1019940021995 A KR 1019940021995A KR 19940021995 A KR19940021995 A KR 19940021995A KR 960012423 A KR960012423 A KR 960012423A
- Authority
- KR
- South Korea
- Prior art keywords
- device isolation
- film
- semiconductor device
- photoresist
- region
- Prior art date
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- Element Separation (AREA)
Abstract
본 발명은 반도체 소자의 소자 분리막 제조방법에 관한 것으로, 셀과 주변회로영역에 각각 크고 작은 소자 분리막을 형성할 때, 소자 분리영역에 형성된 트렌치(Trench)를 산화물로 채운후 실리레이션(Silylation) 공정으로 좁고 넓은 소자 분리영역상에 감광막을 남기고, 다시 감광막을 도포한 후 평탄화시키고 에치백(Etchback)하여 넓은 소자 분리영역상에만 감광막을 남기고, 이후 산화물을 에치백하여 광역 평탄화를 이룰 수 있는 반도체 소자의 소자 분리막 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a device isolation film of a semiconductor device, and when forming large and small device isolation films in a cell and a peripheral circuit region, a silicide process after filling trenches formed in the device isolation region with oxide A semiconductor device capable of leaving a photoresist film on a narrow and wide device isolation region, applying the photoresist film again, and then flattening and etching back to leave a photoresist on only a wide device isolation region, and then etching back oxide to achieve planarization It relates to a method for producing a device separator.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1F도는 본 발명에 의한 반도체 소자의 소자 분리막 제조단계를 도시한 소자의 단면도.1F is a cross-sectional view of a device showing a device isolation film manufacturing step of a semiconductor device according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940021995A KR960012423A (en) | 1994-09-01 | 1994-09-01 | Device Separation Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940021995A KR960012423A (en) | 1994-09-01 | 1994-09-01 | Device Separation Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960012423A true KR960012423A (en) | 1996-04-20 |
Family
ID=66686631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940021995A KR960012423A (en) | 1994-09-01 | 1994-09-01 | Device Separation Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960012423A (en) |
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1994
- 1994-09-01 KR KR1019940021995A patent/KR960012423A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |