KR960005743A - 카드뮴램프 발광장치 - Google Patents

카드뮴램프 발광장치 Download PDF

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Publication number
KR960005743A
KR960005743A KR1019950021889A KR19950021889A KR960005743A KR 960005743 A KR960005743 A KR 960005743A KR 1019950021889 A KR1019950021889 A KR 1019950021889A KR 19950021889 A KR19950021889 A KR 19950021889A KR 960005743 A KR960005743 A KR 960005743A
Authority
KR
South Korea
Prior art keywords
cadmium
light emitting
lamp
emitting device
light
Prior art date
Application number
KR1019950021889A
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English (en)
Inventor
아키야스 야마구치
유키오 야스다
츠네오 오카누마
다츠시 이가라시
히로미츠 마츠노
다츠미 히라모토
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR960005743A publication Critical patent/KR960005743A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/74—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of difficult vaporisable metal vapour, e.g. sodium

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamp (AREA)

Abstract

본 발명은 산업상 충분히 이용할 수 있을 만한 광강도를 가진 카드뮴램프를 염두한 발광장치에 관한 것으로써, 본 발명은 발광관(1) 내부에 양극(2)과 음극(3)이 짧은 간격(d)을 두고 배치되며, 점등시동을 용이하게 하기 위한 버퍼가스와, 발광물질로서 1×10-4ｇ/㎤ ~ 3×10-3ｇ/㎤의 금속타드뮴이 봉입된 카드뮴램프와,이 카드뮴램프의 음극(3)과 상기 양극(2) 사이에 전기입력을 공급하는 전원장치(20)를 구비하고, 전원장치(20)로부터 카드뮴램프에의 정상점등시의 전기입력을 W(kw), 상기 카드뮴램프의 발광관(1)의 최대내부반경을 r(㎜)로 했을 때, 0.5kw 내지 5.0kw의 전기입력 범위에 있어서, 6.03 + 2.79Wr

Description

카드뮴램프 발광장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 카드뮴램프의 개략도이다.
제2도는 본 발명에 관한 카드뮴 발광장치의 전체도이다.

Claims (2)

  1. 발광관의 내부에 음극과 양극이 짧은 간격을 두고 배치되며, 점등시동을 용이하게 하기 위한 버퍼가스와, 발광물질로서 1×10-4ｇ/㎤ ~ 3×10-3ｇ/㎤의 금속타드뮴이 봉입된 카드뮴램프와, 이 카드뮴램프의 상기 음극과 상기 양극 사이에 전기입력을 공급하는 전원장치를 구비하고, 상기 전원장치로부터 상기 카드뮴램프에의 정상점등시의 전기입력을 W(kW), 상기 카드뮴램프의 발광관(1)의 최대내부반경을 r(㎜)로 했을 때, 0.5kw 내지 5.0kw의 전기입력 범위에서, 6.03 + 2.79Wr40인 것을 특징으로 하는 카드뮴램프 발광장치.
  2. 제1항에 있어서, 전극간 거리 d(㎜)가 2d12 인 것을 특징으로 하는 카드뮴 발광장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950021889A 1994-07-29 1995-07-24 카드뮴램프 발광장치 KR960005743A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-196206 1994-07-29
JP6196206A JPH0845479A (ja) 1994-07-29 1994-07-29 金属蒸気放電ランプ

Publications (1)

Publication Number Publication Date
KR960005743A true KR960005743A (ko) 1996-02-23

Family

ID=16353969

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950021889A KR960005743A (ko) 1994-07-29 1995-07-24 카드뮴램프 발광장치

Country Status (4)

Country Link
US (1) US5589735A (ko)
EP (1) EP0696816A3 (ko)
JP (1) JPH0845479A (ko)
KR (1) KR960005743A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08195186A (ja) * 1995-01-20 1996-07-30 Ushio Inc ショートアーク型カドミウム希ガス放電ランプ
DE69824681T2 (de) * 1997-04-25 2005-06-30 Koninklijke Philips Electronics N.V. Hochdruck-Entladungslampe
US8754576B2 (en) 2012-09-28 2014-06-17 Elwha Llc Low pressure lamp using non-mercury materials

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2659833A (en) * 1949-11-09 1953-11-17 Hanovia Chemical & Mfg Co Ultraviolet vapor electric discharge device
US3758805A (en) * 1971-10-27 1973-09-11 Us Navy A high intensity light source
JPS5510757A (en) * 1978-07-11 1980-01-25 Ushio Inc Short arc type cadmium rare gas discharge lamp
GB2050691B (en) * 1978-12-28 1983-07-20 Mitsubishi Electric Corp Metal-vapor discharge lamp
JPS55102168A (en) * 1979-01-29 1980-08-05 Mitsubishi Electric Corp High pressure metal vapor discharge lamp
JPS55163760A (en) * 1979-06-06 1980-12-20 Mitsubishi Electric Corp High pressure metallic gas discharge lamp
US4387319A (en) * 1981-03-30 1983-06-07 General Electric Company Metal halide lamp containing ScI3 with added cadmium or zinc
EP0543169B2 (en) * 1991-11-21 1998-08-19 Ushiodenki Kabushiki Kaisha Metallic vapour discharge lamp
JP3020397B2 (ja) * 1992-11-20 2000-03-15 ウシオ電機株式会社 ショートアーク型カドミウム希ガス放電ランプおよびこれを搭載した投影露光装置
JP2977696B2 (ja) * 1993-03-17 1999-11-15 ウシオ電機株式会社 金属蒸気放電ランプを用いた光源装置
EP0641015B1 (en) * 1993-08-03 1997-04-16 Ushiodenki Kabushiki Kaisha Cadmium discharge lamp

Also Published As

Publication number Publication date
EP0696816A2 (en) 1996-02-14
EP0696816A3 (en) 1998-02-04
US5589735A (en) 1996-12-31
JPH0845479A (ja) 1996-02-16

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