KR950033092A - 다단 진공 펌프 - Google Patents

다단 진공 펌프 Download PDF

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Publication number
KR950033092A
KR950033092A KR1019950005362A KR19950005362A KR950033092A KR 950033092 A KR950033092 A KR 950033092A KR 1019950005362 A KR1019950005362 A KR 1019950005362A KR 19950005362 A KR19950005362 A KR 19950005362A KR 950033092 A KR950033092 A KR 950033092A
Authority
KR
South Korea
Prior art keywords
pump
rotors
vacuum pump
pair
units
Prior art date
Application number
KR1019950005362A
Other languages
English (en)
Korean (ko)
Inventor
에사키 모리노부
Original Assignee
에사키 모리노부
가부시키가이샤 케미텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에사키 모리노부, 가부시키가이샤 케미텍 filed Critical 에사키 모리노부
Publication of KR950033092A publication Critical patent/KR950033092A/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/24—Rotary-piston machines or pumps of counter-engagement type, i.e. the movement of co-operating members at the points of engagement being in opposite directions
    • F04C2/28—Rotary-piston machines or pumps of counter-engagement type, i.e. the movement of co-operating members at the points of engagement being in opposite directions of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1019950005362A 1994-03-16 1995-03-15 다단 진공 펌프 KR950033092A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7020094 1994-03-16
JP70200/1994 1994-03-16

Publications (1)

Publication Number Publication Date
KR950033092A true KR950033092A (ko) 1995-12-22

Family

ID=13424643

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950005362A KR950033092A (ko) 1994-03-16 1995-03-15 다단 진공 펌프

Country Status (3)

Country Link
EP (1) EP0674106A1 (fr)
KR (1) KR950033092A (fr)
CN (1) CN1112649A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000283024A (ja) 1999-03-30 2000-10-10 Aisin Seiki Co Ltd ポンプ装置
DE10144210A1 (de) * 2001-09-08 2003-03-27 Sgi Prozess Technik Gmbh Pumpensystem
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
JP3941452B2 (ja) * 2001-10-17 2007-07-04 株式会社豊田自動織機 真空ポンプにおける運転停止制御方法及び運転停止制御装置
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
CN109237959A (zh) * 2018-09-07 2019-01-18 华电电力科学研究院有限公司 一种多级干式罗茨真空泵双背压凝汽器抽真空系统及方法
CN110360112A (zh) * 2019-05-28 2019-10-22 上海伊莱茨真空技术有限公司 一种多级罗茨泵真空节能系统
CN110645176A (zh) * 2019-10-12 2020-01-03 常州市金坛区维格生物科技有限公司 一种真空机组连续排料装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809443A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high-vacuum pumps
US2936107A (en) * 1956-06-14 1960-05-10 Nat Res Corp High vacuum device
DE3444169A1 (de) * 1984-12-04 1986-06-12 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Anordnung zur optimierung des betriebes von vakuumpumpenanlagen
DE9306559U1 (de) * 1992-06-10 1993-07-01 Siemens AG, 8000 München Anordnung bestehend aus wenigstens zwei in Reihe geschalteten Flüssigkeitsringmaschinen

Also Published As

Publication number Publication date
EP0674106A1 (fr) 1995-09-27
CN1112649A (zh) 1995-11-29

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Legal Events

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