KR950012112A - Color filter for liquid crystal display (LCD) and its manufacturing method - Google Patents

Color filter for liquid crystal display (LCD) and its manufacturing method Download PDF

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Publication number
KR950012112A
KR950012112A KR1019930020651A KR930020651A KR950012112A KR 950012112 A KR950012112 A KR 950012112A KR 1019930020651 A KR1019930020651 A KR 1019930020651A KR 930020651 A KR930020651 A KR 930020651A KR 950012112 A KR950012112 A KR 950012112A
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South Korea
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color filter
conductive film
transparent conductive
pattern
forming
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KR1019930020651A
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Korean (ko)
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KR100277492B1 (en
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정성기
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김광호
삼성전자 주식회사
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  • Liquid Crystal (AREA)

Abstract

본 발명은 액정용 칼라 OA 기기 및 TV등에 이용되는 칼라필터에 관한 것으로, 칼라필터 상부에 형성된 보호막을 제거하고 필터층(액티브 부분) 상부에만 투명전극막을 형성한 뒤 비액티브 부분의 글라스 기판 상에 잔류하는 안료 레지듀는 플라즈마 에싱(Ashing) 처리로 제거하므로써 액정공정시 발생되는 실떨어짐, 투명전도막 깨짐, 및 돌기에 의한 상하판 쇼트 등과 같은 필터층의 손상을 억제할 수 있는 고신뢰성의 칼라 필터를 실현할 수 있게 된다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to color filters used for color OA devices and TVs for liquid crystals. The protective film formed on the color filter is removed, and a transparent electrode film is formed only on the filter layer (active part). Pigment resin is removed by plasma ashing to provide a highly reliable color filter that can suppress damage to the filter layer such as dust falling during the liquid crystal process, cracking of the transparent conductive film, and shorting of the upper and lower plates due to projections. It can be realized.

Description

액정 디스플레이(LCD)용 칼라필터 및 그 제조방법Color filter for liquid crystal display (LCD) and its manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 1도는 종래 기술에 따른 액정표시소자의 칼라필터 구조를 도시한 단면도,1 is a cross-sectional view showing a color filter structure of a liquid crystal display device according to the prior art;

제2(A)도 내지 제2(I)도는 종래 기술에 따른 액정표시소자의 칼라필터 제조공정을 도시한 단면도,2 (A) to 2 (I) are cross-sectional views showing a color filter manufacturing process of a liquid crystal display device according to the prior art;

제3(A)도 및 제3(B)도는 본 발명에 따른 칼라필터 구조를 도시한 것으로, 제3(A)도는 그 단면도, 제3(B)도는 제3(A)도의 I부분인 플라즈마 에싱방법을 나타낸 도면,3 (A) and 3 (B) show a color filter structure according to the present invention. FIG. 3 (A) is a cross-sectional view thereof, and FIG. 3 (B) is a portion I of FIG. 3 (A) plasma. Drawing showing the ashing method,

제4(A)도 내지 제4(H)도는 본 발명에 따른 액정표시소자의 칼라필터 제조공정을 도시한 단면도.4 (A) to 4 (H) are sectional views showing a color filter manufacturing process of a liquid crystal display device according to the present invention.

Claims (6)

투명 유리기판 상에 소정 간격으로 형성된 블랙매트릭스와, 상기 블랙매트릭스 사이에 일부 중첩되도록 서로 분리되어 순차적으로 형성된 제 1 색 내지 제 3색 필터층과, 액티브 부분인 상기 제 1 색 내지 제 3색 필터층 상부에만 형성된 투명전도막으로 이루어지는 것을 특징으로 하는 액정 디스플레이용 칼라필터.Black matrices formed on a transparent glass substrate at predetermined intervals, first to third color filter layers sequentially formed by being separated from each other so as to partially overlap between the black matrices, and an upper portion of the first to third color filter layers that are active parts. Color filter for a liquid crystal display, characterized in that consisting of a transparent conductive film formed only on. 유리기판 상에 소정간격으로 블랙 매트릭스를 형성하는 공정과 : 상기 블랙 매트릭스 사이에 서로 동일 높이를 갖는 제 1색 내지 제3색 필터층을 순차적으로 형성하는 공정과 : 액티브 부분인 제1 내지 제3색 필터층 상부에 투명전도막을 형성하는 공정과 : 상기 유리기판 상의 비액티브 부분에 잔류하는 안료 레지듀를 제거하는 공정으로 이루어지는 것을 특징으로 하는 액정 디스플레이용 칼라필터의 제조방법.Forming a black matrix on a glass substrate at predetermined intervals; forming a first to third color filter layers having the same height between the black matrix sequentially; and forming first and third colors as active parts. Forming a transparent conductive film on the filter layer; and removing the pigment residue remaining on the inactive portion on the glass substrate. 제2항에 있어서, 상기 투명전도막은 메탈 마스크 또는 노멀 포토리소그라피 공정 중 선택된 어느 하나로 형성됨을 특징으로 하는 액정 디스플레이용 칼라필터의 제조방법.The method of claim 2, wherein the transparent conductive film is formed of any one selected from a metal mask or a normal photolithography process. 제 2항에 있어서, 비액티브 부분에 잔류하는 상기 안료 레지듀는 상기 필터층 상에 형성된 투명전도막을 마스크로 하여 플라즈마 에싱 처리하여 제거함을 특징으로 하는 액정 디스플레이용 칼라필터 제조방법,The method of claim 2, wherein the pigment residue remaining in the inactive portion is removed by plasma ashing using a transparent conductive film formed on the filter layer as a mask. 제2항 또는 제 3항에 있어서, 상기 노멀 포토리소그라피 공정은 포토레지스트(Photoresist : 이하 PR이라 한다) 패턴으로 ITO 투명전도막을 에치하여 투명전도막 패턴을 형성한 후 상기 PR 패턴을 마스크로 하여 에싱(Ashing)을 한뒤 PR을 제거하는 방법과, ITO 패턴 형성후 먼저 PR 패턴을 제거하고 ITO 패턴을 마스크로 에싱하는 방법 중 선택된 어느 하나로 이루어짐을 특징으로 하는 액정 디스플래이용 칼라필터 제조방법.The method of claim 2 or 3, wherein the normal photolithography process is performed by etching an ITO transparent conductive film with a photoresist (PR) pattern to form a transparent conductive film pattern, and then ashing the PR pattern as a mask. A method of manufacturing a color filter for a liquid crystal display, characterized in that it is made of any one of a method of removing the PR after (Ashing), and a method of first removing the PR pattern and then ashing the ITO pattern with a mask after forming the ITO pattern. 제2항에 있어서, 상기 투명전도막은 500-2500Å의 두께로 형성됨을 특징으로 하는 액정 디스플레이용 칼라필터 제조방법.The method of claim 2, wherein the transparent conductive film is formed to a thickness of 500-2500 kW. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930020651A 1993-10-06 1993-10-06 Color filter for liquid crystal display and its manufacturing method KR100277492B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6429916B1 (en) 1998-12-10 2002-08-06 Nec Corporation Liquid crystal display with filter and light shield separated from contact hole
KR100353167B1 (en) * 1998-12-01 2002-09-16 가부시키가이샤 히타치세이사쿠쇼 Liquid Crystal Display Device and Method for Fabricating the Same
KR100390485B1 (en) * 2000-05-24 2003-07-04 엘지전자 주식회사 Method for forming color filter of plasma display panel device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100353167B1 (en) * 1998-12-01 2002-09-16 가부시키가이샤 히타치세이사쿠쇼 Liquid Crystal Display Device and Method for Fabricating the Same
US6429916B1 (en) 1998-12-10 2002-08-06 Nec Corporation Liquid crystal display with filter and light shield separated from contact hole
KR100376355B1 (en) * 1998-12-10 2003-03-17 닛뽄덴끼 가부시끼가이샤 Manufacturing method of liquid crystal display device
KR100390485B1 (en) * 2000-05-24 2003-07-04 엘지전자 주식회사 Method for forming color filter of plasma display panel device

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