KR940019647A - 세라믹체 - Google Patents

세라믹체 Download PDF

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KR940019647A
KR940019647A KR1019940002597A KR19940002597A KR940019647A KR 940019647 A KR940019647 A KR 940019647A KR 1019940002597 A KR1019940002597 A KR 1019940002597A KR 19940002597 A KR19940002597 A KR 19940002597A KR 940019647 A KR940019647 A KR 940019647A
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South Korea
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atomic
ceramic body
magnesium
silicon
less
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KR1019940002597A
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KR100310549B1 (ko
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알베르트 그로엔 빌헬름
요한네스 크라안 마르셀리누스
데 비트흐 기즈스베르투스
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에프. 제이. 스미트
필립스 일렉트로닉스 엔. 파우.
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    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
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    • H—ELECTRICITY
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    • H01L23/00—Details of semiconductor or other solid state devices
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  • Microelectronics & Electronic Packaging (AREA)
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  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Compositions Of Oxide Ceramics (AREA)

Abstract

본 발명은 세라믹체 및 이의 제조방법에 관한 것이다. 이러한 세라믹체는 마그네슘 20 내지 30원자%, 규소 20 내지 30원자%, 질소 40 내지 60원자% 및 산소 15%이하를 포함하는 그 조성에 의해 특징화된다. 바람직한 조성은 일반식 MgSiN2-xOx(여기서, x는 0.5 미만이다)에 상응한다. 본 발명에 따른 세라믹체는 질화알루미늄보다 간단하고 저렴하게 조절할 수 있고, 상기한 세라믹재료의 다수의 특성은 공지된 산화알루미늄의 것보다 양호하다.

Description

세라믹체
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 세라믹체의 X-선 회절패턴을 나타낸다.

Claims (6)

  1. 마그네슘 20 내지 30원자%, 규소 20 내지 30원자%, 질소 40 내지 60원자% 및 산소 15원자% 이하를 포함함을 특징으로 하는 세라믹체.
  2. 제1항에 있어서, 조성이 일반식 MgSiN2-xOx(여기서, x는 0.5미만이다)에 상응하는 세라믹체.
  3. 제1항 또는 제2항에 있어서, 기재의 형태로 존재하는 세라믹체.
  4. 마그네슘 20 내지 30원자%, 규소 20 내지 30원자%, 질소 40 내지 60원자% 및 산소 15원자% 이하를 포함하는 마그네슘-규소-니트라이드 분말을 성형품으로 조밀화시킨 후, 계속해서 불활성 대기하에 1,400 내지 1,600℃ 범위의 온도에서 세라믹체로 소결시킴을 특징으로 하여 제1항 내지 제3항중 어느 한 항에 따른 세라믹체를 제조하는 방법.
  5. 마그네슘 20 내지 30원자%, 규소 20 내지 30원자%, 질소 40 내지 60원자% 및 산소 15원자% 이하를 포함하는 마그네슘-규소-니트라이드 분말을 1,400내지 1,600℃ 범위의 온도에서 고온-프레싱(hot-pressing)시킴을 특징으로 하여, 제1항 내지 제3항중 어느 한 항에 따른 세라믹체를 제조하는 방법.
  6. 제3항에 있어서, 분말의 조성이 일반식 MgSiN2-xOx(여기서, x는 0.5 미만이다)에 상응하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940002597A 1993-02-18 1994-02-15 세라믹체,이의제조방법및이를포함하는전기부재 KR100310549B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP93200467 1993-02-18
EP93200467.4 1993-02-18

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Publication Number Publication Date
KR940019647A true KR940019647A (ko) 1994-09-14
KR100310549B1 KR100310549B1 (ko) 2002-06-20

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ID=8213652

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Application Number Title Priority Date Filing Date
KR1019940002597A KR100310549B1 (ko) 1993-02-18 1994-02-15 세라믹체,이의제조방법및이를포함하는전기부재

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Country Link
US (1) US5411924A (ko)
JP (1) JPH06263543A (ko)
KR (1) KR100310549B1 (ko)
DE (1) DE69407832T2 (ko)
TW (1) TW252969B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996018589A1 (en) * 1994-12-12 1996-06-20 Philips Electronics N.V. Substrate of a ceramic material

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5030600A (ko) * 1973-07-12 1975-03-26
EP0100380B1 (en) * 1981-02-05 1987-06-16 Sumitomo Electric Industries Limited Method for plastic deformation of non-ferrous metals

Also Published As

Publication number Publication date
JPH06263543A (ja) 1994-09-20
DE69407832D1 (de) 1998-02-19
DE69407832T2 (de) 1998-07-16
TW252969B (ko) 1995-08-01
US5411924A (en) 1995-05-02
KR100310549B1 (ko) 2002-06-20

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