KR940007972A - 차폐 구조체 - Google Patents

차폐 구조체 Download PDF

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Publication number
KR940007972A
KR940007972A KR1019930016480A KR930016480A KR940007972A KR 940007972 A KR940007972 A KR 940007972A KR 1019930016480 A KR1019930016480 A KR 1019930016480A KR 930016480 A KR930016480 A KR 930016480A KR 940007972 A KR940007972 A KR 940007972A
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KR
South Korea
Prior art keywords
gas
sealing member
enclosure
weight
shielding structure
Prior art date
Application number
KR1019930016480A
Other languages
English (en)
Other versions
KR970008325B1 (ko
Inventor
루이스 디엔겔리스 로버트
마이클 갤러거 게리
Original Assignee
윌리암 티. 엘리스
인터내셔널 비지네스 머신즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 윌리암 티. 엘리스, 인터내셔널 비지네스 머신즈 코포레이션 filed Critical 윌리암 티. 엘리스
Publication of KR940007972A publication Critical patent/KR940007972A/ko
Application granted granted Critical
Publication of KR970008325B1 publication Critical patent/KR970008325B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packages (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging For Recording Disks (AREA)
  • Rigid Containers With Two Or More Constituent Elements (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

재사용가능한 차폐 밀폐체는 그것으로부터 가스를 청정하기에 적합한 밀폐부재를 갖는다. 이 밀폐부재는 필터와, 공기 및 습기 배출구를 구비한다. 밀봉된 밀폐체 내부의 주변환경 가스의 교체도 제공된다. 청정가스는 밀폐체에 신속히 연결되고 신속히 분리되는 가스 교환시스템에 의해 제공된다. 가스연결라인의 단부를 둘러싸는 흡입컵은 여과막에대해 인터페이스를 형성하며, 밀폐부재와 밀봉접속을 형성한다. 흡입컵 이외의 기계적 접속은 필요없다. 청정시스템 및 교환시스템의 출구 및 입구는 청정대상의 차폐 컨테이너를 제거할 때 스프링 밸브에 의해 자동 분리된다. 차폐 밀폐체의 밀폐부재를 청정시스템 상에 배치할 때, 패키지의 무게는 밸브스프링을 압축하여 밸브를 개방함으로써 청정가스가 흐를 수 있게 한다. 텅빈 차폐 밀폐체는 스프링 작동식 밸브시스템을 개방하기에는 불충분한 무게를 가진다. 일 제품의 무게를 지탱하는 밀폐체만으로 청정된다. 이 밀폐체에는 신속 연결 수단을 통해 가스의 흐름속도를 측정하기 위한 흐름 표시기도 접속된다.

Description

차폐 구조체
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 가스 청정 시스템(gas purge system)의 일부를 포함하는 차폐구조체(isolation structure)의 분해 사시도,
제2도는 제1도에 도시한 차폐 구조체의 밀폐부재 및 밀봉구조체의 단면도로서, 차폐 구조체의 쉘(shell)의 일부를 도시하나, 본 발명의 가스 청정 시스템의 구성요소들은 도시하지 않음
제3도는 본 발명의 가스 청정 시스템의 입구 및 출구와 필터의 바람직한 특징을 도시한 것으로, 본 발명에 따른 밀폐부재의 다른 실시예의 분해 사시도,
제4도는 본 발명의 가스 청정 시스템을 도시한 것으로, 본 발명에 따른 밀폐부재의 단면도.

Claims (4)

  1. 물품(article)을 수납하기에 적합한 차폐 구조체(isolation structure)에 있어서, (a)개구(opening)를 갖는 쉘(shell)과; (b)상기 개구내에 수용될 수 있는 크기로 된 밀폐부재로, i)외주부를 갖는 밀폐부재 본체와, 상기 밀폐부재의 상기 외주부상에 있는 탄성 밀봉재(resilient seal)와, ⅱ)여과막(filter membrane)을 가지며 상기 차폐 구조체의 외부로부터 내부까지 연장된 가스포트(gas port)를 갖는 상기 차폐 구조체의 가스 교환시스템을 포함하는 상기 밀폐 부재와; c)채임버내에 물품의 존재유무에 따라서, 바람직하게는 채임버내의 물품이 사전결정된 무게를 초과하는지의 여부에 반응하여, 상기 가스 포트와의 신속한 연결을 제공하기에 적합한 자기 밀봉인터페이스(self-sealing interface)를 갖는 스프링 작동식 밸브(spring actuated valve)를 구비한 신속 연결 공급수단을 포함하는 차폐 구조체.
  2. 제1항에 있어서, 상기 신속 연결 공급수단의 밸브는 상기 채임버내에 수용된 상기 물품의 무게에 반응해서 동작하는 차폐구조체.
  3. 제1항에 있어서, 상기 신속 연결 공급수단을 통해 가스의 흐름속도(rate of flow of gas)를 측정하기 위한 흐름표시기(flow indicator)는 상기 신속 연결 공급수단에 연결되는 차폐 구조체.
  4. 제1항에 있어서, 상기 신속 연결 공급수단은 상기 채임버내에 수용된 상기 물품의 무게에 반응하는 차폐 구조체.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930016480A 1992-09-24 1993-08-24 차폐 구조체 KR970008325B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP949,959 1992-09-24
US07/949,959 US5295522A (en) 1992-09-24 1992-09-24 Gas purge system for isolation enclosure for contamination sensitive items
US949,959 1992-09-24

Publications (2)

Publication Number Publication Date
KR940007972A true KR940007972A (ko) 1994-04-28
KR970008325B1 KR970008325B1 (ko) 1997-05-23

Family

ID=25489741

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930016480A KR970008325B1 (ko) 1992-09-24 1993-08-24 차폐 구조체

Country Status (7)

Country Link
US (1) US5295522A (ko)
EP (1) EP0591085A1 (ko)
JP (2) JP2500052B2 (ko)
KR (1) KR970008325B1 (ko)
MY (1) MY109544A (ko)
SG (1) SG42816A1 (ko)
TW (1) TW239887B (ko)

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Also Published As

Publication number Publication date
JP2500052B2 (ja) 1996-05-29
TW239887B (ko) 1995-02-01
US5295522A (en) 1994-03-22
KR970008325B1 (ko) 1997-05-23
JPH06227571A (ja) 1994-08-16
JPH08181045A (ja) 1996-07-12
JP2921658B2 (ja) 1999-07-19
EP0591085A1 (en) 1994-04-06
MY109544A (en) 1997-02-28
SG42816A1 (en) 1997-10-17

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