FR2850638B1 - Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres - Google Patents
Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integresInfo
- Publication number
- FR2850638B1 FR2850638B1 FR0301199A FR0301199A FR2850638B1 FR 2850638 B1 FR2850638 B1 FR 2850638B1 FR 0301199 A FR0301199 A FR 0301199A FR 0301199 A FR0301199 A FR 0301199A FR 2850638 B1 FR2850638 B1 FR 2850638B1
- Authority
- FR
- France
- Prior art keywords
- integrated circuits
- electronic label
- label box
- manufacturing integrated
- detachable electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0301199A FR2850638B1 (fr) | 2003-02-03 | 2003-02-03 | Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0301199A FR2850638B1 (fr) | 2003-02-03 | 2003-02-03 | Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2850638A1 FR2850638A1 (fr) | 2004-08-06 |
FR2850638B1 true FR2850638B1 (fr) | 2006-09-29 |
Family
ID=32696299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0301199A Expired - Fee Related FR2850638B1 (fr) | 2003-02-03 | 2003-02-03 | Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2850638B1 (fr) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5295522A (en) * | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Gas purge system for isolation enclosure for contamination sensitive items |
US5669508A (en) * | 1996-05-28 | 1997-09-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pod carrier function expansion by adding a fixture |
JP3370279B2 (ja) * | 1998-07-07 | 2003-01-27 | 信越ポリマー株式会社 | 精密基板収納容器 |
DE10045202A1 (de) * | 2000-09-13 | 2002-04-11 | Infineon Technologies Ag | Kassette für flache Werkstücke |
FR2819794B1 (fr) * | 2001-01-22 | 2003-09-05 | Excel Services Emballages Sa | Boite a fermeture controlee pour le conditionnement de plaquettes distinees a la fabrication de circuits integres |
US7040487B2 (en) * | 2001-07-14 | 2006-05-09 | Entegris, Inc. | Protective shipper |
-
2003
- 2003-02-03 FR FR0301199A patent/FR2850638B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2850638A1 (fr) | 2004-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20111102 |