DE60237806D1 - Integrierte schaltung für einen druckkopf - Google Patents
Integrierte schaltung für einen druckkopfInfo
- Publication number
- DE60237806D1 DE60237806D1 DE60237806T DE60237806T DE60237806D1 DE 60237806 D1 DE60237806 D1 DE 60237806D1 DE 60237806 T DE60237806 T DE 60237806T DE 60237806 T DE60237806 T DE 60237806T DE 60237806 D1 DE60237806 D1 DE 60237806D1
- Authority
- DE
- Germany
- Prior art keywords
- integrated circuit
- print head
- head
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
- B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
- B41J2/235—Print head assemblies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17503—Ink cartridges
- B41J2/17556—Means for regulating the pressure in the cartridge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/813,087 US6883894B2 (en) | 2001-03-19 | 2001-03-19 | Printhead with looped gate transistor structures |
PCT/US2002/008356 WO2002078961A1 (en) | 2001-03-19 | 2002-03-13 | Printhead integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60237806D1 true DE60237806D1 (de) | 2010-11-11 |
Family
ID=25211420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60237806T Expired - Lifetime DE60237806D1 (de) | 2001-03-19 | 2002-03-13 | Integrierte schaltung für einen druckkopf |
Country Status (9)
Country | Link |
---|---|
US (2) | US6883894B2 (de) |
EP (1) | EP1370418B1 (de) |
JP (1) | JP4362288B2 (de) |
KR (1) | KR100553406B1 (de) |
CN (1) | CN100341701C (de) |
DE (1) | DE60237806D1 (de) |
MY (1) | MY127121A (de) |
TW (1) | TW544729B (de) |
WO (1) | WO2002078961A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6582063B1 (en) * | 2001-03-21 | 2003-06-24 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
US7278715B2 (en) * | 2004-04-19 | 2007-10-09 | Hewlett-Packard Development Company, L.P. | Device with gates configured in loop structures |
US7150516B2 (en) * | 2004-09-28 | 2006-12-19 | Hewlett-Packard Development Company, L.P. | Integrated circuit and method for manufacturing |
US8651604B2 (en) * | 2007-07-31 | 2014-02-18 | Hewlett-Packard Development Company, L.P. | Printheads |
US9555630B2 (en) * | 2007-12-02 | 2017-01-31 | Hewlett-Packard Development Company, L.P. | Electrically connecting electrically isolated printhead die ground networks at flexible circuit |
CN101960565B (zh) * | 2008-02-28 | 2012-09-05 | 惠普开发有限公司 | 半导体基板接触通孔 |
WO2014116207A1 (en) * | 2013-01-23 | 2014-07-31 | Hewlett-Packard Development Company, L.P. | Printhead die with multiple termination rings |
US10566416B2 (en) * | 2017-08-21 | 2020-02-18 | Microsemi Corporation | Semiconductor device with improved field layer |
US11827512B2 (en) | 2018-09-24 | 2023-11-28 | Hewlett-Packard Development Company, L.P. | Connected field effect transistors |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3315096A (en) | 1963-02-22 | 1967-04-18 | Rca Corp | Electrical circuit including an insulated-gate field effect transistor having an epitaxial layer of relatively lightly doped semiconductor material on a base layer of more highly doped semiconductor material for improved operation at ultra-high frequencies |
US3608189A (en) | 1970-01-07 | 1971-09-28 | Gen Electric | Method of making complementary field-effect transistors by single step diffusion |
US3868721A (en) | 1970-11-02 | 1975-02-25 | Motorola Inc | Diffusion guarded metal-oxide-silicon field effect transistors |
US4063274A (en) | 1976-12-10 | 1977-12-13 | Rca Corporation | Integrated circuit device including both N-channel and P-channel insulated gate field effect transistors |
US4240093A (en) | 1976-12-10 | 1980-12-16 | Rca Corporation | Integrated circuit device including both N-channel and P-channel insulated gate field effect transistors |
US4142197A (en) | 1977-04-14 | 1979-02-27 | Rca Corp. | Drain extensions for closed COS/MOS logic devices |
US4173022A (en) | 1978-05-09 | 1979-10-30 | Rca Corp. | Integrated gate field effect transistors having closed gate structure with controlled avalanche characteristics |
US4308549A (en) | 1978-12-18 | 1981-12-29 | Xerox Corporation | High voltage field effect transistor |
US4288801A (en) * | 1979-05-30 | 1981-09-08 | Xerox Corporation | Monolithic HVMOSFET active switch array |
US4290077A (en) * | 1979-05-30 | 1981-09-15 | Xerox Corporation | High voltage MOSFET with inter-device isolation structure |
US4290078A (en) * | 1979-05-30 | 1981-09-15 | Xerox Corporation | High voltage MOSFET without field plate structure |
US4274193A (en) | 1979-07-05 | 1981-06-23 | Rca Corporation | Method for making a closed gate MOS transistor with self-aligned contacts |
US4272881A (en) | 1979-07-20 | 1981-06-16 | Rca Corporation | Method for making a closed gate MOS transistor with self-aligned contacts with dual passivation layer |
DE3446968A1 (de) * | 1983-12-26 | 1985-07-04 | Canon K.K., Tokio/Tokyo | Fluessigkeitsstrahlaufzeichnungskopf |
US4696092A (en) | 1984-07-02 | 1987-09-29 | Texas Instruments Incorporated | Method of making field-plate isolated CMOS devices |
US4561170A (en) | 1984-07-02 | 1985-12-31 | Texas Instruments Incorporated | Method of making field-plate isolated CMOS devices |
US4719477A (en) * | 1986-01-17 | 1988-01-12 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
US4697328A (en) | 1986-04-28 | 1987-10-06 | Rockwell International Corporation | Method of making hardened NMOS sub-micron field effect transistors |
US5023690A (en) * | 1986-10-24 | 1991-06-11 | Texas Instruments Incorporated | Merged bipolar and complementary metal oxide semiconductor transistor device |
US5343064A (en) * | 1988-03-18 | 1994-08-30 | Spangler Leland J | Fully integrated single-crystal silicon-on-insulator process, sensors and circuits |
US5055859A (en) * | 1988-11-16 | 1991-10-08 | Casio Computer Co., Ltd. | Integrated thermal printhead and driving circuit |
US4951063A (en) * | 1989-05-22 | 1990-08-21 | Xerox Corporation | Heating elements for thermal ink jet devices |
US5305015A (en) * | 1990-08-16 | 1994-04-19 | Hewlett-Packard Company | Laser ablated nozzle member for inkjet printhead |
US5075250A (en) * | 1991-01-02 | 1991-12-24 | Xerox Corporation | Method of fabricating a monolithic integrated circuit chip for a thermal ink jet printhead |
US5122812A (en) * | 1991-01-03 | 1992-06-16 | Hewlett-Packard Company | Thermal inkjet printhead having driver circuitry thereon and method for making the same |
US5159353A (en) * | 1991-07-02 | 1992-10-27 | Hewlett-Packard Company | Thermal inkjet printhead structure and method for making the same |
US5147812A (en) * | 1992-04-01 | 1992-09-15 | Motorola, Inc. | Fabrication method for a sub-micron geometry semiconductor device |
US5310692A (en) | 1992-05-29 | 1994-05-10 | Sgs-Thomson Microelectronics, Inc. | Method of forming a MOSFET structure with planar surface |
JP3305415B2 (ja) | 1992-06-18 | 2002-07-22 | キヤノン株式会社 | 半導体装置、インクジェットヘッド、および画像形成装置 |
JPH06143581A (ja) * | 1992-11-05 | 1994-05-24 | Xerox Corp | インクジェット印字ヘッド |
US5450109A (en) * | 1993-03-24 | 1995-09-12 | Hewlett-Packard Company | Barrier alignment and process monitor for TIJ printheads |
JPH0776080A (ja) | 1993-09-08 | 1995-03-20 | Canon Inc | 記録ヘッド用基体、記録ヘッド、記録ヘッドカートリッジおよび記録装置と、記録ヘッド用基体の製造方法 |
US6034410A (en) | 1994-01-14 | 2000-03-07 | Stmicroelectronics, Inc. | MOSFET structure with planar surface |
IT1276431B1 (it) * | 1995-06-22 | 1997-10-31 | Olivetti Canon Ind Spa | Testina di stampa a getto di inchiostro con componenti di pilotaggio integrati |
IT1276469B1 (it) * | 1995-07-04 | 1997-10-31 | Olivetti Canon Ind Spa | Metodo per stabilizzare le condizioni termiche di lavoro di una testina di stampa a getto di inchiostro e relativa testina di stampa |
US5883650A (en) * | 1995-12-06 | 1999-03-16 | Hewlett-Packard Company | Thin-film printhead device for an ink-jet printer |
US5710070A (en) | 1996-11-08 | 1998-01-20 | Chartered Semiconductor Manufacturing Pte Ltd. | Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology |
US6183067B1 (en) * | 1997-01-21 | 2001-02-06 | Agilent Technologies | Inkjet printhead and fabrication method for integrating an actuator and firing chamber |
AUPP653498A0 (en) * | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46a) |
US6019907A (en) * | 1997-08-08 | 2000-02-01 | Hewlett-Packard Company | Forming refill for monolithic inkjet printhead |
US6102528A (en) * | 1997-10-17 | 2000-08-15 | Xerox Corporation | Drive transistor for an ink jet printhead |
US5872034A (en) * | 1997-11-03 | 1999-02-16 | Delco Electronics Corporation | EPROM in double poly high density CMOS |
WO2000023279A1 (en) * | 1998-10-16 | 2000-04-27 | Silverbrook Research Pty. Limited | Improvements relating to inkjet printers |
US6547353B2 (en) * | 1999-07-27 | 2003-04-15 | Stmicroelectronics, Inc. | Thermal ink jet printhead system with multiple output driver circuit for powering heating element and associated method |
US6412928B1 (en) * | 2000-12-29 | 2002-07-02 | Eastman Kodak Company | Incorporation of supplementary heaters in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same |
-
2001
- 2001-03-19 US US09/813,087 patent/US6883894B2/en not_active Expired - Lifetime
- 2001-12-25 TW TW090132233A patent/TW544729B/zh not_active IP Right Cessation
- 2001-12-26 MY MYPI20015884A patent/MY127121A/en unknown
-
2002
- 2002-03-13 EP EP02728508A patent/EP1370418B1/de not_active Expired - Lifetime
- 2002-03-13 CN CNB028102347A patent/CN100341701C/zh not_active Expired - Fee Related
- 2002-03-13 WO PCT/US2002/008356 patent/WO2002078961A1/en active Application Filing
- 2002-03-13 JP JP2002577204A patent/JP4362288B2/ja not_active Expired - Fee Related
- 2002-03-13 KR KR1020037012152A patent/KR100553406B1/ko active IP Right Grant
- 2002-03-13 DE DE60237806T patent/DE60237806D1/de not_active Expired - Lifetime
- 2002-08-06 US US10/214,081 patent/US6977185B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN100341701C (zh) | 2007-10-10 |
EP1370418A1 (de) | 2003-12-17 |
WO2002078961A1 (en) | 2002-10-10 |
EP1370418B1 (de) | 2010-09-29 |
US6883894B2 (en) | 2005-04-26 |
JP2004526598A (ja) | 2004-09-02 |
TW544729B (en) | 2003-08-01 |
US6977185B2 (en) | 2005-12-20 |
CN1509235A (zh) | 2004-06-30 |
US20020190328A1 (en) | 2002-12-19 |
MY127121A (en) | 2006-11-30 |
KR100553406B1 (ko) | 2006-02-16 |
US20020130371A1 (en) | 2002-09-19 |
KR20030087644A (ko) | 2003-11-14 |
JP4362288B2 (ja) | 2009-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, US |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PARTNER |