KR930010971B1 - 기판을 열처리하기 위한 장치 - Google Patents

기판을 열처리하기 위한 장치 Download PDF

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Publication number
KR930010971B1
KR930010971B1 KR1019900008438A KR900008438A KR930010971B1 KR 930010971 B1 KR930010971 B1 KR 930010971B1 KR 1019900008438 A KR1019900008438 A KR 1019900008438A KR 900008438 A KR900008438 A KR 900008438A KR 930010971 B1 KR930010971 B1 KR 930010971B1
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KR
South Korea
Prior art keywords
substrate
heat treatment
storage device
board
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019900008438A
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English (en)
Korean (ko)
Other versions
KR910001897A (ko
Inventor
마사미 오타니
켄지 카메이
Original Assignee
다이닛뽕스쿠린세이소오 가부시키가이샤
이시다아키라
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 다이닛뽕스쿠린세이소오 가부시키가이샤, 이시다아키라 filed Critical 다이닛뽕스쿠린세이소오 가부시키가이샤
Publication of KR910001897A publication Critical patent/KR910001897A/ko
Application granted granted Critical
Publication of KR930010971B1 publication Critical patent/KR930010971B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H10P72/0431—
    • H10P72/7612—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019900008438A 1989-06-09 1990-06-08 기판을 열처리하기 위한 장치 Expired - Lifetime KR930010971B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP89-67814(U) 1989-06-09
JP1-67814 1989-06-09
JP1989067814U JPH0536269Y2 (cg-RX-API-DMAC10.html) 1989-06-09 1989-06-09

Publications (2)

Publication Number Publication Date
KR910001897A KR910001897A (ko) 1991-01-31
KR930010971B1 true KR930010971B1 (ko) 1993-11-18

Family

ID=13355791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900008438A Expired - Lifetime KR930010971B1 (ko) 1989-06-09 1990-06-08 기판을 열처리하기 위한 장치

Country Status (2)

Country Link
JP (1) JPH0536269Y2 (cg-RX-API-DMAC10.html)
KR (1) KR930010971B1 (cg-RX-API-DMAC10.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211243A (ja) * 1983-05-17 1984-11-30 Toshiba Corp 半導体基板処理装置

Also Published As

Publication number Publication date
JPH0536269Y2 (cg-RX-API-DMAC10.html) 1993-09-14
JPH038424U (cg-RX-API-DMAC10.html) 1991-01-28
KR910001897A (ko) 1991-01-31

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