KR920704108A - 물체의 온도측정방법과 그 장치 및 가열방법 - Google Patents

물체의 온도측정방법과 그 장치 및 가열방법

Info

Publication number
KR920704108A
KR920704108A KR1019920702168A KR920702168A KR920704108A KR 920704108 A KR920704108 A KR 920704108A KR 1019920702168 A KR1019920702168 A KR 1019920702168A KR 920702168 A KR920702168 A KR 920702168A KR 920704108 A KR920704108 A KR 920704108A
Authority
KR
South Korea
Prior art keywords
heat radiation
pickup
change
heat
measuring
Prior art date
Application number
KR1019920702168A
Other languages
English (en)
Korean (ko)
Inventor
피터 미차엘 노엘 반덴나빌
Original Assignee
원본미기재
인터유니버시테어 마이크로 일렉트로니카 센트룸 브이제트더블유
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 인터유니버시테어 마이크로 일렉트로니카 센트룸 브이제트더블유 filed Critical 원본미기재
Publication of KR920704108A publication Critical patent/KR920704108A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
KR1019920702168A 1991-01-08 1992-01-08 물체의 온도측정방법과 그 장치 및 가열방법 KR920704108A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL91-18 1991-01-08
NL9100018A NL9100018A (nl) 1991-01-08 1991-01-08 Werkwijze en inrichting voor het meten van de temperatuur van een voorwerp, alsmede verwarmingswerkwijze.
PCT/EP1992/000039 WO1992012405A1 (fr) 1991-01-08 1992-01-08 Procede et dispositif de mesure de la temperature d'un objet, et procede de chauffage

Publications (1)

Publication Number Publication Date
KR920704108A true KR920704108A (ko) 1992-12-19

Family

ID=19858700

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920702168A KR920704108A (ko) 1991-01-08 1992-01-08 물체의 온도측정방법과 그 장치 및 가열방법

Country Status (5)

Country Link
EP (1) EP0519033A1 (fr)
JP (1) JPH05507356A (fr)
KR (1) KR920704108A (fr)
NL (1) NL9100018A (fr)
WO (1) WO1992012405A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9124797D0 (en) * 1991-11-22 1992-01-15 Secretary Trade Ind Brit Temperature measuring apparatus
US5444815A (en) * 1993-12-16 1995-08-22 Texas Instruments Incorporated Multi-zone lamp interference correction system
DE4414391C2 (de) * 1994-04-26 2001-02-01 Steag Rtp Systems Gmbh Verfahren für wellenvektorselektive Pyrometrie in Schnellheizsystemen
DE19534440A1 (de) * 1995-09-16 1997-03-20 Bergmann Hans Wilhelm Verfahren und Vorrichtung zur schnellen und berührungslosen Temperaturmessung an farbigen Metallen und anderen anorganischen Stoffen
JP4558411B2 (ja) * 2004-08-24 2010-10-06 富士通セミコンダクター株式会社 急速熱処理装置及び方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH537009A (de) * 1971-10-11 1973-05-15 Bbc Brown Boveri & Cie Verfahren zur berührungslosen Messung der Oberflächentemperatur an einem Objekt
FR2602590B1 (fr) * 1986-08-08 1989-11-10 Electricite De France Procede de mesure de la temperature d'un corps par detection optique et echauffement module
US4890245A (en) * 1986-09-22 1989-12-26 Nikon Corporation Method for measuring temperature of semiconductor substrate and apparatus therefor
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
NL8900003A (nl) * 1989-01-02 1990-08-01 Imec Inter Uni Micro Electr Inrichting en werkwijze voor het behandelen van een of meer plakken materiaal.

Also Published As

Publication number Publication date
NL9100018A (nl) 1992-08-03
EP0519033A1 (fr) 1992-12-23
WO1992012405A1 (fr) 1992-07-23
JPH05507356A (ja) 1993-10-21

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Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid