SE9402247L - Sätt och anordning för tjockleksbedömning - Google Patents
Sätt och anordning för tjockleksbedömningInfo
- Publication number
- SE9402247L SE9402247L SE9402247A SE9402247A SE9402247L SE 9402247 L SE9402247 L SE 9402247L SE 9402247 A SE9402247 A SE 9402247A SE 9402247 A SE9402247 A SE 9402247A SE 9402247 L SE9402247 L SE 9402247L
- Authority
- SE
- Sweden
- Prior art keywords
- intensity
- interval
- curve
- determined
- average value
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9402247A SE9402247L (sv) | 1994-06-27 | 1994-06-27 | Sätt och anordning för tjockleksbedömning |
DE69525879T DE69525879T2 (de) | 1994-06-27 | 1995-06-26 | Verfahren und Vorrichtung zur Dickebewertung |
EP95850119A EP0690288B1 (en) | 1994-06-27 | 1995-06-26 | Method and device for thickness assessment |
US08/495,079 US5581354A (en) | 1994-06-27 | 1995-06-27 | Method and device for thickness assessment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9402247A SE9402247L (sv) | 1994-06-27 | 1994-06-27 | Sätt och anordning för tjockleksbedömning |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9402247D0 SE9402247D0 (sv) | 1994-06-27 |
SE502239C2 SE502239C2 (sv) | 1995-09-18 |
SE9402247L true SE9402247L (sv) | 1995-09-18 |
Family
ID=20394518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9402247A SE9402247L (sv) | 1994-06-27 | 1994-06-27 | Sätt och anordning för tjockleksbedömning |
Country Status (4)
Country | Link |
---|---|
US (1) | US5581354A (sv) |
EP (1) | EP0690288B1 (sv) |
DE (1) | DE69525879T2 (sv) |
SE (1) | SE9402247L (sv) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9616853D0 (en) | 1996-08-10 | 1996-09-25 | Vorgem Limited | An improved thickness monitor |
US5798837A (en) | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
US6278519B1 (en) | 1998-01-29 | 2001-08-21 | Therma-Wave, Inc. | Apparatus for analyzing multi-layer thin film stacks on semiconductors |
US6241244B1 (en) * | 1997-11-28 | 2001-06-05 | Diebold, Incorporated | Document sensor for currency recycling automated banking machine |
US7387236B2 (en) | 2001-10-09 | 2008-06-17 | Delaware Capital Formation, Inc. | Dispensing of currency |
US6859119B2 (en) * | 2002-12-26 | 2005-02-22 | Motorola, Inc. | Meso-microelectromechanical system package |
US7233878B2 (en) * | 2004-01-30 | 2007-06-19 | Tokyo Electron Limited | Method and system for monitoring component consumption |
EP1765704A4 (en) * | 2004-06-18 | 2009-03-04 | Roye Weeks | SYSTEM FOR HANDLING SURFACES |
GB0724779D0 (en) * | 2007-12-20 | 2008-01-30 | Vanguard Sensor Technologies L | Monitoring system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4095098A (en) * | 1977-02-17 | 1978-06-13 | Looper Norman G | Ratiometric transparency meter |
DE2735245A1 (de) * | 1977-08-04 | 1979-02-15 | Siemens Ag | Anordnung zur erzeugung einer konstanten signalamplitude bei einem optoelektronischen abtastsystem |
US4276480A (en) * | 1979-09-28 | 1981-06-30 | Accuray Corporation | Sensor position independent material property determination using radiant energy |
JPS5888610A (ja) * | 1981-11-20 | 1983-05-26 | Canon Inc | 多重送検出装置 |
US4437332A (en) * | 1982-09-30 | 1984-03-20 | Krautkramer-Branson, Inc. | Ultrasonic thickness measuring instrument |
JPS62150109A (ja) * | 1985-12-25 | 1987-07-04 | Tohoku Ricoh Co Ltd | 紙厚識別装置 |
US5138178A (en) * | 1990-12-17 | 1992-08-11 | Xerox Corporation | Photoelectric paper basis weight sensor |
-
1994
- 1994-06-27 SE SE9402247A patent/SE9402247L/sv not_active IP Right Cessation
-
1995
- 1995-06-26 DE DE69525879T patent/DE69525879T2/de not_active Expired - Fee Related
- 1995-06-26 EP EP95850119A patent/EP0690288B1/en not_active Expired - Lifetime
- 1995-06-27 US US08/495,079 patent/US5581354A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
SE9402247D0 (sv) | 1994-06-27 |
SE502239C2 (sv) | 1995-09-18 |
US5581354A (en) | 1996-12-03 |
EP0690288B1 (en) | 2002-03-20 |
DE69525879D1 (de) | 2002-04-25 |
EP0690288A2 (en) | 1996-01-03 |
EP0690288A3 (en) | 1996-11-06 |
DE69525879T2 (de) | 2002-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |