KR910020489A - 감광성 수지조성물 - Google Patents

감광성 수지조성물 Download PDF

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Publication number
KR910020489A
KR910020489A KR1019910007405A KR910007405A KR910020489A KR 910020489 A KR910020489 A KR 910020489A KR 1019910007405 A KR1019910007405 A KR 1019910007405A KR 910007405 A KR910007405 A KR 910007405A KR 910020489 A KR910020489 A KR 910020489A
Authority
KR
South Korea
Prior art keywords
resin composition
photosensitive resin
halogen atom
acid catalyst
catalyst generator
Prior art date
Application number
KR1019910007405A
Other languages
English (en)
Inventor
도시로 쓰모리
Original Assignee
오가 노리오
소니 가부시기가기샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오가 노리오, 소니 가부시기가기샤 filed Critical 오가 노리오
Publication of KR910020489A publication Critical patent/KR910020489A/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/04—Chromates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

내용 없음

Description

감광성 수지조성물
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (2)

  1. 베이스 수지, 산가교제(酸架橋劑) 및 광반응성 산촉매(酸觸媒)발생제가 혼합되어 이루어지는 감광성 수지 조성물에 있어서, 상기 광반응성 산촉매발생제가 다음의 구조식 Ⅰ
    〔단, X1, X2, X3은 할로겐원자 또는 수소원자를 표시하며, 이들중 최소한 하나는 할로겐원자임〕으로 표현되는 테트라키스-1,2,4,5-(폴리할로메틸)벤젠인 것을 특징으로 하는 감광성 수지 조성물.
  2. 베이스 수지, 산가교제및 광반응성 산촉매 발생제가 혼합되어 이루어지는 감광성 수지조성물에 있어서, 상기 광반응성 산촉매발생제가 다음의 구조식 Ⅱ
    〔단, X4, X5, X6은 할로겐원자 또는 수소원자를 표시하며, 이들중 최소한 하나는 할로겐원자임〕으로 표현되는 트리스(폴리할로메틸)벤젠인 것을 특징으로 하는 감광성 수지 조성물.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019910007405A 1990-05-15 1991-05-08 감광성 수지조성물 KR910020489A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2123000A JP2861253B2 (ja) 1990-05-15 1990-05-15 感光性樹脂組成物
JP2-123000 1990-05-15

Publications (1)

Publication Number Publication Date
KR910020489A true KR910020489A (ko) 1991-12-20

Family

ID=14849789

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910007405A KR910020489A (ko) 1990-05-15 1991-05-08 감광성 수지조성물

Country Status (3)

Country Link
US (1) US5208133A (ko)
JP (1) JP2861253B2 (ko)
KR (1) KR910020489A (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107560A (ja) * 1990-08-29 1992-04-09 Mitsubishi Kasei Corp ネガ型感光性組成物
EP0537524A1 (en) 1991-10-17 1993-04-21 Shipley Company Inc. Radiation sensitive compositions and methods
EP0599779A1 (de) * 1992-10-29 1994-06-01 OCG Microelectronic Materials AG Hochauflösender negativ arbeitender Photoresist mit grossem Prozessspielraum
TW288112B (ko) * 1993-06-02 1996-10-11 Sumitomo Chemical Co
US5691101A (en) 1994-03-15 1997-11-25 Kabushiki Kaisha Toshiba Photosensitive composition
JPH08152716A (ja) * 1994-11-28 1996-06-11 Mitsubishi Electric Corp ネガ型レジスト及びレジストパターンの形成方法
US6323287B1 (en) * 1999-03-12 2001-11-27 Arch Specialty Chemicals, Inc. Hydroxy-amino thermally cured undercoat for 193 NM lithography
US6819427B1 (en) 2001-10-10 2004-11-16 Advanced Micro Devices, Inc. Apparatus of monitoring and optimizing the development of a photoresist material
US6634805B1 (en) 2001-10-10 2003-10-21 Advanced Micro Devices, Inc. Parallel plate development
JP4586920B2 (ja) * 2006-04-24 2010-11-24 Ｊｓｒ株式会社 感光性樹脂組成物
CN106030711B (zh) * 2013-12-20 2019-02-22 科思创德国股份有限公司 具有改进的光敏性的全息介质

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3515552A (en) * 1966-09-16 1970-06-02 Minnesota Mining & Mfg Light-sensitive imaging sheet and method of using
US4113497A (en) * 1973-06-11 1978-09-12 American Can Company Compositions with organohalogen compound and diazonium salts as photoinitiators of epoxy compounds in photo-polymerization
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
JPH03102355A (ja) * 1989-09-18 1991-04-26 Sony Corp 感光性樹脂組成物
JP2660352B2 (ja) * 1989-09-20 1997-10-08 日本ゼオン株式会社 レジスト組成物

Also Published As

Publication number Publication date
JP2861253B2 (ja) 1999-02-24
US5208133A (en) 1993-05-04
JPH0419666A (ja) 1992-01-23

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