KR910013502A - 본더용 툴 유지기구 - Google Patents

본더용 툴 유지기구 Download PDF

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Publication number
KR910013502A
KR910013502A KR1019900019704A KR900019704A KR910013502A KR 910013502 A KR910013502 A KR 910013502A KR 1019900019704 A KR1019900019704 A KR 1019900019704A KR 900019704 A KR900019704 A KR 900019704A KR 910013502 A KR910013502 A KR 910013502A
Authority
KR
South Korea
Prior art keywords
tool
holder
rocking plate
freely
theta
Prior art date
Application number
KR1019900019704A
Other languages
English (en)
Other versions
KR940006088B1 (ko
Inventor
고오지 사또오
Original Assignee
아라이 가즈오
가부시끼가이샤 신가와
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아라이 가즈오, 가부시끼가이샤 신가와 filed Critical 아라이 가즈오
Publication of KR910013502A publication Critical patent/KR910013502A/ko
Application granted granted Critical
Publication of KR940006088B1 publication Critical patent/KR940006088B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
    • B23Q1/4857—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single rotating pair
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133—Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)

Abstract

내용 없음.

Description

본더용 툴 유지기구
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 좌측면도,
제5도는 제1도의 V-V선 단면도,
제10도는 제1도의 X-X선 단면도.

Claims (2)

  1. 툴 부착블록과 이 툴 부착블록에 회동이 자유롭게 유지되고, 툴이 고정되는 θ방향 조정용 홀더와 툴 부착블록에 설치되어, 상기 θ방향 조정용 홀더를 툴의 축심을 중심으로 해서 움직임을 축소해서 회동시키는 θ방향 조정수단을 구비한 것을 특징으로 하는 본더용 툴 유지기구.
  2. 상하 이동되는 상하동부재와 이 상하동부재에 회동이 자유롭게 설치되어 그 상하동부재에 고정되는 Y방향 요동판과 이 Y방향 요동판에 그 Y방향 요동판의 회동방향과 직교하는 방향으로 회동이 자유롭게 설치되어 그 Y방향 요동판에 고정된 X방향 요동판을 회동시키는 X방향 조정수단과, 상기 X방향 요동판에 고정된 툴 부착블록과 이 툴 부착블록에 회동이 자유롭게 유지되어 툴이 고정되는 θ방향 조정용 홀더와 상기 툴 부착블록에 설치되고 상기 θ방향 조정용 홀더를 툴의 축심을 중심으로 해서 움직임을 축소해서 회동시키는 θ방향 조정수단을 구비한 것을 특징으로 하는 본더용 툴 유지기구.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900019704A 1989-12-02 1990-12-01 본더용 툴 유지기구 KR940006088B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-314073 1989-12-02
JP1314073A JP2701173B2 (ja) 1989-12-02 1989-12-02 ボンダ用ツール保持機構

Publications (2)

Publication Number Publication Date
KR910013502A true KR910013502A (ko) 1991-08-08
KR940006088B1 KR940006088B1 (ko) 1994-07-06

Family

ID=18048900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900019704A KR940006088B1 (ko) 1989-12-02 1990-12-01 본더용 툴 유지기구

Country Status (3)

Country Link
US (1) US5216933A (ko)
JP (1) JP2701173B2 (ko)
KR (1) KR940006088B1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05308093A (ja) * 1992-04-30 1993-11-19 Matsushita Electron Corp 半導体素子接続装置
FR3018712B1 (fr) * 2014-03-20 2016-12-30 Arts Outil de percage a deux moteurs coaxiaux
US9576928B2 (en) 2015-02-27 2017-02-21 Kulicke And Soffa Industries, Inc. Bond head assemblies, thermocompression bonding systems and methods of assembling and operating the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2645972A (en) * 1949-11-12 1953-07-21 American Optical Corp Adjustment mechanism for microscopes
US2704331A (en) * 1953-10-20 1955-03-15 Albert M Stott Adjustable mount for X-ray diffraction crystal
US3023635A (en) * 1960-01-14 1962-03-06 Bausch & Lomb Mechanical drive
US3691864A (en) * 1970-11-19 1972-09-19 Ibm X-y rotational positioning system
US4317560A (en) * 1979-12-26 1982-03-02 Troyer Wade E Work manipulator
JPS60232839A (ja) * 1984-05-04 1985-11-19 Hitachi Ltd 直線状案内軌道の固定装置
DE3521047C1 (de) * 1985-06-12 1986-09-04 C. Reichert Optische Werke Ag, Wien Mikroskop
JPS6220339A (ja) * 1985-07-19 1987-01-28 Marine Instr Co Ltd テ−プボンデイング装置
JPH0411169Y2 (ko) * 1986-02-15 1992-03-19
US4712444A (en) * 1986-09-16 1987-12-15 Ball Corporation Levered optical mount

Also Published As

Publication number Publication date
JPH03173448A (ja) 1991-07-26
KR940006088B1 (ko) 1994-07-06
JP2701173B2 (ja) 1998-01-21
US5216933A (en) 1993-06-08

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