KR910009348A - 세정장치의 청정공기 취출구 - Google Patents
세정장치의 청정공기 취출구 Download PDFInfo
- Publication number
- KR910009348A KR910009348A KR1019900018449A KR900018449A KR910009348A KR 910009348 A KR910009348 A KR 910009348A KR 1019900018449 A KR1019900018449 A KR 1019900018449A KR 900018449 A KR900018449 A KR 900018449A KR 910009348 A KR910009348 A KR 910009348A
- Authority
- KR
- South Korea
- Prior art keywords
- clean air
- outlet
- air outlet
- cleaning device
- case
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ventilation (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Prevention Of Fouling (AREA)
- Cleaning In General (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일예에 따른 취출구를 갖춘 반도체 재료의 세정조의 측단면도.
제2도는 그 취출구의 사시도.
제3도는 그 취출구의 종단면도.
Claims (3)
- 케이스(1)내에 적당수의 시정조(2)가 설치된 반도체 재료의 세정장치에 있어, 상기 케이스(1)의 한쪽과 케이스(1)의 다른쪽에 있는 흡입구(40)를 향하여, 또한 상기 세정조(2)의 위를 통하여 청정 공기를 취출하는 취출구(10)에 있어서, 상기 취출구(10)는 아래로 부터 위로 세원지 덕트내에 구획된 여러개의 통로(11)를 포하하며, 각 상기 통로(11)는 적어도 상부가 앞끝으로 향하여 가늘게 형성되며, 각 상기통로(11)의 앞끝은 횡방향으로 연장된 가늘고 긴 구멍(12)으로 되어 있는 것을 특징으로 하는 세정장치의 청정 공기 취출구.
- 제1항에 있어서, 상기 취출구(10)앞끝의 각 구멍(12)에는 한개 또는 여러개의 보강용 바아(12a)가 갖추어져 있는 것을 특징으로 하는 세정장치의 청정 공기 취출구.
- 제1항에 있어서, 상기 취출구(10)의 앞끝에는 취출된 공기를 이온화 하기 위한 이온 황장치(17)이 설치되어 있는 것을 특징으로 하는 세정장치의 청정 공기 취출구.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989132330U JPH0371627U (ko) | 1989-11-14 | 1989-11-14 | |
JP1-132330 | 1989-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR910009348A true KR910009348A (ko) | 1991-06-28 |
Family
ID=15078803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900018449A KR910009348A (ko) | 1989-11-14 | 1990-11-14 | 세정장치의 청정공기 취출구 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5362274A (ko) |
JP (1) | JPH0371627U (ko) |
KR (1) | KR910009348A (ko) |
DE (1) | DE4035786A1 (ko) |
GB (1) | GB2238610B (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3110218B2 (ja) * | 1992-09-25 | 2000-11-20 | 三菱電機株式会社 | 半導体洗浄装置及び方法、ウエハカセット、専用グローブ並びにウエハ受け治具 |
JP3171807B2 (ja) * | 1997-01-24 | 2001-06-04 | 東京エレクトロン株式会社 | 洗浄装置及び洗浄方法 |
US5934991A (en) * | 1998-02-01 | 1999-08-10 | Fortrend Engineering Corporation | Pod loader interface improved clean air system |
DE19961533A1 (de) * | 1999-12-20 | 2002-03-28 | Steag Micro Tech Gmbh | Vorrichtung und Verfahren zum Behandeln von Substraten |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE473883C (de) * | 1929-03-30 | Tech Beratungsstelle G M B H | Einrichtung zum Schutz von Arbeitsraeumen gegen die aus offenen Gefaessen austretenden Daempfe und andere Verunreinigungen der Luft mittels eines Luftschleiers | |
US2544769A (en) * | 1945-12-29 | 1951-03-13 | Scovill Manufacturing Co | Fume and vapor control for cleansing tanks |
FR1053195A (fr) * | 1952-03-29 | 1954-02-01 | Procédé et dispositif d'obturation fluidique | |
US3203337A (en) * | 1961-02-27 | 1965-08-31 | Dual Jet Refrigeration Company | Refrigerated display case and elements thereof |
GB988638A (en) * | 1963-01-26 | 1965-04-07 | Ernst Jacobi | Improvements in or relating to dust and fly removal from textile machinery such as ring spinning frames |
GB1125673A (en) * | 1967-01-27 | 1968-08-28 | Conditionaire Australia Pty Lt | Improvements in air screen creating, air conditioning apparatus |
US3543532A (en) * | 1968-11-25 | 1970-12-01 | Streater Ind Inc | Air return grille for an air curtain type refrigerated display case |
US3726203A (en) * | 1971-06-23 | 1973-04-10 | Svenska Flaektfabriken Ab | Device for maintenance of a dustfree, bacteria-free zone in a room |
US3771323A (en) * | 1972-05-17 | 1973-11-13 | Dualjet Corp | Refrigerated reach-in display compartment |
ZA74348B (en) * | 1973-05-04 | 1974-11-27 | Emhart Corp | Refrigerated display case |
US4050368A (en) * | 1976-01-02 | 1977-09-27 | Marion L. Eakes Co. | Exhaust system for industrial processes |
US4120174A (en) * | 1977-03-16 | 1978-10-17 | Kysor Industrial Corporation | Air defrost display case |
DE3603041A1 (de) * | 1985-04-11 | 1986-10-30 | Zöll, Dieter, Selzach | Flaechenreinigungsgeraet |
US4883542A (en) * | 1987-12-22 | 1989-11-28 | John Voneiff | Method and apparatus for cleaning containers |
-
1989
- 1989-11-14 JP JP1989132330U patent/JPH0371627U/ja active Pending
-
1990
- 1990-10-31 US US07/606,524 patent/US5362274A/en not_active Expired - Fee Related
- 1990-11-08 GB GB9024307A patent/GB2238610B/en not_active Expired - Fee Related
- 1990-11-10 DE DE4035786A patent/DE4035786A1/de not_active Withdrawn
- 1990-11-14 KR KR1019900018449A patent/KR910009348A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US5362274A (en) | 1994-11-08 |
GB9024307D0 (en) | 1990-12-19 |
DE4035786A1 (de) | 1991-05-16 |
JPH0371627U (ko) | 1991-07-19 |
GB2238610B (en) | 1993-10-06 |
GB2238610A (en) | 1991-06-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |