KR910009348A - 세정장치의 청정공기 취출구 - Google Patents

세정장치의 청정공기 취출구 Download PDF

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Publication number
KR910009348A
KR910009348A KR1019900018449A KR900018449A KR910009348A KR 910009348 A KR910009348 A KR 910009348A KR 1019900018449 A KR1019900018449 A KR 1019900018449A KR 900018449 A KR900018449 A KR 900018449A KR 910009348 A KR910009348 A KR 910009348A
Authority
KR
South Korea
Prior art keywords
clean air
outlet
air outlet
cleaning device
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019900018449A
Other languages
English (en)
Korean (ko)
Inventor
세이이찌로오 아이고오
Original Assignee
세이이찌로오 아이고오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세이이찌로오 아이고오 filed Critical 세이이찌로오 아이고오
Publication of KR910009348A publication Critical patent/KR910009348A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Ventilation (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)
KR1019900018449A 1989-11-14 1990-11-14 세정장치의 청정공기 취출구 Withdrawn KR910009348A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-132330 1989-11-14
JP1989132330U JPH0371627U (https=) 1989-11-14 1989-11-14

Publications (1)

Publication Number Publication Date
KR910009348A true KR910009348A (ko) 1991-06-28

Family

ID=15078803

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900018449A Withdrawn KR910009348A (ko) 1989-11-14 1990-11-14 세정장치의 청정공기 취출구

Country Status (5)

Country Link
US (1) US5362274A (https=)
JP (1) JPH0371627U (https=)
KR (1) KR910009348A (https=)
DE (1) DE4035786A1 (https=)
GB (1) GB2238610B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3110218B2 (ja) * 1992-09-25 2000-11-20 三菱電機株式会社 半導体洗浄装置及び方法、ウエハカセット、専用グローブ並びにウエハ受け治具
JP3171807B2 (ja) * 1997-01-24 2001-06-04 東京エレクトロン株式会社 洗浄装置及び洗浄方法
US5934991A (en) * 1998-02-01 1999-08-10 Fortrend Engineering Corporation Pod loader interface improved clean air system
DE19961533A1 (de) * 1999-12-20 2002-03-28 Steag Micro Tech Gmbh Vorrichtung und Verfahren zum Behandeln von Substraten

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE473883C (de) * 1929-03-30 Tech Beratungsstelle G M B H Einrichtung zum Schutz von Arbeitsraeumen gegen die aus offenen Gefaessen austretenden Daempfe und andere Verunreinigungen der Luft mittels eines Luftschleiers
US2544769A (en) * 1945-12-29 1951-03-13 Scovill Manufacturing Co Fume and vapor control for cleansing tanks
FR1053195A (fr) * 1952-03-29 1954-02-01 Procédé et dispositif d'obturation fluidique
US3203337A (en) * 1961-02-27 1965-08-31 Dual Jet Refrigeration Company Refrigerated display case and elements thereof
GB988638A (en) * 1963-01-26 1965-04-07 Ernst Jacobi Improvements in or relating to dust and fly removal from textile machinery such as ring spinning frames
GB1125673A (en) * 1967-01-27 1968-08-28 Conditionaire Australia Pty Lt Improvements in air screen creating, air conditioning apparatus
US3543532A (en) * 1968-11-25 1970-12-01 Streater Ind Inc Air return grille for an air curtain type refrigerated display case
US3726203A (en) * 1971-06-23 1973-04-10 Svenska Flaektfabriken Ab Device for maintenance of a dustfree, bacteria-free zone in a room
US3771323A (en) * 1972-05-17 1973-11-13 Dualjet Corp Refrigerated reach-in display compartment
ZA74348B (en) * 1973-05-04 1974-11-27 Emhart Corp Refrigerated display case
US4050368A (en) * 1976-01-02 1977-09-27 Marion L. Eakes Co. Exhaust system for industrial processes
US4120174A (en) * 1977-03-16 1978-10-17 Kysor Industrial Corporation Air defrost display case
DE3603041A1 (de) * 1985-04-11 1986-10-30 Zöll, Dieter, Selzach Flaechenreinigungsgeraet
US4883542A (en) * 1987-12-22 1989-11-28 John Voneiff Method and apparatus for cleaning containers

Also Published As

Publication number Publication date
US5362274A (en) 1994-11-08
DE4035786A1 (de) 1991-05-16
GB2238610B (en) 1993-10-06
GB2238610A (en) 1991-06-05
GB9024307D0 (en) 1990-12-19
JPH0371627U (https=) 1991-07-19

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19901114

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid