KR910003925B1 - 전자 스펙트로 미터 - Google Patents

전자 스펙트로 미터 Download PDF

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Publication number
KR910003925B1
KR910003925B1 KR1019870004966A KR870004966A KR910003925B1 KR 910003925 B1 KR910003925 B1 KR 910003925B1 KR 1019870004966 A KR1019870004966 A KR 1019870004966A KR 870004966 A KR870004966 A KR 870004966A KR 910003925 B1 KR910003925 B1 KR 910003925B1
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KR
South Korea
Prior art keywords
electrons
plane
energy
image
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019870004966A
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English (en)
Korean (ko)
Other versions
KR870011460A (ko
Inventor
로버트 미카엘 와르델 아이안
알란 콕슨 페터
Original Assignee
브이지 인스트루먼트 그룹 리미티드
스텐레이 프레드릭 노르톤
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Publication date
Application filed by 브이지 인스트루먼트 그룹 리미티드, 스텐레이 프레드릭 노르톤 filed Critical 브이지 인스트루먼트 그룹 리미티드
Publication of KR870011460A publication Critical patent/KR870011460A/ko
Application granted granted Critical
Publication of KR910003925B1 publication Critical patent/KR910003925B1/ko
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
KR1019870004966A 1986-05-19 1987-05-19 전자 스펙트로 미터 Expired KR910003925B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB868612099A GB8612099D0 (en) 1986-05-19 1986-05-19 Spectrometer
GB8612099 1986-05-19

Publications (2)

Publication Number Publication Date
KR870011460A KR870011460A (ko) 1987-12-23
KR910003925B1 true KR910003925B1 (ko) 1991-06-17

Family

ID=10598065

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870004966A Expired KR910003925B1 (ko) 1986-05-19 1987-05-19 전자 스펙트로 미터

Country Status (8)

Country Link
US (2) US4758723A (enExample)
EP (1) EP0246841B1 (enExample)
JP (1) JPS62290056A (enExample)
KR (1) KR910003925B1 (enExample)
CN (1) CN1010979B (enExample)
CA (1) CA1263766A (enExample)
DE (1) DE3771782D1 (enExample)
GB (1) GB8612099D0 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8604256D0 (en) * 1986-02-20 1986-03-26 Univ Manchester Electron spectrometer
US4882487A (en) * 1987-06-05 1989-11-21 The Perkin-Elmer Corporation Direct imaging monochromatic electron microscope
JP2842879B2 (ja) * 1989-01-06 1999-01-06 株式会社日立製作所 表面分析方法および装置
US5089699A (en) * 1989-03-14 1992-02-18 Hitachi, Ltd. Secondary charged particle analyzing apparatus and secondary charged particle extracting section
GB2244369A (en) * 1990-05-22 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers
JPH0510897A (ja) * 1991-07-02 1993-01-19 Jeol Ltd Ｘ線光電子分光イメージング装置
US5444242A (en) * 1992-09-29 1995-08-22 Physical Electronics Inc. Scanning and high resolution electron spectroscopy and imaging
US5315113A (en) * 1992-09-29 1994-05-24 The Perkin-Elmer Corporation Scanning and high resolution x-ray photoelectron spectroscopy and imaging
US5506414A (en) * 1993-03-26 1996-04-09 Fisons Plc Charged-particle analyzer
JP3143279B2 (ja) * 1993-09-03 2001-03-07 日本電子株式会社 電子エネルギー分析器
GB9510699D0 (en) * 1995-05-26 1995-07-19 Fisons Plc Apparatus and method for surface analysis
GB9718012D0 (en) * 1997-08-26 1997-10-29 Vg Systems Ltd A spectrometer and method of spectroscopy
US6548810B2 (en) * 2001-08-01 2003-04-15 The University Of Chicago Scanning confocal electron microscope
DE10252129A1 (de) 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
GB0225791D0 (en) 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
GB2403616A (en) * 2003-06-30 2005-01-05 Univ Sheffield Hallam Diffraction pattern imaging using moving aperture.
GB2428868B (en) * 2005-10-28 2008-11-19 Thermo Electron Corp Spectrometer for surface analysis and method therefor
CN100575981C (zh) * 2006-12-27 2009-12-30 中国科学院物理研究所 一种准连续或连续激光自旋分辨光电子能谱分析装置
US7718961B1 (en) 2007-01-15 2010-05-18 Raymond Browning Photoelectron microscope
US7608838B1 (en) 2007-01-15 2009-10-27 Raymond Browning Electron optical component
US7569816B1 (en) 2007-01-15 2009-08-04 Raymond Browning Electron spectrometer
GB0801663D0 (en) * 2008-01-30 2008-03-05 Krizek Jiri G F Electromagnetic imaging analyzer
JP4533444B2 (ja) * 2008-03-31 2010-09-01 株式会社日立製作所 透過型電子顕微鏡用収差補正器
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
FR2942070B1 (fr) * 2009-02-11 2011-03-11 Commissariat Energie Atomique Procede de correction d'astigmatisme en imagerie par spectromicroscopie a emission d'electrons
WO2011024677A1 (ja) * 2009-08-28 2011-03-03 独立行政法人産業技術総合研究所 電極部材、電子エネルギー分析器、光電子エネルギー分析器、及び温度測定装置
EP3428953B1 (en) * 2012-03-06 2025-09-17 Scienta Omicron AB Analyser arrangement for particle spectrometer
JP6405271B2 (ja) * 2015-03-12 2018-10-17 日本電子株式会社 電子分光装置および測定方法
CN105259197A (zh) * 2015-11-25 2016-01-20 中国科学院兰州化学物理研究所 光照-x射线光电子能谱同步分析测试装置
CN108345027B (zh) * 2018-03-16 2023-10-24 中国工程物理研究院激光聚变研究中心 一种能谱仪
DE102019107327A1 (de) * 2019-03-21 2020-09-24 Specs Surface Nano Analysis Gmbh Vorrichtung und Verfahren zum Elektronentransfer von einer Probe zu einem Energieanalysator und Elektronen-Spektrometervorrichtung
US11011343B2 (en) * 2019-07-15 2021-05-18 Applied Materials, Inc. High-current ion implanter and method for controlling ion beam using high-current ion implanter
GB201910880D0 (en) * 2019-07-30 2019-09-11 Vg Systems Ltd A spectroscopy and imaging system
CN112799120B (zh) * 2019-11-13 2024-03-22 中国科学院国家空间科学中心 一种离子和电子同步测量的双通道静电分析器
US11264200B1 (en) * 2020-09-23 2022-03-01 Fei Company Lamella alignment based on a reconstructed volume
JP7586856B2 (ja) * 2022-06-16 2024-11-19 日本電子株式会社 電子分光装置および分析方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1303136A (enExample) * 1970-02-27 1973-01-17
DE2331091C3 (de) * 1973-06-19 1980-03-20 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung zur Bestimmung der Energie geladener Teilchen
SU711922A1 (ru) * 1978-07-10 1985-09-30 Ужгородский Государственный Университет Устройство дл селекции пучка электронов по энерги м
US4358680A (en) * 1979-11-30 1982-11-09 Kratos Limited Charged particle spectrometers

Also Published As

Publication number Publication date
CN87103626A (zh) 1988-06-01
DE3771782D1 (de) 1991-09-05
JPS62290056A (ja) 1987-12-16
US4758723A (en) 1988-07-19
GB8612099D0 (en) 1986-06-25
USRE33275E (en) 1990-07-24
CN1010979B (zh) 1990-12-26
EP0246841B1 (en) 1991-07-31
CA1263766A (en) 1989-12-05
EP0246841A3 (en) 1988-11-23
JPH0584629B2 (enExample) 1993-12-02
KR870011460A (ko) 1987-12-23
EP0246841A2 (en) 1987-11-25

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