KR890010575A - 위치검출장치 - Google Patents

위치검출장치 Download PDF

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KR890010575A
KR890010575A KR1019880017061A KR880017061A KR890010575A KR 890010575 A KR890010575 A KR 890010575A KR 1019880017061 A KR1019880017061 A KR 1019880017061A KR 880017061 A KR880017061 A KR 880017061A KR 890010575 A KR890010575 A KR 890010575A
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South Korea
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detecting
phase
pattern
scanning
plate
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KR1019880017061A
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English (en)
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KR920010591B1 (ko
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게이시 구보
마사기 스즈끼
노리오 오꾸다니
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다니이 아끼오
마쓰시다덴기산교 가부시기가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

내용 없음

Description

위치검출장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도~제3도는 본 발명의 일시실시예에 있어서의 위치검출장치의 전체개념구성을 도시한 사시도와 동작 원리를 표시한 설명도.

Claims (9)

  1. 광원과, 상기 광원으로부터의 광을 주사하는 주사장치, 규칙적으로 배열된 슬릿을 가진 코우판과, 규칙적으로 배열된 슬릿을 가진 마스크와, 상기 코우드판과 마스크에 의한 모아레 간섭무늬에 대한 상기 주사광의 주사에 의해 발생한, 광량변화를 검출하는 적어도 1개의 광검출기와, 상기 주사광의 주사위상에 대한 상기 광검출기 출력의 위상변화에 의거해서 상기 코우드판의 위치를 검출하는 위상검출기로 이루어진 위치검출장치.
  2. 광원과, 상기 광원으로부터의 광을 주사하는 주사장치와, 규칙적으로 배열된 슬릿을 가진 코우드 판과, 규칙적으로 배열된 슬릿을 가진 마스크와, 상기 코우드판과 마스크에 의한 모아레 간섭무뉘에 대한 상기 주사광의 주사에 의해 발생한, 광량변화를 검출하는, 적어도 1개의 광검출기와, 상기 주사광의 주사위사에 대한 상기 광검출기 출력의 위상변호에 의거해서 상기 코우드판의 미소위치를 검출하는 위상검출기와 상기 코우드판상의 대략적으로 위치를 표시하는 패턴과, 상기 주사광의 주사에 의해 상기 패턴을 상기 광검출기 변화에 위해 판독하여, 상기 코우드판의 대략적 위치를 검출하는 판독기로 이루어진 위치검출장치.
  3. 제2항에 있어서, 상기 코우드판상의 대략적 위치를 표시하는 패턴이, 쐐기형 슬릿으로 이루어진 위치검출장치.
  4. 제2항에 있어서, 상기 코우드판상의 대략적 위치를 표시하는 패턴이 2진화 부호를 표시하는 슬릿으로 이루어진 위치검출장치.
  5. 소정의 최소 검출폭으로 절대위치를 검출하는 제1의 위치검출수단과, 이 제1의 위치검출수단에 의한 최소검출 폭을 검출범위로 해서 그 범위내의 위치를 검출하는 제2의 위치검출수단과, 상기 제1의 위치검출 수단에 있어서의 최소 검출폭마다 교호로 출력이 반전하는 2차신화를 출력하는 2차 신호출력수단과, 상기 2차신호에 대하여 90℃위상이 다른 2차신호를 출력하는 90℃위상신호출력수단과, 상기 제2의 위치검출수단과 2차신호출력수단과 90℃위상신호출력수단으로부터의 신호에 의해서 제1의 위치검출수단에 의한 검출치를 보정하는 보정수단을 구비한 것을 특징으로 하는 위치검출장치.
  6. 제1항에 있어서, 제1위 위치검출수단은 2진화부호패턴을 사용한 위치검출수단으로 이루어지고, 2차 신호출력수단은 상기 2진화부터패턴의 최하위 패턴으로부터 얻어지는 신호를 출력하도록 구성되어 있는 위치검출장치.
  7. 제2항에 있어서, 90℃위상신호 출력수단은 2진화부호패턴의 최하위 패턴에 대하여 90℃위상을 다르게 해서 형성한 90℃위상패턴으로부터 얻은 신호를 출력하도록 구성되어 있는 위치검출장치.
  8. 규칙적으로 배열된 슬릿을 가진 코우드판과, 상기 코우드판과 상대 이동가능하고 또한 규칙적으로 배열된 슬릿을 가진 마스크에 의해서 형성되는 모아레간섭무늬에 대하여 광주사해서 그 투과광량을 광검출기로 검출하고, 그 검출신호의 위상에 의거해서 슬릿피치내에서의 위치를 검출하는 위치검출장치에 있어서, 상기 코우드판에 위상 검출용의 트리거 발생패턴을 형성한 것을 특징으로 하는 위치검출장치.
  9. 규칙적으로 배열된 슬릿을 가진 코우드판과, 상기 코우드판과 상대이동가능하고 또한 규칙적으로 배열된 슬릿을 가진 마스크에 의해 형성되는 모아레간섭무늬 또는 부척으로부터의 투과 광량을 광검출기로 검출하고, 그 검출신호의 위상에 의거해서 슬릿피치내에서의 위치를 검출하는 위치검출장치에 있어서, 검출신호의 특이점 검출수단과, 위상사이클폭의 검출수단과, 기준점과 특이점의 간격과 위상 사이클폭으로부터 검출신호의 위상을 검출하는 수단을 구비하고 있는 것을 특징으로 하는 위치검출장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880017061A 1987-12-28 1988-12-20 위치검출장치 KR920010591B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-332046 1987-12-28
JP87-332046 1987-12-28
JP62332046A JP2600235B2 (ja) 1987-12-28 1987-12-28 位置検出装置

Publications (2)

Publication Number Publication Date
KR890010575A true KR890010575A (ko) 1989-08-09
KR920010591B1 KR920010591B1 (ko) 1992-12-10

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US (1) US4970387A (ko)
JP (1) JP2600235B2 (ko)
KR (1) KR920010591B1 (ko)

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US5294793A (en) * 1991-08-23 1994-03-15 Rsf-Elektronik Gesellschaft M.B.H. System for measuring lengths or angles with a high-velocity movable scanning unit
KR100264312B1 (ko) * 1995-10-13 2000-08-16 디지래드 개선된 전하 수집능력을 갖는 반도체 방사선 검출기
US5841274A (en) * 1997-01-29 1998-11-24 Mitutoyo Corporation Induced current absolute position transducer using a code-track-type scale and read head
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
FR2780157B1 (fr) * 1998-06-18 2000-07-21 Valeo Electronique Capteur d'angle absolu de la rotation du volant pour vehicule automobile
US6330708B1 (en) * 1998-09-17 2001-12-11 International Business Machines Corporation Method for preparing command files for photomask production
JP2001208503A (ja) * 2000-01-25 2001-08-03 Harmonic Drive Syst Ind Co Ltd リニアアクチュエータの絶対位置検出装置
US7589314B2 (en) * 2004-07-12 2009-09-15 Mitsubishi Denki Kabushiki Kaisha Optical encoder applying substantially parallel light beams and three periodic optical elements
JP5068050B2 (ja) * 2006-09-28 2012-11-07 スタンレー電気株式会社 光学式アブソリュート形ロータリエンコーダ

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DE2938318C2 (de) * 1979-09-21 1988-05-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
GB2076147B (en) * 1980-05-15 1984-07-11 Ferranti Ltd Position encoder
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Publication number Publication date
JPH01172706A (ja) 1989-07-07
KR920010591B1 (ko) 1992-12-10
JP2600235B2 (ja) 1997-04-16
US4970387A (en) 1990-11-13

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