KR890004427A - 칩 실장장치 - Google Patents

칩 실장장치 Download PDF

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Publication number
KR890004427A
KR890004427A KR1019880010689A KR880010689A KR890004427A KR 890004427 A KR890004427 A KR 890004427A KR 1019880010689 A KR1019880010689 A KR 1019880010689A KR 880010689 A KR880010689 A KR 880010689A KR 890004427 A KR890004427 A KR 890004427A
Authority
KR
South Korea
Prior art keywords
chip
pushing
expansion tape
pin
collet
Prior art date
Application number
KR1019880010689A
Other languages
English (en)
Other versions
KR910006969B1 (ko
Inventor
마사노리 니시구찌
Original Assignee
나까하라 쯔네오
스미도모덴기고오교오 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나까하라 쯔네오, 스미도모덴기고오교오 가부시기가이샤 filed Critical 나까하라 쯔네오
Publication of KR890004427A publication Critical patent/KR890004427A/ko
Application granted granted Critical
Publication of KR910006969B1 publication Critical patent/KR910006969B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0417—Feeding with belts or tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H05K13/021—Loading or unloading of containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
    • H01L2221/68322—Auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
    • Y10T156/1983—Poking delaminating means

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)

Abstract

내용 없음.

Description

칩 실장장치
제1도는 본 발명의 전체구성을 도시한 블록도.
제2도는 제1실시예의 작동을 도시한 단면도.
제3도는 박리센서의 작동을 도시한 단면도.

Claims (2)

  1. 팽창테이프에 접착된 칩을 진공흡작하는 콜리트와, 진공흡착된 상기 칩을 상기 팽창테이프의 하부면으로부터 상기 콜리트 방향으로 밀어올리는 핀과, 상기 팽창테이프를 상기 칩의 주변부로부터 하부로 끌어 내리는 하동수단과, 상기 밀어올리는 핀을 밀어올린 상태에서 상기 칩의 주변부로부터의 상기 팽창테이프의 박리 광학적으로 검지하는 박리센서를 갖추고, 상기 박리센서의 검지신호에 의하여 상기 밀어올리는 핀이 하강하도록 제어되고 있는 것을 특징으로 하는 칩 실장장치.
  2. 팽창테이프에 접착된 칩을 진공흡착하는 콜리트와, 진공흡착된 상기 칩을 상기 팽창테이프의 하부면으로부터 상기 콜리트 방향으로 밀어올리는 핀과, 상기 팽창테이프를 상기 칩의 주변부로부터 하부쪽으로 끌어내리는 하동수단과, 상기 밀어올리는 핀을 밀어올린 상태에서 상기 팽창테이프가 상기 밀어올리는 핀에 의하여 찢어진 것을 검지하는 박리센서를 갖추고, 상기 박리센서의 검지신호에 의하여 상기 밀어올리는 핀이 하강하도록 제어되고 있는 것을 특징으로 하는 칩 실장장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880010689A 1987-08-31 1988-08-23 칩 실장장치 KR910006969B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-217522 1987-08-31
JP62217522A JPH088292B2 (ja) 1987-08-31 1987-08-31 チップ実装装置

Publications (2)

Publication Number Publication Date
KR890004427A true KR890004427A (ko) 1989-04-22
KR910006969B1 KR910006969B1 (ko) 1991-09-14

Family

ID=16705562

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880010689A KR910006969B1 (ko) 1987-08-31 1988-08-23 칩 실장장치

Country Status (7)

Country Link
US (1) US4859269A (ko)
EP (1) EP0305964B1 (ko)
JP (1) JPH088292B2 (ko)
KR (1) KR910006969B1 (ko)
AU (1) AU601618B2 (ko)
CA (1) CA1297664C (ko)
DE (1) DE3852591T2 (ko)

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US5217550A (en) * 1990-09-28 1993-06-08 Dai Nippon Printing Co., Ltd Alignment transfer method
JP2802871B2 (ja) * 1993-03-18 1998-09-24 ローム株式会社 半導体チップのピックアップ装置およびこれを用いる半導体チップのピックアップ方法
JPH0837395A (ja) * 1994-07-21 1996-02-06 Matsushita Electric Ind Co Ltd 半導体チップ供給装置および供給方法
DE19515684C2 (de) * 1995-04-28 2003-11-06 Michael Geringer Verfahren zur Vereinzelung von elektrischen Bauelementen
JP3498877B2 (ja) * 1995-12-05 2004-02-23 株式会社東芝 半導体製造装置および半導体装置の製造方法
US6139676A (en) * 1997-08-14 2000-10-31 Microchip Technology Incorporated Apparatus and method for removing semiconductor chips from a diced semiconductor wafer
DE19752582C2 (de) * 1997-11-27 2000-06-21 Inst Mikrotechnik Mainz Gmbh Ablösevorrichtung für Mikrobauteile
US6123800A (en) * 1998-08-04 2000-09-26 Lucent Technologies, Inc. Method and apparatus for handling element on an adhesive film
US6102267A (en) * 1998-12-10 2000-08-15 Lucent Technologies, Inc. Method and apparatus for non-contact pulsating jet cleaving of a semiconductor material
US6204092B1 (en) * 1999-04-13 2001-03-20 Lucent Technologies, Inc. Apparatus and method for transferring semiconductor die to a carrier
JP2002050670A (ja) * 2000-08-04 2002-02-15 Toshiba Corp ピックアップ装置及びピックアップ方法
US6889427B2 (en) * 2002-02-15 2005-05-10 Freescale Semiconductor, Inc. Process for disengaging semiconductor die from an adhesive film
DE10225097A1 (de) * 2002-04-04 2003-10-23 Georg Rudolf Sillner Verfahren zum Verarbeiten von elektrischen Bauelementen, insbesondere von Halbleiterchips, sowie Vorrichtung zum Durchführen des Verfahrens
JP2004111601A (ja) * 2002-09-18 2004-04-08 Tokyo Seimitsu Co Ltd ダイボンダ
DE10258800A1 (de) * 2002-12-16 2004-07-08 Siemens Ag Verfahren und Vorrichtung zum Aufbringen einer Klebstoffschicht auf flächige Bauelemente, Bestückvorrichtung zum Bestücken von flächigen Bauelementen
JP4624813B2 (ja) * 2005-01-21 2011-02-02 ルネサスエレクトロニクス株式会社 半導体装置の製造方法および半導体製造装置
US8137050B2 (en) * 2005-09-29 2012-03-20 Semiconductor Energy Laboratory Co., Ltd. Pickup device and pickup method
JP4693805B2 (ja) * 2007-03-16 2011-06-01 株式会社東芝 半導体装置の製造装置及び製造方法
JP5176186B2 (ja) * 2008-10-03 2013-04-03 ルネサスエレクトロニクス株式会社 半導体チップのピックアップ方法および半導体装置の製造方法
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US9633883B2 (en) 2015-03-20 2017-04-25 Rohinni, LLC Apparatus for transfer of semiconductor devices
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US10141215B2 (en) * 2016-11-03 2018-11-27 Rohinni, LLC Compliant needle for direct transfer of semiconductor devices
US10504767B2 (en) 2016-11-23 2019-12-10 Rohinni, LLC Direct transfer apparatus for a pattern array of semiconductor device die
US10471545B2 (en) 2016-11-23 2019-11-12 Rohinni, LLC Top-side laser for direct transfer of semiconductor devices
US10062588B2 (en) 2017-01-18 2018-08-28 Rohinni, LLC Flexible support substrate for transfer of semiconductor devices
US10410905B1 (en) 2018-05-12 2019-09-10 Rohinni, LLC Method and apparatus for direct transfer of multiple semiconductor devices
JP7284328B2 (ja) * 2018-09-19 2023-05-30 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法
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JP7038640B2 (ja) * 2018-10-26 2022-03-18 信越化学工業株式会社 ペリクルの剥離方法及びペリクルの剥離装置
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Also Published As

Publication number Publication date
DE3852591D1 (de) 1995-02-09
US4859269A (en) 1989-08-22
AU601618B2 (en) 1990-09-13
EP0305964A3 (en) 1991-04-10
EP0305964A2 (en) 1989-03-08
KR910006969B1 (ko) 1991-09-14
AU2165188A (en) 1989-03-02
DE3852591T2 (de) 1995-06-01
CA1297664C (en) 1992-03-24
JPS6459929A (en) 1989-03-07
EP0305964B1 (en) 1994-12-28
JPH088292B2 (ja) 1996-01-29

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