KR880014338A - 반도체 재료의 수분건조장치 - Google Patents

반도체 재료의 수분건조장치 Download PDF

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Publication number
KR880014338A
KR880014338A KR1019880005448A KR880005448A KR880014338A KR 880014338 A KR880014338 A KR 880014338A KR 1019880005448 A KR1019880005448 A KR 1019880005448A KR 880005448 A KR880005448 A KR 880005448A KR 880014338 A KR880014338 A KR 880014338A
Authority
KR
South Korea
Prior art keywords
rotor
substrate
semiconductor material
board
stored
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019880005448A
Other languages
English (en)
Korean (ko)
Inventor
세이 이찌로오 아이고우
Original Assignee
세이 이찌로오 아이고우
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세이 이찌로오 아이고우 filed Critical 세이 이찌로오 아이고우
Publication of KR880014338A publication Critical patent/KR880014338A/ko
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0408—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1019880005448A 1987-05-11 1988-05-11 반도체 재료의 수분건조장치 Ceased KR880014338A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1987069835U JPH0745958Y2 (ja) 1987-05-11 1987-05-11 半導体材料の水切乾燥装置
JP??62-69835 1987-05-11

Publications (1)

Publication Number Publication Date
KR880014338A true KR880014338A (ko) 1988-12-23

Family

ID=13414245

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880005448A Ceased KR880014338A (ko) 1987-05-11 1988-05-11 반도체 재료의 수분건조장치

Country Status (3)

Country Link
US (1) US4848006A (enExample)
JP (1) JPH0745958Y2 (enExample)
KR (1) KR880014338A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069501Y2 (ja) * 1988-09-27 1994-03-09 大日本スクリーン製造株式会社 基板の回転乾燥装置
KR950007111Y1 (ko) * 1992-08-31 1995-08-28 김주용 반도체 웨이퍼 건조장치
ITUD20080143A1 (it) * 2008-06-19 2009-12-20 Colussi Ermes S R L Macchina centrifuga
CN102226641A (zh) * 2011-04-29 2011-10-26 无锡市奥曼特科技有限公司 新型的硅片甩干机内筒结构

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295167A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer
JPS55154736A (en) * 1979-05-23 1980-12-02 Sigma Gijutsu Kogyo Kk Centrifugal drier
JPS6158238A (ja) * 1984-08-29 1986-03-25 Toshiba Corp ウエハ回転洗浄装置
US4777732A (en) * 1986-06-12 1988-10-18 Oki Electric Industry Co., Ltd. Wafer centrifugal drying apparatus

Also Published As

Publication number Publication date
US4848006A (en) 1989-07-18
JPS63178321U (enExample) 1988-11-18
JPH0745958Y2 (ja) 1995-10-18

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Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000