KR870000612A - 광경화성 조성물 - Google Patents

광경화성 조성물 Download PDF

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KR870000612A
KR870000612A KR1019860004528A KR860004528A KR870000612A KR 870000612 A KR870000612 A KR 870000612A KR 1019860004528 A KR1019860004528 A KR 1019860004528A KR 860004528 A KR860004528 A KR 860004528A KR 870000612 A KR870000612 A KR 870000612A
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South Korea
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weight
parts
hydrogen
carbon atoms
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KR1019860004528A
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KR910004845B1 (ko
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야스히꼬 아라끼
시게루 단죠오
하지메 쇼오히
Original Assignee
세끼스이가가꾸고오교가부시끼가이샤
히로다 가오루
세끼스이가 가꾸 고오교 가부시끼가이샤
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Priority claimed from JP60124960A external-priority patent/JPS61282835A/ja
Application filed by 세끼스이가가꾸고오교가부시끼가이샤, 히로다 가오루, 세끼스이가 가꾸 고오교 가부시끼가이샤 filed Critical 세끼스이가가꾸고오교가부시끼가이샤
Publication of KR870000612A publication Critical patent/KR870000612A/ko
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Publication of KR910004845B1 publication Critical patent/KR910004845B1/ko

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/52—Compositions containing diazo compounds as photosensitive substances
    • G03C1/60—Compositions containing diazo compounds as photosensitive substances with macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/12—Using specific substances
    • H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax, thiol
    • H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389—Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y10S430/121—Nitrogen in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y10S430/123—Sulfur in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/155—Nonresinous additive to promote interlayer adhesion in element

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

내용 없음.

Description

광경화성 조성물
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (10)

  1. 다음으로 구성된 광경화성 조성물 (a) 하나이상의 α,β-불포화된 에틸렌 불포화 단량체로부터 유도되는 구조 단위들을 갖는 수지 100중량부 (b) 광중합성 단량체 10-300중량부. (c) 광중합 개시제 0.1-20 중량부, 및(d) 다음 일반식(I) 또는 (II)로 표시되는 화합물 0.01-1중량부
    식중, R1은 상호 오르토 위치에 결합들을 갖는 2가 방향성 탄화수소기이고; R2는 수소, 1-4탄소원자를 갖는 알킬기, 페닐기 또는 C1-C4알킬을 갖는 아릴기이고; R3및 R4는 각각 1-10탄소원자를 갖는 알킬기, 아릴기 또는 아랄킬기이고; X1은 산소, 황 또는 N-R5이고; X2는 산소, 황 또는 NH이고; X3는 질소 또는 CR6이고; X4는 산소, 황 또는 NR6이고; X5는 질소 또는 CR7이고; X6는 질소 또는 CH이고; R5는 수소, 히드록실기, 할로겐 또는 1-4탄소원자를 갖는 알킬기이고; R6는 수소 또는 1-4탄소원자를 갖는 알킬기이고; R7은 수소, NH2, 할로겐 또는 1-4탄소원자를 갖는 알킬기임.
  2. 제1항에 있어서, 수지(a)가 폴리(메타크릴레이트), (메타)아크릴 에스테르 및 불포화 카르복실산의 카르복실함유 공중합체, 스티렌 및 불포화 카르복실산의 카르복실함유 공중합체, 그리고 상기한 카르복실함유 공중합체의 저급 알칸올 에스테르로 부터 선택됨을 특징으로 하는 조성물.
  3. 제1항에 있어서, 광중합성 단량체(b)가 폴리아크릴레이트형 단량체임을 특징으로 하는 조성물.
  4. 제1항에 있어서, 광중합성 단량체(b)의 양이 20-100중량부임을 특징으로 하는 조성물.
  5. 제1항에 있어서, 광중합성 개시제(c)가 티옥산톤 유도체, 방향성 카르보닐 화합물 및 디알킬아미노벤조산 에스테르로부터 선택됨을 특징으로 하는 조성물.
  6. 제1항에 있어서, 광중합 개시제(c)의 양이 1-18중량부임을 특징으로 하는 조성물.
  7. 제1항에 있어서, 화합물(d)가 다음식(Ia) 및 (IIa)로부터 선택됨을 특징으로 하는 조성물.
    식중, X11은 산소, 황 또는 NH이고, X31은 수소 또는 CH이고 X2는 제1항의 정의와 같음.
    식중, R3,R4및 X5는 제1항의 정의와 같음.
  8. 제1항에 있어서, 화합물(d)가 2-(4-티아졸릴)벤즈 이미다졸, 2-(4-티아졸릴)벤즈옥사졸, 2-(4-티아졸릴)벤조티아졸, 4,5-디페닐이미다졸, 4,5-디에틸 이미다졸 또는 4,5-디페닐 트리아졸임을 특징으로 하는 조성물.
  9. 제1항에 있어서, 화합물(d)의 양이 0.015-0.8중량부임을 특징으로 하는 조성물.
  10. 투명한 지지필름과 거기에 도포시킨 제1항의 광경화성 조성물로 구성된 건조 필름 레지스트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019860004528A 1985-06-07 1986-06-07 광경화성 조성물 KR910004845B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP60124960A JPS61282835A (ja) 1985-06-07 1985-06-07 感光性組成物
JP12496185 1985-06-07
JP124,961 1985-06-07
JP124,960 1985-06-07
JP124961 1997-04-28
JP124960 1997-04-28

Publications (2)

Publication Number Publication Date
KR870000612A true KR870000612A (ko) 1987-02-19
KR910004845B1 KR910004845B1 (ko) 1991-07-13

Family

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Application Number Title Priority Date Filing Date
KR1019860004528A KR910004845B1 (ko) 1985-06-07 1986-06-07 광경화성 조성물

Country Status (5)

Country Link
US (1) US4756994A (ko)
EP (1) EP0206030B1 (ko)
KR (1) KR910004845B1 (ko)
CA (1) CA1282272C (ko)
DE (1) DE3683194D1 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5053315A (en) * 1990-07-17 1991-10-01 Eastman Kodak Company Radiation-sensitive composition containing an unsaturated polyester and use thereof in lithographic printing plates
US5536808A (en) * 1994-10-05 1996-07-16 The Regents Of The University Of Michigan Thiazole polymers and method of producing same
US5939239A (en) * 1997-12-01 1999-08-17 Nichigo-Morton Co., Ltd. Photoimageable compositions containing photopolymerizable urethane oligomers and dibenzoate plasticizers
US5952153A (en) * 1997-12-01 1999-09-14 Morton International, Inc. Photoimageable composition having improved flexibility, adhesion and stripping characteristics
JP4308585B2 (ja) * 2003-06-09 2009-08-05 Ａｚエレクトロニックマテリアルズ株式会社 感光性樹脂組成物密着性向上剤及びそれを含有する感光性樹脂組成物
KR20240014607A (ko) 2015-06-04 2024-02-01 카티바, 인크. 금속 표면 상에서 에치 레지스트 패턴의 제조 방법
JP6975463B2 (ja) 2015-08-13 2021-12-01 カティーバ， インコーポレイテッド 金属表面上のエッチレジストパターンの製造方法
US10398034B2 (en) 2016-12-12 2019-08-27 Kateeva, Inc. Methods of etching conductive features, and related devices and systems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1165570A (en) * 1966-12-08 1969-10-01 Agfa Gevaert Nv Photopolymerization of Ethylenically Unsaturated Compounds
US3622334A (en) * 1969-12-31 1971-11-23 Du Pont Photopolymerizable compositions and elements containing heterocyclic nitrogen-containing compounds
US3873316A (en) * 1970-06-11 1975-03-25 Kalle Ag Process for the production of a light-sensitive copying material having a copper-containing support, and copying material so produced
US3769023A (en) * 1971-05-07 1973-10-30 Horizons Inc Light sensitive reproduction and electron beam sensitive material
JPS5948752A (ja) * 1982-09-13 1984-03-21 Hitachi Chem Co Ltd 感光性樹脂組成物
US4629679A (en) * 1985-02-12 1986-12-16 Mitsubishi Rayon Company Ltd. Tetrazole compound-containing photopolymerizable resin composition

Also Published As

Publication number Publication date
EP0206030A3 (en) 1988-01-07
EP0206030B1 (en) 1992-01-02
US4756994A (en) 1988-07-12
KR910004845B1 (ko) 1991-07-13
EP0206030A2 (en) 1986-12-30
CA1282272C (en) 1991-04-02
DE3683194D1 (de) 1992-02-13

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