KR860002941A - 배선회로 기판위에 금속을 용착시키는 방법 - Google Patents

배선회로 기판위에 금속을 용착시키는 방법 Download PDF

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KR860002941A
KR860002941A KR1019850006428A KR850006428A KR860002941A KR 860002941 A KR860002941 A KR 860002941A KR 1019850006428 A KR1019850006428 A KR 1019850006428A KR 850006428 A KR850006428 A KR 850006428A KR 860002941 A KR860002941 A KR 860002941A
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mask
substrate
solution
contacting
substrate surface
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피이 모이샌( 외 1) 마이클
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칼 에이 에저러
콜모겐 테크놀러지스 코오포레이션
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Publication of KR860002941A publication Critical patent/KR860002941A/ko

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
    • H—ELECTRICITY
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1605—Process or apparatus coating on selected surface areas by masking
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1635—Composition of the substrate
    • C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
    • C23C18/1641—Organic substrates, e.g. resin, plastic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
    • C23C18/2073—Multistep pretreatment
    • C23C18/208—Multistep pretreatment with use of metal first
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
    • C23C18/2073—Multistep pretreatment
    • C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28—Sensitising or activating
    • C23C18/285—Sensitising or activating with tin based compound or composition
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28—Sensitising or activating
    • C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C23C18/40—Coating with copper using reducing agents
    • C23C18/405—Formaldehyde
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703—Plating
    • H05K2203/0706—Inactivating or removing catalyst, e.g. on surface of resist
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1415—Applying catalyst after applying plating resist
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    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
    • H05K3/426—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates without metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base

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  • Manufacturing Of Printed Wiring (AREA)
  • Chemically Coating (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Recrystallisation Techniques (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
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  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

내용 없음

Description

배선회로 기판위에 금속을 용착시키는 방법.
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (22)

  1. 기질표면에 부가된 또는 그 내부에 끼워넣은 적어도 하나의 절연도선이 있고, 적어도 기질표면의 일부분이 소수성 마스크로 덮혀있고, 기질내에 적어도 하나의 구멍 및 /또는 블라인드 바이어가 있으며, 도선이 교차되고, 구멍 및 /또는 블라인드 바이어의 벽과, 교차된 도선은 금속용착에 의해서 금속화되는 배선회로기판위에 금속을 용착시키는 방법에 있어서, 상기 벽을 포함하는 기질 표면을, 노출된 표면이 금속용착을 수용하게 하는데 적합한 처리제로 구성하는 촉매성 용액으로 접촉시키고; 상기 벽위의 귀금속 활성제를 촉진시키는 반면에 소수성 마스크로부터 본질적으로 모든 귀금속을 선택적으로 제거하기에 충분한 시간간격동안, 상기 벽과 소수성 마스크를 포함하는 전체표면을 알칼리용액내의 킬레이트제로 구성되는 약 10-14의 pH값을 갖는 촉진용액으로 접촉시키고; 상기 벽의 촉매처리된 표면위에 금속층을 용착시키는 것을 특징으로 하는 배선회로기판위에 금속을 용착시키는 방법.
  2. 제1항에 있어서, 알칼리촉진용액이 기질에 접촉될 때 교반되는 방법.
  3. 제1항에 있어서, 상기 벽을 포함하는 기질표면과 마스크를 촉매와 접촉하기 전에, 세척제/컨디셔너용액으로 접촉시키는 단계를 더 포함하는 방법.
  4. 제1항에 있어서, 상기 킬레이트제를 아미노산, 알칸을 아민, 다관능카르복실레이트로 구성되는 군으로부터 선택하는 방법.
  5. 제4항에 있어서, 상기 킬레이트제는 아미노산으로 구성하는 방법.
  6. 제5항에 있어서, 상기 아미노산을 히드록시에틸렌디아민 트리아세트산 및 그 염, 글리신, 니트릴로 트리아세트산으로 구성되는 군으로부터 선택하는 방법.
  7. 제4항에 있어서, 상기 킬레이트제는 알칸올 아민으로 구성하는 방법.
  8. 제7항에 있어서, 상기 알칸올 아민을 히드록시에틸렌디아민 테트라아세트산 및 그염, 에틸렌디아민 테트라프로판올로 구성되는 군으로부터 선택하는 방법.
  9. 제4항에 있어서, 상기 킬렐이트제는 다관능 카르복실레이트로 구성하는 방법.
  10. 제9항에 있어서, 상기 다관능 카르복실레이트는 시트레이트 또는 타르트레이트로 구성하는 방법.
  11. 제1항에 있어서, 촉매성 용액은 팔성듐, 주석, 염화물의 용액으로 구성하는 방법.
  12. 제1항에 있어서, 귀금속이 제거되어 마스크위에 귀금속의 농도가 약 002mg/cm2이하로 되는 방법.
  13. 제1항에 있어서, 알칼리 촉진용액을 예정된 속도로 교반하는 방법.
  14. 제11항에 있어서, 상기 금속층을 무전해 금속용착에 의해 상기 벽의 촉매처리된 표면위에 용착시키는 방법.
  15. 부성, 소수성 및 절연성 마스크를 기질표면위에 사용하여 표면의 일부분들이 마스크가 덮히지 않고 노출되고, 마스크물질의 표면은 무전해금속용착에 촉매의 영향을 마칠 수 있는 촉매종의 용착에 저항하고 금속용착을 증진시킬 수 있는 처리제로 구성하는 촉매로 마스크와 기질표면의 임의의 마스크가 덮히지 않은 부분을 접촉시키고; 마스크과 기질의 전체표면의 촉진용액으로 접촉시키고; 마스크의 표면으로부터 촉매종을 제거하고; 기질표면을 무전해 금속도금액으로 접촉시켜서 기질표면의 마스크가 덮히지 않은 부분위에 무전해 금속층을 형성하는 단계를 포함하는무전해금속도금에 의해서 절연기질표면위에 인쇄회로를 제조하는 방법에 있어서, 촉진용액으로서 약 10-14의 pH값을 갖는 알칼리용액내의 킬레이트제를 사용하고, 마스크의 표면으로부터 본질적으로 모든 촉매종을 제거하고 기질표면의 마스크가 덮히지 않은 부분위와 구멍벽위에 촉매종을 남기기에 충분한 시간간격동안, 기질표면을 이러한 알칼리 촉진제로 접촉시키는 것을 특징으로 하는 절연기질 표면위에 인쇄회로를 제조하는 방법.
  16. 제15항에 있어서, 하나 또는 그 이상의 구멍을 미리 선택된 지점에서 절연기질내에 제공하고; 마스크적용중에 구멍들을 노출시키고; 구멍벽의 부착력을 증진시키고; 구멍벽을 활성화하여 그 위에 촉매종을 형성하고; 촉진용액을 구멍벽위의 촉매중에 접촉시키고; 무전해금속도금액을 구멍벽에 접촉시켜서 구멍벽위에 무전해 금속층을 형성하고, 기질표면의 정패턴위의 무전해금속층과 함께 도금된 관통구멍 인쇄회로기판을 형성하는 단계를 더 포함하는 방법.
  17. 제15항에 있어서, 절연기질은 수지물질로 구성하고, 구멍은 또한 구멍벽위의 수지를 얼룩지게 하는 구멍뚫기 단계의 의해 제공되고, 구멍벽은 산화용액으로 부착력을 증진하여 구멍벽으로부터 임의의 수지 얼룩을 제저하는 방법.
  18. 제15항에 있어서, 활성화단계에서는 용해된 형태의 주석이온과 귀금속이온으로 구성된 활성제용액을 사용하는 방법.
  19. 제17항에 있어서, 마스크를 에폭시 노볼라크 수지, 실리콘수지, 폴리에틸렌수지, 플루오로카본수지, 폴리우레탄수지, 아크릴수지, 그리고 상기 수지들의 혼합물로 구성되는 군으로부터 선택하는 방법.
  20. 제15항에 있어서, 마스크가 안팎이 일치되지 않은 마스크이고 구멍들은 마스크를 통하여 절연기질 내로 연장되어 마스크와 절연기질에 의해 제공된 구멍벽들이 일직선이 되도록 하는 방법.
  21. 제15항에 있어서, 마스크가 구멍이 제조되는 인쇄회로 패턴위에 비선택적으로 적용되고, 계속하여 구멍이 안팎이 일치하지 않는 절연마스크를 지나서 절연기질내로 형성하는 방법.
  22. 제15항에 있어서, 무전해금속은 동으로 구성하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019850006428A 1984-09-04 1985-09-03 배선회로 기판위에 금속을 용착시키는 방법 KR860002941A (ko)

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US06/646,978 US4668532A (en) 1984-09-04 1984-09-04 System for selective metallization of electronic interconnection boards

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US4668532A (en) 1987-05-26
EP0176736A1 (en) 1986-04-09
IL76158A0 (en) 1985-12-31
AU4623385A (en) 1986-03-13
AU574823B2 (en) 1988-07-14
EP0176736B1 (en) 1988-07-13
FR2569725A1 (fr) 1986-03-07
IN164433B (ko) 1989-03-18
GB2164063B (en) 1987-12-31
JPH0632374B2 (ja) 1994-04-27
DE3563755D1 (en) 1988-08-18
JPS6167988A (ja) 1986-04-08
GB2164063A (en) 1986-03-12
ATE35698T1 (de) 1988-07-15
FR2569725B1 (fr) 1988-09-16
GB8521997D0 (en) 1985-10-09

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