KR840002204B1 - 연마액 제어용 밸브장치 - Google Patents

연마액 제어용 밸브장치 Download PDF

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Publication number
KR840002204B1
KR840002204B1 KR1019810002998A KR810002998A KR840002204B1 KR 840002204 B1 KR840002204 B1 KR 840002204B1 KR 1019810002998 A KR1019810002998 A KR 1019810002998A KR 810002998 A KR810002998 A KR 810002998A KR 840002204 B1 KR840002204 B1 KR 840002204B1
Authority
KR
South Korea
Prior art keywords
polishing
polishing liquid
supplied
liquid
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019810002998A
Other languages
English (en)
Korean (ko)
Other versions
KR830006609A (ko
Inventor
세스나 조셉브이.
Original Assignee
스피드팜 코포레이션
제임스 엔 팔리
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스피드팜 코포레이션, 제임스 엔 팔리 filed Critical 스피드팜 코포레이션
Publication of KR830006609A publication Critical patent/KR830006609A/ko
Application granted granted Critical
Publication of KR840002204B1 publication Critical patent/KR840002204B1/ko
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
    • F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85938—Non-valved flow dividers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85954—Closed circulating system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86863—Rotary valve unit
    • Y10T137/86871—Plug
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87788—With valve or movable deflector at junction
    • Y10T137/8782—Rotary valve or deflector

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Multiple-Way Valves (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1019810002998A 1980-08-28 1981-08-18 연마액 제어용 밸브장치 Expired KR840002204B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US182125 1980-08-28
US182,125 1980-08-28
US06/182,125 US4593716A (en) 1980-08-28 1980-08-28 Control valve assembly for abrasive slurry

Publications (2)

Publication Number Publication Date
KR830006609A KR830006609A (ko) 1983-09-28
KR840002204B1 true KR840002204B1 (ko) 1984-11-28

Family

ID=22667154

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019810002998A Expired KR840002204B1 (ko) 1980-08-28 1981-08-18 연마액 제어용 밸브장치

Country Status (6)

Country Link
US (1) US4593716A (enExample)
JP (1) JPS5775783A (enExample)
KR (1) KR840002204B1 (enExample)
DE (1) DE3125004C2 (enExample)
FR (1) FR2489467A1 (enExample)
GB (1) GB2082479B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5268207A (en) * 1990-12-21 1993-12-07 International Business Machines Corporation Texturing the surface of a recording disk using particle impact
US5301714A (en) * 1993-03-01 1994-04-12 Johnson Keith E Multi-position valve apparatus having a return port
DE4409234A1 (de) * 1994-03-18 1995-09-21 Zimmer Ag Verteiler für viskose Flüssigkeiten mit multiplen radialen Ausgängen
SE503928C2 (sv) * 1994-12-28 1996-09-30 Tetra Laval Holdings & Finance Anordning för fördelning av smörjmedel till olika smörjställen samt en pumpanordning med en sådan fördelningsanordning
GB2320722A (en) * 1996-12-31 1998-07-01 Reckitt & Colmann Prod Ltd Abrasive cleaning using spray dispenser
US6551174B1 (en) 1998-09-25 2003-04-22 Applied Materials, Inc. Supplying slurry to a polishing pad in a chemical mechanical polishing system
US6920897B2 (en) * 2001-03-27 2005-07-26 Blair J. Poirier Potable water circulation system
US6705344B2 (en) * 2001-03-27 2004-03-16 Blair J. Poirier Potable water circulation system
US6652366B2 (en) 2001-05-16 2003-11-25 Speedfam-Ipec Corporation Dynamic slurry distribution control for CMP
US6572445B2 (en) 2001-05-16 2003-06-03 Speedfam-Ipec Multizone slurry delivery for chemical mechanical polishing tool
DE10137577C1 (de) * 2001-07-31 2003-03-06 Infineon Technologies Ag Ventilmittel für eine Slurry-Auslassöffnung einer Vorrichtung für Chemisch-Mechanisches Polieren
US8151885B2 (en) * 2009-04-20 2012-04-10 Halliburton Energy Services Inc. Erosion resistant flow connector
US8800645B2 (en) * 2010-03-12 2014-08-12 Submersible Pumps, Inc. High flow intake system for submersible pumps
JP5505713B2 (ja) * 2010-04-26 2014-05-28 株式会社Ｓｕｍｃｏ 研磨液分配装置及びこれを備えた研磨装置
KR101568790B1 (ko) * 2014-07-03 2015-11-12 주식회사 신승정밀공업사 매니폴드 및 이를 이용하는 타이어 압력 조절장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2839877A (en) * 1954-03-29 1958-06-24 Crane Packing Co Lapping machine
AT238587B (de) * 1963-03-27 1965-02-25 Zentrale Entwicklung Konstrukt Einrichtung, um eine in einem Vorratsbehälter befindliche Polierflüssigkeit einem druckluftbetriebenen Sprühaggregat zuzuführen
US3505766A (en) * 1964-12-09 1970-04-14 Speedfam Corp Lapping machine truing ring
FR2082255A5 (enExample) * 1970-03-09 1971-12-10 Barragan Jacques
US3640308A (en) * 1970-04-15 1972-02-08 Du Pont Apparatus for dividing and recombining flow
US4187882A (en) * 1978-08-18 1980-02-12 Watson John D Diverter-valve apparatus
US4299553A (en) * 1979-12-14 1981-11-10 The Continental Group, Inc. Hot runner manifold flow distributor plug

Also Published As

Publication number Publication date
JPS5775783A (en) 1982-05-12
US4593716A (en) 1986-06-10
FR2489467A1 (fr) 1982-03-05
JPH059230B2 (enExample) 1993-02-04
GB2082479B (en) 1984-03-07
KR830006609A (ko) 1983-09-28
FR2489467B3 (enExample) 1984-03-30
DE3125004A1 (de) 1982-04-08
GB2082479A (en) 1982-03-10
DE3125004C2 (de) 1986-10-16

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