KR840001229A - 금속 증발용 저항 가열 보트 - Google Patents

금속 증발용 저항 가열 보트 Download PDF

Info

Publication number
KR840001229A
KR840001229A KR1019820003778A KR820003778A KR840001229A KR 840001229 A KR840001229 A KR 840001229A KR 1019820003778 A KR1019820003778 A KR 1019820003778A KR 820003778 A KR820003778 A KR 820003778A KR 840001229 A KR840001229 A KR 840001229A
Authority
KR
South Korea
Prior art keywords
boat
crucible
mixtures
heating
heating portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019820003778A
Other languages
English (en)
Korean (ko)
Inventor
더블류·바쉬터 데니스
Original Assignee
조셉 엠· 세사릭
켄네코트 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 조셉 엠· 세사릭, 켄네코트 코포레이션 filed Critical 조셉 엠· 세사릭
Publication of KR840001229A publication Critical patent/KR840001229A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details specially adapted for crucible or pot furnaces
    • F27B14/10—Crucibles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/0003—Linings or walls
    • F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
  • Resistance Heating (AREA)
  • Compositions Of Oxide Ceramics (AREA)
KR1019820003778A 1981-10-30 1982-08-23 금속 증발용 저항 가열 보트 Withdrawn KR840001229A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US316,464 1981-10-30
US06/316,464 US4446357A (en) 1981-10-30 1981-10-30 Resistance-heated boat for metal vaporization

Publications (1)

Publication Number Publication Date
KR840001229A true KR840001229A (ko) 1984-03-28

Family

ID=23229162

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019820003778A Withdrawn KR840001229A (ko) 1981-10-30 1982-08-23 금속 증발용 저항 가열 보트

Country Status (12)

Country Link
US (1) US4446357A (cg-RX-API-DMAC10.html)
JP (1) JPS5877572A (cg-RX-API-DMAC10.html)
KR (1) KR840001229A (cg-RX-API-DMAC10.html)
AU (1) AU8985182A (cg-RX-API-DMAC10.html)
BR (1) BR8205728A (cg-RX-API-DMAC10.html)
CA (1) CA1203373A (cg-RX-API-DMAC10.html)
DE (1) DE3239949C2 (cg-RX-API-DMAC10.html)
FR (1) FR2515691A1 (cg-RX-API-DMAC10.html)
GB (1) GB2109911B (cg-RX-API-DMAC10.html)
IL (1) IL66823A (cg-RX-API-DMAC10.html)
IN (1) IN157415B (cg-RX-API-DMAC10.html)
IT (1) IT1149108B (cg-RX-API-DMAC10.html)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943873A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発材料収容器
JPS60226492A (ja) * 1984-04-23 1985-11-11 Toshiba Corp 化合物半導体単結晶の製造装置
FR2587574B1 (fr) * 1985-09-18 1987-10-30 Commissariat Energie Atomique Resistor pour le traitement de materiaux
GB2192643A (en) * 1986-07-14 1988-01-20 Universal High Technologies Method of coating refractory vessels with boron nitride
US5158750A (en) * 1990-06-06 1992-10-27 Praxair S.T. Technology, Inc. Boron nitride crucible
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
US5035201A (en) * 1990-12-28 1991-07-30 Gte Products Corporation Evaporating boat having parallel inclined cavities
US5495550A (en) * 1994-09-28 1996-02-27 Advanced Ceramics Corporation Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating
US6120286A (en) * 1996-12-05 2000-09-19 Sintec Keramik Gmbh & Co. Kg Vaporizer boat for metal vaporizing
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US6229956B1 (en) * 2000-03-22 2001-05-08 Advanced Ceramics Corporation Flash evaporator vessel
US20020011205A1 (en) * 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US7517551B2 (en) * 2000-05-12 2009-04-14 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light-emitting device
CN1332061C (zh) * 2000-12-14 2007-08-15 通用电气公司 闪蒸器皿
FR2836601A1 (fr) * 2002-02-22 2003-08-29 Thales Sa Antenne monopolaire ou dipolaire a large bande
SG113448A1 (en) * 2002-02-25 2005-08-29 Semiconductor Energy Lab Fabrication system and a fabrication method of a light emitting device
EP1369499A3 (en) * 2002-04-15 2004-10-20 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US20030221620A1 (en) * 2002-06-03 2003-12-04 Semiconductor Energy Laboratory Co., Ltd. Vapor deposition device
US20040123804A1 (en) 2002-09-20 2004-07-01 Semiconductor Energy Laboratory Co., Ltd. Fabrication system and manufacturing method of light emitting device
KR100489304B1 (ko) * 2002-12-23 2005-05-17 재단법인 포항산업과학연구원 저항가열 보트 및 그 제조방법
DE10316228B3 (de) * 2003-04-09 2004-12-16 Dr. Eberl Mbe-Komponenten Gmbh Effusionszelle mit verbesserter Temperaturkontrolle des Tiegels
JP4545504B2 (ja) * 2004-07-15 2010-09-15 株式会社半導体エネルギー研究所 膜形成方法、発光装置の作製方法
DE102005020945B4 (de) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung
DE102005020946B4 (de) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Verfahren und Verdampferschiffchen zum Beschichten von Substraten mit Kupfer oder Silber
DE102005030862B4 (de) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper
US7494616B2 (en) 2005-11-04 2009-02-24 Momentive Performance Materials Inc. Container for evaporation of metal and method to manufacture thereof
DE102007035856B8 (de) * 2007-07-31 2009-04-16 Sintec Keramik Gmbh Widerstandsheizer und Verfahren zum Herstellen desselben
US20120006809A1 (en) * 2010-06-23 2012-01-12 Colorado State University Research Foundation Sublimation crucible with embedded heater element
US10184168B2 (en) * 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen
DE102021115602A1 (de) * 2021-06-16 2022-12-22 Kennametal Inc. Verdampferschiffchen

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1059598A (fr) * 1952-07-09 1954-03-25 Westinghouse Freins & Signaux Perfectionnements apportés à la fabrication des redresseurs secs
US3063865A (en) * 1957-06-03 1962-11-13 Nat Steel Corp Process of treating a boron nitride crucible with molten aluminum
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
US3029777A (en) * 1959-01-30 1962-04-17 Nat Res Corp Vapor deposition coating apparatus
US3020177A (en) * 1959-05-13 1962-02-06 Continental Can Co Art of vaporizing materials
US3281517A (en) * 1963-11-19 1966-10-25 Melpar Inc Vacuum furnace
US3344505A (en) * 1964-09-22 1967-10-03 Westinghouse Electric Corp Method of bonding a boron nitride body to a refractory metal
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source
US3515852A (en) * 1967-08-10 1970-06-02 Sylvania Electric Prod Metal-evaporating source
DE1771968A1 (de) * 1967-08-10 1972-01-27 Sylvania Electric Prod Verdampfungsquelle fuer den Niederschlag von Metallen aus dem Vakuum
CH491208A (de) * 1968-05-20 1970-05-31 Hauser Johann Verdampfervorrichtung
US3636300A (en) * 1969-01-30 1972-01-18 Phillips Petroleum Co Method for the production of high-temperature gases
US3636303A (en) * 1971-03-10 1972-01-18 Gte Sylvania Inc Apparatus for metal vaporization comprising a reduced cross sectio heater and a refractory vessel
US3636305A (en) * 1971-03-10 1972-01-18 Gte Sylvania Inc Apparatus for metal vaporization comprising a heater and a refractory vessel
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization

Also Published As

Publication number Publication date
IL66823A0 (en) 1982-12-31
FR2515691B1 (cg-RX-API-DMAC10.html) 1985-05-24
FR2515691A1 (fr) 1983-05-06
BR8205728A (pt) 1983-09-06
AU8985182A (en) 1983-05-05
US4446357A (en) 1984-05-01
CA1203373A (en) 1986-04-22
DE3239949A1 (de) 1983-05-11
JPS5877572A (ja) 1983-05-10
DE3239949C2 (de) 1985-05-15
IN157415B (cg-RX-API-DMAC10.html) 1986-03-22
IL66823A (en) 1986-01-31
GB2109911A (en) 1983-06-08
IT1149108B (it) 1986-12-03
GB2109911B (en) 1985-04-03
IT8249292A0 (it) 1982-10-18

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19820823

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination