KR20260020094A - 기판수납용기 - Google Patents
기판수납용기Info
- Publication number
- KR20260020094A KR20260020094A KR1020257039870A KR20257039870A KR20260020094A KR 20260020094 A KR20260020094 A KR 20260020094A KR 1020257039870 A KR1020257039870 A KR 1020257039870A KR 20257039870 A KR20257039870 A KR 20257039870A KR 20260020094 A KR20260020094 A KR 20260020094A
- Authority
- KR
- South Korea
- Prior art keywords
- lid
- substrate support
- container body
- substrate
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/021559 WO2024252672A1 (ja) | 2023-06-09 | 2023-06-09 | 基板収納容器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20260020094A true KR20260020094A (ko) | 2026-02-10 |
Family
ID=93795858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257039870A Pending KR20260020094A (ko) | 2023-06-09 | 2023-06-09 | 기판수납용기 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024252672A1 (https=) |
| KR (1) | KR20260020094A (https=) |
| CN (1) | CN121100400A (https=) |
| TW (1) | TW202448781A (https=) |
| WO (1) | WO2024252672A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062272Y2 (ja) * | 1988-02-25 | 1994-01-19 | 信越ポリマー株式会社 | ウェーハ容器の上部緩衝板 |
| JP3938293B2 (ja) * | 2001-05-30 | 2007-06-27 | 信越ポリマー株式会社 | 精密基板収納容器及びその押さえ部材 |
| JP5072067B2 (ja) * | 2006-11-27 | 2012-11-14 | 信越ポリマー株式会社 | 基板収納容器 |
| WO2018185894A1 (ja) * | 2017-04-05 | 2018-10-11 | ミライアル株式会社 | 基板収納容器 |
-
2023
- 2023-06-09 JP JP2025525915A patent/JPWO2024252672A1/ja active Pending
- 2023-06-09 KR KR1020257039870A patent/KR20260020094A/ko active Pending
- 2023-06-09 WO PCT/JP2023/021559 patent/WO2024252672A1/ja not_active Ceased
- 2023-06-09 CN CN202380098079.3A patent/CN121100400A/zh active Pending
-
2024
- 2024-06-07 TW TW113121297A patent/TW202448781A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2024252672A1 (https=) | 2024-12-12 |
| TW202448781A (zh) | 2024-12-16 |
| CN121100400A (zh) | 2025-12-09 |
| WO2024252672A1 (ja) | 2024-12-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102017118B (zh) | 保持器及包括保持器的基板收纳容器 | |
| CN101855716B (zh) | 保持器以及基板收纳容器 | |
| JP6177248B2 (ja) | 基板収納容器 | |
| US12080577B2 (en) | Substrate storage container | |
| JP6166275B2 (ja) | 基板収納容器 | |
| TWI907688B (zh) | 基板收納容器 | |
| TW201838042A (zh) | 基板收納容器 | |
| KR102098722B1 (ko) | 기판수납용기 | |
| KR20260020094A (ko) | 기판수납용기 | |
| JP4965472B2 (ja) | 処理治具用の収納容器 | |
| KR20260018824A (ko) | 기판수납용기 | |
| TWI431716B (zh) | A storage box for handling jigs | |
| US20220344186A1 (en) | Substrate storage container | |
| KR102930874B1 (ko) | 기판수납용기, 그 제조방법 및 뚜껑체측 기판지지부 | |
| JP2015053329A (ja) | 基板収納容器 | |
| WO2014057573A1 (ja) | 蓋体側基板支持部の汚染を抑制する基板収納容器 | |
| TW202522658A (zh) | 基板收納容器 | |
| WO2026083709A1 (ja) | 基板収納容器 | |
| JP4965380B2 (ja) | 処理治具用の収納ケース | |
| KR20260018811A (ko) | 기판수납용기 | |
| JP2016058629A (ja) | 基板収納容器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| Q12 | Application published |
Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13 | Application amended |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P13-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |