CN121100400A - 基板收纳容器 - Google Patents

基板收纳容器

Info

Publication number
CN121100400A
CN121100400A CN202380098079.3A CN202380098079A CN121100400A CN 121100400 A CN121100400 A CN 121100400A CN 202380098079 A CN202380098079 A CN 202380098079A CN 121100400 A CN121100400 A CN 121100400A
Authority
CN
China
Prior art keywords
cover
substrate support
container body
substrate
guide surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380098079.3A
Other languages
English (en)
Chinese (zh)
Inventor
久保田幸二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Publication of CN121100400A publication Critical patent/CN121100400A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN202380098079.3A 2023-06-09 2023-06-09 基板收纳容器 Pending CN121100400A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/021559 WO2024252672A1 (ja) 2023-06-09 2023-06-09 基板収納容器

Publications (1)

Publication Number Publication Date
CN121100400A true CN121100400A (zh) 2025-12-09

Family

ID=93795858

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380098079.3A Pending CN121100400A (zh) 2023-06-09 2023-06-09 基板收纳容器

Country Status (5)

Country Link
JP (1) JPWO2024252672A1 (https=)
KR (1) KR20260020094A (https=)
CN (1) CN121100400A (https=)
TW (1) TW202448781A (https=)
WO (1) WO2024252672A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062272Y2 (ja) * 1988-02-25 1994-01-19 信越ポリマー株式会社 ウェーハ容器の上部緩衝板
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
JP5072067B2 (ja) * 2006-11-27 2012-11-14 信越ポリマー株式会社 基板収納容器
WO2018185894A1 (ja) * 2017-04-05 2018-10-11 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
JPWO2024252672A1 (https=) 2024-12-12
TW202448781A (zh) 2024-12-16
KR20260020094A (ko) 2026-02-10
WO2024252672A1 (ja) 2024-12-12

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Legal Events

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