KR20250127260A - 반도체 제조 장치용의 튜브 - Google Patents

반도체 제조 장치용의 튜브

Info

Publication number
KR20250127260A
KR20250127260A KR1020257018333A KR20257018333A KR20250127260A KR 20250127260 A KR20250127260 A KR 20250127260A KR 1020257018333 A KR1020257018333 A KR 1020257018333A KR 20257018333 A KR20257018333 A KR 20257018333A KR 20250127260 A KR20250127260 A KR 20250127260A
Authority
KR
South Korea
Prior art keywords
fluorinated polymer
tube
semiconductor manufacturing
polymerization
manufacturing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257018333A
Other languages
English (en)
Korean (ko)
Inventor
유토 나카가와
신지 와다
사다오 가네토쿠
류타 야나가와
Original Assignee
에이지씨 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이지씨 가부시키가이샤 filed Critical 에이지씨 가부시키가이샤
Publication of KR20250127260A publication Critical patent/KR20250127260A/ko
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/06—Hoses, i.e. flexible pipes made of rubber or flexible plastics with homogeneous wall
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F14/18—Monomers containing fluorine
    • C08F14/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C08F214/265—Tetrafluoroethene with non-fluorinated comonomers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L9/00—Rigid pipes
    • F16L9/12—Rigid pipes of plastics with or without reinforcement

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
KR1020257018333A 2022-12-28 2023-12-27 반도체 제조 장치용의 튜브 Pending KR20250127260A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-212129 2022-12-28
JP2022212129 2022-12-28
PCT/JP2023/046908 WO2024143464A1 (ja) 2022-12-28 2023-12-27 半導体製造装置用のチューブ

Publications (1)

Publication Number Publication Date
KR20250127260A true KR20250127260A (ko) 2025-08-26

Family

ID=91717750

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257018333A Pending KR20250127260A (ko) 2022-12-28 2023-12-27 반도체 제조 장치용의 튜브

Country Status (5)

Country Link
US (1) US20250257820A1 (https=)
JP (1) JPWO2024143464A1 (https=)
KR (1) KR20250127260A (https=)
CN (1) CN120418573A (https=)
WO (1) WO2024143464A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048681A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 固体組成物、固体組成物の製造方法及び成形体
WO2026048678A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 共重合体の製造方法、成形体の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019003265A1 (ja) 2017-06-26 2019-01-03 三井・デュポンフロロケミカル株式会社 フッ素樹脂成形体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3424270B2 (ja) * 1993-07-30 2003-07-07 旭硝子株式会社 エチレン／テトラフルオロエチレン系共重合体
US6645590B1 (en) * 1998-06-28 2003-11-11 E. I. Du Pont De Nemours And Company Articles of functional fluoropolymer
JP2005178297A (ja) * 2003-12-22 2005-07-07 Daikin Ind Ltd 含フッ素成形体及び半導体製造装置
WO2014112592A1 (ja) * 2013-01-18 2014-07-24 旭硝子株式会社 エチレン－テトラフルオロエチレン共重合体乾燥物、ペレットおよび成形物の製造方法
JPWO2016006644A1 (ja) * 2014-07-09 2017-04-27 旭硝子株式会社 含フッ素共重合体および積層体
CN104151754B (zh) * 2014-08-15 2016-05-25 上海三爱富新材料股份有限公司 高流动性乙烯-四氟乙烯共聚物组合物及其制备方法
CN105082495B (zh) * 2015-07-07 2019-07-05 上海交通大学 一种氟树脂复合物的制造方法，氟树脂复合物及其制品成形
CN108350123B (zh) * 2015-11-13 2020-12-08 Ａｇｃ株式会社 共聚物以及含有该共聚物的组合物
WO2017209133A1 (ja) * 2016-05-31 2017-12-07 旭硝子株式会社 フッ素樹脂の製造方法
JP6974784B2 (ja) * 2018-03-01 2021-12-01 ダイキン工業株式会社 フルオロポリマーの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019003265A1 (ja) 2017-06-26 2019-01-03 三井・デュポンフロロケミカル株式会社 フッ素樹脂成形体

Also Published As

Publication number Publication date
WO2024143464A1 (ja) 2024-07-04
JPWO2024143464A1 (https=) 2024-07-04
CN120418573A (zh) 2025-08-01
US20250257820A1 (en) 2025-08-14

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)