KR20250002154A - 고온 접합로 - Google Patents

고온 접합로 Download PDF

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Publication number
KR20250002154A
KR20250002154A KR1020247031385A KR20247031385A KR20250002154A KR 20250002154 A KR20250002154 A KR 20250002154A KR 1020247031385 A KR1020247031385 A KR 1020247031385A KR 20247031385 A KR20247031385 A KR 20247031385A KR 20250002154 A KR20250002154 A KR 20250002154A
Authority
KR
South Korea
Prior art keywords
press plate
press
workpiece
heating device
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247031385A
Other languages
English (en)
Korean (ko)
Inventor
우도 브로이슈
요르그 윈하우어
알렉산더 테르위
피터 슈레히트
위르겐 나우만
스테판 아이히
폴 야넥
펠릭스 겜세
Original Assignee
피브이에이 인더스트리얼 배큐엄 시스템 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 피브이에이 인더스트리얼 배큐엄 시스템 게엠베하 filed Critical 피브이에이 인더스트리얼 배큐엄 시스템 게엠베하
Publication of KR20250002154A publication Critical patent/KR20250002154A/ko
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/26—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/24—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools characterised by the means for heating the tool
    • B29C65/26—Hot fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/24—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools characterised by the means for heating the tool
    • B29C65/30—Electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/02—Dies; Inserts therefor; Mounting thereof; Moulds
    • B30B15/026—Mounting of dies, platens or press rams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams
    • B30B15/062—Press plates
    • B30B15/064—Press plates with heating or cooling means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Press Drives And Press Lines (AREA)
KR1020247031385A 2022-03-29 2023-03-28 고온 접합로 Pending KR20250002154A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022107462.5 2022-03-29
DE102022107462.5A DE102022107462A1 (de) 2022-03-29 2022-03-29 Hochtemperatur-Fügeofen
PCT/DE2023/100238 WO2023186217A1 (de) 2022-03-29 2023-03-28 Hochtemperatur-fügeofen

Publications (1)

Publication Number Publication Date
KR20250002154A true KR20250002154A (ko) 2025-01-07

Family

ID=85979688

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247031385A Pending KR20250002154A (ko) 2022-03-29 2023-03-28 고온 접합로

Country Status (7)

Country Link
US (1) US20260042166A1 (cg-RX-API-DMAC7.html)
EP (1) EP4499341A1 (cg-RX-API-DMAC7.html)
JP (1) JP2025511165A (cg-RX-API-DMAC7.html)
KR (1) KR20250002154A (cg-RX-API-DMAC7.html)
CN (1) CN119212819A (cg-RX-API-DMAC7.html)
DE (2) DE102022107462A1 (cg-RX-API-DMAC7.html)
WO (1) WO2023186217A1 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117600638A (zh) * 2023-11-21 2024-02-27 浙江晨华科技有限公司 一种扩散焊烧结系统
CN117564430B (zh) * 2024-01-15 2024-04-02 中国核动力研究设计院 曲面工件扩散焊接的加压组件、设备及焊接方法
DE102024111649B3 (de) * 2024-04-25 2025-09-25 SMT Maschinen- und Vertriebs GmbH & Co Kommanditgesellschaft Zylinderplatte einer Vorrichtung zum Verbinden eines Bauelements mit einem Substrat
CN119387795B (zh) * 2024-11-08 2025-05-27 哈尔滨工业大学 一种基于恒流电场作用下实现锆及其合金低温扩散连接的方法
CN120572201B (zh) * 2025-07-29 2025-10-17 浙江金桥铜业科技有限公司 一种软铜箔的自动化焊接设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3754499A (en) 1971-09-27 1973-08-28 North American Rockwell High temperature platens
JPS55128385A (en) * 1979-03-27 1980-10-04 Mitsubishi Heavy Ind Ltd Split pressure system large member diffusion welding method and apparatus thereof
US4649249A (en) * 1985-09-13 1987-03-10 Rockwell International Corporation Induction heating platen for hot metal working
DE102004027545A1 (de) 2004-06-04 2005-12-29 Meier Vakuumtechnik Gmbh Vorrichtung für das heiße Laminieren und anschließende Abkühlen von Bauteilen
US20060273450A1 (en) 2005-06-02 2006-12-07 Intel Corporation Solid-diffusion, die-to-heat spreader bonding methods, articles achieved thereby, and apparatus used therefor
US7948034B2 (en) 2006-06-22 2011-05-24 Suss Microtec Lithography, Gmbh Apparatus and method for semiconductor bonding
DE102006058493B4 (de) * 2006-12-12 2012-03-22 Erich Thallner Verfahren und Vorrichtung zum Bonden von Wafern
EP2106892A1 (de) * 2008-04-04 2009-10-07 komax Holding AG Heizplatte für Werkstücke
DE102010031421B4 (de) 2010-07-15 2013-04-18 Ruhlamat Gmbh Laminiervorrichtung und ein Verfahren zum Laminieren mehrlagiger Dokumente
JP5593299B2 (ja) 2011-11-25 2014-09-17 東京エレクトロン株式会社 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体
JP6353374B2 (ja) 2015-01-16 2018-07-04 東京エレクトロン株式会社 接合装置、接合システムおよび接合方法
CN113458578A (zh) 2020-03-30 2021-10-01 超众科技股份有限公司 接合装置
CN113458580A (zh) 2020-03-30 2021-10-01 超众科技股份有限公司 接合装置

Also Published As

Publication number Publication date
WO2023186217A1 (de) 2023-10-05
US20260042166A1 (en) 2026-02-12
DE112023001625A5 (de) 2025-03-27
DE102022107462A1 (de) 2023-10-05
EP4499341A1 (de) 2025-02-05
CN119212819A (zh) 2024-12-27
JP2025511165A (ja) 2025-04-15

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20240920

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application