CN119212819A - 高温接合炉 - Google Patents

高温接合炉 Download PDF

Info

Publication number
CN119212819A
CN119212819A CN202380031824.2A CN202380031824A CN119212819A CN 119212819 A CN119212819 A CN 119212819A CN 202380031824 A CN202380031824 A CN 202380031824A CN 119212819 A CN119212819 A CN 119212819A
Authority
CN
China
Prior art keywords
pressing
pressing plate
workpiece
joining
heating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380031824.2A
Other languages
English (en)
Chinese (zh)
Inventor
乌多·布罗伊奇
约尔格·温豪尔
亚历山大·特威
彼得·施莱赫特
尤尔根·瑙曼
斯特凡·艾奇
保罗·贾内克
菲利克斯·简姆斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pva Industrial Vacuum System Co ltd
Original Assignee
Pva Industrial Vacuum System Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pva Industrial Vacuum System Co ltd filed Critical Pva Industrial Vacuum System Co ltd
Publication of CN119212819A publication Critical patent/CN119212819A/zh
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023Thermo-compression bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/26Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/24Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools characterised by the means for heating the tool
    • B29C65/26Hot fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/24Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools characterised by the means for heating the tool
    • B29C65/30Electrical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/02Dies; Inserts therefor; Mounting thereof; Moulds
    • B30B15/026Mounting of dies, platens or press rams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06Platens or press rams
    • B30B15/062Press plates
    • B30B15/064Press plates with heating or cooling means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Press Drives And Press Lines (AREA)
CN202380031824.2A 2022-03-29 2023-03-28 高温接合炉 Pending CN119212819A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022107462.5 2022-03-29
DE102022107462.5A DE102022107462A1 (de) 2022-03-29 2022-03-29 Hochtemperatur-Fügeofen
PCT/DE2023/100238 WO2023186217A1 (de) 2022-03-29 2023-03-28 Hochtemperatur-fügeofen

Publications (1)

Publication Number Publication Date
CN119212819A true CN119212819A (zh) 2024-12-27

Family

ID=85979688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380031824.2A Pending CN119212819A (zh) 2022-03-29 2023-03-28 高温接合炉

Country Status (7)

Country Link
US (1) US20260042166A1 (cg-RX-API-DMAC7.html)
EP (1) EP4499341A1 (cg-RX-API-DMAC7.html)
JP (1) JP2025511165A (cg-RX-API-DMAC7.html)
KR (1) KR20250002154A (cg-RX-API-DMAC7.html)
CN (1) CN119212819A (cg-RX-API-DMAC7.html)
DE (2) DE102022107462A1 (cg-RX-API-DMAC7.html)
WO (1) WO2023186217A1 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117600638A (zh) * 2023-11-21 2024-02-27 浙江晨华科技有限公司 一种扩散焊烧结系统
CN117564430B (zh) * 2024-01-15 2024-04-02 中国核动力研究设计院 曲面工件扩散焊接的加压组件、设备及焊接方法
DE102024111649B3 (de) * 2024-04-25 2025-09-25 SMT Maschinen- und Vertriebs GmbH & Co Kommanditgesellschaft Zylinderplatte einer Vorrichtung zum Verbinden eines Bauelements mit einem Substrat
CN119387795B (zh) * 2024-11-08 2025-05-27 哈尔滨工业大学 一种基于恒流电场作用下实现锆及其合金低温扩散连接的方法
CN120572201B (zh) * 2025-07-29 2025-10-17 浙江金桥铜业科技有限公司 一种软铜箔的自动化焊接设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3754499A (en) 1971-09-27 1973-08-28 North American Rockwell High temperature platens
JPS55128385A (en) * 1979-03-27 1980-10-04 Mitsubishi Heavy Ind Ltd Split pressure system large member diffusion welding method and apparatus thereof
US4649249A (en) * 1985-09-13 1987-03-10 Rockwell International Corporation Induction heating platen for hot metal working
DE102004027545A1 (de) 2004-06-04 2005-12-29 Meier Vakuumtechnik Gmbh Vorrichtung für das heiße Laminieren und anschließende Abkühlen von Bauteilen
US20060273450A1 (en) 2005-06-02 2006-12-07 Intel Corporation Solid-diffusion, die-to-heat spreader bonding methods, articles achieved thereby, and apparatus used therefor
US7948034B2 (en) 2006-06-22 2011-05-24 Suss Microtec Lithography, Gmbh Apparatus and method for semiconductor bonding
DE102006058493B4 (de) * 2006-12-12 2012-03-22 Erich Thallner Verfahren und Vorrichtung zum Bonden von Wafern
EP2106892A1 (de) * 2008-04-04 2009-10-07 komax Holding AG Heizplatte für Werkstücke
DE102010031421B4 (de) 2010-07-15 2013-04-18 Ruhlamat Gmbh Laminiervorrichtung und ein Verfahren zum Laminieren mehrlagiger Dokumente
JP5593299B2 (ja) 2011-11-25 2014-09-17 東京エレクトロン株式会社 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体
JP6353374B2 (ja) 2015-01-16 2018-07-04 東京エレクトロン株式会社 接合装置、接合システムおよび接合方法
CN113458578A (zh) 2020-03-30 2021-10-01 超众科技股份有限公司 接合装置
CN113458580A (zh) 2020-03-30 2021-10-01 超众科技股份有限公司 接合装置

Also Published As

Publication number Publication date
KR20250002154A (ko) 2025-01-07
WO2023186217A1 (de) 2023-10-05
US20260042166A1 (en) 2026-02-12
DE112023001625A5 (de) 2025-03-27
DE102022107462A1 (de) 2023-10-05
EP4499341A1 (de) 2025-02-05
JP2025511165A (ja) 2025-04-15

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