KR20240151163A - 기억 장치 - Google Patents
기억 장치 Download PDFInfo
- Publication number
- KR20240151163A KR20240151163A KR1020247025984A KR20247025984A KR20240151163A KR 20240151163 A KR20240151163 A KR 20240151163A KR 1020247025984 A KR1020247025984 A KR 1020247025984A KR 20247025984 A KR20247025984 A KR 20247025984A KR 20240151163 A KR20240151163 A KR 20240151163A
- Authority
- KR
- South Korea
- Prior art keywords
- conductor
- insulator
- transistor
- oxide
- addition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H01L23/5286—
-
- H01L23/535—
-
- H01L27/0688—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/70—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the floating gate being an electrode shared by two or more components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B80/00—Assemblies of multiple devices comprising at least one memory device covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/68—Capacitors having no potential barriers
- H10D1/692—Electrodes
- H10D1/711—Electrodes having non-planar surfaces, e.g. formed by texturisation
- H10D1/716—Electrodes having non-planar surfaces, e.g. formed by texturisation having vertical extensions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
- H10W20/427—Power or ground buses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
Landscapes
- Semiconductor Memories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2022-023698 | 2022-02-18 | ||
| JP2022023698 | 2022-02-18 | ||
| PCT/IB2023/051025 WO2023156875A1 (ja) | 2022-02-18 | 2023-02-06 | 記憶装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20240151163A true KR20240151163A (ko) | 2024-10-17 |
Family
ID=87577698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020247025984A Pending KR20240151163A (ko) | 2022-02-18 | 2023-02-06 | 기억 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250151294A1 (https=) |
| JP (1) | JPWO2023156875A1 (https=) |
| KR (1) | KR20240151163A (https=) |
| CN (1) | CN118696613A (https=) |
| WO (1) | WO2023156875A1 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011151383A (ja) | 2009-12-25 | 2011-08-04 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JP2012257187A (ja) | 2010-08-06 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 半導体集積回路 |
| WO2021053473A1 (ja) | 2019-09-20 | 2021-03-25 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012033828A (ja) * | 2010-08-02 | 2012-02-16 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| CN103022012B (zh) * | 2011-09-21 | 2017-03-01 | 株式会社半导体能源研究所 | 半导体存储装置 |
| JP6607681B2 (ja) * | 2014-03-07 | 2019-11-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2018201011A (ja) * | 2017-05-26 | 2018-12-20 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
-
2023
- 2023-02-06 WO PCT/IB2023/051025 patent/WO2023156875A1/ja not_active Ceased
- 2023-02-06 KR KR1020247025984A patent/KR20240151163A/ko active Pending
- 2023-02-06 US US18/834,280 patent/US20250151294A1/en active Pending
- 2023-02-06 JP JP2024500692A patent/JPWO2023156875A1/ja active Pending
- 2023-02-06 CN CN202380021630.4A patent/CN118696613A/zh active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011151383A (ja) | 2009-12-25 | 2011-08-04 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JP2012257187A (ja) | 2010-08-06 | 2012-12-27 | Semiconductor Energy Lab Co Ltd | 半導体集積回路 |
| WO2021053473A1 (ja) | 2019-09-20 | 2021-03-25 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Non-Patent Citations (1)
| Title |
|---|
| M.Oota et al, "3D-Stacked CAAC-In-Ga-Zn Oxide FETs with Gate Length of 72nm", IEDM Tech. Dig., 2019, pp.50-53 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20250151294A1 (en) | 2025-05-08 |
| CN118696613A (zh) | 2024-09-24 |
| WO2023156875A1 (ja) | 2023-08-24 |
| JPWO2023156875A1 (https=) | 2023-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102926648B1 (ko) | 반도체 장치 및 반도체 장치의 제작 방법 | |
| JP7568878B2 (ja) | 半導体装置 | |
| KR20240052666A (ko) | 반도체 장치 | |
| KR20250116072A (ko) | 반도체 장치 | |
| US20260101500A1 (en) | Storage device | |
| KR20250060217A (ko) | 기억 장치 | |
| KR20240157035A (ko) | 기억 장치 | |
| KR20220050134A (ko) | 메모리 셀 및 기억 장치 | |
| US11830951B2 (en) | Semiconductor device including transistor and capacitor | |
| KR20230054848A (ko) | 반도체 장치 | |
| KR20250053085A (ko) | 기억 장치 | |
| KR20250024915A (ko) | 반도체 장치 및 기억 장치 | |
| KR102744478B1 (ko) | 반도체 장치 및 반도체 장치의 제작 방법 | |
| KR20240151163A (ko) | 기억 장치 | |
| JP7591496B2 (ja) | 半導体装置 | |
| US20250008721A1 (en) | Semiconductor device and electronic device | |
| JP7756646B2 (ja) | 半導体装置の作製方法 | |
| KR20250099327A (ko) | 반도체 장치, 반도체 장치의 제작 방법, 및 전자 기기 | |
| WO2024100489A1 (ja) | 半導体装置、半導体装置の作製方法、及び電子機器 | |
| KR20240146020A (ko) | 기억 장치 | |
| KR20250139309A (ko) | 반도체 장치 및 기억 장치 | |
| KR20250071946A (ko) | 기억 장치 | |
| KR20240151177A (ko) | 기억 장치 | |
| KR20250090280A (ko) | 트랜지스터 및 기억 장치 | |
| KR20250109673A (ko) | 반도체 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
|
| D18 | Deferred examination requested |
Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D18-EXM-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| D18-X000 | Deferred examination requested |
St.27 status event code: A-1-2-D10-D18-exm-X000 |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |