KR20240028289A - 도포 장치 - Google Patents
도포 장치 Download PDFInfo
- Publication number
- KR20240028289A KR20240028289A KR1020230086314A KR20230086314A KR20240028289A KR 20240028289 A KR20240028289 A KR 20240028289A KR 1020230086314 A KR1020230086314 A KR 1020230086314A KR 20230086314 A KR20230086314 A KR 20230086314A KR 20240028289 A KR20240028289 A KR 20240028289A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- holding
- stage
- holding member
- width direction
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 39
- 238000000576 coating method Methods 0.000 title claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 205
- 230000007246 mechanism Effects 0.000 claims abstract description 92
- 239000012530 fluid Substances 0.000 claims abstract description 6
- 238000007667 floating Methods 0.000 claims description 54
- 239000007788 liquid Substances 0.000 claims description 31
- 238000012423 maintenance Methods 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 abstract description 21
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000007921 spray Substances 0.000 abstract 1
- 230000032258 transport Effects 0.000 description 15
- 230000008859 change Effects 0.000 description 14
- 238000012546 transfer Methods 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005188 flotation Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005339 levitation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
Landscapes
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022133005A JP7470749B2 (ja) | 2022-08-24 | 2022-08-24 | 塗布装置 |
| JPJP-P-2022-133005 | 2022-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20240028289A true KR20240028289A (ko) | 2024-03-05 |
Family
ID=90025895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020230086314A KR20240028289A (ko) | 2022-08-24 | 2023-07-04 | 도포 장치 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7470749B2 (ja) |
| KR (1) | KR20240028289A (ja) |
| CN (1) | CN117619596A (ja) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001244313A (ja) | 2000-02-28 | 2001-09-07 | Nikon Corp | 搬送方法及び搬送装置、露光方法及び露光装置 |
| JP5854799B2 (ja) | 2011-11-30 | 2016-02-09 | 株式会社Ｓｃｒｅｅｎホールディングス | 搬送装置 |
| JP6797698B2 (ja) | 2017-01-11 | 2020-12-09 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理装置の異状検知方法 |
-
2022
- 2022-08-24 JP JP2022133005A patent/JP7470749B2/ja active Active
-
2023
- 2023-07-04 KR KR1020230086314A patent/KR20240028289A/ko active Search and Examination
- 2023-08-03 CN CN202310975303.4A patent/CN117619596A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2024030264A (ja) | 2024-03-07 |
| JP7470749B2 (ja) | 2024-04-18 |
| CN117619596A (zh) | 2024-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination |