KR20240015615A - 레이저 가공 장치 - Google Patents

레이저 가공 장치 Download PDF

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Publication number
KR20240015615A
KR20240015615A KR1020237027903A KR20237027903A KR20240015615A KR 20240015615 A KR20240015615 A KR 20240015615A KR 1020237027903 A KR1020237027903 A KR 1020237027903A KR 20237027903 A KR20237027903 A KR 20237027903A KR 20240015615 A KR20240015615 A KR 20240015615A
Authority
KR
South Korea
Prior art keywords
laser
unit
laser light
incident surface
displacement information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237027903A
Other languages
English (en)
Korean (ko)
Inventor
가츠히로 고레마츠
데츠야 이이다
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20240015615A publication Critical patent/KR20240015615A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020237027903A 2021-06-01 2022-03-03 레이저 가공 장치 Pending KR20240015615A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-092245 2021-06-01
JP2021092245 2021-06-01
PCT/JP2022/009218 WO2022254844A1 (ja) 2021-06-01 2022-03-03 レーザ加工装置

Publications (1)

Publication Number Publication Date
KR20240015615A true KR20240015615A (ko) 2024-02-05

Family

ID=84324187

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237027903A Pending KR20240015615A (ko) 2021-06-01 2022-03-03 레이저 가공 장치

Country Status (5)

Country Link
JP (1) JPWO2022254844A1 (https=)
KR (1) KR20240015615A (https=)
CN (1) CN117412830A (https=)
TW (1) TWI912496B (https=)
WO (1) WO2022254844A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118089565B (zh) * 2024-04-23 2024-07-02 常州奥瑞克精密测量系统有限公司 一种具有多点式多姿态激光同轴度校验装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008087053A (ja) 2006-10-03 2008-04-17 Hamamatsu Photonics Kk レーザ加工方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201719A (ja) * 1998-01-09 1999-07-30 Nikon Corp 位置測定装置及びレーザ加工装置
DE502004001360D1 (de) * 2004-07-30 2006-10-12 Innolas Gmbh Waferbearbeitungsvorrichtung und zugehöriges Verfahren
JP4555092B2 (ja) * 2005-01-05 2010-09-29 株式会社ディスコ レーザー加工装置
JP4402708B2 (ja) * 2007-08-03 2010-01-20 浜松ホトニクス株式会社 レーザ加工方法、レーザ加工装置及びその製造方法
JP2011161492A (ja) * 2010-02-12 2011-08-25 Hitachi High-Technologies Corp レーザ加工状態検査方法及び装置レーザ加工方法及び装置並びにソーラパネル製造方法
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
JP5775811B2 (ja) * 2011-12-26 2015-09-09 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法
JP6786374B2 (ja) * 2016-12-16 2020-11-18 株式会社スミテック レーザ加工装置及びレーザ加工方法
JP2018176212A (ja) * 2017-04-11 2018-11-15 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP7257604B2 (ja) * 2018-11-19 2023-04-14 株式会社東京精密 レーザ加工装置及びその制御方法
JP6911882B2 (ja) * 2019-03-28 2021-07-28 ブラザー工業株式会社 レーザマーカ
JP7309277B2 (ja) * 2019-09-12 2023-07-18 株式会社ディスコ 位置調整方法及び位置調整装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008087053A (ja) 2006-10-03 2008-04-17 Hamamatsu Photonics Kk レーザ加工方法

Also Published As

Publication number Publication date
TWI912496B (zh) 2026-01-21
WO2022254844A1 (ja) 2022-12-08
CN117412830A (zh) 2024-01-16
JPWO2022254844A1 (https=) 2022-12-08
TW202247930A (zh) 2022-12-16

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St.27 status event code: A-0-1-A10-A15-nap-PA0105

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St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

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St.27 status event code: A-1-2-D10-D11-exm-PA0201

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St.27 status event code: A-1-2-D10-D13-srh-X000