TWI912496B - 雷射加工裝置 - Google Patents

雷射加工裝置

Info

Publication number
TWI912496B
TWI912496B TW111110292A TW111110292A TWI912496B TW I912496 B TWI912496 B TW I912496B TW 111110292 A TW111110292 A TW 111110292A TW 111110292 A TW111110292 A TW 111110292A TW I912496 B TWI912496 B TW I912496B
Authority
TW
Taiwan
Prior art keywords
aforementioned
laser light
unit
light
incident surface
Prior art date
Application number
TW111110292A
Other languages
English (en)
Chinese (zh)
Other versions
TW202247930A (zh
Inventor
是松克洋
飯田哲也
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202247930A publication Critical patent/TW202247930A/zh
Application granted granted Critical
Publication of TWI912496B publication Critical patent/TWI912496B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW111110292A 2021-06-01 2022-03-21 雷射加工裝置 TWI912496B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-092245 2021-06-01
JP2021092245 2021-06-01

Publications (2)

Publication Number Publication Date
TW202247930A TW202247930A (zh) 2022-12-16
TWI912496B true TWI912496B (zh) 2026-01-21

Family

ID=84324187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111110292A TWI912496B (zh) 2021-06-01 2022-03-21 雷射加工裝置

Country Status (5)

Country Link
JP (1) JPWO2022254844A1 (https=)
KR (1) KR20240015615A (https=)
CN (1) CN117412830A (https=)
TW (1) TWI912496B (https=)
WO (1) WO2022254844A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118089565B (zh) * 2024-04-23 2024-07-02 常州奥瑞克精密测量系统有限公司 一种具有多点式多姿态激光同轴度校验装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201719A (ja) * 1998-01-09 1999-07-30 Nikon Corp 位置測定装置及びレーザ加工装置
CN1799752A (zh) * 2005-01-05 2006-07-12 株式会社迪斯科 激光加工装置
JP2009034723A (ja) * 2007-08-03 2009-02-19 Hamamatsu Photonics Kk レーザ加工方法、レーザ加工装置及びその製造方法
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
JP2013132651A (ja) * 2011-12-26 2013-07-08 Hamamatsu Photonics Kk レーザ加工装置及びレーザ加工方法
JP2020157365A (ja) * 2019-03-28 2020-10-01 ブラザー工業株式会社 レーザマーカ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502004001360D1 (de) * 2004-07-30 2006-10-12 Innolas Gmbh Waferbearbeitungsvorrichtung und zugehöriges Verfahren
JP4964554B2 (ja) 2006-10-03 2012-07-04 浜松ホトニクス株式会社 レーザ加工方法
JP2011161492A (ja) * 2010-02-12 2011-08-25 Hitachi High-Technologies Corp レーザ加工状態検査方法及び装置レーザ加工方法及び装置並びにソーラパネル製造方法
JP6786374B2 (ja) * 2016-12-16 2020-11-18 株式会社スミテック レーザ加工装置及びレーザ加工方法
JP2018176212A (ja) * 2017-04-11 2018-11-15 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP7257604B2 (ja) * 2018-11-19 2023-04-14 株式会社東京精密 レーザ加工装置及びその制御方法
JP7309277B2 (ja) * 2019-09-12 2023-07-18 株式会社ディスコ 位置調整方法及び位置調整装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201719A (ja) * 1998-01-09 1999-07-30 Nikon Corp 位置測定装置及びレーザ加工装置
CN1799752A (zh) * 2005-01-05 2006-07-12 株式会社迪斯科 激光加工装置
JP2009034723A (ja) * 2007-08-03 2009-02-19 Hamamatsu Photonics Kk レーザ加工方法、レーザ加工装置及びその製造方法
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
JP2013132651A (ja) * 2011-12-26 2013-07-08 Hamamatsu Photonics Kk レーザ加工装置及びレーザ加工方法
JP2020157365A (ja) * 2019-03-28 2020-10-01 ブラザー工業株式会社 レーザマーカ

Also Published As

Publication number Publication date
WO2022254844A1 (ja) 2022-12-08
CN117412830A (zh) 2024-01-16
JPWO2022254844A1 (https=) 2022-12-08
KR20240015615A (ko) 2024-02-05
TW202247930A (zh) 2022-12-16

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