JPWO2022254844A1 - - Google Patents
Info
- Publication number
- JPWO2022254844A1 JPWO2022254844A1 JP2023525405A JP2023525405A JPWO2022254844A1 JP WO2022254844 A1 JPWO2022254844 A1 JP WO2022254844A1 JP 2023525405 A JP2023525405 A JP 2023525405A JP 2023525405 A JP2023525405 A JP 2023525405A JP WO2022254844 A1 JPWO2022254844 A1 JP WO2022254844A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021092245 | 2021-06-01 | ||
| PCT/JP2022/009218 WO2022254844A1 (ja) | 2021-06-01 | 2022-03-03 | レーザ加工装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022254844A1 true JPWO2022254844A1 (https=) | 2022-12-08 |
Family
ID=84324187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023525405A Pending JPWO2022254844A1 (https=) | 2021-06-01 | 2022-03-03 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2022254844A1 (https=) |
| KR (1) | KR20240015615A (https=) |
| CN (1) | CN117412830A (https=) |
| TW (1) | TWI912496B (https=) |
| WO (1) | WO2022254844A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118089565B (zh) * | 2024-04-23 | 2024-07-02 | 常州奥瑞克精密测量系统有限公司 | 一种具有多点式多姿态激光同轴度校验装置及方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11201719A (ja) * | 1998-01-09 | 1999-07-30 | Nikon Corp | 位置測定装置及びレーザ加工装置 |
| DE502004001360D1 (de) * | 2004-07-30 | 2006-10-12 | Innolas Gmbh | Waferbearbeitungsvorrichtung und zugehöriges Verfahren |
| JP4555092B2 (ja) * | 2005-01-05 | 2010-09-29 | 株式会社ディスコ | レーザー加工装置 |
| JP4964554B2 (ja) | 2006-10-03 | 2012-07-04 | 浜松ホトニクス株式会社 | レーザ加工方法 |
| JP4402708B2 (ja) * | 2007-08-03 | 2010-01-20 | 浜松ホトニクス株式会社 | レーザ加工方法、レーザ加工装置及びその製造方法 |
| JP2011161492A (ja) * | 2010-02-12 | 2011-08-25 | Hitachi High-Technologies Corp | レーザ加工状態検査方法及び装置レーザ加工方法及び装置並びにソーラパネル製造方法 |
| JP2013096853A (ja) * | 2011-11-01 | 2013-05-20 | Omron Corp | 変位センサ |
| JP5775811B2 (ja) * | 2011-12-26 | 2015-09-09 | 浜松ホトニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
| JP6786374B2 (ja) * | 2016-12-16 | 2020-11-18 | 株式会社スミテック | レーザ加工装置及びレーザ加工方法 |
| JP2018176212A (ja) * | 2017-04-11 | 2018-11-15 | 株式会社東京精密 | レーザー加工装置及びレーザー加工方法 |
| JP7257604B2 (ja) * | 2018-11-19 | 2023-04-14 | 株式会社東京精密 | レーザ加工装置及びその制御方法 |
| JP6911882B2 (ja) * | 2019-03-28 | 2021-07-28 | ブラザー工業株式会社 | レーザマーカ |
| JP7309277B2 (ja) * | 2019-09-12 | 2023-07-18 | 株式会社ディスコ | 位置調整方法及び位置調整装置 |
-
2022
- 2022-03-03 CN CN202280039414.8A patent/CN117412830A/zh active Pending
- 2022-03-03 JP JP2023525405A patent/JPWO2022254844A1/ja active Pending
- 2022-03-03 WO PCT/JP2022/009218 patent/WO2022254844A1/ja not_active Ceased
- 2022-03-03 KR KR1020237027903A patent/KR20240015615A/ko active Pending
- 2022-03-21 TW TW111110292A patent/TWI912496B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| TWI912496B (zh) | 2026-01-21 |
| WO2022254844A1 (ja) | 2022-12-08 |
| CN117412830A (zh) | 2024-01-16 |
| KR20240015615A (ko) | 2024-02-05 |
| TW202247930A (zh) | 2022-12-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250219 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20260414 |