KR20230163290A - Optical treatment device and optical treatment method - Google Patents

Abstract

[Problem] To provide a light processing device that has high processing capability and can perform homogeneous surface modification.
[Solution] A light processing device includes at least one light source that irradiates ultraviolet light belonging to a wavelength band of 205 nm or less, a lamp house that covers the at least one light source and has an opening in a direction in which the ultraviolet light exits, a carrier disposed downstream of the lamp house to convey the material to be treated in one direction so as to cross a position opposite to the opening while leaving a gap between the lamp house and a carrier to raise the temperature of the carrier. A heater and a control unit configured to control the material to be treated while irradiating the material with ultraviolet light to the material to be treated, wherein the control section controls the heater to transfer the material whose temperature is raised by the at least one light source. The temperature of the carrier is raised to suppress a decrease in temperature of the body.

Description

Light processing device and light processing method {OPTICAL TREATMENT DEVICE AND OPTICAL TREATMENT METHOD}

The present invention relates to a light processing device and a light processing method.

A surface modification method is known in which the surface of a material to be treated is irradiated with ultraviolet light to modify the surface. For example, Patent Document 1 describes a surface modification method in which the surface of a fluororesin is modified by irradiating ultraviolet light while supplying a treatment gas to the surface.

International Publication No. 2022/024882

As surface modification technology using ultraviolet light advances, improvements in light processing devices are required. The purpose of the present invention is to provide a light processing device and a light processing method that have high processing capability and can perform homogeneous surface modification.

The light processing device of the present invention includes at least one light source that irradiates ultraviolet light belonging to a wavelength band of 205 nm or less,

a lamp house covering the at least one light source and having an opening in a direction in which the ultraviolet light exits;

a carrier that conveys the material to be treated in one direction so as to cross a position opposite to the opening while leaving a gap between the lamp house and the lamp house;

a heater disposed downstream of the lamp house and raising the temperature of the carrier;

A control unit configured to control the material to be treated while irradiating the material with ultraviolet light to the material to be treated,

The control unit controls the heater to raise the temperature of the carrier body to suppress a decrease in the temperature of the carrier body raised by the light source.

Ultraviolet light belonging to the wavelength band of 205 nm or less is called vacuum ultraviolet (VUV) light. Ultraviolet light belonging to this wavelength band generates oxygen radicals and ozone from oxygen molecules in the environment. Oxygen radicals and ozone react with the surface of the material to be treated and have the ability to modify the surface. On the other hand, ultraviolet light belonging to a wavelength band of 205 nm or less has high light absorption for oxygen molecules. The material to be treated is moved by the carrier so as to cross a position opposite to the opening of the lamp house.

The position opposite to the opening of the lamp house is a position immediately below the lamp house where the emitted light from the light source disposed in the lamp house reaches. The material to be treated is passed across the position where the light emitted from the light source disposed in the lamp house arrives. As a result, the reforming treatment of the material to be treated can be performed continuously, and the reforming treatment can be performed on a large area and in a short time. “Conveyor” is a conveyance means that places the material to be treated and moves the material to be treated. Details will be described later, but specific examples of the “carrier” include a belt conveyor and a movable stage.

The light source radiates not only ultraviolet light in the wavelength band of 205 nm or less, but also infrared light. At a position opposite to the opening of the lamp house, that is, directly below the lamp house, the temperature of the carrier increases due to infrared light energy. On the other hand, outside the position immediately below the lamp house, where infrared rays do not reach, the carrier is not affected by infrared rays.

The present inventor realized that there is a risk of bending of the carrier body when it is carried out from the inside of the lamp house. This is because, when a part of the carrier body is located directly below the lamp house and the rest is located outside just below the lamp house, a temperature difference occurs inside the carrier body, and warping occurs due to the difference in thermal expansion. If bending occurs in the carrier, the distance between the light source and the material to be treated changes, and the carrier cannot be passed in one direction while maintaining a constant distance from the light source, making it impossible to perform the desired reforming treatment homogeneously.

Therefore, the present inventor arranges a heater for raising the temperature of the carrier body downstream of the lamp house, and heats the carrier body carried out from the lamp house with the heater. As a result, even when a part of the carrier is located directly below the lamp house and the remainder is located just outside the lamp house, temperature variation inside the carrier can be suppressed and warpage due to the difference in thermal expansion can be reduced. As a result, the carrier can be passed in one direction while maintaining the distance from the light source, and the desired reforming treatment can be performed homogeneously.

The carrier may be an endless belt stretched between a first pulley disposed upstream of the lamp house and a second pulley disposed downstream of the lamp house.

The heater may radiate infrared rays toward the carrier.

The heater may spray heating fluid toward the carrier.

The heater may indirectly raise the temperature of the endless belt by raising the temperature of the surface of the second pulley.

The light processing device may further include a second heater that is disposed upstream of the lamp house and raises the temperature of the carrier. By reducing the bending, the distance between the light source and the material to be treated can be maintained more.

The light processing device may further include an exhaust chamber at least one of upstream of the lamp house and downstream of the lamp house. It becomes easier to control the oxygen concentration and humidity in the lamp house.

The main material of the endless belt may be stainless steel. Stainless steel has high corrosion resistance to ultraviolet light. The endless belt may have a through hole penetrating in the thickness direction of the endless belt.

The light processing device further includes a guide roller at a position opposite to the opening, and the endless belt may be sandwiched between the opening and the guide roller. The guide roller may be made of metal or resin. The guide roller may be divided in the width direction.

The light processing device may further include a sensor that measures the temperature of the carrier before or after the temperature is raised by the heater, or the amount of radiant heat of the heater.

The control unit may control the heater based on the temperature result obtained from the sensor.

The light treatment method of the present invention is to transfer ultraviolet light in a wavelength band of 205 nm or less emitted by a light source to the treated material in a lamp house in the presence of oxygen while transporting the treated material having a resin on the surface on a carrier in one direction. To investigate,

The temperature of the material to be treated taken out from the lamp house is raised to suppress a decrease in the temperature of the carrier heated by the light source.

It is possible to provide a light processing device and a light processing method that have high processing capability and can perform homogeneous surface modification.

1 is a diagram showing a first embodiment of a light processing device.
Figure 2 is an enlarged view of the area from the rear part of the lamp house to the second pulley.
Figure 3 is a diagram showing the surface of the treated material before surface modification and the surface of the treated material after surface modification.
Figure 4 is a diagram showing the shape of the first pulley.
Fig. 5 is a diagram showing the guide roller of this embodiment.
FIG. 6 is a diagram showing a second embodiment of a light processing device.
FIG. 7 is an enlarged view of the area from the first pulley of FIG. 6 to the front part of the lamp house.
FIG. 8 is a diagram showing a third embodiment of a light processing device.

Embodiments will be described with reference to the drawings. In addition, each drawing disclosed in this specification is only schematically shown. In other words, the dimension ratio in the drawings and the actual dimension ratio do not necessarily match, and also, the dimension ratios do not necessarily match between the drawings.

In the following, each drawing is explained with reference to the XYZ coordinate system. In this specification, when expressing directions, when positive and negative directions are distinguished, they are described by adding positive and negative signs, such as “+X direction” and “-X direction.” When expressing a direction without distinguishing between positive and negative directions, it is simply described as “X direction.” That is, in this specification, when it is simply described as “X direction”, both “+X direction” and “-X direction” are included. The same applies to the Y direction and Z direction. In the embodiment described below, the direction of gravity is the -Z direction, the conveyance direction in which the material to be treated is conveyed on the carrier is the +Y direction, and the width direction of the material to be treated is the X direction.

<First embodiment>

[Overview of light processing device]

Together with Fig. 1, a first embodiment of a light processing device is shown. The light processing device 100 includes three light sources 3 that irradiate ultraviolet light belonging to a wavelength band of 205 nm or less, a lamp house 2 arranged to cover the three light sources 3, and a material to be treated 4 ) is provided with a carrier that conveys the. Details will be described later, but in this embodiment, a conveyor belt 1 (hereinafter sometimes simply referred to as “belt 1”) is used as a conveyance body.

The ultraviolet light L1 emitted from the light source 3 is vacuum ultraviolet light, more specifically, ultraviolet light belonging to a wavelength band of at least 205 nm or less. As used in this specification, “ultraviolet light belonging to a wavelength band of at least 205 nm or less” refers to light that exhibits an emission intensity of at least 205 nm or less in the emission spectrum of the light source 3. Such light, for example, is (1) light that exhibits intensity in a broad wavelength band and an emission spectrum in which the peak emission wavelength that represents the maximum intensity is 205 nm or less, (2) multiple maximum intensities (multiple peaks). (3) light representing an emission spectrum in which any one of a plurality of peaks is included in a wavelength range of 205 nm or less; (3) light of 205 nm or less with respect to the total integrated intensity in the emission spectrum, It includes light showing an integrated intensity of at least 30% or more.

The inner wall of the lamp house 2 of this embodiment has a plurality of gas supply ports 8 for supplying inert gas. A plurality of gas supply ports (8) are connected to the gas supply source (9). In this embodiment, nitrogen is used as the inert gas. Nitrogen is supplied from the gas supply port 9 to the gas supply port 8, and nitrogen is blown into the lamp house 2 from the gas supply port 8. Details will be explained later, but this reduces the oxygen concentration in the lamp house 2. Additionally, it is possible to reduce the oxygen concentration in the lamp house 2 by, for example, placing the lamp house 2 itself in an environment with a lot of inert gas. Accordingly, the gas supply port 8 formed in the lamp house 2 is not an essential component in the present invention.

Close to the belt (1) is the opening of the lamp house (2). The light processing device 100 has an exhaust space former 5 and an exhaust port 24 on the opposite side of the opening of the lamp house 2 across the belt 1. Most of the inert gas supplied from the gas supply port 8 goes around the belt 1, is collected in the exhaust space former 5, and is exhausted from the exhaust port 24.

The belt 1 of this embodiment is circular and therefore endless. The belt 1 extends between a first pulley 11 relatively positioned in the -Y direction and a second pulley 12 relatively positioned in the +Y direction. The belt 1 moves the material 4 to be treated 4 across a position opposite to the opening of the lamp house 2, while leaving a gap between the belt 1 and the lamp house 2.

The positions Y1 and Y2 are located on the upper side (+Z side) of the belt 1. The position Y1 is located upstream (-Y side) from the lamp house 2 and the position Y2. The position Y2 is located downstream (+Y side) from the position Y1 and the lamp house 2. At the position Y1, the material to be treated (4) is placed on a portion of the belt (1), and the placed material (4) moves in the downstream direction (+Y direction) together with the portion of the belt (1), , the material to be treated 4 is reformed immediately below the lamp house 2, and the material to be treated 4 is separated from the belt 1 at the position Y2. The material to be treated 4 may be placed on the belt 1 or the material to be treated 4 may be removed from the belt 1 by a handling robot, not shown, or another conveyor belt.

The light processing device 100 has a plurality of guide rollers 13 that support the belt 1 between the first pulley 11 and the second pulley 12. In order to reduce the variation in the distance between the light source 3 and the material to be treated 4, a large number of guide rollers 13 may be disposed, especially near the light source 3. In this embodiment, there are six guide rollers 13 below the opening of the lamp house 2. Additionally, the light processing device 100 has a dancer roller 14 for applying a constant tension to the belt 1.

[heater]

The light processing device 100 has a heater that raises the temperature of the belt 1 located downstream of the lamp house 2. In the case of this embodiment, the heater is a heater 21 built into the second pulley 12 and a heating gas supply unit 22. The heater 21 built into the second pulley 12 located downstream of the lamp house 2 raises the temperature of the surface of the second pulley 12. Thereby, the belt 1 in contact with the second pulley 12 is heated.

Heating gas 23 is emitted from the heating gas supply unit 22 toward the belt 1. Thereby, the belt 1 downstream of the lamp house 2 is heated. The material to be treated (4) may exist between the heating gas supply unit (22) and the belt (1). By raising the temperature of the material to be treated 4, the temperature of the belt 1 can be indirectly raised. The same applies even when there is a material to be treated 4 between the belt 1 and a heater other than the heating gas supply unit 22 (described in detail later).

The operation of the heaters 21 and 22 will be explained with reference to FIG. 2. FIG. 2 is an enlarged view of the area from the rear part of the lamp house 2 in FIG. 1 to the second pulley 12. However, Figure 2 shows a state in which the heaters 21 and 22 are not operating. That is, the second pulley 12 is not heated, and the heating gas supply unit 22 does not emit heating gas 23 to the belt 1. With the heaters 21 and 22 not operating, the light source 3 is turned on and ultraviolet light L1 is irradiated to the belt 1. Then, as shown in FIG. 2, the belt 1 may generate wave-shaped bending D1 that periodically has expansion in the +Z direction and Y direction. In Fig. 2, the dashed line 25 in contact with the guide roller 13 is the position of the belt 1 when there is no bending D1.

It is assumed that this bending D1 occurs based on the following mechanism. First, the light source 3 radiates not only ultraviolet light L1 belonging to a wavelength band of 205 nm or less, but also infrared rays. When the light source 3 is turned on, the belt 1 immediately below the lamp house 2 is heated by infrared rays, and the belt 1 expands. Expansion of the belt 1 occurs in the longitudinal direction, width direction, and thickness direction of the belt 1. Next, when the heated belt 1 comes out of the lamp house 2 and runs for a while, the belt 1 is naturally cooled, and the expanded belt 1 contracts. That is, a thermal expansion difference occurs within the belt 1.

Between the first pulley 11 and the second pulley 12, the belt 1 moves at a constant speed. Therefore, when a difference in thermal expansion occurs inside the belt 1 moving at a constant speed, a wavy bend D1 appears in the belt 1. In addition, in FIG. 2, only the bending D1 that appears in the YZ plane of the belt 1 is shown, and the belt 1 is also bent in the width direction (X direction). The size of this bending may reach 3 mm in the +Z direction with respect to the position of the dashed line 25 in the case where there is no bending. Additionally, when the light processing device 100 is in an environment at room temperature (about 20°C), the belt 1 near the light source 3 is heated by the light source 3 that turns on, so that the surface of the belt 1 becomes heated. It may reach 50℃.

The wavy bending D1 of the belt 1 narrows the gap between the material to be treated 4 and the light source 3. If the gap between the light source 3 and the material to be treated 4 becomes narrow, the desired reforming treatment cannot be performed homogeneously. Additionally, if the deflection D1 of the belt 1 becomes particularly large, the material 4 placed on the belt 1 interferes with the light source 3 or is taken out of the lamp house 2. There is a risk of interference with (2).

Therefore, the present inventor decided to raise the temperature of the belt 1 using the heaters 21 and 22 so that the temperature of the belt 1 does not decrease after the heated belt 1 comes out of the lamp house 2. . As a result, the thermal expansion of the belt 1 continues from the lamp house 2 to the second pulley 12, and the thermal expansion variation of the belt 1 can be suppressed. As a result, the wavy bend D1 becomes smaller, and the position of the belt 1 approaches the dashed-dash line 25 or overlaps the dashed-dash line 25 . And, by maintaining the distance between the light source 3 and the material to be treated 4, the desired reforming treatment can be performed homogeneously.

[Control of heater]

As shown in FIG. 1 , the light processing device 100 includes a control unit 19 that controls the heaters 21 and 22 . The control unit 19 controls heating of the heaters 21 and 22 to reach a desired temperature. In this embodiment, the light processing device 100 has a temperature sensor 18. The temperature sensor 18 is located downstream of the lamp house 2 and upstream of the heaters 21 and 22. Using the temperature sensor 18, the temperature of the belt 1, downstream of the lamp house 2, and upstream of the heaters 21 and 22 is detected. In this embodiment, a sensor (radiation thermometer) that detects the amount of radiant heat of the belt 1 is used as the temperature sensor 18. Thereby, the temperature of the moving belt 1 can be detected non-contactly.

FIG. 1 shows the heaters 21 and 22, the temperature sensor 18, and the control unit 19 being connected by a power line. The temperature sensor 18 measures the temperature of the belt 1 before or after the temperature is increased by the heaters 21 and 22. The electrical signal detected by the temperature sensor 18 is sent to the control unit 19, and the control unit 19 can determine the output of the heaters 21 and 22 based on the detected temperature. Additionally, in Figure 2, power lines are omitted.

Moreover, not only is temperature control performed by the control unit 19 shared with the other heaters 21 and 22, but each of the heaters 21 and 22 may be equipped with an individual temperature sensor. The heaters 21 and 22 may be controlled based on the detection signals of the individual temperature sensors. The temperature sensor may be a thermocouple or a resistance thermometer.

Additionally, Figure 1 does not show all power lines (electrical communication lines). The control unit 19 may control the operation of the light processing device 100 (e.g., drive control of the first pulley 11, lighting control of the light source 3, and control of the supply amount of inert gas).

The control unit 19 may be a dedicated control unit installed for the light processing device 100 or may be a control unit shared with other devices or systems. A programmable logic controller (or sequencer), personal computer, or general-purpose computer may be used in the control unit.

It has been explained that the heater of this embodiment includes the heater 21 and the heating gas supply unit 22 built into the second pulley 12, but it is not limited to this. The heaters 21 and 22 may be separate heaters from the second pulley 12, for example. Additionally, infrared radiation heaters may be used as the heaters 21 and 22. In addition, although this embodiment has two heaters 21 and 22, it is sufficient to have at least one heater.

When the partial area of the belt 1 passes around the second pulley 12, the partial area of the belt 1 returns towards the first pulley 11. At this time, the partial area of the belt 1 is naturally cooled. Therefore, even after the annular belt 1 makes one revolution around the first pulley 11 and the second pulley 12, the belt 1 requires heating by the heater.

A method for determining whether the heaters 21 and 22 are preventing the temperature of the belt 1 from decreasing will be explained. Both the temperature of the belt 1 when the heaters 21 and 22 are operated and the temperature of the belt 1 when the heaters 21 and 22 are not operated are measured. And, if the temperature of the belt 1 when the heaters 21 and 22 are operated is higher than the temperature of the belt 1 when the heaters 21 and 22 are not operated, the heaters 21 and 22 operate on the belt. It is confirmed that the temperature drop in (1) is prevented.

[Treatment material]

The material to be treated 4 used in this embodiment is a resin sheet called prepreg, in which a base material such as paper or glass is impregnated with a resin. An interlayer insulating film is formed from the copper clad laminate (CCL) that has been cured by bonding copper foil to this resin sheet. Interlayer insulating films are used for high-frequency circuit boards and the like. When joining copper foil to the resin sheet, the above-mentioned surface modification treatment is used to increase the bonding force of the resin sheet to the copper foil.

Materials other than the resin sheet may also be applied to the material to be treated 4. There may be cases where modification treatment is performed for purposes other than improving bonding strength. The material to be treated 4 may be a thick, hard plate-shaped substrate, a long flexible film, or a three-dimensional shape other than a plate. The Y-direction length of the material to be treated 4 may be shorter or longer than the Y-direction length of the lamp house 2. The width of the material to be treated 4 in the X direction is shorter than the width of the lamp house 2 in the X direction.

[Reformation mechanism]

The mechanism of surface modification of this embodiment will be explained. Ultraviolet light (hν) used in this embodiment, belonging to a wavelength band of at least 205 nm or less, acts on oxygen molecules in the environment to generate atomic oxygen. O( ^1D ) is highly reactive atomic oxygen (oxygen radical) and has an oxidizing function. O( ³ P) represents atomic oxygen in the ground state. This is shown in equation (1).

hν＋O ₂ → O( ¹ D)＋O( ³ P) … (One)

O( ³ P), which is atomic oxygen in the ground state, combines with oxygen molecules in the presence of the third body (M) to generate ozone (O ₃ ). This is shown in equation (2). Ozone has an oxidizing effect.

O( ³ P)＋O ₂ ＋M → O ₃ ＋M … (2)

Water vapor contained in the air also generates hydroxy radicals (·OH), which have an oxidizing effect, according to equations (3) and (4) below.

hν＋H ₂ O → ·OH＋H … (3)

O( ¹ D)+H ₂ O → 2(·OH) … (4)

FIG. 3 is a diagram schematically showing the surface of the prepreg that is the material to be treated 4. The material to be treated 4a represents the surface of the resin sheet before modification treatment. Hydrocarbon groups are exposed on the surface of the resin sheet. In this embodiment, only some hydrocarbons in the polymer exposed to the surface of the resin sheet are simplified and shown. These surfaces exhibit hydrophobicity.

The treated material 4b represents the surface of the prepreg after modification treatment. Oxygen radicals (O( ¹ D)), ozone (O ₃ ), or hydroxy radicals (·OH) generated when oxygen molecules are irradiated with ultraviolet light (hν) oxidize hydrocarbon groups on the surface of the resin to form hydroxy groups. It is formed at the carboxyl group. Hydrophilic hydroxy groups and carboxyl groups improve bonding properties with copper.

[Oxygen concentration]

Oxygen molecules are the raw material for producing O( ^1D ) or _O3 . However, it is necessary to generate O( ¹ D) or O ₃ near the surface of the material to be treated 4b, and in order to allow ultraviolet light (hν), which is easily absorbed by oxygen molecules, to reach the vicinity of the surface, the oxygen concentration must be adjusted to It must be lowered to reduce the oxygen molecular weight in the optical path. For this reason, the lamp house 2 is filled with an inert gas.

The oxygen concentration in the lamp house 2 should just be 10% or less, and is more preferably 5% or less. For example, if 172nm ultraviolet light advances 4mm into a space where the oxygen concentration is 10% or less, a light intensity of more than 50% can be secured, and if 172nm ultraviolet light advances 4mm into a space where the oxygen concentration is 5% or less, , light intensity of more than 70% can be secured. However, as mentioned above, since oxygen molecules are a raw material for producing O( ^1D ) or _O3 , in order to secure oxygen molecules as a raw material, the oxygen concentration is preferably 1% or more, and 3% or more. It is more desirable to have it.

The source of oxygen molecules and water molecules for obtaining oxygen radicals (O( ^1D )), ozone ( _O3 ), or hydroxy radicals (·OH) is the air outside the lamp house 2. As shown in Figures 1 and 2, there is a gap between the lamp house 2 and the belt 1. This gap is, for example, 3 to 4 mm. Oxygen molecules and water molecules flow into the lamp house 2 from outside the lamp house 2 through the gap between the lamp house 2 and the belt 1. In order to adjust the oxygen concentration in the lamp house 2, at least the amount of inert gas supplied from the gas supply port 8, the gas suction force from the exhaust port 24, and the gap between the lamp house 2 and the belt 1 are adjusted. You can control either one.

[Carrier]

The belt 1, which is a conveyance chain, is mainly made of stainless steel. Stainless steel has high corrosion resistance that is unlikely to deteriorate even when exposed to oxygen radicals (O( ^1D )), ozone ( _O3 ), or hydroxy radicals (·OH). The belt 1 may be made of another metal or resin.

The belt 1 of this embodiment has a sheet shape. The width of the belt 1 in the X direction is larger than the width of the material to be treated 4 in the X direction. The width of the belt 1 in the X direction may be 380 mm or more and 580 mm or less. Additionally, the thickness of the belt 1 in the Z direction may be 0.1 mm or more and 0.5 mm or less. If the belt (1) is thick, it is difficult for the belt (1) to heat up and bend. On the other hand, if the belt 1 is thin, it is easy to move the belt 1 smoothly. The moving speed of the belt 1 may be 1 m/min to 5 m/min.

The belt 1 may have a plurality of through holes in the thickness direction of the belt 1. Since the belt 1 has a plurality of through holes, a portion of the gas flow from the lamp house 2 toward the exhaust space former 5 passes through the through holes without going around the belt 1. The effect of suppressing gas turbulence is achieved by the through hole. Additionally, when the light processing device 100 has an absorber that adsorbs the material to be treated 4 through the through hole, the material to be treated 4 can be adsorbed and fixed to the belt 1. The adsorbent may be, for example, a suction mechanism that suctions the through hole.

[Light source]

A xenon excimer lamp is used as the light source 3 in this embodiment. A xenon excimer lamp is a discharge lamp in which xenon gas is enclosed inside a light emitting tube. The peak emission wavelength of the xenon excimer lamp is 172 nm. The light source 3 may be a discharge lamp filled with a gas other than xenon gas. Additionally, the light source 3 may be a solid light source such as LED.

In Figure 1, three light sources 3 are arranged side by side in the Y direction, but there needs to be at least one light source 3. Additionally, the light sources 3 may be arranged side by side in the X direction, or the light sources 3 may be arranged side by side in each of the X and Y directions.

The width of the light source 3 in the X direction may be larger than the width of the material to be treated 4 in the X direction. The width of the light source 3 in the X direction may be, for example, 380 to 580 mm.

[Lamp House]

The lamp house 2 arranged to cover the light source 3 has an opening in the direction (-Z direction) through which the ultraviolet light emitted by the light source 3 exits. Thereby, the light emitted from the light source 3 is directed in the -Z direction. A reflector or a reflective layer that reflects ultraviolet light may be formed on the inner wall of the lamp house 2.

The length of the lamp house 2 in the Y direction may be, for example, 300 mm to 500 mm. Moreover, the distance between the +Y side end of the lamp house 2 and the rotation center of the second pulley 12 in the Y direction may be, for example, 300 mm to 500 mm.

[Pulley]

Figure 4 shows the shape of the first pulley 11. In this embodiment, the first pulley 11 is a drive pulley for driving the belt 1. The first pulley 11 is a rotating body centered on the X1 axis extending in the X direction. The first pulley 11 has a crown shape in which the central diameter R1 in the X direction is slightly larger than the end diameter R2 in the X direction. The crown (radius of curvature) R3 of the first pulley 11 may be, for example, 100000 mm or more. The diameter R1 may be, for example, 50 mm to 170 mm. The shape of the first pulley 11 is not limited to this embodiment, and may be a cylindrical shape with a constant diameter in the X direction. The width direction length W1 of the first pulley 11 is larger than the width of the belt 1 in the X direction. The width direction length W1 of the first pulley 11 may be 400 mm to 600 mm.

The second pulley 12 is a driven pulley that moves by friction with the driving belt 1. The shape and angular dimensions of the second pulley 12 may be the same as or different from the shape and angular dimensions of the first pulley 11. The distance between the rotation center of the first pulley 11 and the rotation center of the second pulley 12 may be 800 mm to 1200 mm. Additionally, the first pulley 11 may be a driven pulley and the second pulley 12 may be a driving pulley.

[Guide Roller]

Fig. 5 shows one of the guide rollers 13 of this embodiment. The guide roller 13 is used to move the belt 1 by suppressing frictional resistance while supporting the belt 1. The guide roller 13 is divided in the width direction. That is, a plurality of small rollers 43 (in Fig. 5, only one small roller 43 is denoted by a symbol) are arranged side by side in the X direction. As a result, the contact area between the guide roller 13 and the belt 1 is reduced, the amount of heat transfer in both directions between the belt 1 and the guide roller 13 is reduced, and the belt 1 is not affected by the guide roller 13. It can make it difficult to be affected by heat.

The guide roller 13 may be made of metal or resin. When the guide roller 13 is mainly made of a material with high thermal conductivity such as metal, it is particularly effective to use a plurality of small rollers 43. When using resin for the guide roller 13, a resin (for example, polyimide resin, epoxy resin, or PTFE resin) that is difficult to deteriorate by ultraviolet light may be used.

The shapes and respective dimensions of the plurality of small rollers 43 are illustrated. The plurality of small rollers 43 are all rotating bodies centered on the X1 axis along the X direction. The diameter R3 of the small roller 43 may be 50 mm to 150 mm. The width W2 of the small roller 43 may be 20 mm to 100 mm. The number of small rollers 43 may be 2 to 20 lined up in the X direction.

Additionally, the guide roller 13 may be comprised of one roller that is not divided in the width direction. Additionally, the guide roller 13 may be provided with a temperature adjustment element that enables temperature adjustment of the belt 1. The temperature adjustment element may include at least one of a heating element and a cooling element.

The light processing device 100 of this embodiment does not have a guide roller outside the lamp house 2, but may have a guide roller outside the lamp house 2.

[Driving in warm weather]

Immediately after the start of lighting of the light source 3, the first pulley 11 and the second pulley 12 are at room temperature. Therefore, the bending D1 of the belt 1 is particularly likely to occur immediately after the light source 3 starts turning on. As time passes from the lighting of the light source 3, the temperature of the members in contact with the belt 1, such as the second pulley 12, increases, and the deflection D1 decreases. Therefore, the light processing device 100 may be operated in warm-up mode. The warm-up operation refers to operating the light processing device 100 (i.e., turning on the light source 3 and operating the heater, before starting the reforming process by actually placing the material to be treated 4 on the belt 1). (1) is rotated. As a result, the temperature of the belt 1 increases, and the occurrence of bending D1 of the belt 1 can be suppressed. Warm-up operation may be performed for, for example, 5 to 15 minutes.

＜Second Embodiment＞

Together with FIG. 6, a second embodiment of the light processing device will be described. Below, description will be given focusing on features different from the first embodiment. Points that are not explained in the second embodiment can be implemented in the same way as in the first embodiment. The same applies to the third embodiment described later.

The light processing device 200 of the second embodiment has a second heater upstream of the lamp house 2. The second heater is disposed upstream of the lamp house 2. And the second heater raises the temperature of the belt 1 located upstream of the lamp house 2. The second heater of this embodiment is a heater 41 and an infrared radiation heater 42 built into the first pulley 11. The heater 41 built into the first pulley 11 located upstream of the lamp house 2 raises the temperature of the surface of the first pulley 11. Thereby, the belt 1 in contact with the first pulley 11 is heated. The infrared radiation heater 42 is arranged along the surface of the first pulley 11 with the belt 1 interposed therebetween. The infrared radiation heater 42 radiates infrared rays toward the belt 1 and heats the belt 1. The infrared radiation heater 42 is particularly suitable as a heater for the belt 1 when the belt 1 is made of a material with a high thermal emissivity such as resin.

The operation of the heaters 41 and 42 will be explained with reference to FIG. 7. FIG. 7 is an enlarged view of the area from the first pulley 11 in FIG. 6 to the front part of the lamp house 2. However, Figure 7 shows a state in which the heaters 41 and 42 are not operating. When the light source 3 is turned on without the heaters 41 and 42 in operation, the belt 1 undergoes wave-shaped bending D2 that periodically has expansion in the +Z direction and Y direction, as shown in FIG. There are cases where it occurs. Additionally, in Fig. 7, the dashed line 25 in contact with the guide roller 13 is the position of the belt 1 when there is no bending D2.

It is assumed that this bending D2, like the bending D1, is caused by a difference in the amount of thermal expansion within the belt 1. Upstream of the lamp house 2, the temperature of the belt 1 is about room temperature, and the belt 1 is in a contracted state. Meanwhile, immediately below the lamp house 2, the belt 1 near the light source 3 is heated and expands by infrared rays from the light source 3.

When a difference in thermal expansion occurs inside the belt (1) moving at a constant speed, a wavy bend (D2) appears in the belt (1). In addition, in Figure 7, only the bending D2 that appears in the YZ plane of the belt 1 is shown, but the belt 1 is also bent in the width direction (X direction).

Therefore, before the belt 1 enters the lamp house 2, the belt 1 is preliminarily heated. As a result, the temperature increase range of the belt 1 immediately below the lamp house 2 becomes small. As a result, the difference in thermal expansion can be suppressed between the belt 1 located upstream of the lamp house 2 and the belt 1 located immediately below the lamp house 2. As a result, the wavy bend D2 becomes small, and the position of the belt 1 approaches the dashed-dash line 25 or overlaps the dashed-dash line 25 . And, by maintaining the distance between the light source 3 and the material to be treated 4, the desired reforming treatment can be performed homogeneously.

As shown in FIGS. 6 and 7 , the light processing device 200 is provided with a temperature sensor 45 that measures the temperature of the surface of the first pulley 11. Thereby, by measuring the temperature of the surface of the first pulley 11, the temperature of the belt 1 immediately after contacting the first pulley 11 can be estimated. If the belt 1 is made of a material with a low emissivity such as metal, it is difficult to measure the amount of radiant heat of the belt 1. At this time, if the surface of the first pulley 11 is made of a material with a relatively high emissivity, the radiant heat amount of the first pulley 11 can be measured instead of the radiant heat amount of the belt 1.

[Exhaust room]

As shown in FIG. 6 , the light processing device 200 includes an exhaust chamber 30 upstream of the lamp house 2 and an exhaust chamber 31 downstream of the lamp house 2 . The exhaust chambers 30 and 31 have exhaust ports 32 and 33 for discharging the gas in the exhaust chambers 30 and 31, respectively. By providing the exhaust chambers 30 and 31, it is easy to adjust the oxygen and humidity flowing into the lamp house 2 from the gap between the lamp house 2 and the belt 1. That is, in order to adjust the oxygen concentration in the lamp house 2, the exhaust amount of the exhaust ports 31 and 32 may be controlled.

＜Third Embodiment＞

Together with FIG. 8, a third embodiment of the light processing device will be described. In the light processing device 300 of the third embodiment, the carrier is not an endless belt but a stepped plate 51. The plate 51 is long in the Y direction. Therefore, when a part of the plate 51 moves outside the lamp house 2 and cools naturally, the remainder of the plate 51 is heated within the lamp house 2. Therefore, the plate 51 can cause a temperature difference in the Y direction. Additionally, since the plate 51 is thin, there are cases where warping in the Z direction occurs within the plate 51 due to a difference in thermal expansion due to a temperature difference in the Y direction.

Therefore, in order to reduce warpage, it is effective to blow the heating gas 23 from the heating gas supply part 22 disposed downstream of the lamp house 2 to raise the temperature of the plate 51. In addition, as explained in the second embodiment, it is also effective to preliminarily heat the plate 51 with the infrared radiation heater 42, which is a second heater disposed upstream of the lamp house 2.

Each embodiment and its modification examples have been described above. The present invention is not limited to the above-described embodiments and their modifications, and the above-described embodiments or modifications may be appropriately combined or further modifications may be made.

Although the above-described light processing devices 100, 200, and 300 have a single lamp house 2, a plurality of lamp houses 2 may be arranged in the conveyance direction (Y direction).

The above-described light processing devices 100, 200, and 300 are shown so that the irradiation direction of ultraviolet light L1 is the same as the gravity direction (-Z direction), but the irradiation direction of ultraviolet light L1 is different from the gravity direction. It doesn't matter. For example, it is okay to irradiate ultraviolet light in the horizontal direction to a carrier transported in the direction of gravity.

1：Belt
2：Lamp House
3：Light source
4, 4a, 4b: Material to be treated
5: Exhaust space former
8: Gas supply port
9 ：Gas source
11: 1st pulley
12: 2nd pulley
13: Guide roller
14: Dancer Roller
18, 45: Temperature sensor
19: Control unit
21, 41: Heater
22: Heating gas supply section
23: Heating gas
24, 32, 33: Exhaust port
30, 31: Exhaust chamber
42: Infrared radiation heater
43: Small roller
51: plate
100, 200, 300: Light processing device
D1, D2: Bending
L1: Ultraviolet light

Claims (12)

At least one light source that irradiates ultraviolet light belonging to a wavelength band of 205 nm or less,
a lamp house covering the at least one light source and having an opening in a direction in which the ultraviolet light exits;
a carrier that conveys the material to be treated in one direction so as to cross a position opposite to the opening while leaving a gap between the lamp house and the lamp house;
a heater disposed downstream of the lamp house and raising the temperature of the carrier;
A control unit configured to control the material to be treated while irradiating the material with ultraviolet light to the material to be treated,
The light processing device, wherein the control unit controls the heater to raise the temperature of the carrier body to suppress a decrease in the temperature of the carrier body raised by the at least one light source. In claim 1,
The light processing device is characterized in that the carrier is an endless belt stretched between a first pulley disposed upstream of the lamp house and a second pulley disposed downstream of the lamp house. In claim 1 or claim 2,
A light processing device, wherein the heater radiates infrared rays toward the carrier. In claim 1 or claim 2,
A light processing device, wherein the heater sprays heating fluid toward the carrier. In claim 2,
The light processing device is characterized in that the heater indirectly raises the temperature of the endless belt by raising the temperature of the surface of the second pulley. In claim 1 or claim 2,
A light processing device comprising a second heater disposed upstream of the lamp house and raising the temperature of the carrier. In claim 1 or claim 2,
A light processing device comprising an exhaust chamber at least one of an upstream side of the lamp house and a downstream side of the lamp house. In claim 2 or claim 5,
A light processing device, characterized in that the main material of the endless belt is stainless steel. In claim 2 or claim 5,
A light processing device characterized in that the endless belt has a through hole penetrating in the thickness direction of the endless belt. In claim 2 or claim 5,
A light processing device comprising a guide roller at a position opposite the opening, wherein the endless belt is sandwiched between the opening and the guide roller. In claim 1 or claim 2,
A light processing device comprising a sensor that measures the temperature of the carrier before or after being heated by the heater, or the amount of radiant heat from the heater. While conveying a material to be treated having a resin on the surface on a carrier in one direction, the material to be treated is irradiated with ultraviolet light in a wavelength band of 205 nm or less emitted by a light source within a lamp house in the presence of oxygen,
A light processing method, characterized in that the temperature of the material to be treated carried out from the lamp house is increased so as to suppress a decrease in the temperature of the material heated by the light source.