JP2015036590A - Infrared ray processing device and infrared ray processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sufficiently suppress flapping of an object to be processed while sufficiently cooling the object to be processed when radiating infrared ray to the object to be processed.SOLUTION: In a drying device 10, infrared ray is radiated, for drying, to a sheet-like coat 82 that is transported by a roll to roll method, by using an infrared ray heater 30 containing a filament 32 that releases infrared ray by heating, and an inner tube 36 and an outer tube 40 which absorb the infrared ray of the wavelength exceeding 3.5 μm and cover the filament 32. A portion (portion in a furnace body 12) of the coat 82 which is irradiated with the infrared ray from the infrared ray heater is cooled with a second refrigerant. A cooling mechanism 60 supports the coat 82 for transportation by a belt conveyor 61. At a cooling roll 65, a second flow path 65a is formed such that the second refrigerant passes inside a ring of a belt 62.

Description

  The present invention relates to an infrared processing apparatus and an infrared processing method.

  2. Description of the Related Art Conventionally, an infrared processing apparatus that performs processing such as drying of an object to be dried using infrared irradiation and air blowing is known. For example, Patent Document 1 describes a drying apparatus that uses a nozzle-equipped heater in which a slit-shaped air blowing nozzle and a rod-shaped heater are arranged side by side. It is described that a quartz glass medium wavelength infrared heater using a carbon filament as a heating element is used as the rod heater. In this heater with a nozzle, by providing a nozzle and a heater, the heater is heated to be dried, and components such as water volatilized by the heating are removed by blowing air from the nozzle, so that drying can be performed efficiently. Yes.

JP 2001-330368 A

  By the way, a sheet-like processing target conveyed by a roll-to-roll method may be processed using infrared rays. In this case, when the processing target is overheated by infrared rays, there may be a problem that stress is generated due to thermal expansion or thermal contraction after the processing and the processing target is deformed. In order to suppress this, it is conceivable to perform processing while cooling the processing target. However, when processing is performed with air blowing and a heater as in the drying apparatus described in Patent Document 1, there is a case where the processing target cannot be sufficiently cooled even if cooling is performed by air blowing. In addition, if the air velocity or flow rate of the blown air is increased in order to sufficiently cool, a phenomenon such as fluttering of the sheet-like processing target occurs, which may adversely affect the processing target.

  The present invention has been made in order to solve such problems, and it is mainly intended to sufficiently suppress fluttering of the processing target while sufficiently cooling the processing target when the processing target is irradiated with infrared rays. Objective.

The infrared processing apparatus of the present invention is
An infrared processing apparatus that performs processing by emitting infrared rays to a sheet-like processing target,
Transport means for transporting the processing object in the transport direction in a roll-to-roll manner;
A heating element that emits infrared rays by heating, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element, and an infrared heater that emits infrared rays to the object to be treated;
A cooling means for cooling a portion irradiated with infrared rays from the infrared heater of the processing object with a liquid;
It is equipped with.

  In the infrared processing apparatus of the present invention, a heating element that emits infrared rays by heating and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element is conveyed in a roll-to-roll manner. Processing is performed by emitting infrared rays to a sheet-like processing target. Moreover, the part irradiated with the infrared rays from an infrared heater among process objects is cooled with a liquid. Therefore, it is possible to process the processing target with the infrared heater while cooling the processing target with the liquid. And since it cools using a liquid, compared with the case where it cools, for example using ventilation, cooling efficiency becomes high and it can fully cool a process target. Moreover, since it cools using a liquid, compared with the case where it cools using ventilation, the fluttering of a sheet-like process target can be suppressed sufficiently. In the infrared heater, a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm covers a heating element. Therefore, the infrared rays radiated from the infrared heater have an increased proportion of near infrared rays (infrared region having a wavelength of 0.7 to 3.5 μm). Near-infrared rays can efficiently perform processing (for example, drying, dehydration, etc.) of the processing target, such as being able to efficiently break hydrogen bonds in molecules such as water and solvent in the processing target. By using such an infrared heater, sufficient processing can be performed even when the temperature of the processing target is kept relatively low by the liquid. In addition, the infrared processing apparatus of the present invention may be configured as a continuous apparatus that radiates infrared rays to a processing target that is being transported while continuously transporting the processing target. It may be configured as an intermittent device that stops conveyance while processing by radiating. Moreover, the infrared heater should just be 1 or more, and may be provided with two or more. Furthermore, the infrared heater may include a refrigerant flow path through which a refrigerant for cooling the pipe can flow. The infrared heater may include a plurality of the tubes, and the refrigerant flow path may be a space surrounded by the plurality of tubes.

  In the infrared processing apparatus of the present invention, the cooling means may support the processing object so as to be transportable. Here, “supporting the processing target so that it can be transported” includes a case where the processing target is not transported by itself and supported so as not to interfere with transport, and a case where the processing target is transported by itself.

  In the infrared processing apparatus of the present invention, the cooling means may include a liquid flow path forming member that forms a liquid flow path through which the liquid can flow.

  In the infrared processing apparatus of the present invention having a liquid flow path forming member, the cooling means includes a belt conveyor that supports the processing target and includes a ring-shaped belt that can rotate together with the processing target in the transport direction. The liquid flow path forming member forms the liquid flow path so that the liquid passes inside the ring of the belt, and the liquid passing through the liquid flow path forming member and the liquid flow path Or at least one of the inner peripheral surface of the belt may be configured to be able to contact the side in contact with the processing target. In this case, since the processing target is supported by the belt conveyor, it is possible to transport the processing target while reducing the tension in the transport direction applied to the processing target from the transport unit. Thereby, the deformation | transformation of the conveyance target by tension | tensile_strength can be suppressed more. In addition, since the conveyance target is cooled via the belt, it is possible to further suppress adhesion of liquid (water droplets), foreign matter, and the like flowing through the liquid flow path to the back surface of the processing target. Here, the belt conveyor may include a driving unit that rotationally drives the belt, and the processing target may be conveyed by rotating the belt by the driving unit. In addition, the belt conveyor may be configured such that the processing target is not transported by itself, and the belt is driven to rotate by frictional force in accordance with the transport of the processing target (it is not driven to rotate by itself).

  In this case, the belt conveyor has a plurality of holes formed in the belt, and the infrared processing device includes an adsorption unit that depressurizes the inside of the hole of the belt and adsorbs the processing target to the belt. It may be. By so doing, the object to be processed is adsorbed to the belt, so that the object to be processed can be more uniformly cooled via the belt, and fluttering of the object to be processed can be further suppressed.

  In the infrared processing apparatus of the present invention having a liquid flow path forming member, the liquid flow path forming member may be a cooling roll that forms the liquid flow path therein.

  In the infrared processing apparatus according to the aspect of the invention having a liquid flow path forming member, the cooling means includes a ring-shaped belt that supports the processing target so as to be transportable and is rotatable in the transporting direction together with the processing target. The belt may be configured as the liquid flow path forming member that forms the liquid flow path therein.

  In the infrared processing apparatus of the present invention, the infrared heater may be arranged vertically above the processing target. In this case, for example, when the cooling unit cools the processing target from the vertically lower side, it is easy to directly irradiate the processing target with infrared rays having a wavelength of 3.5 μm or less from the infrared heater regardless of the position of the cooling unit.

  In the infrared processing device of the present invention having a liquid flow path forming member, the liquid flow path forming member opens toward the processing target side, and the liquid is in direct or indirect contact with the processing target. The liquid channel that can be circulated may be formed. Here, “indirect contact with the processing target” means contacting the processing target via another member. In this case, the cooling means includes the above-described belt conveyor, and the liquid flow path forming member is configured to allow the liquid to flow while the liquid is in contact with the processing target side of the inner peripheral surface of the belt. A path may be formed. By doing so, since the liquid is in contact with the belt, for example, the cooling efficiency can be further increased as compared with the case where the liquid cools the belt (and the processing target) via the liquid flow path forming member.

  In this case, the liquid flow path forming member may have an elastic body that is disposed at both ends of the opening in the transport direction and is in direct or indirect contact with the processing target. In this way, it is possible to further suppress the liquid from leaking to the outside from the opened portion of the liquid channel. In this case, the elastic body may surround the outer periphery of the opening. In this way, liquid leakage can be further suppressed.

  In the infrared processing apparatus of the present invention in which the liquid flow path forming member forms a liquid flow path opened toward the processing target side, the infrared heater may be disposed in the liquid flow path. In this way, the configuration of the infrared processing apparatus can be made compact compared to the case where the infrared heater and the liquid flow path forming member are separately disposed. Further, the surface of the infrared heater can be cooled by the liquid flowing through the liquid flow path. Here, “the infrared heater is disposed in the liquid flow path” means that at least a part of the infrared heater may be disposed in the liquid flow path. For example, the infrared heater may penetrate the liquid channel, or may penetrate the liquid channel and the liquid channel forming member.

  In the infrared processing apparatus of the present invention in which the infrared heater is disposed in the liquid flow path, the liquid may be in an infrared region having an infrared transmission maximum wavelength of 3.5 μm or less. In this case, since the liquid easily transmits infrared rays having a wavelength of 3.5 μm or less, it is possible to further suppress a reduction in processing efficiency due to the liquid around the infrared heater absorbing infrared rays having a wavelength of 3.5 μm or less. The liquid may have a total transmittance of infrared light having a wavelength of 3.5 μm or less of 80% or less.

  In the infrared processing apparatus of the present invention, the liquid flow path forming member may be made of an infrared reflective material whose surface forming the liquid flow path reflects infrared light having a wavelength of 3.5 μm or less. In this way, the liquid flow path forming member is formed of an infrared reflecting material on the surface forming the liquid flow path, and the processing target side is open, so that the wavelength emitted from the infrared heater in a direction other than the processing target is 3.5 μm. The following infrared rays can be reflected toward the object to be processed. Thereby, processing efficiency can be improved more. Note that “the surface forming the liquid channel is made of an infrared reflecting material that reflects infrared rays having a wavelength of 3.5 μm or less” means that all of the liquid channel forming members are made of an infrared reflecting material. The case where only the surface which forms a liquid flow path is comprised with the infrared reflective material is included.

  The infrared processing apparatus of the present invention may perform the processing of the processing target in a reduced pressure or vacuum atmosphere. It is relatively difficult to blow air under reduced pressure, and it cannot blow air under vacuum. Therefore, when processing is performed in such an atmosphere, it is highly significant to cool the processing target using a liquid.

The infrared processing method of the present invention comprises:
Infrared ray having conveyance means for conveying a sheet-like processing target in the conveyance direction by a roll-to-roll method, a heating element that emits infrared rays by heating, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element An infrared processing method using an infrared processing device comprising a heater,
Radiating infrared rays from the infrared heater to the object to be treated, and cooling the portion irradiated with infrared rays from the infrared heater among the objects to be treated with a liquid;
Is included.

  In the infrared processing method of the present invention, effects similar to those of the above-described infrared processing apparatus of the present invention, for example, when processing by emitting infrared rays to the processing target, the processing target is sufficiently cooled, and the fluttering of the processing target is sufficient. The effect of suppressing is acquired. In addition, by using an infrared heater having a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element, sufficient processing can be performed even when the temperature of the processing target is kept relatively low by the liquid. Can do. In this infrared processing method, various aspects of the above-described infrared processing apparatus may be adopted, and steps for realizing each function of the above-described infrared processing apparatus may be added.

1 is a longitudinal sectional view of a drying device 10. FIG. It is AA sectional drawing of FIG. It is a longitudinal cross-sectional view of the drying apparatus 110 of a modification. It is a longitudinal cross-sectional view of the drying apparatus 210 of a modification. It is BB sectional drawing of FIG. 5 is a perspective view of a second flow path forming member 270. FIG.

  Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view of a drying apparatus 10 which is an embodiment of an infrared processing apparatus of the present invention. 2 is a cross-sectional view taken along the line AA in FIG. The drying apparatus 10 performs drying of the coating film 82 applied on the sheet 80 made of PET film using infrared rays. The furnace body 12, the transport mechanism 20, the infrared heater 30, the cooling mechanism 60, and the like. And a controller 90. The drying apparatus 10 processes (drys) the sheet 80 on which the coating film 82 to be processed (drying target) is formed on the upper surface while being transported by the transport mechanism 20 in the transport direction (right direction in the drawing) by the roll-to-roll method. It is configured as a continuous drying furnace.

  The furnace body 12 is a heat insulating structure formed in a substantially rectangular parallelepiped shape, and has openings 15 and 16 on the front end face 13 and the rear end face 14, respectively. The opening 15 serves as a carry-in entrance when carrying the sheet 80 into the furnace body 12. The opening 16 serves as a carry-out port when carrying out the sheet 80 to the outside of the furnace body 12. The furnace body 12 has a length from the front end face 13 to the rear end face 14 of, for example, 1 m to 6 m. In the space 12 a inside the furnace body 12, an infrared heater 30, a belt conveyor 61 of the cooling mechanism 60, and the like are arranged.

  The transport mechanism 20 is a mechanism that transports the sheet 80 in the transport direction by a roll-to-roll method. The transport mechanism 20 includes a roll 21 provided in front of the furnace body 12 (left side in FIG. 1) and a roll 22 provided in the rear of the furnace body 12 (right side in FIG. 1). The transport mechanism 20 includes a drive roller 23 and a driven roller 25 disposed between the roll 21 and the opening 15 in the transport direction, and a drive roller 24 and a drive roller 24 disposed between the opening 16 and the roll 22 in the transport direction. And a driven roller 26. The driving roller 23 and the driven roller 25 are configured as a pair of nip rolls. The driving roller 23 and the driven roller 25 convey the sheet 80 while separating the tension between the upstream and downstream in the conveying direction of the sheet 80 with this portion as a boundary by sandwiching the sheet 80 from above and below. The driving roller 24 and the driven roller 26 are similarly configured as a pair of nip rolls.

  The infrared heater 30 is a device that irradiates the coating film 82 passing through the furnace body 12 with infrared rays, and is vertically above the sheet 80 (and the coating film 82) (the surface side of the sheet 80, the upper side in FIG. 1). Is arranged. A plurality of infrared heaters 30 (six in this embodiment) are arranged at substantially equal intervals in the front-rear direction of the furnace body 12. The plurality of infrared heaters 30 have the same configuration, and are attached so that the longitudinal direction thereof is orthogonal to the conveying direction of the coating film 82 (the longitudinal direction is the left-right direction in FIG. 2). Hereinafter, the configuration of one infrared heater 30 will be described.

  As shown in FIGS. 1 and 2, the infrared heater 30 includes a heater body 38 formed so that a filament 32 as a heating element is surrounded by an inner tube 36, and an outer tube formed so as to surround the heater body 38. 40, a bottomed cylindrical cap 42 that is airtightly fitted to both ends of the outer tube 40, a first flow path 48 that is formed between the heater body 38 and the outer tube 40 and through which the first refrigerant can flow. And a temperature sensor 37 for detecting the surface temperature of the outer tube 40.

  The filament 32 emits infrared rays when heated, and is made of W (tungsten) in this embodiment. Other examples of the material of the filament 32 include Ni—Cr alloy, Mo, Ta, and Fe—Cr—Al alloy. When the filament 32 is supplied with electric power from the electric power supply source 50 and heated to 700 to 1700 ° C. for example, the filament 32 emits infrared rays having a peak in an infrared region having a wavelength of 3.5 μm or less (for example, around 3 μm). . The electrical wiring 34 connected to the filament 32 is drawn out to the outside airtightly through a wiring drawing portion 44 provided in the cap 42, and is connected to the power supply source 50. The inner tube 36 and the outer tube 40 are formed of an infrared absorbing material that functions as a filter that passes infrared rays having a wavelength of 3.5 μm or less among the electromagnetic waves radiated from the filament 32 and absorbs infrared rays having a wavelength exceeding 3.5 μm. ing. Examples of such infrared transmitting materials used for the inner tube 36 and the outer tube 40 include germanium, silicon, sapphire, calcium fluoride, barium fluoride, zinc selenide, zinc sulfide, chalcogenide glass, and transmissive alumina ceramics. Other examples include quartz glass that can transmit infrared rays. In this embodiment, both the inner tube 36 and the outer tube 40 are made of quartz glass.

  The heater body 38 is supported at both ends by holders 49 disposed inside the cap 42. Each cap 42 has a first refrigerant inlet / outlet 46. The first refrigerant supplied from the first refrigerant supply source 52 flows from one first refrigerant inlet / outlet 46 into the first channel 48, passes through the first channel 48 and the other first refrigerant inlet / outlet 46, and is externally supplied. To flow. The 1st refrigerant | coolant which flows through the 1st flow path 48 is air, an inert gas, etc., for example, contacts the inner tube 36 and the outer tube 40, and cools each tube 36 and 40 by taking heat away.

  In the infrared heater 30 configured in this manner, when infrared rays having a peak at a wavelength of 3.5 μm or less are radiated from the filament 32, infrared rays having a wavelength of 3.5 μm or less pass through the inner tube 36 and the outer tube 40. The coating film 82 of the sheet 80 passing through the furnace body 12 is irradiated. Infrared light having this wavelength is said to be excellent in the ability to break the hydrogen bonds of moisture and solvent contained in the coating film 82 of the sheet 80, and can dry by efficiently evaporating water and solvent. The inner tube 36 and the outer tube 40 absorb infrared rays having a wavelength exceeding 3.5 μm, but are cooled by the first refrigerant flowing through the first flow path 48, and thus are less than the ignition point of the solvent evaporating from the coating film 82. It is possible to maintain the temperature at (for example, 200 ° C. or lower).

  The cooling mechanism 60 is a mechanism that cools a portion of the coating film 82 that is irradiated with infrared rays from the infrared heater 30 with a second refrigerant that is liquid while supporting the coating film 82 to be transportable. The cooling mechanism 60 includes a belt conveyor 61 and a second refrigerant supply source 54.

  The belt conveyor 61 is a device that supports the vertically lower side of the sheet 80 (the back side of the sheet 80 and the lower side in FIG. 1) and conveys the sheet 80 in the conveying direction. The belt conveyor 61 includes a belt 62, a driving roller 63, a driving roller 64, a water cooling roll 65, and an adsorption roll 66. The belt 62 is a ring-shaped member that can rotate together with the sheet 80 in the conveyance direction (rotate clockwise in FIG. 1). The belt 62 is looped around the drive roller 63, the drive roller 64, the water cooling roll 65, and the suction roll 66. The belt 62 includes an upper portion 62a which is a portion on the coating film 82 side (upper side in FIG. 1) and a lower portion 62b which is a portion on the opposite side (lower side in FIG. 1) from the coating film 82. The upper portion 62 a is in contact with the back surface of the sheet 80 and supports the sheet 80 and the coating film 82. The belt 62 is formed with a number of holes (not shown) penetrating the belt 62 in the thickness direction.

  The driving rollers 63 and 64 are rollers disposed on the front side (left side in FIG. 1) and the rear side (right side in FIG. 1) in the space 12a, respectively. The driving roller 63 and the driving roller 64 are driven to rotate, whereby the belt 62 rotates. A plurality of water cooling rolls 65 and suction rolls 66 are arranged between the driving roller 63 and the driving roller 64 in the transport direction. In the present embodiment, three water-cooled rolls 65 and two suction rolls 66 are disposed, and the water-cooled rolls 65 and the suction rolls 66 are alternately disposed. The water-cooled roll 65 is a cylindrical member that forms a second flow path 65a as a liquid flow path through which the second refrigerant can flow. The water-cooled roll 65 includes an outer tube that contacts the inner peripheral surface of the belt 62 (the lower surface of the upper portion 62a and the upper surface of the lower portion 62b), an inner tube that is arranged concentrically with the outer tube and has a smaller diameter than the outer tube. The space between the outer tube and the inner tube is a second flow path 65a. Moreover, the water cooling roll 65 has two 2nd refrigerant | coolant inlets / outlets which are not shown in figure which lead to the exterior of the water cooling roll 65 from the 2nd flow path 65a. The second refrigerant supplied from the second refrigerant supply source 54 flows into the second flow path 65a from one second refrigerant inlet / outlet and flows to the outside through the second flow path 65a and the other second refrigerant inlet / outlet. It is like that. The second refrigerant is a liquid such as water, for example, and indirectly contacts the coating film 82 through the outer tube of the water-cooling roll 65, the belt 62 (upper portion 62a), and the sheet 80 to cool it. The suction roll 66 is a cylindrical member having many holes (not shown) formed on the outer peripheral surface. A large number of holes of the suction roll 66 are connected to the inside of the suction roll 66 via an air intake device 56 disposed outside the furnace body 12 through piping. In addition, the numerous holes of the suction roll 66 are configured to communicate with the numerous holes of the belt 62 described above at the upper end of the suction roll 66. Thereby, when the intake device 56 performs intake, the inside of the numerous holes of the upper portion 62a of the belt 62 is decompressed through the numerous holes of the piping and the suction roll 66 and comes into contact with the upper portion 62a of the belt 62. The sheet 80 (and the coating film 82) is adsorbed on the upper portion 62a. The water cooling roll 65 and the suction roll 66 are both configured as driven rollers, and rotate due to frictional force with the inner peripheral surface of the belt 62 as the belt 62 rotates. The water-cooled roll 65 and the suction roll 66 are preferably supported by bearings with relatively little sliding resistance, such as oil bath type bearings. In the present embodiment, the drive roller 63, the drive roller 64, the water cooling roll 65, and the suction roll 66 are not present in the region directly below the infrared heater 30, and are shifted from the infrared heater 30 in the front-rear direction. It was supposed to be arranged to do.

  The sheet 80 is made of a PET film. The sheet 80 is not particularly limited, but has a thickness of 10 to 100 μm and a width of 200 to 300 mm, for example. The coating film 82 is applied to the upper surface of the sheet 80 and is used as a thin film for MLCC (multilayer ceramic capacitor) after drying, for example. The coating film 82 includes, for example, ceramic powder or metal powder, an organic binder, and an organic solvent.

  The controller 90 is configured as a microprocessor centered on a CPU. The controller 90 outputs a control signal to the rolls 21 and 22 of the transport mechanism 20, the drive rollers 23 and 24, and the drive rollers 63 and 64 of the belt conveyor 61, thereby switching between rotation and stop of these and rotating speed. To control. Thereby, the controller 90 adjusts the tension applied to the sheet 80 in the conveyance direction, and adjusts the passage time of the coating film 82 in the furnace body 12. In addition, the controller 90 outputs a control signal for adjusting the magnitude of power supplied from the power supply source 50 to the filament 32 to the power supply source 50 to individually control the temperature of the filament 32 of the infrared heater 30. To do. In addition, the controller 90 inputs the temperature of the outer tube 40 detected by the temperature sensor 37 that is a thermocouple, or outputs a control signal to an on-off valve or a flow rate adjustment valve (not shown) of the first refrigerant supply source 52. The flow rate of the first refrigerant flowing through the first flow path 48 of the infrared heater 30 is individually controlled. Further, the controller 90 outputs a control signal to an on-off valve or a flow rate adjustment valve (not shown) of the second refrigerant supply source 54 to control the flow rate of the second refrigerant flowing through the second flow path 65a of the second flow path 65a. .

  Next, how the coating film 82 is dried using the drying apparatus 10 thus configured will be described. First, the controller 90 rotates the rolls 21 and 22, the driving rollers 23 and 24, and the driving rollers 63 and 64 to start conveying the sheet 80. As described above, the driving rollers 23 and 24 and the driven rollers 25 and 26 function as nip rolls, so that a portion of the sheet 80 between the driving rollers 23 and 24 has a tension from the rolls 21 and 22. Hardly takes. In the furnace body 12, the upper portion 62a of the belt 62 of the belt conveyor 61 conveys the sheet 80 while supporting the sheet 80 from below. Therefore, the tension applied to the portion of the sheet 80 between the driving roller 23 and the driving roller 24 can be further reduced. In the present embodiment, the controller 90 controls the rotational speed of the belt 62 so that the tension applied to the sheet 80 in the furnace body 12 is suppressed to such a small value that the sheet 80 does not deform (extend). .

  When the controller 90 rotates the rollers of the transport mechanism 20 and the belt conveyor 61 in this way, the sheet 80 is unwound from the roll 21 disposed at the left end of the drying apparatus 10. The sheet 80 is coated with a coating film 82 on the upper surface by a coater (not shown) immediately before being brought into the furnace body 12 from the opening 15. And the sheet | seat 80 with which the coating film 82 was apply | coated is conveyed in the furnace body 12. FIG. At this time, the controller 90 controls the power supply source 50, the first refrigerant supply source 52, and the second refrigerant supply source 54. Thereby, while the sheet 80 passes through the furnace body 12, the coating film 82 formed on the upper surface of the sheet 80 is dried by being irradiated with infrared rays from the infrared heater 30. At the same time, the second refrigerant flowing through the second flow path 65a cools the upper portion 62a of the belt 62, whereby the sheet 80 and the coating film 82 are cooled. In this embodiment, the temperature of the sheet 80 is equal to or lower than the glass transition point (about 70 ° C.) of the PET film so as not to cause problems such as deformation due to stress caused by thermal expansion and contraction. The temperature and flow rate of the second refrigerant supplied from the second refrigerant supply source 54 to the second flow path 65a are predetermined so as to be a predetermined value (for example, 60 ° C., 50 ° C., 45 ° C., etc.). did. Thus, while the sheet 80 and the coating film 82 are cooled by the second refrigerant, the coating film 82 is dried by infrared rays to form a thin film. Thereafter, the sheet 80 and the thin film (the coating film 82 after drying) are carried out from the opening 16. The unloaded thin film is wound together with the sheet 80 on a roll 22 installed at the right end of the furnace body 12. Thereafter, the thin film is peeled off from the sheet 80, cut into a predetermined shape and laminated, and an MLCC is manufactured. Note that the outer peripheral surface of the outer tube 40 of the infrared heater 30 is cooled by the first refrigerant. The controller 90 adjusts the flow rate of the first refrigerant to maintain the outer tube 40 at a temperature lower than the ignition point of the solvent (for example, 200 ° C. or lower).

  Here, as described above, since the infrared heater 30 has the inner tube 36 and the outer tube 40 that absorb infrared rays having a wavelength exceeding 3.5 μm, infrared rays of 3.5 μm or less are emitted from the infrared heater 30. Radiated mainly. The infrared rays in this wavelength region can be dried by efficiently evaporating water and solvent from the coating film 82 even when the coating film 82 is cooled by the second refrigerant and kept at a relatively low temperature. Further, the sheet 80 which is a PET film is hardly heated by infrared rays in this wavelength region. Moreover, the sheet 80 is maintained at a temperature below its own glass transition point by the second refrigerant. By drying the coating film 82 while cooling the coating film 82 and the sheet 80 in this manner, it is possible to suppress the occurrence of stress in the coating film 82 and the sheet 80 due to thermal expansion and shrinkage after drying. Deformation of the film 82 can be suppressed.

  Here, the correspondence between the components of the present embodiment and the components of the present invention will be clarified. The coating film 82 of this embodiment corresponds to a processing target of the present invention, the transport mechanism 20 corresponds to a transport means, the filament 32 corresponds to a heating element, the inner tube 36 and the outer tube 40 correspond to tubes, and infrared rays. The heater 30 corresponds to an infrared heater, the second refrigerant corresponds to a liquid, and the cooling mechanism 60 corresponds to a cooling unit. The second flow path 65a corresponds to the liquid flow path, the water cooling roll 65 corresponds to the liquid flow path forming member and the cooling roll, and the suction roll 66 and the suction device 56 correspond to the suction means. In the present embodiment, an example of the infrared processing method of the present invention is also clarified by describing the operation of the drying apparatus 10.

  According to the drying apparatus 10 of this embodiment described above, it has the filament 32 that emits infrared rays by heating, and the inner tube 36 and the outer tube 40 that absorb infrared rays having a wavelength exceeding 3.5 μm and cover the filament 32. The infrared heater 30 radiates infrared rays to the sheet-like coating film 82 conveyed by the roll-to-roll method to perform drying. Moreover, the part (part in the furnace body 12) irradiated with the infrared rays from the infrared heater in the coating film 82 is cooled by the second refrigerant. Therefore, the coating film 82 can be dried by the infrared heater 30 while the coating film 82 is cooled by the second refrigerant. And since it cools using the 2nd refrigerant | coolant which is a liquid, compared with the case where it cools, for example using ventilation, cooling efficiency becomes high and the coating film 82 can fully be cooled. Moreover, since it cools using a liquid, the flapping of the sheet-like coating film 82 can fully be suppressed compared with the case where it cools using ventilation. For this reason, the bad influence to the coating film 82 by ventilation can fully be suppressed. Specifically, when the sheet 80 or the coating film 82 is blown, the sheet 80 or the coating film 82 flutters due to the blowing, and the coating film 82 is deformed or the sheet 80 flutters. Although it may not be applied correctly, this can be further suppressed. Further, when air is blown to the surface of the coating film 82, the surface of the coating film 82 may be roughened, but this can be further suppressed. In the infrared heater 30, the inner tube 36 and the outer tube 40 made of an infrared absorbing material cover the filament 32. Therefore, the infrared rays radiated from the infrared heater 30 have an increased ratio of near infrared rays (infrared region having a wavelength of 0.7 to 3.5 μm). Near-infrared rays can efficiently cut hydrogen bonds in molecules such as water and solvent in the coating film 82, so that the coating film 82 can be efficiently dried. By using such an infrared heater 30, the temperature of the coating film 82 and the sheet 80 is kept relatively low by the second refrigerant, and the evaporation rate of moisture and solvent from the coating film 82 is increased and sufficient drying is performed. It can be carried out.

  Moreover, the cooling mechanism 60 supports the coating film 82 by the belt conveyor 61 so that conveyance is possible. The cooling mechanism 60 indirectly contacts the coating film 82 with a liquid second refrigerant to cool the coating film 82, and the cooling mechanism 60 supports the coating film 82 by this indirect contact.

  The cooling mechanism 60 includes a belt conveyor 61 that has a ring-shaped belt 62 that supports the coating film 82 and can rotate in the transport direction together with the coating film 82, and the water-cooling roll 65 is located inside the ring of the belt 62. The second flow path 65a is formed so that the second refrigerant passes through the second flow path 65a, and the second flow path 65a can contact the lower surface of the upper portion 62a that is the side in contact with the coating film 82 on the inner peripheral surface of the belt 62. It is configured. Thereby, since the sheet | seat 80 and the coating film 82 are supported by the belt conveyor 61, the sheet | seat 80 and the coating film 82 can be conveyed, making the tension | tensile_strength of the conveyance direction added from the conveyance mechanism 20 small. Thereby, the deformation | transformation of the sheet | seat 80 by tension | tensile_strength can be suppressed and the deformation | transformation of the coating film 82 can be suppressed more. In addition, since the sheet 80 and the coating film 82 are cooled via the belt 62, the second refrigerant (water droplets) and foreign matters flowing through the second flow path 65a are further prevented from adhering to the back surface of the sheet 80 and the coating film 82. can do. Furthermore, driving rollers 23 and 24 and driven rollers 25 and 26 that are nip rolls are arranged on both sides in the conveying direction of the portion of the sheet 80 and the coating film 82 that passes through the furnace body 12. The tension in the transport direction applied to the film 82 can be further suppressed.

  Further, the belt conveyor 61 has a plurality of holes formed in the belt 62, and the drying device 10 has a suction roll 66 that depressurizes the inside of the holes of the belt 62 and sucks the sheet 80 and the coating film 82 onto the belt 62. An air intake device 56 is provided. Therefore, by adsorbing the sheet 80 and the coating film 82 to the belt 62, the sheet 80 and the coating film 82 can be more uniformly cooled via the belt 62, and the fluttering of the sheet 80 and the coating film 82 is further suppressed. can do.

  The infrared heater 30 is arranged vertically above the coating film 82. Therefore, it is easy to directly irradiate the coating film 82 with infrared rays having a wavelength of 3.5 μm or less from the infrared heater, regardless of the position of the cooling mechanism 60 that cools the sheet 80 and the coating film 82 from vertically below.

  Further, the drive roller 63, the drive roller 64, the water cooling roll 65, and the suction roll 66 are not present in the region directly below the infrared heater 30, and are disposed so as to be shifted in the front-rear direction from the infrared heater 30. Has been. Therefore, each roller becomes difficult to be heated by the infrared heater 30, and the cooling efficiency of the sheet 80 and the coating film 82 by the second refrigerant is improved.

  It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.

  For example, in the above-described embodiment, the sheet-like coating film 82 formed on the sheet 80 is to be dried, but is not limited to this as long as the drying target is a sheet. For example, the sheet 80 itself unrolled from the roll 21 and conveyed may be a drying target.

  In the embodiment described above, the water cooling roll 65 cools the sheet 80 and the coating film 82 via the belt 62 of the belt conveyor 61, but not limited to this, the water cooling roll 65 directly contacts the back surface of the sheet 80. The sheet 80 and the coating film 82 may be cooled. In this case, the drying apparatus 10 may not include the belt conveyor 61 (belt 62).

  In the embodiment described above, the water cooling roll 65 and the suction roll 66 are driven rollers, but one or more of them may be driving rollers.

  In the above-described embodiment, the belt conveyor 61 has the driving rollers 63 and 64 that rotationally drive the belt 62, and conveys the sheet 80 and the coating film 82 by rotationally driving the belt 62 by the driving rollers 63 and 64. However, it is not limited to this. For example, it is good also as a structure provided with a driven roller instead of the driving roller 63 and the driving roller 64. FIG. That is, the belt conveyor 61 may not convey the sheet 80 or the coating film 82 by itself, and the belt 62 may be rotated by frictional force with the sheet 80 as the sheet 80 is conveyed by the conveying mechanism 20. .

  In the embodiment described above, the belt 62 of the belt conveyor 61 may be formed of an infrared reflecting material that reflects infrared rays having a wavelength of 3.5 μm or less. Examples of such an infrared reflecting material include metals such as SUS304 and aluminum. By so doing, the infrared rays from the infrared heater 30 can be reflected by the belt 62 and radiated to the coating film 82, so that the coating film 82 can be dried more efficiently. In this case, the belt 62 is preferably made of a material having an infrared total reflectance of 80% or more with a wavelength of 3.5 μm or less. Moreover, when it is set as the aspect which the water cooling roll 65 mentioned above contacts the back surface of the sheet | seat 80 directly, you may form the member which comprises the water cooling roll 65 (especially outer peripheral surface of the water cooling roll 65) with an infrared reflective material. Further, the belt 62 and the water-cooled roll 65 are not limited to being formed of an infrared reflecting material, and an infrared reflecting layer made of an infrared reflecting material may be formed on the surface. Examples of the material for the infrared reflection layer include gold, platinum, and aluminum. The infrared reflecting layer may be formed by coating the surface of the belt 62 or the water-cooled roll 65 by a film forming method such as sputtering, CVD, or thermal spraying.

  In the above-described embodiment, the second refrigerant is circulated through the second flow path 65a in the water-cooled roll 65 disposed on the inner side of the inner peripheral surface of the belt 62, but is not limited thereto. For example, the second flow path may be formed inside the belt 62. FIG. 3 is a vertical cross-sectional view of a modified drying apparatus 110. The modified drying apparatus 110 includes a cooling mechanism 160 instead of the cooling mechanism 60. The cooling mechanism 160 includes a belt conveyor 161 and a second refrigerant supply source 54. The belt conveyor 161 includes a belt 162 having a second flow path 162c therein, drive rollers 63 and 64, and a plurality (five in FIG. 3) of driven rollers 165. The belt 162 is formed by integrally molding or welding a metal plate, for example, and the outer wall 162d constituting the outer peripheral portion of the ring, the inner wall 162e constituting the inner peripheral portion, the outer wall 162d and the inner wall 162e are left and right. It has a left side wall and a right side wall (not shown) that are connected at the ends (the front side in FIG. 3-the end in the back direction). A space surrounded by the outer wall 162d, the inner wall 162e, the left side wall, and the right side wall is a second flow path 162c. The belt 162 is in contact with the driving rollers 63 and 64 and the driven roller 165 on the inner peripheral surface of the inner wall 162e, and is wound around these in a ring shape. The belt 162 has an upper portion 162a that is a portion on the coating film 82 side (upper side in FIG. 3), and a lower portion 162b that is a portion on the opposite side (lower side in FIG. 3) from the coating film 82. The upper portion 162a (in particular, the upper surface of the outer wall 162d) is in contact with the back surface of the sheet 80 and supports the sheet 80 and the coating film 82. The belt 162 has a second refrigerant inlet / outlet (not shown) that leads from the second flow path 162c to the outside of the belt 162, one on each of the left side wall and the right side wall. The second refrigerant supplied from the second refrigerant supply source 54 flows into the second channel 162c from one second refrigerant inlet / outlet, and flows to the outside through the second channel 162c and the other second refrigerant inlet / outlet. It is like that. The pipe from the second refrigerant supply source 54 to one second refrigerant inlet / outlet port is connected by a flexible pipe made of, for example, resin so as to follow the rotation of the belt 162. The belt 162 is preferably formed of the above-described infrared reflecting material. Also in the drying apparatus 110 of this modified example, the part irradiated with infrared rays from the infrared heater 30 in the coating film 82 can be cooled by the second refrigerant flowing through the second flow path 162c, as in the above-described embodiment. Therefore, similarly to the above-described embodiment, when the coating film 82 is irradiated with infrared rays and processed, the sheet 80 and the coating film 82 are sufficiently cooled, and the fluttering of the sheet 80 and the coating film 82 is sufficiently suppressed. it can. Further, since the entire belt 162 can be cooled as compared with the above-described embodiment, the sheet 80 and the coating film 82 can be cooled more uniformly. Further, the sheet 80 and the coating film 82 are easily cooled sufficiently. The belt 162 may include a plurality of columnar spacers that support the outer wall 162d and the inner wall 162e up and down to keep the distance between them.

  In the embodiment described above, the outer pipe of the water cooling roll 65 forming the second flow path 65a is in contact with the inner peripheral surface of the belt 62. However, the present invention is not limited to this, and the second refrigerant is directly applied to the belt 62. You may touch. FIG. 4 is a vertical cross-sectional view of a modified drying apparatus 210. 5 is a cross-sectional view taken along the line BB in FIG. FIG. 6 is a perspective view of the second flow path forming member 270. In FIG. 6, the second refrigerant inlet / outlet 272 is not shown. As shown in FIG. 4, in the drying device 210 according to the modification, the cooling mechanism 260 includes a belt conveyor 261 and a second flow path forming member 270. The belt conveyor 261 has the same configuration as the belt conveyor 61 described above except that the water-cooling roll 65 and the suction roll 66 are not provided. The second flow path forming member 270 is a structure that is disposed between the upper part 62a and the lower part 62b of the belt 62 and is formed in a substantially rectangular parallelepiped. An end (upper end in FIGS. 4 to 6) of the second flow path forming member 270 on the upper portion 23 a side is an opening 271. The second flow path forming member 270 has a substantially rectangular parallelepiped cavity having the opening 271 toward the sheet 80 or the coating film 82, and the inside of the cavity is a second flow path 270a. The second flow path forming member 270 is formed with two second refrigerant inlets / outlets 272 (see FIG. 5) that connect the second flow path 270a and the outside of the second flow path forming member 270. The second refrigerant supplied from the second refrigerant supply source 54 flows from one second refrigerant inlet / outlet 272 (left side in FIG. 5) into the second channel 270a, and the second channel 270a and the other second refrigerant inlet / outlet. It flows through 272 (the right side in FIG. 5) to the outside. In addition, the second flow path forming member 270 includes a leakage prevention rubber 275 that is an elastic body made of resin surrounding the outer periphery of the opening 271. The leakage prevention rubber 275 includes leakage prevention rubbers 275a and 275b (see FIGS. 4 and 6) disposed on both sides of the opening 271 in the conveyance direction (both in the front-rear direction) and leakage disposed on both sides of the opening 271 in the left and right direction. Prevention rubbers 275c and 275d (see FIGS. 5 and 6). The leakage preventing rubber 275 is disposed in a state where the upper surface is pressed against the inner peripheral surface of the belt 62 (the lower surface of the upper portion 62a). Also in the drying apparatus 210 of this modified example, the part irradiated with infrared rays from the infrared heater 30 in the coating film 82 can be cooled by the second refrigerant flowing through the second flow path 270a, as in the above-described embodiment. Therefore, similarly to the above-described embodiment, when the coating film 82 is irradiated with infrared rays and processed, the sheet 80 and the coating film 82 are sufficiently cooled, and the fluttering of the sheet 80 and the coating film 82 is sufficiently suppressed. it can. Further, since the second refrigerant is in direct contact with the belt 62, for example, the second refrigerant passes through the outer pipe of the water-cooling roll 65 and the liquid flow path forming member such as the second flow path forming member 270 described above. In addition, the cooling efficiency can be further increased as compared with the case of cooling the processing target). Further, since the leakage preventing rubber 275 is in contact with the inner peripheral surface of the belt 62 that is in direct contact with the second refrigerant, the second refrigerant flows from the opened portion (opening 271) of the second flow path 270a when the sheet 80 is conveyed. Leakage to the outside can be further suppressed. Further, the leakage preventing rubber 275b located in the transport direction (right direction) also plays a role of scraping off the second refrigerant adhering to the belt 62. Note that the leakage preventing rubber 275 may include only the leakage preventing rubbers 275a and 275b located on both sides in the transport direction. In other words, the leak prevention rubbers 275c and 275d may not be elastic. This is because the second refrigerant is relatively likely to leak in the direction along the transport direction. Alternatively, the leakage prevention rubber 275 may not be provided, and the upper end of the second flow path forming member 270 may be in direct contact with the belt 62. Further, in the drying device 210 of the modified example, the second refrigerant may be in direct contact with the back surface of the sheet 80 assuming that the belt conveyor 261 is not provided. Or in the drying apparatus 210 of this modification, you may arrange | position the infrared heater 30 in the 2nd flow path 270a. For example, you may attach so that the infrared heater 30 may penetrate the 2nd flow path formation member 270 and the 2nd flow path 270a perpendicularly | vertically to a conveyance direction (left-right direction of FIG. 5). By doing so, the surface of the infrared heater 230 can also be cooled by the second refrigerant. In this case, the second flow path forming member 270 is preferably formed of an infrared reflecting material. Moreover, it is preferable to use the liquid in the infrared region whose infrared transmission maximum wavelength is 3.5 μm or less as the second refrigerant. In addition, it is preferable to use a liquid having an infrared total transmittance of 80% or more with a wavelength of 3.5 μm or less. By using such a material that easily transmits infrared rays, infrared rays from the infrared heater 230 can be efficiently emitted to the coating film 82. Similarly, the belt 62 and the sheet 80 are preferably made of a material that easily transmits infrared rays. When the sheet 80 itself is a processing target, the sheet 80 does not necessarily need to transmit infrared rays.

  In the embodiment described above, the atmosphere of the space 12a during drying was not mentioned, but the space 12a may be under normal pressure, or may be under reduced pressure or under vacuum. Here, it is relatively difficult to blow air under reduced pressure, and it cannot blow air under vacuum. Therefore, when drying is performed in such an atmosphere, it is highly significant to cool the drying target such as the sheet 80 and the coating film 82 using the second refrigerant that is a liquid.

  In the above-described embodiment, the drying apparatus 10 includes a blower that blows air toward the surface of the coating film 82 or in parallel with the surface of the coating film 82, or exhaust that exhausts the atmosphere of the space 12 a that includes the blowing. An apparatus may be further provided. Even if the drying apparatus 10 includes an air blower or the like, the sheet 80 and the coating film 82 can be sufficiently cooled by the second refrigerant, so that the air volume is appropriately adjusted so as to sufficiently suppress the above-described adverse effect on the coating film 82 due to the air blowing. And wind speed can be reduced. And by performing ventilation, since the water | moisture content and solvent which evaporated from the coating film 82 can be removed rapidly, drying efficiency can be improved more. Moreover, flapping of the sheet | seat 80 and the coating film 82 can also be suppressed more because an air blower blows toward the surface of the part currently supported by the belt conveyor 61 among the sheet | seat 80 and the coating film 82. FIG. Moreover, the drying apparatus 10 has a heater with a nozzle provided with an infrared heater 30 and a nozzle serving as an air outlet, and both infrared radiation and air blowing may be performed by this heater with a nozzle.

  In the above-described embodiment, the drying apparatus 10 is a continuous type, but is not limited to this as long as the processing target is conveyed by a roll-to-roll method, and may be an intermittent feed type, for example. In the case of the intermittent feed type, the drying apparatus 10 includes, for example, a coating film forming process for forming the coating film 82 on the sheet 80 and a loading process for transporting the sheet 80 and bringing the coating film 82 into the furnace body 12. And a drying process in which the conveyance of the sheet 80 is stopped inside the furnace body 12 and the coating film 82 is dried, and an unloading process in which the sheet 80 is conveyed and the dried coating film 82 is unloaded may be performed. . At this time, the drying furnace 10 may simultaneously perform the drying process of the coating film 82 and the coating film forming process of the next coating film 82 so that the plurality of coating films 82 can be continuously and efficiently dried. Similarly, you may perform simultaneously the carrying-out process of the coating film 82 after drying, and the carrying-in process of the coating film 82 to dry next. By adopting the intermittent feed method, the drying furnace 10 stops the conveyance of the sheet 80 in the drying process, so that the coating film 82 can be accurately printed when the coating film 82 is formed by screen printing or the like in the coating film forming process. .

  In the above-described embodiment, the coating 82 that is a drying target is exemplified as a thin film for MLCC (multilayer ceramic capacitor) after drying, but the drying target is not limited thereto. For example, the coating film 82 may be a coating film that serves as an electrode for a lithium ion secondary battery. As such a coating film, for example, an electrode material paste obtained by kneading an electrode material (positive electrode active material or negative electrode active material), a binder, a conductive material, and a solvent together on the sheet 80 can be used. Further, the sheet 80 in this case may be a metal sheet such as aluminum or copper. Alternatively, the coating film 82 may be used as a thin film for LTCC (low temperature fired ceramics) or other green sheets.

  In the embodiment described above, the drying apparatus 10 dries the coating film 82 using infrared rays. However, the drying apparatus 10 is not limited to a drying furnace as long as it is an infrared treatment apparatus that treats a processing target using infrared rays. Examples of other treatments using infrared rays include chemical reactions such as cross-linking and imidization of the treatment target, dehydration, annealing, and the like.

  DESCRIPTION OF SYMBOLS 10 Drying device, 12 Furnace body, 12a space, 13 Front end surface, 14 Rear end surface, 15,16 Opening, 20 Conveyance mechanism, 21,22 Roll, 23,24 Driving roller, 25,26 Driven roller, 30 Infrared heater, 32 Filament, 34 Electrical wiring, 36 Inner pipe, 37 Temperature sensor, 38 Heater body, 40 Outer pipe, 42 Cap, 44 Wiring outlet, 46 First refrigerant inlet / outlet, 48 First flow path, 49 Holder, 50 Power supply source, 52 First refrigerant supply source, 54 Second refrigerant supply source, 56 Intake device, 60 Cooling mechanism, 61 Belt conveyor, 62 Belt, 62a Upper part, 62b Lower part, 63, 64 Drive roller, 65 Water cooling roll, 65a First 2 channels, 66 adsorption rolls, 80 sheets, 82 coatings, 90 controllers, 110 drying equipment 160 cooling mechanism, 161 belt conveyor, 162 belt, 162a upper part, 162b lower part, 162c second flow path, 162d outer wall, 162e inner wall, 165 driven roller, 210 drying device, 260 cooling mechanism, 261 belt conveyor, 270 Second flow path forming member, 270a Second flow path, 271 opening, 272 Second refrigerant inlet / outlet, 275, 275a to 275d Leakage preventing rubber.

Claims (15)

An infrared processing apparatus that performs processing by emitting infrared rays to a sheet-like processing target,
Transport means for transporting the processing object in the transport direction in a roll-to-roll manner;
A heating element that emits infrared rays by heating, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element, and an infrared heater that emits infrared rays to the object to be treated;
A cooling means for cooling a portion irradiated with infrared rays from the infrared heater of the processing object with a liquid;
Infrared processing device equipped with. The cooling means supports the processing target so as to be transportable.
The infrared processing apparatus according to claim 1. The cooling means includes a liquid flow path forming member that forms a liquid flow path through which the liquid can flow.
The infrared processing apparatus according to claim 1 or 2. The cooling means includes a belt conveyor having a ring-shaped belt that supports the processing target so as to be transportable and can rotate in the transport direction together with the processing target.
The liquid flow path forming member forms the liquid flow path so that the liquid passes inside the belt ring,
At least one of the liquid flow path forming member and the liquid passing through the liquid flow path is configured to be able to contact the processing target side of the inner peripheral surface of the belt.
The infrared processing apparatus according to claim 3. The infrared processing apparatus according to claim 4,
The belt conveyor has a plurality of holes formed in the belt,
An adsorbing means for depressurizing the inside of the hole of the belt and adsorbing the processing object to the belt;
Infrared processing device equipped with. The liquid flow path forming member is a cooling roll that forms the liquid flow path inside.
The infrared processing apparatus of any one of Claims 3-5. The cooling means includes a belt conveyor that supports the processing target so as to be transportable and has a ring-shaped belt that can rotate in the transporting direction together with the processing target.
The belt is configured as the liquid flow path forming member that forms the liquid flow path therein.
The infrared processing apparatus according to claim 3. The infrared heater is arranged vertically above the processing target,
The infrared processing apparatus of any one of Claims 1-7. The liquid flow path forming member forms the liquid flow path that opens toward the processing target side and allows the liquid to flow while directly or indirectly contacting the processing target.
The infrared processing apparatus according to claim 3. The liquid flow path forming member has elastic bodies that are disposed at both ends of the opening in the transport direction and are in direct or indirect contact with the processing target.
The infrared processing apparatus according to claim 9. The infrared heater is disposed in the liquid flow path;
The infrared processing apparatus according to claim 9 or 10. The liquid is in an infrared region having an infrared transmission maximum wavelength of 3.5 μm or less.
The infrared processing apparatus according to claim 11. The liquid flow path forming member is made of an infrared reflecting material whose surface that forms the liquid flow path reflects infrared light having a wavelength of 3.5 μm or less.
The infrared processing apparatus according to claim 12. Performing the treatment of the treatment object in an atmosphere under reduced pressure or vacuum;
The infrared processing apparatus of any one of Claims 1-13. Infrared ray having conveyance means for conveying a sheet-like processing target in the conveyance direction by a roll-to-roll method, a heating element that emits infrared rays by heating, and a tube that absorbs infrared rays having a wavelength exceeding 3.5 μm and covers the heating element An infrared processing method using an infrared processing device comprising a heater,
Radiating infrared rays from the infrared heater to the object to be treated, and cooling the portion irradiated with infrared rays from the infrared heater among the objects to be treated with a liquid;
Infrared processing method.

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