KR20230104238A - 전력 공급 장치, 시스템, 노광 장치 및 물품 제조 방법 - Google Patents

전력 공급 장치, 시스템, 노광 장치 및 물품 제조 방법 Download PDF

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Publication number
KR20230104238A
KR20230104238A KR1020237018910A KR20237018910A KR20230104238A KR 20230104238 A KR20230104238 A KR 20230104238A KR 1020237018910 A KR1020237018910 A KR 1020237018910A KR 20237018910 A KR20237018910 A KR 20237018910A KR 20230104238 A KR20230104238 A KR 20230104238A
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KR
South Korea
Prior art keywords
power
power supply
unit
units
supply terminals
Prior art date
Application number
KR1020237018910A
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English (en)
Korean (ko)
Inventor
야스히로 모테기
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20230104238A publication Critical patent/KR20230104238A/ko

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H02J1/10—Parallel operation of dc sources
    • H02J1/102—Parallel operation of dc sources being switching converters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H02J1/10—Parallel operation of dc sources

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Public Health (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Sources (AREA)
  • Direct Current Feeding And Distribution (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020237018910A 2020-11-20 2021-11-12 전력 공급 장치, 시스템, 노광 장치 및 물품 제조 방법 KR20230104238A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2020-193758 2020-11-20
JP2020193758A JP2022082285A (ja) 2020-11-20 2020-11-20 電力供給装置、システム、露光装置および物品製造方法
PCT/JP2021/041653 WO2022107686A1 (ja) 2020-11-20 2021-11-12 電力供給装置、システム、露光装置および物品製造方法

Publications (1)

Publication Number Publication Date
KR20230104238A true KR20230104238A (ko) 2023-07-07

Family

ID=81708074

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237018910A KR20230104238A (ko) 2020-11-20 2021-11-12 전력 공급 장치, 시스템, 노광 장치 및 물품 제조 방법

Country Status (5)

Country Link
JP (1) JP2022082285A (zh)
KR (1) KR20230104238A (zh)
CN (1) CN116547879A (zh)
TW (1) TW202241007A (zh)
WO (1) WO2022107686A1 (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010170369A (ja) 2009-01-23 2010-08-05 Nec Corp 電源制御システム、電源制御方法、電力振分制御回路、および、電源制御プログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004104018A (ja) * 2002-09-12 2004-04-02 Canon Inc 製造システム
TWI652580B (zh) * 2018-04-13 2019-03-01 緯創資通股份有限公司 集線裝置與其電源供應方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010170369A (ja) 2009-01-23 2010-08-05 Nec Corp 電源制御システム、電源制御方法、電力振分制御回路、および、電源制御プログラム

Also Published As

Publication number Publication date
WO2022107686A1 (ja) 2022-05-27
CN116547879A (zh) 2023-08-04
JP2022082285A (ja) 2022-06-01
TW202241007A (zh) 2022-10-16

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