KR20230104238A - Power supply device, system, exposure device and article manufacturing method - Google Patents

Abstract

The power supply device has a plurality of power supply terminals for supplying power to a plurality of units. Each unit transmits control information including a power reception unit receiving power from any one of the plurality of power supply terminals and information on power consumption of the unit without receiving power to the power reception unit, as described above. It includes a device that provides power to the power supply. The power supply device acquires the control information from each of the devices of the plurality of units in a state in which power is not supplied to the plurality of units through a plurality of power sources and the plurality of power supply terminals, and and a controller that selects, from the plurality of power sources, a power source for supplying power through any one of the plurality of power supply terminals to at least one of the plurality of units based on control information.

Description

Power supply device, system, exposure device and article manufacturing method

The present invention relates to a power supply device, a system, an exposure device, and a method for manufacturing an article.

Industrial equipment may include a standard unit group that meets basic specifications and an optional unit group that provides functional extensions that can be selected by customers. Further, in addition to industrial equipment, there are also those equipped with units developed according to individual requests of customers. Further, even after the vendor delivers the industrial equipment to the customer, it may be possible to provide hardware and/or software to upgrade the basic specifications. On the other hand, it is difficult to individually prepare power supplies capable of responding to all of the unit configurations in which various combinations can be employed.

First of all, it is difficult to accurately grasp the total power consumption of a plurality of units included in industrial equipment. For example, in the case of ultra-high-precision industrial equipment such as semiconductor exposure equipment and FPD exposure equipment, even if they have the same unit configuration, the installation environment (ambient temperature, humidity, altitude) or equipment (cooling water temperature, power supply voltage) depends on the installation location. input), etc., the power consumption used for environmental control changes. In addition, power consumption used for vibration suppression control may change according to the floor strength of the installation site of the industrial equipment.

Further, in addition to the effects of differences in installation environments, the roles of each unit may be different in the course of carrying in a workpiece in an exposure sequence, measuring alignment, repeating scan exposure, and carrying out a workpiece. Therefore, depending on the exposure sequence, the peak timing of power consumption may be different. For example, measurement systems such as alignment scopes and off-axis scopes consume a lot of power during measurement, but consume little during exposure. Conversely, the disc driving mechanism for driving the original plate and the substrate driving mechanism for driving the substrate consume little power during measurement, but consume large amounts of power during exposure. After grasping the characteristics of each unit, it is desirable to be able to supply power with a uniform load.

Based on the above circumstances, if the unit has only a standard configuration, it is possible to prepare a suitable power supply based on the design data taking into account the power consumption specifications of each unit and the sequence control executed by the software controlling the industrial equipment. . However, if a power supply system for industrial equipment is built on the premise that all options are used, surplus power of the power supply is large in the case of industrial equipment without optional configuration. A configuration with a large surplus power is not preferable from the viewpoint of energy saving because power supply efficiency is lowered. In addition, since the operation of the standard unit is different between a case with and without an optional configuration, the power consumption of the standard unit itself may vary.

As described above, it is difficult to accurately determine the power consumption of industrial equipment only when there are many combinations of standard units and optional units whose characteristics are known. In addition to this, there are cases where a special order unit whose specifications are determined after consultation with a customer is additionally connected to the power supply system, or power consumption is increased by upgrading performance or functions after industrial equipment is delivered to the customer. It is very difficult to cope with such a case with a power supply system of industrial equipment prepared in advance. In the worst case, the capacity of the power system may be exceeded and industrial equipment may go down.

Therefore, when there is an addition of a unit or an addition of a function, it is necessary to increase the power source accordingly or to perform a large-scale wiring work. As a result, an inefficient power supply system is constructed, which may cause problems such as increased power loss or an unnecessarily increased installation area. In addition, since the wiring work is performed after the main breaker is turned off, the downtime of the industrial equipment may increase.

Patent Literature 1 describes a power distribution control circuit and a server distribution control circuit. When the power distribution control circuit obtains the predicted power value from the server device, it sends a switching instruction to externally output the built-in power supply to the server device with low power consumption, and outputs the externally output built-in power source to the server device with high power consumption. Sends conversion instructions to be received. The server distribution control circuit generates distribution information indicating how much surplus power is to be allocated to which server, and sends it to the server power distribution circuit. However, the server device cannot send the predicted power value to the power distribution control circuit unless power is supplied and it is not operating as a server device.

Japanese Unexamined Patent Publication No. 2010-170369

The present invention provides an advantageous technique for facilitating reconfiguration of a power supply that supplies power to a plurality of units.

One aspect of the present invention relates to a power supply device having a plurality of power supply terminals for supplying power to a plurality of units, wherein each unit is configured to supply power from any one of the plurality of power supply terminals. a power receiving unit that receives power, and a device that provides control information including information on power consumption of the unit to the power supply device without receiving power to the power receiving unit, wherein the power supply device includes a plurality of obtains the control information from each of the devices of the plurality of units in a state in which power is not supplied to the plurality of units via a power supply of the plurality of power supply terminals, and the plurality of units is acquired based on the control information and a control unit for selecting a power supply from among the plurality of power sources for supplying power to at least one of the units of the plurality of power supply terminals through any one of the plurality of power supply terminals.

According to the present invention, an advantageous technique is provided to facilitate the reconfiguration of a power supply that supplies power to a plurality of units.

1 is a diagram illustrating a configuration of a power supply device in industrial equipment.
2A is a diagram illustrating unit power information stored in a non-volatile memory of an IoT device.
2B is a diagram illustrating unit power information stored in a non-volatile memory of an IoT device.
Fig. 3 illustrates details of a portion of industrial equipment;
4 is a diagram illustrating an allocation sequence in which a power supply control unit dynamically allocates power resources in industrial equipment;
5 is a diagram illustrating an operation of allocating built-in power sources to added units;
Fig. 6 is a diagram illustrating the configuration of a unit incorporated in industrial equipment;
Fig. 7 is a diagram illustrating the configuration of an online system using a power supply device in industrial equipment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. In addition, the following embodiment does not limit the invention according to the claim. Although a plurality of characteristics are described in the embodiment, it cannot be said that all of these plurality of characteristics are essential to the invention, and a plurality of characteristics may be combined arbitrarily. In addition, in the accompanying drawings, the same reference numerals are given to the same or similar structures, and overlapping descriptions are omitted.

1 shows a configuration of a power supply device 1 in an industrial equipment IE according to an embodiment. Industrial equipment IE is an example of a system including the power supply device 1 . The industrial equipment IE may include a plurality of units 200, 201, 202, and 203. The plurality of units 200 , 201 , 202 , and 203 may include power receiving units 230 , 231 , 232 , and 233 , respectively. The plurality of units 200, 201, 202, and 203 may include IoT devices 210, 211, 212, and 213, respectively. The power supply device 1 includes a plurality of power supply terminals (110, 111, 112, 113, 114) may be provided. In addition, the power supply device 1 may include a plurality of built-in power sources (power sources) 100 , 101 , 102 , and 103 .

Power PWR may be supplied from an external power source to the plurality of built-in power sources 100, 101, 102, and 103. In one example, the built-in power source 103 among the plurality of built-in power sources 100, 101, 102, and 103 is a spare built-in power source, and the power supply terminal 114 among the plurality of power supply terminals 110 to 114 is a spare power supply. It may be a power supply terminal. The power supply device 1 may include a power supply control unit 130 . The power supply control unit 130 converts a built-in power source for supplying power to at least one of the plurality of units 200 to 203 through one of the plurality of power supply terminals 110 to 114 to a plurality of built-in power sources 100 to 103. ) may be configured to select from. In addition, the power supply device 1 may include a PoE hub 131 . PoE hub 131 is an example of a communication interface having a function of supplying power to IoT devices of units connected to a plurality of power supply terminals 110 to 114 among a plurality of units 200 to 203 . The power supply device 1 may also include a switch circuit 132 that determines a connection between at least one of the plurality of built-in power sources 100 to 103 and at least one of the plurality of power supply terminals 110 to 114. Further, in the example of Fig. 1, the switch circuit 132 is arranged to determine a connection between at least one of the plurality of built-in power sources 100 to 103 and at least one of the power supply terminals 113 and 114. Determining the connection includes making the connection and releasing the connection.

A plurality of IC memories (memory elements) 120, 121, 122, 123, and 124 are allocated to the plurality of power supply terminals 110, 111, 112, 113, and 114, respectively. In each of the plurality of IC memories 120, 121, 122, 123, and 124, location information (identification information) of a corresponding power supply terminal among a plurality of power supply terminals 110, 111, 112, 113, and 114 is stored. do. The power supply control unit 130 has a function of managing a plurality of built-in power sources 100 to 103, a function of controlling the switch circuit 132, and a function of communicating with the industrial equipment control unit 150 through the PoE hub 131. can be provided

The power supply controller 130 sends a control signal to each of the plurality of built-in power supplies 100 to 103 to turn the plurality of built-in power supplies 100 to 103 into an operating state (ON) or a stopped state (OFF). may be In addition, the power supply control unit 130 receives from the plurality of built-in power sources 100 to 103, for example, their specifications (eg, rated output power, output voltage) and/or status (eg, error state). and the like can be acquired at any or predetermined timing. Power PWR may be supplied from an external power source to the power supply controller 130 . The power supply control unit 130 can be started by supplying power PWR to the power supply control unit 130 from an external power source, by operating a switch (not shown), or by inputting a start signal such as a start command. The plurality of built-in power sources 100 to 103 may be started by a control signal or start signal from the power supply controller 130 . When the plurality of built-in power sources 100 to 103 are activated, they can output voltages according to respective specifications based on the power PWR.

The power supply control unit 130 determines specifications (eg, rated output power and output voltage) of each of the plurality of built-in power sources 100 to 103 and specifications (eg, consumption) of the plurality of units 200 to 203 . The switch circuit 132 can be controlled based on power, input voltage) and connection destination (power supply terminal). This means that a built-in power source for supplying electric power to each of the plurality of units 200 to 203 is selected from the plurality of built-in power supplies 100 to 103 . The power supply control unit 130 determines the specifications (eg, power consumption, input voltage) and connection destination of the plurality of units 200 to 203 from the IoT devices 210 to 213 respectively provided in the plurality of units 200 to 203. Information on (power supply terminal) can be acquired. The power supply control unit 130 may include an output unit that outputs information indicating at least one of specifications and states of the plurality of built-in power sources 100 to 103 and power consumption of the plurality of units 200 to 203 . The corresponding output unit may include, for example, at least one of a display unit and a communication unit.

2A and 2B schematically show examples of unit power information stored in a non-volatile memory (flash ROM 306 to be described later) of an IoT device provided in the unit. In this example, unit 200 is a standard unit (unit built into industrial equipment IE as standard), and unit 203 is an optional unit (unit built into industrial equipment IE as standard by user's selection). 2A schematically shows an example of unit power information stored in the IoT device 210 of the unit 200 as a standard unit. 2B schematically shows an example of unit power information stored in the IoT device 213 of the unit 203 as an optional unit.

In the first row, information on the unit name, connected power supply terminal, connected built-in power source, and input voltage is included. If the unit is a standard unit, since it is a load whose connection plan has been determined, all information can exist from the beginning of installation. On the other hand, when the unit is a unit whose connection to an option unit or the like is undetermined, information about the connected power supply terminal and the connected built-in power source does not exist at the beginning of installation. In the example of Fig. 2B, power supply terminals of undetermined connection destination are indicated by X, and built-in power supplies of undetermined connection destination are indicated by Y. For X, the location information of the power supply terminal is acquired from the included IC memory, and this will be described with reference to FIG. 3 . As for Y, it is determined by the power supply control unit 130 executing an allocation sequence for dynamically allocating power resources (embedded power sources 100 to 103), which will be described with reference to FIG. 4 .

In the second row, a plurality of power consumption information according to the operating state of the industrial equipment IE is stored or recorded. In the example of FIG. 2A, 2B, it is an example in case industrial equipment IE is exposure apparatus, such as a semiconductor exposure apparatus or FPD exposure apparatus. In the exposure apparatus, fluctuations in power consumption of each unit appear remarkably during initialization, idle, measurement, and exposure. In the examples of FIGS. 2A and 2B, these four examples are shown. The types of operating states are defined according to the characteristics of the industrial equipment IE, and the number can be increased or decreased. By classifying the operating state in more detail, the power supply control unit 130 can more accurately estimate the overall load (power consumption). For example, the initialization sequence may include a plurality of operations that the industrial equipment control unit 150 manages and executes in a planned manner, and power consumption information is acquired for each of these plurality of operations, and as part of the unit power information It may be stored in the IoT device. The power supply controller 130 of the power supply device 1 may acquire unit power information stored in the non-volatile memory of the IoT hub of the unit through the PoE hub 131 .

In FIG. 3 , details of a part of the industrial equipment IE shown in FIG. 1 are illustrated. In FIG. 3 , unit 200 is shown among a plurality of units 200 to 203 , but other units may also have the same configuration. The IoT device 210 includes, for example, a LAN communication unit 300, a power reception interface 301, a power transmission interface 302, a communication device 303, a processor 304, a memory 305, a flash ROM 306, interface 307 and bus 308. The unit 200 may include a plurality of components not shown in addition to the unit controller 220, and the plurality of components may be controlled by the unit controller 220. The unit controller 220 may communicate with the IoT device 210 through the interface 307 . The IC memory 120 assigned to the power supply terminal 110 to which the unit 200 is connected may include a power receiving circuit 310 , a flash ROM 311 and a communication device 312 . The other IC memories 121 to 124 may also have a similar configuration.

The unit 200 includes a power receiving unit 231 that receives power from any one of the plurality of power supply terminals 110 to 114 of the power supply device 1, and uses the power received by the power receiving unit 231. it works by The power received by the power reception unit 231 from any one of the plurality of power supply terminals 110 to 114 of the power supply device 1 is supplied to a plurality of components not shown above in addition to the unit control unit 220. .

Meanwhile, the IoT device 210 may operate by receiving power supply from the PoE hub 131 of the power supply device 1 . The IoT device 210 supplies power when the power receiver 231 of the unit 200 is not supplied with power from any of the plurality of power supply terminals 110 to 114 of the power supply device 1. It can operate by receiving power supply from the PoE hub 131 of the device 1. The power reception interface 301 supplies power to the power transmission interface 302 based on power supplied from the PoE hub 131 . The voltage supplied from the power reception interface 301 to the power transmission interface 302 may be the same as or different from the voltage supplied from the PoE hub 131 to the power reception interface 301 . The power transmission interface 302 supplies power to the power receiving circuit 310 of the IC memory 120 assigned to the power supply terminal 110 to which the unit 200 is connected. When power is supplied from the power transmission interface 302, the power reception circuit 310 supplies power to the flash ROM 311 and the communication device 312 based on the power. In the flash ROM 311, location information (identification information) of the power supply terminal 110 to which the IC memory 120 is allocated is stored, and the location information is stored in the IoT device 210 via the communication device 312. transmitted to the communication device 303. The location information is stored or written into the flash ROM 306 as part of the unit power information. The power supply controller 130 of the power supply device 1 may obtain unit power information stored in the flash memory 306 through the PoE hub 131 and the LAN communication unit 300 .

The configuration of supplying power to the IoT device 210 from the PoE hub 131 is to supply power to the IoT device 210 before power is supplied to the unit 200 from the power supply terminal 110 (or 111 to 114). makes it possible to supply In other words, the configuration for supplying power to the IoT device 210 from the PoE hub 131 is the IoT device in a state in which power is not supplied to the unit 200 from the power supply terminal 110 (or 111 to 114). (210). Instead of the PoE hub 131, a configuration in which power is supplied directly from the power supply device 1 to the IoT device 210 (that is, without going through the power supply terminals 110 to 114) may be employed. Alternatively, a configuration in which electric power is supplied from a battery (in the IoT device 210 or in the unit 200) to the IoT device 210 may be employed. In such a configuration, the PoE hub 131 is unnecessary, and a hub having no power supply function may be used.

Alternatively, there is a case in which wireless communication is possible because the distance between the power supply device 1 and the units 200 to 204 is short. In this case, the IoT devices 210 to 214 may be wireless type IC tags, and an RFID reader/writer may be used instead of the PoE HUB 131 as a communication means between the power supply control unit 130 and the IC tag.

In one example, communication device 312 and communication device 303 can be configured to perform serial communication with communication device 312 as a slave node and communication device 303 as a master node. The location information of the power supply terminal transmitted from the communication device 312 to the communication device 303 is stored or recorded in the flash ROM 306, thereby determining the information of X described with reference to Figs. 2A and 2B. When it is confirmed that the location information is stored in the flash ROM 306, the IoT device 210 may turn off the power transmission interface 302. Then, the IoT device 210 may be configured not to communicate with the IC memory 120 until power is supplied from the PoE hub 131 to the power reception interface 301 next.

A plurality of power consumption information (eg, initialization, idle, measurement, and exposure power consumption information) according to the operating state of the industrial device is transmitted from the unit control unit 220 to the interface 307 of the IoT device 210 ), it can be stored in the flash ROM 306. As an initial value of the power consumption information, for example, a value measured under a predetermined sequence condition may be used in inspection of the unit 200 upon shipment.

As described above, each unit provides control information (unit control information) including information on the power consumption of the unit to the power supply device 1 without receiving power supply from the power receiving unit 231. It may include a device (IoT device). The power supply device 1 is connected to each device (IoT) of the plurality of units 200 to 204 in a state in which power is not supplied to the plurality of units 200 to 204 through the plurality of power supply terminals 110 to 114. It is possible to acquire the corresponding control information (unit control information) from the device). The power supply device 1 provides a plurality of built-in power sources for supplying power through any one of the plurality of power supply terminals 110 to 114 to at least one of the plurality of units 200 to 204 based on the corresponding control information. It can be selected from built-in power sources 100 to 103.

4 illustrates an allocation sequence in which the power supply control unit 130 of the power supply device 1 dynamically allocates power resources (built-in power supplies 100 to 103) in the industrial equipment IE to units. Here, it is assumed that the unit 203 is an optional unit and Y exists in the control information stored in the IoT device 213 of the unit 203. In addition, it is assumed that the built-in power supply 103 is a spare built-in power supply. In step S401, the power supply control unit (hereinafter referred to as the controller) 130 checks whether or not all of the plurality of built-in power supplies 100 to 103 are OFF, and if all of the plurality of built-in power supplies 100 to 103 are OFF, , the process proceeds to step S402. In step S402, the control unit 130 prohibits the built-in power supplies 100 to 103 from turning ON by operating the power switch or by a startup command. Next, in step S403, the control unit 130 acquires control information (unit control information) of the IoT devices 210 to 214 of the units 200 to 204 by LAN communication via the PoE hub 131.

Next, in step S404, the control unit 130 controls the internal power supplies 100 to 103 based on the output voltage and output power upper limit of the built-in power supplies 100 to 103 and the connection destination information and power consumption information among the control information obtained in step S403. ) Calculate the surplus power of each. In addition, the controller 130 acquires information indicating the output voltage and output power upper limit of the built-in power supplies 100 to 103 in advance. Fig. 5 schematically shows the surplus power of the built-in power supplies 100 to 103. "INIT." indicates power consumption during initialization, "IDOL" indicates power consumption during idle, "measurement" indicates power consumption during measurement, and "exposure" indicates power consumption during exposure. In addition, the cross-hatched portion represents the power consumption of the unit to which the built-in power supply has already been allocated. The built-in power supply 100 is already assigned to the unit 200, the built-in power supply 101 is already assigned to the unit 201, and the built-in power source 102 is already assigned to the unit 202. The difference between the upper end of the cross-hatched portion and the upper limit of the output power is surplus power.

In step S405, the control unit 130 determines, based on the connection destination information among the control information obtained in step S403, whether or not there exists an IoT device (that is, a unit corresponding to the IoT device) whose built-in power supply of the connection destination has not been determined. judge An IoT device (here, the IoT device 213) for which the built-in power supply of the connection destination has not been determined is an IoT device in which Y described with reference to FIGS. 2A and 2B exists in the control information. If there is an IoT device whose built-in power source to be connected to has not been determined, the control unit 130 proceeds to step S406, and if such an IoT device does not exist, it proceeds to step S410.

In step S410, the control unit 130 permits turning on the built-in power supplies 100 to 103 by operation of the power switch or by a startup command, thereby ending the assignment sequence.

Hereinafter, an operation in the case where there is an IoT device whose built-in power supply has not been determined as a connection destination will be described. In step S406, the controller 130 compares the power consumption of the unit 203 obtained from the control information stored in the IoT device 213 with the surplus power of the built-in power supplies 100 to 103 calculated in step S404. In the example of FIG. 5 , the built-in power supply 100 has surplus power for supplying power to the unit 203, the built-in power supply 101 has no surplus power for supplying power to the unit 203, and The built-in power source 103 of has surplus power to supply power to the unit 203. Also, the built-in power supply 102 has an output voltage of 48V and is not suitable for the unit 203 whose input voltage is 24V.

In step S407, the control unit 130 determines whether or not the output voltage of the plurality of built-in power sources 100 to 103 is suitable for the unit 203 and has surplus power for supplying power to the unit 203. do. Then, when such a built-in power supply does not exist, the control unit 130 issues an error notification in step S411. In that case, work to remove the cause of the error is required. For example, after the power consumption of the units 200 to 202 is lowered by reviewing the operation plan of the industrial equipment control unit 150, the power consumption information is rewritten in the IoT devices 200a to 202a on the unit side. It is necessary to take action. As a more specific example, after the power consumption of the units 200 to 202 is lowered by reviewing the operation plan of the industrial equipment control unit 150, the power consumption information of the IoT devices 210 to 212 of the units 200 to 202 is read. Countermeasures to fill in may be employed.

On the other hand, when some of the plurality of built-in power sources 100 to 103 have an output voltage suitable for the unit 203 and have surplus power for supplying power to the unit 203, in step S408, the controller ( 130 determines the built-in power source to allocate to unit 203. Here, the control unit 130 can set the built-in power supply already assigned to a certain unit, that is, the built-in power supply 100 as a high-priority assignment candidate even with the spare built-in power supply 103 . When the built-in power supply having surplus power is only the spare built-in power supply 103, the controller 130 can allocate the spare built-in power supply 103 to the unit 203. The controller 130 allocates the built-in power source 100 to the unit 203 by controlling the switch circuit 132 . In other words, it can be said that the controller 130 determines the internal power supply 100 to be allocated to the unit 203 by controlling the switch circuit 132 .

In step S409, the control unit 130 stores connection destination information indicating that the connected built-in power supply is the built-in power supply 100 in the IoT device 213 of the unit 203. By executing step S409, the controller 130 becomes capable of managing the added unit 203 as a fixed load, so that when the assignment sequence is executed next, the time required for its execution is shortened. After step S409, the process returns to step S404.

In the above case, the plurality of units include at least one first unit from which power is to be supplied from among the plurality of built-in power sources, and at least one first unit from which of the plurality of built-in power sources is not yet determined. Includes one second unit. The controller 130 is configured to supply power to the second unit of the plurality of built-in power sources based on surplus power of the power supply for supplying power to the first unit among the plurality of built-in power sources and control information of the second unit. A power source can be selected from the plurality of power sources.

In order to use the surplus power effectively by using the system including the power supply device 1, it is desirable to accurately determine the actual power consumption of each unit. Even in the case of the same operation sequence under the environmental conditions of the place where the industrial device IE is installed, the power consumption of the industrial device IE may be different. Therefore, it is preferable that the current consumption values stored in the IoT devices 210 to 213 that manage the units 200 to 203 are updated at any time, rather than the initial values set at the time of shipment. For example, after installation of the industrial equipment IE, periodically or at an arbitrary timing, it is preferable to measure the current consumption of the units 200 to 203 and update the current consumption values stored in the IoT devices 210 to 213. .

6 shows an example of the configuration of a unit 200 connected to the power supply device 1 in the industrial equipment IE. Other units 201 to 203 may have a similar configuration. As described above, the unit 200 may include an IoT device 210 that stores power information, a unit controller 220, and a power receiver 230 that receives power supplied from the power supply device 1. In addition, the unit 200 includes a current sensor 261 for measuring the current supplied from the power supply device 1, a memory 260, a power receiving circuit 262, a power supply circuit 263, a measuring unit 264, and a driving unit. (265).

The power receiving circuit 262 and the power supply circuit 263 receive power supplied from the power supply device 1 through the power receiving unit 230 and the current sensor 261, and the unit control unit 220, the measurement unit 264, The driver 265 generates and supplies voltages required for each. The unit controller 220 detects current consumption of the unit 200 based on the output of the current sensor 261 .

The unit control unit 220 controls the measurement unit 264 and the driving unit 265 by receiving a command from the industrial device control unit 150 that manages each control of initialization, idle, measurement, and exposure. At this time, the unit controller 220 periodically collects the current consumption value of the unit 200 from the current sensor 261 and stores it in the memory 260 for each sequence of initialization, idle, measurement, and exposure. After a predetermined number of current consumption values are accumulated in the memory 260, the unit controller 220 determines the actual power consumption of the unit 200 based on the current consumption value, and determines the power consumption information of the IoT device 210. can be overwritten. In this way, by managing power consumption and updating power consumption information even after installation in units of units, the power supply control unit 130 can always accurately grasp the surplus power of each built-in power source.

In addition, the unit control unit 220 may be equipped with a CPU with high processing capability capable of handling big data. In such a case, the unit control unit 220 does not determine the actual power consumption only with information on the measured current value from the current sensor 261, but uses data such as the states of the measurement unit 264 and the driving unit 265 as dependent variables. It may be determined as a value predicted by machine learning associated with . The power supply control unit 130 can grasp the surplus power of each built-in power supply in real time by using a predicted value obtained by dynamically grasping a change in power consumption due to a change in the environment or a change in unit clock time. In this way, the power supply control unit 130 can dynamically and appropriately allocate the built-in power supply to each unit.

The power supply controller 130 may have a function of outputting (or transmitting) power information to the industrial equipment controller 150 . There are two main purposes of this function, one is for the industrial device control unit 150 to grasp the timing change of power consumption of each unit, and the other is for the industrial device control unit 150 to determine the power consumption of each built-in power supply. and surplus power.

For the former, that is, the information indicating the timed change in power consumption of the unit, the industrial equipment control unit 150 can use it as state management data for predictive maintenance of the unit, abnormality detection, and the like. In addition, it can be used not only for failure prediction but also as data for performance maintenance. For example, in high-precision industrial equipment such as exposure equipment, a slight temperature change directly adversely affects performance, but by predicting a change in heat amount from a change in power consumption and changing a control parameter for temperature control of the unit, the temperature inside the exposure equipment is changed. The influence of the deterioration of the control performance can be suppressed to a minimum.

Regarding the latter, that is, the details of power consumption and surplus power information of each built-in power supply, the industrial equipment control unit 150 grasps them, thereby making the operation plan during initialization, idle, measurement, and exposure time performance upgrade or energy It can be flexibly reviewed from the point of view of savings.

In addition, the specification of power consumption and surplus power information of each built-in power supply can be used to provide hardware and software that upgrade basic specifications even after the industrial equipment is delivered to the customer. Such information may be provided to industrial equipment online.

7 is a block diagram of an online system for centrally managing power supplies of industrial equipment. A plurality of industrial machines 601 are installed in the customer factory 600 . A plurality of industrial devices 601 may periodically output data to the server 603 through the Ethernet switch 602. The data of the server 603 is shared by the server 611 of the industrial equipment maker office via a network cloud protected by a firewall, and the manager stores the data in the data server 612 to view the data with the terminal 613. You can do it. By including the surplus power information of each built-in power supply described in FIGS. 1 to 5 in this data, it is possible to accurately grasp the surplus power within each industrial equipment 601 installed in the customer factory 600.

Based on such information, when an industrial equipment maker receives a special order according to an additional individual request for the industrial equipment 601 after installation, development becomes possible considering surplus power, and unnecessary power supply is installed. The advantage is that you don't have to. Also, by any chance, in providing hardware and software for upgrading performance with respect to basic specifications after installation, even when it is determined that there is no surplus power, the power supply of power shortage can be specified. Therefore, there is an advantage in that it can be completed with the minimum required repair, such as replacement with a power supply having a required capacity. These advantages lead to reduction of installation area, shortened delivery time, and reduction of downtime during repair, and also lead to providing services with high customer satisfaction.

As described above, according to the present embodiment, it is possible to accurately grasp electric power even after installation in industrial equipment, and to flexibly respond to unit expansion without imposing restrictions on the operation of connected loads. Of course, the present invention can be applied to systems other than industrial equipment.

An article manufacturing method will be described as an application example in the case where the above industrial equipment is configured as an exposure apparatus. The method for manufacturing the article includes an exposure step of exposing a substrate using the exposure device, a developing step of developing the substrate that has undergone the exposure step, and a treatment step of processing the substrate that has undergone the development step to obtain an article. can include A photosensitive material (photoresist) is applied to a substrate provided in an exposure apparatus. Through the exposure process, the pattern of the original plate is transferred to the photosensitive material as a latent image pattern. In the developing process, this latent image pattern is converted into a physical device pattern. The treatment process may include, for example, a process of patterning the underlying layer using a device pattern. The processing step may also include a step of dicing the substrate.

The present invention is a process in which a program for realizing one or more functions of the above-described embodiments is supplied to a system or device via a network or a storage medium, and one or more processors in a computer of the system or device reads and executes the program. It is also feasible Also, it can be realized by a circuit (for example, an ASIC) that realizes one or more functions.

The invention is not limited to the above embodiments, and various changes and modifications are possible without departing from the spirit and scope of the invention. Accordingly, the claims are appended to clarify the scope of the invention.

This application claims priority based on Japanese Patent Application No. 2020-193758 filed on November 20, 2020, and all of the contents of the description are incorporated herein.

1: power supply
200 to 203: unit
111 to 114: power supply terminals
210 to 213: IoT device
100 to 103: built-in power supply (power supply)
130: power supply control unit (control unit)

Claims (12)

A power supply device having a plurality of power supply terminals for supplying power to a plurality of units,
Each unit transmits control information including a power reception unit receiving power from any one of the plurality of power supply terminals and information on power consumption of the unit without receiving power to the power reception unit, as described above. comprising a device providing a power supply;
The power supply device,
plural powers,
Acquire the control information from each of the devices of the plurality of units in a state in which power is not supplied to the plurality of units through the plurality of power supply terminals, and based on the control information, at least one of the plurality of units and a control unit for selecting a power source for supplying power through one of the plurality of power supply terminals from among the plurality of power sources. According to claim 1,
The plurality of units may include at least one first unit from which power is to be supplied from among the plurality of power sources, and at least one first unit from which of the plurality of power sources to be supplied have not yet been determined. In the state containing 2 units,
The control unit supplies power to the second unit of the plurality of power sources based on surplus power of a power source supplying power to the first unit among the plurality of power sources and the control information of the second unit A power supply device characterized in that for selecting a power source from the plurality of power sources. According to claim 1 or 2,
Further comprising a plurality of memory elements respectively corresponding to the plurality of power supply terminals so that one memory corresponds to one power supply terminal;
Each of the plurality of units is connected to a memory element corresponding to the one power supply terminal of the plurality of memory elements when connected to one power supply terminal of the plurality of power supply terminals;
Each of the plurality of memory elements includes identification information for identifying a corresponding power supply terminal among the plurality of power supply terminals. According to claim 3,
Each of the plurality of memories operates by receiving power from the device of a unit connected to a corresponding one of the plurality of power supply terminals, and supplies the identification information to the device. power supply. According to any one of claims 1 to 4,
and a communication interface having a function of supplying power to the devices of units connected to the plurality of power supply terminals among the plurality of units. According to any one of claims 1 to 5,
The device includes a non-volatile memory for storing the control information,
The control unit acquires the control information stored in the non-volatile memory. According to claim 6,
The control information stored in the nonvolatile memory is updated at an arbitrary or predetermined timing,
The control unit acquires the updated control information. According to any one of claims 1 to 7,
and an output unit configured to output information indicating at least one of specifications and states of the plurality of power sources and power consumption of the plurality of units. A unit connected to any one of the plurality of power supply terminals of a power supply device having a plurality of power supply terminals for supplying power to a plurality of units and operated by electric power from the power supply device;
A power receiving unit that receives power from any of the plurality of power supply terminals, and control information including information about power consumption of the unit without receiving power to the power receiving unit is transmitted to the power supply device. A unit characterized in that it has a communication unit to provide. A system comprising a power supply device having a plurality of units and a plurality of power supply terminals for supplying power to the plurality of units;
Each unit transmits control information including a power receiving unit that receives power from any one of the plurality of power supply terminals and information about power consumption of the unit without receiving power to the power receiving unit, as described above. comprising a device providing a power supply;
The power supply device,
plural powers,
Acquiring the control information from each of the devices of the plurality of units in a state in which power is not supplied to the plurality of units through the plurality of power supply terminals, and based on the control information, at least one of the plurality of units and a control unit for selecting a power source for supplying power through any one of the plurality of power supply terminals from among the plurality of power sources. An exposure apparatus comprising a power supply device having a plurality of units and a plurality of power supply terminals for supplying power to the plurality of units;
Each unit transmits control information including a power receiving unit that receives power from any one of the plurality of power supply terminals and information about power consumption of the unit without receiving power to the power receiving unit, as described above. comprising a device providing a power supply;
The power supply device,
plural powers,
Acquiring the control information from each of the devices of the plurality of units in a state in which power is not supplied to the plurality of units through the plurality of power supply terminals, and based on the control information, at least one of the plurality of units and a control unit for selecting a power source for supplying power through one of the plurality of power supply terminals from among the plurality of power sources. An exposure step of exposing a substrate using the exposure apparatus according to claim 11;
A developing step of developing the substrate that has passed through the exposure step;
A processing step of obtaining an article by processing the substrate that has gone through the developing step
A method of manufacturing an article comprising:

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