KR20230095695A - 선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법 - Google Patents

선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법 Download PDF

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Publication number
KR20230095695A
KR20230095695A KR1020210185428A KR20210185428A KR20230095695A KR 20230095695 A KR20230095695 A KR 20230095695A KR 1020210185428 A KR1020210185428 A KR 1020210185428A KR 20210185428 A KR20210185428 A KR 20210185428A KR 20230095695 A KR20230095695 A KR 20230095695A
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KR
South Korea
Prior art keywords
process gas
unit
outer cylinder
gas
eco
Prior art date
Application number
KR1020210185428A
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English (en)
Korean (ko)
Inventor
김승곤
이은경
고창복
서동명
김남수
곽영태
Original Assignee
한국에너지기술연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국에너지기술연구원 filed Critical 한국에너지기술연구원
Priority to KR1020210185428A priority Critical patent/KR20230095695A/ko
Priority to PCT/KR2022/018609 priority patent/WO2023121016A1/fr
Publication of KR20230095695A publication Critical patent/KR20230095695A/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
    • B04C—APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
    • B04C9/00—Combinations with other devices, e.g. fans, expansion chambers, diffusors, water locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B01D47/063—Spray cleaning with two or more jets impinging against each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
    • B04C—APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
    • B04C3/00—Apparatus in which the axial direction of the vortex flow following a screw-thread type line remains unchanged ; Devices in which one of the two discharge ducts returns centrally through the vortex chamber, a reverse-flow vortex being prevented by bulkheads in the central discharge duct
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
    • B04C—APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
    • B04C5/00—Apparatus in which the axial direction of the vortex is reversed
    • B04C5/20—Apparatus in which the axial direction of the vortex is reversed with heating or cooling, e.g. quenching, means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
    • B04C—APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
    • B04C3/00—Apparatus in which the axial direction of the vortex flow following a screw-thread type line remains unchanged ; Devices in which one of the two discharge ducts returns centrally through the vortex chamber, a reverse-flow vortex being prevented by bulkheads in the central discharge duct
    • B04C2003/003—Shapes or dimensions of vortex chambers

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Treating Waste Gases (AREA)
KR1020210185428A 2021-12-22 2021-12-22 선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법 KR20230095695A (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020210185428A KR20230095695A (ko) 2021-12-22 2021-12-22 선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법
PCT/KR2022/018609 WO2023121016A1 (fr) 2021-12-22 2022-11-23 Système de traitement écologique et procédé de traitement pour gaz de processus de rejet industriel, à l'aide d'un procédé de tourbillonnement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020210185428A KR20230095695A (ko) 2021-12-22 2021-12-22 선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법

Publications (1)

Publication Number Publication Date
KR20230095695A true KR20230095695A (ko) 2023-06-29

Family

ID=86902963

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210185428A KR20230095695A (ko) 2021-12-22 2021-12-22 선회방식을 이용한 산업 배출 공정가스 친환경 처리시스템 및 처리방법

Country Status (2)

Country Link
KR (1) KR20230095695A (fr)
WO (1) WO2023121016A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000065641A (ko) 1999-04-07 2000-11-15 고석태 반도체장치 제조설비의 스크러버 시스템
JP2005131509A (ja) 2003-10-29 2005-05-26 Unisem Co Ltd 廃ガス処理処置及び廃ガス処理方法
KR20140122900A (ko) 2013-04-11 2014-10-21 주식회사 에스지티 파워 처리용 하이브리드 타입 스크러버

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990076119A (ko) * 1998-03-27 1999-10-15 윤종용 배기가스 처리장치
KR100501525B1 (ko) * 2003-02-04 2005-07-18 동부아남반도체 주식회사 반도체 공정용 가스세정장치
JP2009008333A (ja) * 2007-06-28 2009-01-15 Nissei Sangyo Kk 排ガス処理装置
KR101519553B1 (ko) * 2013-04-03 2015-05-14 씨에스케이(주) 사이클론을 이용한 반도체 폐가스 처리용 스크러버
KR102133870B1 (ko) * 2018-08-20 2020-07-14 엠에이티플러스 주식회사 폐가스 처리 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000065641A (ko) 1999-04-07 2000-11-15 고석태 반도체장치 제조설비의 스크러버 시스템
JP2005131509A (ja) 2003-10-29 2005-05-26 Unisem Co Ltd 廃ガス処理処置及び廃ガス処理方法
KR20140122900A (ko) 2013-04-11 2014-10-21 주식회사 에스지티 파워 처리용 하이브리드 타입 스크러버

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WO2023121016A1 (fr) 2023-06-29

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