KR20230054396A - 유량 제어 장치 및 방법, 그리고 유체 공급 시스템 - Google Patents
유량 제어 장치 및 방법, 그리고 유체 공급 시스템 Download PDFInfo
- Publication number
- KR20230054396A KR20230054396A KR1020237008518A KR20237008518A KR20230054396A KR 20230054396 A KR20230054396 A KR 20230054396A KR 1020237008518 A KR1020237008518 A KR 1020237008518A KR 20237008518 A KR20237008518 A KR 20237008518A KR 20230054396 A KR20230054396 A KR 20230054396A
- Authority
- KR
- South Korea
- Prior art keywords
- flow rate
- opening degree
- flow control
- control valve
- flow
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims description 25
- 230000008859 change Effects 0.000 claims abstract description 53
- 238000001514 detection method Methods 0.000 claims abstract description 50
- 238000005070 sampling Methods 0.000 claims abstract description 8
- 230000008676 import Effects 0.000 claims description 23
- 230000007423 decrease Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 42
- 238000001816 cooling Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000012886 linear function Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012267 brine Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
- G05D23/1393—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2020-140330 | 2020-08-21 | ||
| JP2020140330A JP7432923B2 (ja) | 2020-08-21 | 2020-08-21 | 流量制御装置及び方法、並びに、流体供給システム |
| PCT/JP2021/029257 WO2022039047A1 (ja) | 2020-08-21 | 2021-08-06 | 流量制御装置及び方法、並びに、流体供給システム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20230054396A true KR20230054396A (ko) | 2023-04-24 |
Family
ID=80322695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020237008518A KR20230054396A (ko) | 2020-08-21 | 2021-08-06 | 유량 제어 장치 및 방법, 그리고 유체 공급 시스템 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230333575A1 (ja) |
| JP (1) | JP7432923B2 (ja) |
| KR (1) | KR20230054396A (ja) |
| CN (1) | CN115885233A (ja) |
| TW (1) | TW202227917A (ja) |
| WO (1) | WO2022039047A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115452312B (zh) * | 2022-10-26 | 2023-02-03 | 中国空气动力研究与发展中心低速空气动力研究所 | 一种热气流量测量与控制方法、系统 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2812404B2 (ja) * | 1990-12-21 | 1998-10-22 | 株式会社荏原製作所 | 弁開度制御方法 |
| WO2012166833A1 (en) | 2011-05-31 | 2012-12-06 | Johnson Matthey Public Limited Company | Dual function catalytic filter |
| JP2019045076A (ja) * | 2017-09-04 | 2019-03-22 | 三浦工業株式会社 | ガス流量制御装置 |
| JP7398886B2 (ja) * | 2018-07-02 | 2023-12-15 | 東京エレクトロン株式会社 | 流量制御器、ガス供給系及び流量制御方法 |
-
2020
- 2020-08-21 JP JP2020140330A patent/JP7432923B2/ja active Active
-
2021
- 2021-08-06 KR KR1020237008518A patent/KR20230054396A/ko unknown
- 2021-08-06 WO PCT/JP2021/029257 patent/WO2022039047A1/ja active Application Filing
- 2021-08-06 CN CN202180050840.7A patent/CN115885233A/zh active Pending
- 2021-08-06 US US18/041,859 patent/US20230333575A1/en active Pending
- 2021-08-19 TW TW110130592A patent/TW202227917A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN115885233A (zh) | 2023-03-31 |
| US20230333575A1 (en) | 2023-10-19 |
| TW202227917A (zh) | 2022-07-16 |
| JP2022035780A (ja) | 2022-03-04 |
| JP7432923B2 (ja) | 2024-02-19 |
| WO2022039047A1 (ja) | 2022-02-24 |
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