KR20230040971A - Frame for producing mask integrated frame and producing method thereof - Google Patents

Abstract

The present invention relates to a frame for manufacturing a frame-integrated mask and a method of manufacturing the same. The frame according to the present invention is a frame used to manufacture a frame-integrated mask by attaching a mask for forming OLED pixels, and comprises an edge frame part, and a mask cell sheet part. The mask cell sheet part includes an edge sheet portion; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion extending in a second direction perpendicular to the first direction, intersecting the first grid sheet portion, and having both ends connected to the edge sheet portion. The mask cell sheet part includes a plurality of mask cell regions provided in at least one of the first direction and the second direction perpendicular to the first direction, and the amount of Z-axis displacement of the mask cell sheet part based on an upper surface of the mask cell sheet part is 50 to 200 μm.

Description

Frame for manufacturing a frame-integrated mask and its manufacturing method {FRAME FOR PRODUCING MASK INTEGRATED FRAME AND PRODUCING METHOD THEREOF}

The present invention relates to a frame for manufacturing a frame-integrated mask and a manufacturing method thereof. More specifically, it relates to a frame for manufacturing a frame-integrated mask and a method for manufacturing the frame-integrated mask, which prevents the mask cell sheet portion from suddenly lifting or sagging when the frame-integrated mask is manufactured.

As a technology for forming pixels in the OLED manufacturing process, the FMM (Fine Metal Mask) method, which deposits organic materials on a desired location by attaching a thin metal shadow mask to the substrate, is mainly used.

In the existing OLED manufacturing process, a mask is manufactured in a stick shape, plate shape, etc., and then the mask is welded and fixed to the OLED pixel deposition frame. A plurality of cells corresponding to one display may be provided in one mask. In addition, several masks can be fixed to the OLED pixel deposition frame for manufacturing large-area OLEDs. In the process of fixing to the frame, each mask is tensioned so that it is flat. It is a very difficult task to adjust the tension so that the entire part of the mask is flat. In particular, in order to flatten each cell and align a mask pattern that is only a few to several tens of μm in size, a high level of work is required to check the alignment in real time while finely adjusting the tensile force applied to each side of the mask. do.

Nevertheless, in the process of fixing a plurality of masks to one frame, there is a problem in that alignment between masks and between mask cells is not good. In addition, in the process of fixing the mask to the frame by welding, the thickness of the mask film is too thin and has a large area, so the mask is sagging or distorted by the load, and wrinkles and burrs generated at the welded part during the welding process cause the mask cell to deteriorate. There was a problem with the alignment being staggered.

In the case of ultra-high-definition OLED, the current QHD picture quality is 500 to 600 PPI (pixel per inch), with a pixel size of about 30 to 50 μm, and 4K UHD and 8K UHD high-definition are higher than this, such as ~860 PPI and ~1600 PPI. has a resolution of In this way, considering the pixel size of ultra-high-definition OLED, the alignment error between each cell must be reduced to about several micrometers, and an error that deviate from this can lead to failure of the product, so the yield can be very low. Therefore, there is a need to develop a technology capable of preventing deformation such as drooping or twisting of the mask and clarifying the alignment, a technology of fixing the mask to the frame, and the like.

Accordingly, the present invention has been made to solve various problems of the prior art as described above, and when manufacturing a frame-integrated mask, a frame for manufacturing a frame-integrated mask capable of preventing a mask cell sheet from suddenly lifting or sagging, and a frame for manufacturing a frame-integrated mask and the same It aims at providing a manufacturing method.

In addition, an object of the present invention is to provide a frame for manufacturing a frame-integrated mask and a method for manufacturing the same, which can prevent deformation when attaching a mask to the frame by clarifying the alignment of the mask cell sheet portion in the frame. .

The above object of the present invention is a frame used to manufacture a frame-integrated mask by attaching a mask for forming an OLED pixel, wherein the frame includes: an edge frame portion; and a mask cell sheet portion, wherein the mask cell sheet portion includes: an edge sheet portion; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion that extends in a second direction perpendicular to the first direction, intersects the first grid sheet portion, and has both ends connected to the edge sheet portion, wherein the mask cell sheet portion comprises: , A plurality of mask cell regions are provided along at least one of the second directions perpendicular to the first direction, and the Z-axis displacement of the mask cell sheet portion relative to the top surface of the mask cell sheet portion is +50 μm to -200 μm. , which is achieved by frames.

A Z-axis displacement per unit length in the X-axis or Y-axis direction of the mask cell sheet portion within the mask cell region may be ±20 μm/10 mm or less.

A dummy pattern may be formed on at least a portion of the edge sheet portion.

The dummy pattern may be formed on at least a portion of the periphery of the mask cell region or on at least a portion of an outer edge of the rim sheet portion.

The dummy pattern may include a first dummy pattern formed on at least a part of the periphery of the mask cell region; and a second dummy pattern formed at least outside a portion where the first dummy pattern is formed.

The dummy pattern may offset the tensile force so that when a tensile force is applied to at least one side of the mask cell sheet portion, a tensile force smaller than the corresponding tensile force is transmitted to the mask cell sheet.

A width of the dummy pattern may be greater than at least 0.1 mm.

The dummy pattern may be penetrating along the thickness direction of the mask cell sheet portion or partially etched.

The second dummy pattern may be formed to be larger than the first dummy pattern.

The mask cell sheet portion may be formed to have a larger area than the rim frame portion to be attached, and at least a portion of the second dummy pattern may be formed in an outer region of the rim frame portion.

After the mask cell sheet unit is attached to the edge frame unit, at least a portion of the edge sheet unit on which the second dummy pattern is formed may be removed by trimming.

And, the above object of the present invention is a method for manufacturing a frame used to manufacture a frame-integrated mask by attaching a mask for forming an OLED pixel, comprising: (a) preparing an edge frame; and (b) stretching at least one side of the mask cell sheet unit and attaching it to the edge frame unit, wherein the mask cell sheet unit comprises: an edge sheet unit; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion that extends in a second direction perpendicular to the first direction, intersects the first grid sheet portion, and has both ends connected to the edge sheet portion, wherein the mask cell sheet portion comprises: , A plurality of mask cell regions are provided along at least one of the second directions perpendicular to the first direction, and the Z-axis displacement of the mask cell sheet portion relative to the top surface of the mask cell sheet portion is +50 μm to -200 μm. , achieved by the manufacturing method of the frame.

A Z-axis displacement per unit length in the X-axis or Y-axis direction of the mask cell sheet portion within the mask cell region may be ±20 μm/10 mm or less.

A dummy pattern is formed on at least a portion of the edge sheet portion, and in step (b), the dummy pattern may offset the tensile force so that a tensile force smaller than that directly applied to the mask cell sheet portion is transmitted to the mask cell sheet.

According to the present invention configured as described above, when manufacturing a frame-integrated mask, there is an effect of preventing the mask cell sheet portion from suddenly lifting or sagging.

In addition, according to the present invention, it is possible to prevent deformation when attaching the mask to the frame by clarifying the alignment of the mask cell sheet portion in the frame.

1 is a schematic diagram showing a conventional process of attaching a mask to a frame.
2 is a front view and a side cross-sectional view illustrating a frame-integrated mask according to an embodiment of the present invention.
3 is a front view and a side cross-sectional view showing a frame according to an embodiment of the present invention.
4 is a front view showing a mask cell sheet part according to an embodiment of the present invention.
5 to 7 are front views illustrating a process of manufacturing a frame according to an embodiment of the present invention.
8 is a schematic diagram showing an OLED pixel deposition apparatus using a frame-integrated mask according to an embodiment of the present invention.
9 is a schematic cross-sectional side view illustrating a Z-axis displacement of a mask cell sheet part according to an embodiment of the present invention.
10 shows measurement portions in the X-axis and Y-axis directions of a mask cell sheet portion on a frame according to an embodiment of the present invention.
FIG. 11 shows the Z-axis displacement of the mask cell sheet portion in each direction of FIG. 10 (a).
FIG. 12 shows the Z-axis displacement of the mask cell sheet portion in each direction of FIG. 10 (b).
FIG. 13 shows the Z-axis displacement per unit length of the mask cell sheet portion in each direction of FIG. 10 (a).
FIG. 14 shows the Z-axis displacement per unit length of the mask cell sheet portion in each direction of FIG. 10 (b).

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The detailed description of the present invention which follows refers to the accompanying drawings which illustrate, by way of illustration, specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable one skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other but are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in one embodiment in another embodiment without departing from the spirit and scope of the invention. Additionally, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. Accordingly, the detailed description set forth below is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all equivalents as claimed by those claims. Similar reference numerals in the drawings indicate the same or similar functions in various aspects, and the length, area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily practice the present invention.

1 is a schematic diagram showing a process of attaching a conventional mask 10 to a frame 20.

The conventional mask 10 is a stick-type or plate-type, and the stick-type mask 10 of FIG. 1 can be used by welding both sides of the stick to the OLED pixel deposition frame. A plurality of display cells C are provided on the body of the mask 10 (or the mask layer 11 ). One cell C corresponds to one display of a smartphone or the like. A pixel pattern P is formed in the cell C to correspond to each pixel of the display.

Referring to (a) of FIG. 1 , the stick mask 10 is loaded on the square frame-shaped frame 20 in a stretched state by applying tensile forces F1 to F2 in the direction of the long axis of the stick mask 10 . The cells C1 to C6 of the stick mask 10 are positioned in the blank area inside the frame 20 .

Referring to (b) of FIG. 1, after aligning while finely adjusting the tensile forces (F1 to F2) applied to each side of the stick mask 10, welding (W) a part of the side of the stick mask 10 Accordingly, the stick mask 10 and the frame 20 are interconnected. 1(c) shows a cross-sectional side view of the frame and the stick mask 10 connected to each other.

Although the tensile forces F1 to F2 applied to each side of the stick mask 10 are finely adjusted, there is a problem in that the mask cells C1 to C3 are not well aligned with each other. For example, an example is that the distances between the patterns of the cells C1 to C6 are different from each other or the patterns P are distorted. Since the stick mask 10 has a large area including a plurality of cells C1 to C6 and has a very thin thickness of several tens of μm, it is easily hit or distorted by a load. In addition, it is very difficult to check the alignment between the cells C1 to C6 in real time through a microscope while adjusting the tensile force F1 to F2 to flatten each cell C1 to C6. In order to prevent the mask pattern P having a size of several to several tens of μm from adversely affecting the pixel process of the ultra-high-definition OLED, it is preferable that the alignment error does not exceed 3 μm. This alignment error between adjacent cells is referred to as pixel position accuracy (PPA).

In addition to this, while connecting the plurality of stick masks 10 to one frame 20, respectively, a state of alignment between the plurality of stick masks 10 and between the plurality of cells C to C6 of the stick mask 10 It is also a very difficult task to clarify, and the process time for alignment inevitably increases, which is a significant reason for reducing productivity.

Meanwhile, after the stick mask 10 is connected and fixed to the frame 20, the tensile forces F1 to F2 applied to the stick mask 10 may act reversely to the frame 20 as tension. Such tension may slightly deform the frame 20, and a problem in which alignment between the plurality of cells C to C6 may be distorted may occur.

Accordingly, the present invention proposes a frame 200 and a frame-integrated mask enabling the mask 100 to form an integral structure with the frame 200 . The mask 100 integrally formed with the frame 200 can be prevented from deformation such as sagging or twisting, and can be clearly aligned with the frame 200 .

2 is a front view (FIG. 2 (a)) and a side cross-sectional view (FIG. 2 (b)) showing a frame-integrated mask according to an embodiment of the present invention. 3 is a front view and a side cross-sectional view showing a frame 200 according to an embodiment of the present invention.

In this specification, the configuration of the frame-integrated mask is briefly described below, but it can be understood that the structure and manufacturing process of the frame-integrated mask are incorporated in the Korean Patent Application No. 2018-0016186 as a whole.

Referring to FIGS. 2 and 3 , the frame-integrated mask may include a plurality of masks 100 and one frame 200 . In other words, it is a form in which a plurality of masks 100 are attached to the frame 200 one by one. Hereinafter, for convenience of description, a square mask 100 will be described as an example, but the masks 100 may be in the form of a stick mask having protrusions clamped on both sides before being attached to the frame 200, and the frame 200 ), then the protrusion can be removed.

A plurality of mask patterns P may be formed on each mask 100 , and one cell C may be formed on one mask 100 . One mask cell C may correspond to one display of a smartphone or the like.

The mask 100 may be made of a material such as invar, super invar, nickel (Ni), or nickel-cobalt (Ni-Co). The mask 100 may use a metal sheet produced by a rolling process or electroforming.

The frame 200 is formed to attach a plurality of masks 100 thereto. The frame 200 is preferably made of the same material as the mask in consideration of thermal deformation. The frame 200 may include an edge frame portion 210 having a substantially rectangular shape or a rectangular frame shape. The inside of the edge frame unit 210 may be hollow.

In addition, the frame 200 may include a plurality of mask cell regions CR, and may include a mask cell sheet portion 220 connected to the edge frame portion 210 . The mask cell sheet portion 220 may include an edge sheet portion 221 and first and second grid sheet portions 223 and 225 . The edge sheet portion 221 and the first and second grid sheet portions 223 and 225 refer to portions partitioned from the same sheet, and are integrally formed with each other.

The edge frame portion 210 may be formed to a thickness of several mm to several cm thicker than the thickness of the mask cell sheet portion 220 . The mask cell sheet portion 220 may have a thickness of about 0.1 mm to 1 mm, which is thinner than the thickness of the edge frame portion 210 but thicker than the mask 100 . The first and second grid sheet portions 223 and 225 may have a width of about 1 to 5 mm.

In the flat sheet, a plurality of mask cell regions CR (CR11 to CR56) may be provided except for regions occupied by the edge sheet portion 221 and the first and second grid sheet portions 223 and 225 .

The frame 200 includes a plurality of mask cell regions CR, and each mask 100 may be attached such that one mask cell C corresponds to the mask cell region CR. The mask cell C corresponds to the mask cell region CR of the frame 200, and part or all of the dummy may be attached to the frame 200 (mask cell sheet portion 220). Accordingly, the mask 100 and the frame 200 can form an integral structure.

4 is a front view showing the mask cell sheet part 220 according to an embodiment of the present invention.

The mask cell sheet portion 220 may be manufactured by manufacturing a flat sheet using an electroplating or other film forming process, and then removing a portion of the mask cell region (CR) through laser scribing, etching, or the like. there is. In this specification, an example in which a 6 X 5 mask cell region (CR: CR11 to CR56) is formed will be described. Five first grid sheet parts 223 and four second grid sheet parts 225 may exist.

As described above, the mask cell sheet portion 220 may be connected to the edge frame portion 210 . However, in the process of attaching the mask cell sheet portion 220 to the edge frame portion 210 by tensioning, the mask cell sheet portion 220 may be lifted or drooped.

Since the mask cell sheet portion 220 is a portion to which the edge of the mask 100 is directly attached, it must be kept taut. In particular, it is necessary to maintain a tight state in the temperature range of the OLED pixel process, and to prevent sagging due to a load or wrinkles due to tension in a specific part. It is considered very important to attach the mask cell sheet part 220 to the edge frame part 210 after making it taut by applying an appropriate amount of tensile force to the entire edge part.

However, since the mask cell sheet portion 220 is very thin, has a large area, and is composed of a metal sheet made of a material such as invar, there is a problem in that it is easily lifted and drooped even with a slight difference in tensile force. Even if the tension is slightly strong, the mask cell sheet portion 220 is pulled too tight and lifted, and even if the tension is slightly weakened, sagging occurs due to the load of the mask cell sheet portion 220 . In addition to the means for directly controlling the tensile force finely, it is necessary to control the tensile force in the structural part of the mask cell sheet portion 220 to make it flat.

Therefore, the present invention is characterized by further forming dummy patterns (230: 231, 233, 235, 237) capable of offsetting the tensile force on the mask cell sheet portion 220. The dummy patterns 230 (231, 233, 235, 237) are preferably formed on the edge sheet portions 221 (221a, 221b) of the mask cell sheet portion 220.

The mask cell sheet portion 220 may be formed at least equal to or larger than the edge frame portion 210 . The mask cell sheet portion 220 may be tensioned by applying a tensile force to the mask cell sheet portion 220 while clamping the edge portion (the outer portion 221b of the edge sheet portion) with a predetermined clamper (not shown) or the like. When the mask cell sheet portion 220 is formed to be larger than the edge frame portion 210, the alignment/attachment process is performed without interfering with the edge frame portion 210 while the mask cell sheet portion 220 is clamped with a clamper. It can be done [see FIG. 6]. At this time, of the edge sheet portion 221 of the mask cell sheet portion 220, a portion corresponding to the frame frame portion 210 is denoted by 221a, and a portion corresponding to the outside of the frame frame portion 210 is denoted by 221b.

When the mask cell sheet part 220 corresponds to the edge frame part 210, the first dummy pattern 231 is at least part of the periphery of the mask cell region CR from the inside of the edge frame part 210 or inside the border sheet part. (221a).

Also, the second dummy pattern 235 may be formed on the mask cell sheet portion 220 corresponding to the outer side of the edge frame portion 210 or on the outer side 221b of the edge sheet portion. In addition, as the second dummy pattern 233 is formed outside the mask cell sheet portion 220 , it may be formed to be equal to or larger than the first dummy pattern 231 . The second dummy pattern 233 may contribute to canceling/dispersing the tensile force over a wider area than the first dummy pattern 231 .

The edge sheet portion 221b corresponding to the outside of the frame frame portion 210 may be removed by trimming after the mask cell sheet portion 220 is attached to the frame frame portion 210 by welding or the like. there is. In other words, the outer portion 221b of the edge sheet portion on which the second dummy pattern 235 is formed (the outside of the welded portion) is removed, and the inner portion of the edge sheet portion on which the first dummy pattern 233 is formed ( Only 221a may be attached to the rim frame portion 210 .

The dummy patterns 230 (231, 233, 235, 237) may be formed in a size of several mm to several cm to macroscopically cancel/disperse the tensile force applied to the mask cell sheet portion 220, preferably. The width may be larger than 0.1 mm. The first and second dummy patterns 231 and 233 may be formed at intervals corresponding to intervals of the plurality of mask cell regions CR.

In addition, although the dummy pattern 230 is shown in a rectangular shape, there are, of course, no limitations on its shape, spacing, and size as long as it is within a range capable of canceling/dispersing the tensile force.

When the side of the mask cell sheet portion 220 on which the first and second dummy patterns 231 and 233 are formed is stretched (F1 to F4), the tensile force is generated due to the shape change of the first and second dummy patterns 231 and 233. It can offset being too strong or too weak. The first and second dummy patterns 231 and 233 are formed at intervals corresponding to the intervals of the plurality of mask cell regions CR, and can cancel tensile forces corresponding to rows and columns in which each mask cell region CR is formed. there is. Details of canceling/dispersing the tensile force will be described later with reference to FIG. 6 .

In addition to the first and second dummy patterns 231 and 233 , third dummy patterns 235 and 237 may be further formed at the edge portions of the ends where the first and second dummy patterns 231 and 233 are formed. The third dummy patterns 235 and 237 may further contribute to canceling/dispersing the tensile force at the corners in addition to canceling/dispersing the tensile force at the sides of the mask cell sheet portion 220 .

The first and second dummy patterns 231 and 233 may be formed in a penetrating form along the thickness direction of the mask cell sheet portion 220 , but may also be formed in a form in which only a partial depth is etched rather than completely penetrating.

Hereinafter, a process of manufacturing the frame 200 by attaching the mask cell sheet portion 220 on which the dummy patterns 230 (231, 233, 235, and 237) are formed to the frame frame portion 210 and a process of canceling/dispersing the tensile force explain about

5 to 7 are front views illustrating a process of manufacturing the frame 200 according to an embodiment of the present invention.

First, referring to (a) of FIG. 5 , the frame frame unit 210 is prepared. The edge frame unit 210 may have a rectangular frame shape including a hollow region R.

Next, referring to (b) of FIG. 5 , a mask cell sheet portion 220 is prepared. The mask cell sheet portion 220 is formed by manufacturing a flat sheet using rolling, electroplating, or other film forming processes, and then removing a portion of the mask cell region (CR) through laser scribing, etching, and the like, and dummy. Patterns 230 (231, 233, 235, 237) can be formed by forming. Since the mask cell sheet portion 220 has a larger area than the edge frame portion 210, a portion corresponding to the position of the edge frame portion 210 is indicated by a dotted line in FIG. 5(b).

Next, referring to FIG. 6 , the mask cell sheet portion 220 may correspond to the edge frame portion 210 . In the process of matching, all sides of the mask cell sheet portion 220 are stretched (F1 to F4) to flatten the mask cell sheet portion 220, and the edge sheet portion 221 is attached to the frame frame portion 210. can respond Even on one side, the mask cell sheet portion 220 may be clamped and stretched at several points (eg, 1 to 3 points in FIG. 6 ). At this time, the tensile strength may be different for each of several points on one side. Meanwhile, the mask cell sheet portion 220 may be stretched (F1, F2) along some lateral directions instead of all sides.

Even if the tension of the clamper (not shown) clamping the mask cell sheet portion 220 is slightly strong, the mask cell sheet portion 220 is pulled too tight and lifted, and even if it is slightly weakened, the load of the mask cell sheet portion 220 sagging may occur. However, in the mask cell sheet portion 220 of the present invention, the dummy patterns 230, 231, 233, 235, and 237 may offset/disperse the tensile force.

Referring to the enlarged portion, even if the mask cell sheet portion 220 (outer side 221b of the edge sheet portion 220) is stretched with a tensile force of F1, the second dummy pattern 233 can offset the tensile force with F1'. can Since the second dummy pattern 233 is not a part filled with a sheet, but a part penetrated or etched to a partial depth, it does not lift or load and is slightly deformed, canceling the tensile force from F1 to F1' and transmitting it to the inside. At the same time, the first dummy pattern 231 formed inside the second dummy pattern 233 further offsets the tensile force by F1", and the tensile force is applied to the inner edge sheet portion 221a or the portion where welding W is to be performed. In this process, the strong tensile force of F1 can be appropriately controlled by F1". Of course, even if only one of the first dummy pattern 231 and the second dummy pattern 233 is formed, the tensile force can be offset and transferred to the inside of the mask cell sheet portion 220 .

At the same time, the tensile force of F1 may be distributed throughout the edge sheet portion 221 along the direction in which the first dummy pattern 231 and the second dummy pattern 233 are formed. Thus, the tensile force can be offset and distributed uniformly throughout the mask cell sheet portion 220 . Third dummy patterns 235 and 237 are further formed at the corners of the mask cell sheet portion 220 to offset and distribute the concentration of tensile force at the corners.

Accordingly, without the need to precisely control the tensile forces (F1 to F4) directly applied to the mask cell sheet portion 220 through a clamper (not shown), the tensile force is reduced through structural improvement of the mask cell sheet portion 220. It can be uniformly and properly controlled.

Next, further referring to FIG. 6 , after the mask cell sheet portion 220 corresponds to the edge frame portion 210 , the inner portion 221a of the edge sheet portion 221 may be welded (W). It is preferable to weld (W) all sides so that the mask cell sheet portion 220 can be firmly attached to the edge frame portion 210, but both sides may be welded (W). The welding (W) should be performed as close as possible to the edge of the edge frame unit 210 so that the lifted space between the edge frame unit 210 and the mask cell sheet unit 220 can be reduced as much as possible and adhesion can be increased. The welding (W) part may be formed in a line or spot shape, and has the same material as the mask cell sheet part 220, and the edge frame part 210 and the mask cell sheet part 220 are integrally formed. It can be a medium to connect with.

Next, referring to FIG. 7 , after the mask cell sheet unit 220 is attached to the edge frame unit 210, the outer portion 221b of the border sheet unit 221 on which the second dummy pattern 233 is formed is removed. can be removed Since the inner portion 221a of the edge sheet portion 221 is attached to the edge frame 210 by welding (W), the outer portion 221b is removed in a state where the outer portion 221b has been trimmed to form the outer portion 221b. ) can be removed. Accordingly, the manufacture of the frame 200 can be completed.

As a subsequent process, when a process of attaching the plurality of masks 100 corresponding to and attaching the plurality of masks 100 to the mask cell region CR of the frame 200 is completed, the fabrication of the frame integrated mask of the present invention is completed.

8 is a schematic diagram showing an OLED pixel deposition apparatus 1000 using frame-integrated masks 100 and 200 according to an embodiment of the present invention.

Referring to FIG. 8 , the OLED pixel deposition apparatus 1000 includes a magnet plate 300 in which a magnet 310 is accommodated and a cooling water line 350 is disposed, and an organic material source 600 from a lower portion of the magnet plate 300. ) and a deposition source supply unit 500 for supplying.

A target substrate 900 such as glass on which the organic material source 600 is deposited may be interposed between the magnet plate 300 and the source deposition unit 500 . The frame-integrated masks 100 and 200 (or FMM) for depositing the organic material source 600 pixel by pixel may be disposed on the target substrate 900 so as to be in close contact with or very close to each other. The magnet 310 generates a magnetic field and may adhere to the target substrate 900 by the magnetic field.

The deposition source supply unit 500 may supply the organic material source 600 by reciprocating left and right paths, and the organic material source 600 supplied from the deposition source supply unit 500 may form a pattern P formed on the frame integrated masks 100 and 200. ) and deposited on one side of the target substrate 900 . The deposited organic material source 600 passing through the pattern P of the frame-integrated masks 100 and 200 may serve as the pixel 700 of the OLED.

In order to prevent non-uniform deposition of the pixels 700 due to a shadow effect, the patterns of the frame-integrated masks 100 and 200 may be inclined (S) (or formed in a tapered shape (S)). . Since the organic material sources 600 passing through the pattern in a diagonal direction along the inclined surface may also contribute to the formation of the pixel 700, the pixel 700 may be deposited with a uniform thickness as a whole.

9 is a schematic cross-sectional side view illustrating a Z-axis displacement of a mask cell sheet part according to an embodiment of the present invention.

As seen in FIG. 8 , it is required that the frame-integrated masks 100 and 200 be placed in close contact with or very close to the target substrate 900 . When the organic material source 600 passing through the mask 100 forms the OLED pixel 700, as the distance between the mask 100 and the target substrate 900 increases, the quality of the OLED pixel 700 is formed. It becomes difficult.

Therefore, as shown in (a) of FIG. 9 , in order to improve adhesion to the target substrate 900, the mask cell sheet portion 220 is in a flat state, or at least not sagging or convex upwards, so that the edge frame portion Attached to (210) is most preferred. However, as the mask cell sheet portion 220 has a large area, it is not easy to maintain a perfectly flat state by the load. Accordingly, as shown in (b) of FIG. 9 , deflection, that is, displacement H in the -direction in the Z axis may occur.

As described above with reference to FIG. 4 , the present invention forms the first and second dummy patterns 227 and 229 to control the tensile force when the mask cell sheet portion 220 is attached to the frame frame portion 210 , thereby controlling the mask cell sheet portion 220 . A displacement amount of the seat portion 220 in the Z-axis direction is set. In order to implement high-quality OLED pixels 700 such as QHD, UHD, and 8K UHD, the degree of adhesion to the target substrate 600 must be high. The Z-axis displacement of (220) is characterized in that +50 μm to -200 μm.

Considering that the thickness of the mask 100 is between about 5 μm and 50 μm, the top surface of the mask cell sheet portion 220 is substantially equivalent to the thickness of the mask 100 in the Z-axis even if displacement occurs. As a result, the mask 100 may be in complete contact with the target substrate 600 . In addition to this, considering the gap that does not affect the OLED pixel 700 formed within the width of the mask pattern P and the set error range, the Z-axis displacement of the mask cell sheet portion 220 is from +50 μm to +50 μm. It can be set to -200㎛. Forming a frame-integrated mask in this section may be suitable for depositing a high-resolution OLED.

10 shows measurement portions in the X-axis and Y-axis directions of a mask cell sheet portion on a frame according to an embodiment of the present invention.

In one embodiment of the present invention, the mask cell sheet portion 220 having a size of about 450 mm X 350 mm and having a 5 X 2 mask cell region (CR) as shown in FIG. attached to. As shown in FIG. 10 (a), the Z-axis displacement of the mask cell sheet 220 is measured along the X1 to X12 directions (long axis direction), and as shown in FIG. 10 (b), the Y1 to Y6 and Y10 to Y16 directions (short axis direction) ), the Z-axis displacement of the mask cell sheet portion 220 was measured.

FIG. 11 shows the Z-axis displacement of the mask cell sheet portion in each direction of FIG. 10 (a).

Referring to FIG. 11 (a) , it can be confirmed that the Z-axis displacement of the mask cell sheet portion 220 is 0 or more in the X1 direction and the X4 direction. In particular, it is confirmed that the lifting value is high due to the height of the welding point for attachment in the outside of the mask cell region CR (the X-axis of about 80 or less and about 470 or more in the graph). Sagging of the mask cell sheet portion 220 does not appear even inside the mask cell region CR (at about 80 to 470 on the X axis in the graph), but rather protrudes upward. The X1 and X4 directions are the edges of the mask cell sheet portion 220 and are close to the portion attached to the frame frame portion 210 and are in a tight state, so that downward sagging is not confirmed.

The X2 direction and the X3 direction are central portions of the mask cell sheet portion 220 and correspond to the mask cell region CR. Therefore, since there is no supported portion at the bottom, it can be confirmed that the Z-axis displacement of the mask cell sheet portion 220 is 0 or less. That is, it can be confirmed that the mask cell sheet portion 220 is displaced along the -Z axis because it sags downward.

Referring to FIG. 11 (b), in the X8 and X9 directions, the Z-axis displacement is 0 or more outside the mask cell region CR (the X-axis area below about 80 and above about 470 degrees in the graph), whereas the mask cell area CR ), it can be confirmed that the Z-axis displacement has a value of 0 or less on the inside and deflection occurs.

Referring to FIG. 11 (c) , it can be confirmed that the Z-axis displacement of the mask cell sheet portion 220 is 0 or more in the X5 to X7 directions and the X10 to X12 directions. Since this part is the part where the mask cell sheet part 220 is supported by the edge frame part 210, no downward sagging is confirmed.

FIG. 12 shows the Z-axis displacement of the mask cell sheet portion in each direction of FIG. 10 (b).

Referring to FIG. 12 (a), in the Y1 and Y6 directions, the lift value is high due to the height of the welding point for attachment in the outer mask cell region (CR) (the Y-axis of about 70 or less, about 350 or more in the graph). that is confirmed Since only one grid cell sheet part (223, 225) is caught inside the mask cell region (CR) (approximately 70 to 350 on the Y axis in the graph), the Z-axis displacement increases only in this area and the Z-axis displacement increases in the other areas. It can be seen that it is generally low.

The Y2 to Y5 directions correspond to the central portion of the mask cell sheet portion 220 and correspond to the mask cell region CR. Therefore, since there is no supported portion at the bottom, it can be confirmed that the Z-axis displacement of the mask cell sheet portion 220 is 0 or less. That is, it can be confirmed that the mask cell sheet portion 220 is displaced along the -Z axis because it sags downward.

In the Y10 and Y16 directions, it can be confirmed that the Z-axis displacement of the mask cell sheet portion 220 is 0 or more. Since this part is the part where the mask cell sheet part 220 is supported by the edge frame part 210, no downward sagging is confirmed.

Referring to FIG. 12 (b), in the Y11 to Y15 directions, the Z-axis displacement is 0 or more outside the mask cell region CR (the Y-axis of about 70 or less and about 350 or more in the graph), whereas the mask cell region CR On the inside, it can be seen that the Z-axis displacement has a value of 0 or less and deflection occurs.

FIG. 13 shows the Z-axis displacement per unit length of the mask cell sheet portion in each direction of FIG. 10 (a).

Referring to FIG. 13, in the X1 to X4 directions, the lifting is strong due to the height of the welding point for attachment in the outside of the mask cell region (CR) (the X axis of about 80 or less, about 470 or more in the graph), so the X axis It can be seen that the Z-axis displacement per unit length is larger than ±20㎛/10mm. On the other hand, in the inside of the mask cell region (CR) (approximately 80 to 470 on the X axis in the graph), the Z-axis displacement per unit length in the X-axis must be less than ±20㎛/10mm so that sagging does not occur rapidly and sags occur linearly. The amount of deflection can be set by controlling the tensile force as much as possible.

FIG. 14 shows the Z-axis displacement per unit length of the mask cell sheet portion in each direction of FIG. 10 (b). Indicates the absolute value of the Z-axis displacement per Y-axis unit length.

Referring to FIG. 14, in the Y1 and Y6 directions, lifting appears strong due to the height of the welding point for attachment at the outer edge of the mask cell region CR (the Y axis of about 70 or less, about 350 or more in the graph), so the Y axis It can be seen that the Z-axis displacement per unit length is larger than ±20㎛/10mm. Since only one grid cell sheet portion 223, 225 is caught inside the mask cell region CR (approximately 70 to 350 on the Y axis in the graph), the Z-axis displacement increases only in this area, and the amount of Z-axis displacement per unit length increases. It can be seen that it appears large.

In the Y2 to Y5 directions, the lifting is strong due to the height of the welding point for attachment in the outside of the mask cell area (CR) (the Y-axis of about 70 or less, about 350 or more in the graph), so the Z-axis displacement per Y-axis unit length It can be seen that this appears larger than ±20 μm/10 mm. On the other hand, in the inside of the mask cell region (CR) (approximately 80 to 470 on the Y axis in the graph), the Z-axis displacement per unit length of the Y-axis must be less than ±20㎛/10mm so that sagging does not occur rapidly and sags occur linearly. The amount of deflection can be set by controlling the tensile force as much as possible.

As described above, in the present invention, the amount of Z-axis displacement (amount of lift/amount of deflection (H)) of the mask cell sheet part 220 is preferably +50 to -200 μm, and the amount of change per unit length of the X-axis/Y-axis is ±20 The frame 200 may be configured by controlling the tensile force of the mask cell sheet portion 220 to be less than ㎛/10 mm. Accordingly, there is an effect of improving the adhesion between the mask 100 and the target substrate 900 to form the OLED pixel 700 of clear quality.

Although the present invention has been shown and described with preferred embodiments as described above, it is not limited to the above embodiments, and various variations can be made by those skilled in the art within the scope of not departing from the spirit of the present invention. Transformation and change are possible. Such modifications and variations are to be regarded as falling within the scope of this invention and the appended claims.

100: mask
110: mask film, mask metal film
200: frame
210: border frame part
220: mask cell sheet portion
221: border seat portion
223: first grid sheet portion
225: second grid sheet portion
227: first dummy pattern
229: second dummy pattern
C: cell, mask cell
CR: mask cell area
P: mask pattern

Claims (10)

A frame used to manufacture a frame-integrated mask by attaching a mask for forming an OLED pixel,
The frame may include a border frame portion; And a mask cell sheet portion,
The mask cell sheet part,
border sheet portion; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion extending in a second direction perpendicular to the first direction, crossing the first grid sheet portion, and having both ends connected to the edge sheet portion;
The mask cell sheet portion includes a plurality of mask cell regions along at least one of a first direction and a second direction perpendicular to the first direction;
The Z-axis displacement amount per unit length in the X-axis or Y-axis direction of the mask cell sheet portion within the mask cell area is ±20 μm / 10 mm or less, the frame. According to claim 1,
A frame in which a dummy pattern is formed on at least a part of the edge sheet portion. According to claim 2,
The dummy pattern is
a first dummy pattern formed on at least a part of the periphery of the mask cell region; and
a second dummy pattern formed at least outside a portion where the first dummy pattern is formed;
Including, frame. According to claim 2,
The dummy pattern offsets the tensile force so that when a tensile force is applied to at least one side of the mask cell sheet portion, a tensile force smaller than the corresponding tensile force is transmitted to the mask cell sheet. According to claim 2,
The width of the dummy pattern is at least greater than 0.1mm, frame. According to claim 3,
A frame in which the second dummy pattern is formed to be larger than the first dummy pattern. According to claim 3,
The frame of claim 1 , wherein the mask cell sheet portion is formed to have a larger area than the frame portion to be attached, and at least a part of the second dummy pattern is formed in an area outside the frame portion. According to claim 7,
After the mask cell sheet unit is attached to the edge frame unit, at least a portion of the edge sheet unit on which the second dummy pattern is formed is removed by trimming. A method for manufacturing a frame used to manufacture a frame-integrated mask by attaching a mask for forming an OLED pixel,
(a) preparing a border frame unit; and
(b) attaching at least one side of the mask cell sheet part to the edge frame part;
including,
The mask cell sheet part,
border sheet portion; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion extending in a second direction perpendicular to the first direction, crossing the first grid sheet portion, and having both ends connected to the edge sheet portion;
The mask cell sheet portion includes a plurality of mask cell regions along at least one of a first direction and a second direction perpendicular to the first direction;
The Z-axis displacement amount per unit length in the X-axis or Y-axis direction of the mask cell sheet portion within the mask cell region is ±20 μm / 10 mm or less. According to claim 9,
A dummy pattern is formed on at least a part of the edge sheet portion,
In step (b), the dummy pattern offsets the tensile force so that a tensile force smaller than that directly applied to the mask cell sheet portion is transmitted to the mask cell sheet.

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