KR20230017550A - Manufacturing method of mask alignment stick - Google Patents

Abstract

The present invention relates to a method for manufacturing mask alignment sticks which are mounted on a mask frame and support a mask sheet that is to be bonded to the mask frame. The present invention provides a mask alignment stick manufacturing method which comprises: an alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys, which are to be formed on mask alignment sticks, on an original plate for manufacturing the plurality of mask alignment sticks; and a mask alignment stick separation step of separating the mask alignment sticks from the original plate by cutting outer circumferential surfaces of the respective mask alignment sticks in the original plate. Accordingly, instead of simultaneously processing alignment patterns, keys, and external appearance lines of mask alignment sticks on an original plate, the external appearance lines of the mask alignment sticks are processed after processing the plurality of alignment patterns and keys on the original plate so that the precision of alignment patterns and keys can be improved.

Description

Manufacturing method of mask alignment stick {Manufacturing method of mask alignment stick}

The present invention relates to a method for manufacturing a mask alignment stick, and more particularly, to a method for manufacturing a mask alignment stick for manufacturing a mask alignment stick mounted on a mask frame and supporting a mask sheet bonded to the mask frame from the lower portion. it's about

Referring to the background art disclosed in Korean Patent Registration No. 10-2210022, an organic light-emitting diode (OLED) is a display device provided in a TV, PC, tablet PC, smart phone, smart location, vehicle instrument panel, etc. is widely used as In this OLED, a light emitting layer emitting light is made of an organic compound. In the OLED manufacturing process, a method of depositing an organic material at a desired location by attaching a thin metal mask to a substrate is mainly used.

In a conventional OLED manufacturing process, after manufacturing a metal mask in a stick shape, plate shape, etc., the metal mask is welded and fixed on a mask frame. Thereafter, the dummy region of the metal mask welded to the mask frame is removed by cutting along the trim line.

A conventional metal mask is fixed by welding on the mask frame after being stretched with a constant tensile force. At this time, an alignment pattern for alignment with a substrate seated on the mask frame is disposed at the edge of the metal mask.

However, in the conventional metal mask, stress is concentrated on the edge of the mask sheet where the alignment pattern is placed during the process of tensioning with a constant tensile force, so the alignment pattern is distorted and the positioning accuracy is lowered, and the metal mask There was a problem that the central part of the sag to the bottom.

In order to solve the above problem, a mask alignment stick having an alignment pattern formed thereon is bonded to the mask frame to accurately position the metal mask while solving the problem that the central part of the metal mask sags downward. An alignment pattern for aligning with the mask sheet and an alignment key are formed on the mask align stick.

In the case of manufacturing a conventional mask alignment stick, the outer line of the mask alignment stick, the alignment pattern, and the alignment key are simultaneously processed through an etching process in a sheet-shaped original state.

In this case, the outline of the mask alignment stick is processed first, and distortion occurs, resulting in a problem in that the accuracy of the alignment pattern and alignment key is deteriorated.

In addition, when processing the align key, the alignment key is processed by predicting the tensile state, but it is difficult to process the align key accurately due to problems such as bending of the fabric.

The present invention was created to solve the above problems, and in the case of manufacturing a mask alignment stick using a sheet-shaped ledger, the alignment pattern and alignment patterns are improved by improving the alignment pattern processing process and the alignment key processing process. It is to provide a method of manufacturing a mask alignment stick that improves the precision of an in-key.

In order to achieve the above object, the present invention relates to a method for manufacturing a mask sheet alignment stick mounted on a mask frame and supporting a mask sheet bonded to the mask frame, which is a method for manufacturing a plurality of mask alignment sticks. an alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys formed on each mask alignment stick; and a mask alignment stick separation step of separating the mask alignment sticks from the mother sheet by cutting the outer circumferential surface of each mask alignment stick from the mother sheet.

In the mask alignment stick manufacturing method according to the present invention, in the alignment pattern and key forming step, a plurality of alignment patterns may be formed on the mother sheet by dry etching, and the plurality of keys may be formed by wet etching. It may be formed on a mother sheet, and the alignment pattern may be a plurality of alignment holes formed spaced apart from each other.

In the step of separating the mask alignment stick, the mask alignment stick may be separated by cutting an outer circumferential surface of the mask alignment stick from the mother sheet using wet etching.

The mask alignment stick manufacturing method according to the present invention may further include a mask alignment stick stretching step of stretching the mask alignment stick separated through the mask alignment stick separation step.

The mask alignment stick stretching step includes a mask alignment stick bonding step of bonding the mask alignment stick to a polymesh, which is an elastic body, and a polymesh bonding step of bonding the polymesh to which the mask alignment stick is bonded to a tensile frame; A polymesh stretching step of stretching the polymesh using a tension frame and a polymesh removing step of removing the polymesh inside the circumferential surface of the mask align stick.

The mask alignment stick stretching step may further include a polymesh inspection step of inspecting whether the mask alignment stick is uniformly stretched by inspecting whether the polymesh stretched by the tension frame is uniformly stretched. there is.

The polymesh inspection step includes a polymesh photographing step of photographing the front and back of the polymesh using a vision on the lower surface of the stretched polymesh after the metal mask sheet is bonded to the upper surface, and the image of the front and back photographed by the vision and the machine It may include an image comparison step in which the control unit compares and inspects images of the front and back sides of the photographed polymesh that are uniformly stretched.

In the polymesh tensioning step, the tension frame for tensioning the polymesh includes a frame portion having a closed quadrangular shape, first to fourth tension portions disposed adjacent to the inside of the frame portion, and the first tension portion. to a fourth extension part, and a clamp part for separating the first extension part to the fourth extension part so that the distance between the first extension part and the fourth extension part disposed to correspond to each other by pulling the first extension part to the fourth extension part to the outside of the frame part can

In the method for manufacturing a mask alignment stick according to the present invention, a plurality of alignment patterns and keys are processed on a ledger without simultaneously processing an alignment pattern, a key, and an outer line of the mask alignment stick on the ledger, and then a mask alignment stick is formed. It is possible to improve the precision of the alignment pattern and key by processing the outline.

1 is a flow chart showing the sequence of a method of manufacturing a mask alignment stick according to an embodiment of the present invention.
FIG. 2 is a flowchart illustrating a detailed sequence of the mask alignment stick stretching step shown in FIG. 1 .
FIG. 3 is a diagram showing a detailed sequence of the polymesh inspection step shown in FIG. 2 .
4 is a diagram schematically illustrating a process of separating a plurality of mask alignment sticks from the ledger after forming a plurality of alignment patterns and keys on the ledger.
5 is a diagram schematically illustrating a process of bonding a mask align stick to a polymesh.
6 is a diagram schematically illustrating a process of bonding a polymesh to which a mask align stick is bonded to a tensile frame.
FIG. 7 is a diagram schematically illustrating a process of tensioning a polymesh using the tension frame shown in FIG. 6 .
8 is a diagram schematically illustrating a process of cutting a polymesh positioned on a lower surface of a mask align stick in a tensile frame in which the polymesh is tensioned.
9 is a diagram schematically illustrating a process of bonding a mask align stick tensioned to a mask frame using a tension frame.
10 is a diagram schematically illustrating a process of inspecting a stretched polymesh.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Prior to this, the terms or words used in this specification and claims should not be construed as being limited to the usual or dictionary meaning, and the inventor appropriately uses the concept of the term in order to explain his/her invention in the best way. It should be interpreted as a meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined.

Referring to FIG. 1 , a mask alignment stick manufacturing method according to an embodiment of the present invention is for manufacturing a mask alignment stick mounted on a mask frame and supporting a mask sheet bonded to the mask frame. A key forming step ( S10 ), a mask alignment stick separation step ( S20 ) may be included, and a mask alignment stick stretching step ( S30 ) may be further included.

1 and 4, in the alignment pattern forming step (S10), a plurality of mask alignment sticks 110 are formed on the ledger 10 for manufacturing the plurality of mask alignment sticks 110. This step is to form the alignment patterns 112 and the keys 114. The plurality of alignment patterns 112 are formed on the mother sheet 10 by dry etching, and the plurality of keys 114 are formed by wet etching. It is preferable to be formed on the ledger 10 by The alignment pattern 112 is composed of a plurality of alignment holes 112a, and the plurality of alignment holes 112a are formed to be spaced apart at equal intervals in the longitudinal direction of each mask alignment stick 110.

Referring to FIG. 1 , after the alignment pattern and key formation step (S10), a mask alignment stick separation step (S20) is performed, and the mask alignment stick separation step (S20) is performed in the ledger 10. This step is to separate the plurality of mask alignment sticks 110 from the mother sheet 10 by cutting the outer circumferential surface of the mask alignment stick 110 . In the mask alignment stick separation step (S20), it is preferable to separate the mask alignment stick 110 from the mother sheet 10 by cutting the outer circumferential surface of the mask alignment stick 110 using wet etching. After processing a plurality of alignment patterns 112 and keys 114 on the ledger 10, the outer peripheral surface of the mask alignment stick 110 is cut to improve the precision of the alignment patterns 112 and keys 114. be able to do

Here, wet etching, also called wet etching, is etching using a liquid chemical that has the property of corroding and dissolving only the target metal. As a method of etching by etching method, processing accuracy is improved compared to wet etching, and it is preferable to use wet etching when fine processing is not required, and to use dry etching when fine processing is required.

After the mask alignment stick separation step (S20), a mask alignment stick stretching step (S30) is performed. In the mask alignment stick stretching step (S30), the separated mask alignment sticks 110 are equally stretched. It is a step to

Referring to FIG. 2, the mask alignment stick stretching step (S30) includes a mask alignment stick bonding step (S31), a polymesh bonding step (S32), a polymesh stretching step (S33), and a polymesh removal step. (S34) and a polymesh inspection step (S35).

2 and 5, in the mask alignment stick bonding step (S31), a plurality of mask alignment sticks 110 formed with alignment patterns 112 and keys 114 separated from the ledger 10. This is a step of bonding to the polymesh 200, which is an elastic body having a rectangular shape, and when the mask align stick 110 is bonded to the polymesh 200, the circumferential end of the mask align stick 110 and Adjacent portions are bonded to adhere to the polymesh 200 . When the mask alignment stick bonding step (S31) is completed, only the circumferential surface of the mask align stick 110 to be bonded is bonded to the polymesh 120, and the portion excluding the circumferential surface is bonded to the polymesh 120. It is not bonded, but adhered.

The polymesh 200 is preferably 80 to 150mesh, and it is preferable that the thickness or specification of the mesh can be applied differently depending on the tension condition and thickness of the mask align stick 110.

2, 6 and 7, after the mask alignment stick bonding step (S31), a polymesh bonding step (S32) is performed. In the polymesh bonding step (S32), a plurality of This is a step of bonding the polymesh 200 to which the mask align stick 110 is bonded to the tensile frame 300. The polymesh 200 to which the mask align stick 110 is bonded is coupled to the first tensile parts 320 to the fourth tensile parts 350 provided inside the tensile frame 300, thereby forming the tensile frame 300. (300).

The tension frame 300 for tensioning the polymesh 200 to which the mask align stick 110 is bonded includes a frame portion 310 and a first tension portion provided inside the frame portion 310 ( 320), the second extension part 330, the third extension part 340, the fourth extension part 350, and the clamp part connected to the first extension part 320 to the fourth extension part 350 ( 360).

The tension frame 300 for tensioning the polymesh 200 to which the mask align stick 110 is bonded includes a frame portion 310 and a first tension portion provided inside the frame portion 310 ( 320), the second extension part 330, the third extension part 340, the fourth extension part 350, and the clamp part connected to the first extension part 320 to the fourth extension part 350 ( 360).

The first extension part 320 to the fourth extension part 350 are connected to the clamp part 360, and the clamp part 360 holds the first extension part 320 to the fourth extension part 350. The polymesh 200 is stretched by pulling the frame part 310 outward and separating the first tensile parts 320 to the fourth tensile parts 350 so that the distance between them is increased. It is preferable that a plurality of through holes 310a through which the clamp part 360 passes are formed in the frame part 310, and one end is connected to the first tensile part 320 to the fourth tensile part 350. It is preferable that the other end of the clamp part 360 is connected to the forward and backward movement member 370 for moving the clamp part 360 forward and backward after passing through the through hole 310a.

After the polymesh bonding step (S32), a polymesh stretching step (S33) is performed. In the polymesh stretching step (S33), the mask alignment stick 110 is bonded using the tensile frame 300. This step is to stretch the polymesh 200.

After coupling the circumferential surface of the polymesh 200 having a square shape to the first tensile parts 320 to the fourth tensile parts 350 disposed inside the frame part 310 to have a square shape, the forward and backward movement When the clamp part 360 is pulled outward of the frame part 310 by using the member 370, the distance between the first tension part 320 to the fourth tension part 350 disposed correspondingly increases. The polymesh 200 and the mask align stick 110 bonded to the polymesh 200 are tensioned by a uniform tensile force.

Referring to FIGS. 2 and 8 , after the polymesh stretching step (S33), the polymesh removal step (S34) is performed. The polymesh removal step (S34) is a step of removing the polymesh 200 located inside the circumferential surface of the mask alignment stick 110, and it is preferable to use a laser when removing the polymesh 200. .

Referring to FIGS. 2 and 3 , it is preferable to perform a polymesh inspection step (S35) after performing the polymesh stretching step (S33) and before performing the polymesh removal step (S34). The polymesh inspection step (S35) is a step of inspecting whether or not the polymesh 200 stretched by the tensile frame 300 is uniformly stretched, and the polymesh inspection step (S35) is a polymesh photographing step ( S351) and an image comparison step (S352).

3 and 10, in the polymesh photographing step (S351), the lower surface of the polymesh 200 is photographed using the vision 500 after the mask align stick 110 is bonded to the upper surface. In this step, the front and back 210 of the polymesh 200 stretched by the tension frame 300 is photographed using the vision 500, and the photographed image is transmitted to the controller 600.

After the polymesh photographing step (S351), an image comparison step (S352) is performed. This is a step of comparing and inspecting the image and the image of the front and back sides of the polymesh 200 uniformly stretched and stored in the control unit 600 after being photographed. By performing the polymesh inspection step (S35), the polymesh 200 is uniformly It is possible to easily and quickly check whether or not the alignment pattern 112 and the key 114 formed on the alignment mask stick 110 are deformed through this, and the polymesh 200 determined as normal ) performs the subsequent process, and the polymesh 200 determined to be defective is discarded.

The polymesh 200 is preferably colored to have a difference from the mask alignment stick 110, and the polymesh 200 has a color so that the front and back 210 of the polymesh 200 are uniform It is easy to determine whether or not it is stretched, and it is possible to determine whether or not it is uniformly stretched by checking whether the shape of the front and back 210 of the polymesh 200 is changed.

A plurality of alignment patterns 112 and keys ( 114) and then processing the outer line of the mask alignment stick 110, it is possible to improve the accuracy of the alignment pattern 112 and the key 114.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

100: Ledger 110: Mask Align Stick
112: alignment pattern 114: key
200: Polymesh 300: Tensile frame
310: frame part 320: first tensile part
330: second tensile portion 340: third tensile portion
350: fourth tensile part 360: clamp part
400: mask frame 500: vision
600: control unit

Claims (8)

It relates to a method for manufacturing a mask sheet alignment stick mounted on a mask frame and supporting a mask sheet bonded to the mask frame,
an alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys formed on each mask alignment stick on a ledger for manufacturing a plurality of mask alignment sticks; and
A mask alignment stick manufacturing method comprising a mask alignment stick separation step of separating the mask alignment sticks from the ledger by cutting the outer circumferential surface of each mask alignment stick in the ledger.
The method of claim 1,
In the alignment pattern and key formation step, a plurality of alignment patterns are formed on the ledger by dry etching, and the plurality of keys are formed on the ledger by wet etching;
The method of manufacturing a mask alignment stick, characterized in that the alignment pattern is a plurality of alignment holes formed spaced apart.
The method of claim 1,
In the step of separating the mask alignment stick, wet etching is used to cut the outer circumferential surface of the mask alignment stick to separate the mask alignment stick.
The method of claim 1,
The method of manufacturing a mask alignment stick further comprising a mask alignment stick stretching step of stretching the mask alignment stick separated through the mask alignment stick separation step.
The method of claim 4,
The mask alignment stick tension step,
A mask alignment stick bonding step of bonding the mask alignment stick to an elastic polymesh;
A polymesh bonding step of bonding the polymesh to which the mask align stick is bonded to the tensile frame;
A polymesh tensioning step of tensioning the polymesh using a tensioning frame;
A method of manufacturing a mask alignment stick comprising a polymesh removal step of removing the polymesh inside the circumferential surface of the mask alignment stick.
The method of claim 5,
The mask alignment stick tension step,
The method of manufacturing a mask alignment stick further comprising a polymesh inspection step of inspecting whether the mask alignment stick is uniformly stretched by inspecting whether the polymesh stretched by the tension frame is uniformly stretched.
The method of claim 6,
In the polymesh inspection step,
A polymesh photographing step of photographing the front and back of the polymesh on the lower surface of the stretched polymesh using vision after a metal mask sheet is bonded to the upper surface;
A method of manufacturing a mask align stick comprising an image comparison step of comparing and inspecting, by a controller, the image of the front and back photographed by the vision and the image of the front and back in which the previously photographed polymesh is uniformly stretched.
The method of claim 5,
In the polymesh tensioning step, the tension frame for tensioning the polymesh,
A frame portion having a closed quadrangular shape;
First to fourth tensile parts disposed adjacent to the inside of the frame part;
The first to fourth extensions are connected to each other so that the distance between the first extensions to the fourth extensions is increased by pulling the first extensions to the fourth extensions to the outside of the frame. Method of manufacturing a mask align stick comprising a clamp portion to make.

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