KR102633152B1 - Manufacturing method of mask alignment stick - Google Patents

Abstract

The present invention relates to a method of manufacturing a mask sheet alignment stick that supports a mask sheet mounted on a mask frame and joined to the mask frame, and is formed on each mask alignment stick in a ledger for manufacturing a plurality of mask alignment sticks. An alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys; A mask alignment stick separation step of cutting the outer peripheral surface of each mask alignment stick in the ledger to separate the mask aligning sticks from the ledger; and a mask align stick tensioning step of tensioning the mask align stick separated through the mask align stick separation step, wherein the mask align stick tensioning step involves bonding the mask align stick to an elastic polymesh. A mask align stick bonding step, a polymesh bonding step of bonding the polymesh to which the mask align stick is bonded to a tension frame, a polymesh tensioning step of tensioning the polymesh using a tension frame, and a polymesh tensioning step of tensioning the polymesh using a tension frame, and A polymesh inspection step of inspecting whether the polymesh tensioned by the mask alignment stick is uniformly tensioned by checking whether the polymesh tensioned by the mask aligner stick is uniformly tensioned. It includes a polymesh removal step of removing the polymesh inside the peripheral surface of the in-stick, and the polymesh inspection step is performed by visualizing the front and back of the polymesh on the lower surface of the polymesh, which is tensioned after a metal mask sheet is bonded to the upper surface. It includes a polymesh photographing step using a polymesh photographing step, and an image comparison step in which the control unit compares and inspects the front and back images captured by the vision and the front and back images in which the previously photographed polymesh is uniformly stretched, and the alignment pattern and In the key forming step, a plurality of alignment patterns are formed on the ledger by dry etching, the plurality of keys are formed on the ledger by wet etching, and the alignment patterns are a plurality of alignment holes formed to be spaced apart. , In the mask align stick separation step, the outer peripheral surface of the mask align stick is cut from the ledger using wet etching to separate the mask align stick, and in the polymesh tensioning step, the tension frame for tensioning the polymesh is A frame portion having a closed rectangular shape, first to fourth tension portions disposed adjacent to the inside of the frame portion, and the first to fourth tension portions connected to the first to fourth tension portions. Provided is a method of manufacturing a mask alignment stick including a clamp part that pulls the four tension parts to the outside of the frame part to space the correspondingly disposed first to fourth tension parts apart.
Therefore, rather than processing the alignment pattern and key and the outline of the mask alignment stick on the ledger at the same time, the alignment pattern and key are processed by processing a plurality of alignment patterns and keys on the ledger and then processing the outline of the mask alignment stick. The precision can be improved.

Description

Manufacturing method of mask alignment stick {Manufacturing method of mask alignment stick}

The present invention relates to a method of manufacturing a mask alignment stick, and more specifically, to a method of manufacturing a mask alignment stick that supports at the bottom a mask sheet mounted on a mask frame and joined to the mask frame. It's about.

Referring to the background technology described in Korean Patent No. 10-2210022, Organic Light-Emitting Diode (OLED) is a display device installed in TVs, PCs, tablet PCs, smartphones, smart locations, vehicle dashboards, etc. It is widely used as. In these OLEDs, the light-emitting layer that emits light is made of organic compounds. The OLED manufacturing process mainly uses a method of depositing organic materials at a desired location by attaching a thin metal mask to the substrate.

In the conventional OLED manufacturing process, the metal mask is manufactured in the form of a stick, plate, etc., and then the metal mask is welded and fixed on the mask frame. Afterwards, the dummy area of the metal mask welded to the mask frame is removed by cutting along the trim line.

A conventional metal mask is tensioned with a certain tensile force and then fixed to the mask frame by welding. At this time, an alignment pattern is disposed on the edge of the metal mask for alignment with the substrate mounted on the mask frame.

However, in the conventional metal mask, during the process of tensioning with a certain tensile force, stress is concentrated on the edge of the mask sheet where the alignment pattern is placed, so the position of the alignment pattern is distorted, which reduces the positional accuracy and causes problems in the metal mask. There was a problem with the central part of the product sagging downward.

In order to solve the above problems, a mask alignment stick with an alignment pattern formed on it is attached to the mask frame to accurately position the metal mask while solving the problem of the central part of the metal mask sagging downward. An alignment pattern and an alignment key for alignment with the mask sheet are formed on the mask alignment stick.

When manufacturing a conventional mask alignment stick, the outline of the mask alignment stick, the alignment pattern, and the alignment key are simultaneously processed in a sheet-shaped original state through an etching process.

In this case, the outer line of the mask alignment stick is processed first, and distortion occurs, causing a problem in that the precision of the alignment pattern and alignment key is reduced.

In addition, when processing the alignment key, the alignment key is processed by predicting the tensile state, but there is a problem that it is difficult to accurately machine the alignment key due to problems such as the curvature of the fabric.

The present invention was created to solve the above problems. When manufacturing a mask alignment stick using a sheet-shaped ledger, the alignment pattern and key formed on the manufactured mask alignment stick are formed and then manufactured. The outer peripheral surfaces of the plurality of mask alignment sticks are cut to separate the plurality of mask alignment sticks on which the plurality of alignment patterns and keys are formed from the ledger, and the separated mask alignment sticks are evenly distributed using a tension frame and polymesh. Mask Aligner allows you to easily check whether the mask alignment stick has been manufactured accurately and whether the alignment pattern and alignment key have been accurately formed by inspecting the polymesh after tensioning to check whether the mask alignment stick has been uniformly tensioned. The purpose is to provide a method of manufacturing an in-stick.

In order to achieve the above object, the present invention relates to a method of manufacturing a mask sheet alignment stick that is mounted on a mask frame and supports a mask sheet joined to the mask frame, and provides a method for manufacturing a plurality of mask alignment sticks. An alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys formed on each mask alignment stick; A mask alignment stick separation step of cutting the outer peripheral surface of each mask alignment stick in the ledger to separate the mask aligning sticks from the ledger; and a mask align stick tensioning step of tensioning the mask align stick separated through the mask align stick separation step, wherein the mask align stick tensioning step involves bonding the mask align stick to an elastic polymesh. A mask align stick bonding step, a polymesh bonding step of bonding the polymesh to which the mask align stick is bonded to a tension frame, a polymesh tensioning step of tensioning the polymesh using a tension frame, and a polymesh tensioning step of tensioning the polymesh using a tension frame, and A polymesh inspection step of inspecting whether the polymesh tensioned by the mask alignment stick is uniformly tensioned by checking whether the polymesh tensioned by the mask aligner stick is uniformly tensioned. It includes a polymesh removal step of removing the polymesh inside the peripheral surface of the in-stick, and the polymesh inspection step is performed by visualizing the front and back of the polymesh on the lower surface of the polymesh, which is tensioned after a metal mask sheet is bonded to the upper surface. It includes a polymesh photographing step using a polymesh photographing step, and an image comparison step in which the control unit compares and inspects the front and back images captured by the vision and the front and back images in which the previously photographed polymesh is uniformly stretched, and the alignment pattern and In the key forming step, a plurality of alignment patterns are formed on the ledger by dry etching, the plurality of keys are formed on the ledger by wet etching, and the alignment patterns are a plurality of alignment holes formed to be spaced apart. , In the mask align stick separation step, the outer peripheral surface of the mask align stick is cut from the ledger using wet etching to separate the mask align stick, and in the polymesh tensioning step, the tension frame for tensioning the polymesh is A frame portion having a closed rectangular shape, first to fourth tension portions disposed adjacent to the inside of the frame portion, and the first to fourth tension portions connected to the first to fourth tension portions. Provided is a method of manufacturing a mask alignment stick including a clamp part that pulls the four tension parts to the outside of the frame part to space the correspondingly disposed first to fourth tension parts apart.

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The method of manufacturing a mask alignment stick according to the present invention is to process a plurality of alignment patterns and keys on a ledger without simultaneously processing the alignment pattern, key, and outline line of the mask alignment stick, and then process the mask alignment stick. By machining the outline line, the precision of the alignment pattern and key can be improved.

1 is a flowchart showing the procedure for manufacturing a mask alignment stick according to an embodiment of the present invention.
FIG. 2 is a flowchart showing the detailed sequence of the mask align stick tensioning step shown in FIG. 1.
FIG. 3 is a diagram showing the detailed sequence of the polymesh inspection step shown in FIG. 2.
Figure 4 is a diagram schematically showing the process of forming a plurality of alignment patterns and keys on the ledger and then separating a plurality of mask alignment sticks from the ledger.
Figure 5 is a diagram schematically showing the process of joining a mask alignment stick to a polymesh.
Figure 6 is a diagram schematically showing the process of joining the polymesh to which the mask alignment stick is attached to the tensile frame.
FIG. 7 is a diagram schematically showing the process of tensioning a polymesh using the tension frame shown in FIG. 6.
Figure 8 is a diagram schematically showing the process of cutting the polymesh located on the lower surface of the mask alignment stick in the tension frame in which the polymesh is tensioned.
Figure 9 is a diagram schematically showing the process of joining a tensioned mask alignment stick to a mask frame using a tension frame.
Figure 10 is a diagram schematically showing the process of inspecting a tensioned polymesh.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the attached drawings. Prior to this, the terms or words used in this specification and claims should not be construed as limited to their usual or dictionary meanings, and the inventor should appropriately define the concept of terms in order to explain his or her invention in the best way. It must be interpreted as meaning and concept consistent with the technical idea of the present invention based on the principle of definability.

Referring to Figure 1, the mask alignment stick manufacturing method according to an embodiment of the present invention is for manufacturing a mask alignment stick that is mounted on a mask frame and supports a mask sheet bonded to the mask frame, including an alignment pattern and It may include a key forming step (S10), a mask aligning stick separating step (S20), and a mask aligning stick tensioning step (S30).

Referring to Figures 1 and 4, the alignment pattern forming step (S10) is a plurality of mask alignment sticks 110 formed on each mask alignment stick 110 on a ledger 10 for manufacturing a plurality of mask alignment sticks 110. This is the step of forming the alignment pattern 112 and the key 114. The plurality of alignment patterns 112 are formed on the ledger 10 by dry etching, and the plurality of keys 114 are formed by wet etching. It is preferably formed on the ledger 10 by. The alignment pattern 112 consists of a plurality of alignment holes 112a, and the plurality of alignment holes 112a are formed at equal intervals in the longitudinal direction of each mask alignment stick 110.

Referring to FIG. 1, after the alignment pattern and key forming step (S10), a mask align stick separation step (S20) is performed, and the mask align stick separation step (S20) is performed in the ledger 10. This is a step of separating the plurality of mask alignment sticks 110 from the ledger 10 by cutting the outer peripheral surface of the mask alignment stick 110. In the mask align stick separation step (S20), it is preferable to separate the mask align stick 110 from the ledger 10 by cutting the outer peripheral surface of the mask align stick 110 using wet etching. After processing a plurality of alignment patterns 112 and keys 114 on the ledger 10, the outer peripheral surface of the mask alignment stick 110 is cut to improve the precision of the alignment patterns 112 and keys 114. You can do it.

Here, wet etching, also called wet etching, is etching using a liquid chemical that has the property of corroding and dissolving only the target metal, and dry etching is one of the submicron processing technologies, which involves etching with gas or ions in a reduced pressure container. This method of etching improves processing accuracy compared to wet etching, and it is preferable to use wet etching when microprocessing is not necessary, and to use dry etching when microprocessing is required.

After the mask align stick separation step (S20), the mask align stick tensioning step (S30) is performed, and the mask align stick tensioning step (S30) equally tensions the separated mask alignment sticks (110). This is the step to do it.

Referring to FIG. 2, the mask align stick tensioning step (S30) includes a mask aligning stick bonding step (S31), a polymesh bonding step (S32), a polymesh tensioning step (S33), and a polymesh removal step. (S34) and a polymesh inspection step (S35).

Referring to FIGS. 2 and 5, the mask align stick bonding step (S31) involves forming a plurality of mask align sticks 110 with alignment patterns 112 and keys 114 separated from the ledger 10. This is a step of bonding the mask alignment stick 110 to the polymesh 200, which is an elastic body having a square shape. When bonding the mask alignment stick 110 to the polymesh 200, the end portion of the peripheral surface of the mask alignment stick 110 and Adjacent parts are bonded to the polymesh 200. When the mask align stick bonding step (S31) is completed, only the peripheral surface of the bonded mask align stick 110 is bonded to the polymesh 120, and the portion excluding the peripheral surface is bonded to the polymesh 120. It adheres tightly without being joined.

The polymesh 200 is preferably 80 to 150 mesh, and the mesh thickness or standard can be applied differently depending on the tensile condition and thickness of the mask alignment stick 110.

Referring to FIGS. 2, 6, and 7, after the mask align stick bonding step (S31), a polymesh bonding step (S32) is performed, and the polymesh bonding step (S32) is performed by attaching a plurality of pieces to the upper surface. This is the step of joining the poly mesh 200 to which the mask align stick 110 is bonded to the tensile frame 300. The poly mesh 200 to which the mask align stick 110 is bonded is coupled to the first tension portion 320 to the fourth tension portion 350 provided inside the tensile frame 300, thereby forming the tensile frame 300. It is joined to (300).

The tension frame 300, which tensions the poly mesh 200 to which the mask align stick 110 is bonded, includes a frame part 310 and a first tension part provided inside the frame part 310 ( 320), the second tension part 330, the third tension part 340, the fourth tension part 350, and the clamp part connected to the first tension part 320 to the fourth tension part 350 ( 360).

The tension frame 300, which tensions the poly mesh 200 to which the mask align stick 110 is bonded, includes a frame part 310 and a first tension part provided inside the frame part 310 ( 320), the second tension part 330, the third tension part 340, the fourth tension part 350, and the clamp part connected to the first tension part 320 to the fourth tension part 350 ( 360).

The first tension portion 320 to fourth tension portion 350 is connected to the clamp portion 360, and the clamp portion 360 clamps the first tension portion 320 to fourth tension portion 350. The polymesh 200 is tensioned by pulling the frame portion 310 in an outward direction so that the distance between the correspondingly arranged first tension portions 320 to fourth tension portions 350 increases. It is preferable that a plurality of through holes 310a through which the clamp part 360 penetrates are formed in the frame part 310, and one end is connected to the first tension parts 320 to fourth tension parts 350. The other end of the clamp part 360 is preferably connected to a forward and backward movement member 370 that moves the clamp part 360 back and forth after passing through the through hole 310a.

After going through the polymesh bonding step (S32), a polymesh tensioning step (S33) is performed, and the polymesh tensioning step (S33) is performed by bonding the mask alignment stick 110 using the tension frame 300. This is a step of tensioning the polymesh 200.

After combining the peripheral surface of the polymesh 200, which has a square shape, with the first to fourth tension parts 320 to 350, which are arranged to have a square shape inside the frame part 310, the back and forth movement is performed. When the clamp part 360 is pulled to the outside of the frame part 310 using the member 370, the gap between the correspondingly arranged first tension parts 320 to fourth tension parts 350 increases. The polymesh 200 and the mask alignment stick 110 bonded to the polymesh 200 are stretched by uniform tensile force.

Referring to Figures 2 and 8, after the polymesh tensioning step (S33), the polymesh removal step (S34) is performed. The polymesh removal step (S34) is a step of removing the polymesh 200 located inside the peripheral surface of the mask align stick 110, and it is preferable to use a laser when removing the polymesh 200. .

Referring to Figures 2 and 3, it is preferable to perform the polymesh inspection step (S35) after performing the polymesh tensioning step (S33) and before performing the polymesh removal step (S34). The polymesh inspection step (S35) is a step of inspecting whether the polymesh 200 stretched by the tension frame 300 is uniformly stretched, and the polymesh inspection step (S35) is a polymesh photographing step ( It includes an image comparison step (S351) and an image comparison step (S352).

Referring to FIGS. 3 and 10, the polymesh photographing step (S351) involves photographing the lower surface of the polymesh 200, which is tensioned after the mask alignment stick 110 is bonded to the upper surface, using the vision 500. In this step, the front and back 210 of the poly mesh 200 stretched by the tension frame 300 are photographed using the vision 500, and the captured image is transmitted to the control unit 600.

After going through the polymesh photographing step (S351), an image comparison step (S352) is performed, and the image comparison step (S352) is performed on the front and back (210) of the tensioned polymesh (200) captured by the vision (500). This is a step of comparing and inspecting the image and the front and back images of the polymesh 200 that has been uniformly stretched and stored in the control unit 600 after being filmed. By performing the polymesh inspection step (S35), the polymesh 200 is uniformly stretched. It is possible to easily and quickly check whether the alignment pattern 112 and the key 114 formed on the alignment mask stick 110 are deformed, and whether the poly mesh 200 is determined to be normal. ) performs the subsequent process, and the polymesh 200 determined to be defective is discarded.

The polymesh 200 is preferably colored to have a difference from the mask alignment stick 110, and the polymesh 200 is colored so that the front and back 210 of the polymesh 200 are uniform. It is easy to determine whether the polymesh 200 has been stretched, and it is possible to determine whether the polymesh 200 has been uniformly stretched by checking whether the shape of the front and back 210 has changed.

A plurality of alignment patterns 112 and a key ( The precision of the alignment pattern 112 and the key 114 can be improved by processing the outline line of the mask alignment stick 110 after processing 114).

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely illustrative, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

100: Director 110: Mask Align Stick
112: Align pattern 114: Key
200: Polymesh 300: Tensile frame
310: frame part 320: first tension part
330: second tensile portion 340: third tensile portion
350: Fourth tensile part 360: Clamp part
400: Mask Frame 500: Vision
600: Control unit

Claims (8)

It relates to a method of manufacturing a mask sheet alignment stick that is mounted on a mask frame and supports a mask sheet joined to the mask frame,
An alignment pattern and key forming step of forming a plurality of alignment patterns and alignment keys formed on each mask alignment stick on a ledger for manufacturing a plurality of mask alignment sticks;
A mask alignment stick separation step of cutting the outer peripheral surface of each mask alignment stick in the ledger to separate the mask aligning sticks from the ledger; and
Including a mask align stick tensioning step of tensioning the mask align stick separated through the mask align stick separation step,
The mask align stick tensioning step is,
A mask align stick bonding step of bonding the mask align stick to an elastic polymesh,
A polymesh bonding step of bonding the polymesh to which the mask align stick is bonded to the tensile frame,
A polymesh tensioning step of tensioning the polymesh using a tension frame,
A polymesh inspection step of inspecting whether the mask alignment stick is uniformly tensioned by checking whether the polymesh stretched by the tension frame is uniformly tensioned;
The polymesh inspection step includes a polymesh removal step of removing the polymesh inside the peripheral surface of the mask aligner stick, which is confirmed to be uniformly tensioned,
The polymesh inspection step is,
A polymesh photographing step of photographing the front and back of the polymesh using a vision on the lower surface of the tensioned polymesh after a metal mask sheet is bonded to the upper surface;
It includes an image comparison step in which the control unit compares and inspects the front and back images captured by the vision and the previously photographed images of the front and back where the poly mesh is uniformly stretched,
In the alignment pattern and key forming step, a plurality of alignment patterns are formed on the ledger by dry etching, and the plurality of keys are formed on the ledger by wet etching,
The alignment pattern is a plurality of alignment holes formed to be spaced apart,
In the mask align stick separation step, the outer peripheral surface of the mask align stick is cut from the ledger using wet etching to separate the mask align stick,
The tension frame that tensions the polymesh in the polymesh tensioning step is,
A frame portion having a sealed square shape,
First to fourth tension parts disposed adjacent to the inside of the frame part,
The distance between the first to fourth tension parts, which are connected to the first to fourth tension parts and are disposed correspondingly by pulling the first to fourth tension parts to the outside of the frame part, is spaced apart. A method of manufacturing a mask alignment stick including a clamp portion. delete delete delete delete delete delete delete