KR20220168976A - Method for setting process recipe for substrate processing apparatus and substrate processing apparatus - Google Patents

Abstract

The present invention relates to a method for setting a process recipe for a substrate processing apparatus, capable of easily editing the process recipe for the substrate processing apparatus in setting the process recipe, the method comprising the steps of: receiving editing of the setting values of a recipe setting table while displaying the recipe setting table of the process recipe on the screen of a display; and storing, in a storage unit, the process recipe after the editing of the setting values has been received. In response to a display switching command, the process recipe is displayed on the screen by switching between a full display state, in which setting values corresponding to all setting items of the recipe setting table are displayed, and a thumbnail display state, in which setting values corresponding to only setting items for which the editing of the setting values has been received in the past are displayed.

Description

A method for setting a process recipe of a device for processing a substrate and a device for processing a substrate

The present disclosure relates to a method of setting a process recipe of an apparatus for processing a substrate and an apparatus for processing a substrate.

BACKGROUND OF THE INVENTION In a manufacturing process of a flat panel display (FPD) or a semiconductor device, there is a process of performing a film formation process or an etching process on a substrate (a glass substrate or a semiconductor wafer). In a device that executes these processes (a device that processes a substrate), processing is executed based on a command from a control computer according to a preset process recipe.

Patent Literature 1 proposes a technique in which, in a display program for causing a computer to execute a process, an item corresponding to an operation part that has not been selected and operated is not displayed. Further, Patent Literature 2 proposes a technique in which display or non-display of item names can be designated by display flags on the employee information registration screen. Further, Patent Literature 3 proposes a technique of hiding function setting items with low frequency of use in a print setting processing program.

Japanese Unexamined Patent Publication No. 2020-201854 Japanese Unexamined Patent Publication No. 2019-117489 Japanese Unexamined Patent Publication No. 2006-285968

The present disclosure provides a technique capable of conveniently editing a process recipe in setting a process recipe of an apparatus for processing a substrate.

The present disclosure is a method for setting a process recipe of an apparatus for processing a substrate,

For the plurality of setting items of the process recipe, a plurality of setting values set in association with a plurality of steps defined to progress over time are read from the storage unit by the control computer of the apparatus, and the setting items and the above a recipe setting table configured to be able to specify the set value corresponding to the step, displaying on a display unit of a screen of a display connected to the control computer;

a step of accepting editing of the setting value selected by specifying the step and the setting item through an input unit connected to the control computer while displaying the recipe setting table by the step of displaying on the display unit;

A step of storing the process recipe after accepting editing of the setting value in the storage unit;

During a period in which the control computer performs the process of accepting editing of the setting values, all the setting items of the recipe setting table are changed to the recipe setting table according to a display switching command inputted through the input unit. Switching between an overall display state of displaying the associated setting values and an abbreviated display state of displaying setting values associated only with the setting items for which editing of the setting values has been received in the past is switched and displayed on the display unit. do.

According to the present disclosure, in setting a process recipe of a device for processing a substrate, it is possible to easily edit the process recipe.

1 is a schematic plan view showing an embodiment of a substrate processing apparatus of the present disclosure.
2 is a longitudinal side view showing an example of a substrate processing unit provided in the substrate processing apparatus.
3 is a block diagram showing the electrical configuration of the substrate processing apparatus.
4 is a flowchart showing the operation of the substrate processing apparatus.
5 is an explanatory diagram showing an example of a window displayed on a display screen.
6 is a first explanatory diagram showing an example of a recipe setting table displayed on a display screen.
7 is a second explanatory diagram showing an example of a recipe setting table displayed on a display screen.
8 is a third explanatory diagram showing an example of a recipe setting table displayed on a display screen.
9 is a fourth explanatory diagram showing an example of a recipe setting table displayed on a display screen.

<substrate processing device>

Hereinafter, an embodiment of an apparatus for processing a substrate of the present disclosure (hereinafter, referred to as “substrate processing apparatus”) will be described with reference to FIGS. 1 and 2 . The substrate processing apparatus of this example is configured as an apparatus that performs an etching process on a glass substrate G (hereinafter referred to as "substrate G") serving as a substrate. A substrate processing apparatus 1 includes an atmospheric transport chamber 11 equipped with an atmospheric transport mechanism 111 and a vacuum transport chamber 12 equipped with a vacuum transport mechanism 121, and these atmospheric transport chambers 11 ) and the vacuum transfer chamber 12 are connected to each other via a load lock chamber 13.

In the standby transfer room 11, a carry-in/out port 14 through which transfer container 10 containing a plurality of substrates G is carried in/out is provided. The substrate G in the transport container 10 is taken out by the atmospheric transport mechanism 111 and transported to the load lock chamber 13, and the substrate G in the load lock chamber 13 is vacuum transported. It is configured to be received in the vacuum transfer chamber 12 by the mechanism 121 . In addition, in the substrate processing apparatus according to the present disclosure, the atmospheric transport chamber 11, the atmospheric transport mechanism 111, the transport container 10, and the carry-in/out port 14 are not necessarily essential components, and the load lock chamber 13 ) and the atmospheric environment, you may connect a mechanism other than the one which can carry in/out of the board|substrate G to the load lock chamber 13.

To the vacuum transfer chamber 12, for example, two substrate processing units 2A and 2B and one vacuum processing unit 15 are respectively connected. In this example, the substrate processing units 2A and 2B are configured as etching processing units that perform an etching process on the substrate, and the vacuum processing unit 15 is configured as a post-processing unit that performs a treatment process after etching, for example. In Fig. 1, symbols GV1 to GV3 denote gate valves.

<Substrate Processing Unit>

An example of the substrate processing units 2A and 2B constituting the etching processing unit will be briefly described with reference to FIG. 2 . The substrate processing units 2A and 2B of this example are configured to place the substrate G on the mounting table 3 in the vacuum container 21 and perform a plasma treatment on the substrate G. In the vacuum container 21, the substrate G is transported through the conveyance port 22 opened and closed by the gate valve 16, and the internal space of the vacuum container 21 passes through the exhaust passage 231. It is configured to be evacuated by the vacuum exhaust mechanism 23 . A pressure regulator 232 such as an APC (Automatic Pressure Control) valve is interposed in the exhaust passage 231, for example.

The mounting table 3 serves both as an electrode for plasma generation, and for example, a high frequency power supply 31 for plasma generation and a high frequency power supply 32 for supplying bias power for ion pull-in are each a matching device 311. , 321). In the mounting table 3 of this example, a temperature regulating medium flow path 33 constituting a temperature regulating unit is incorporated, and is configured to maintain the substrate G at a set temperature. The mounting table 3 is supported by an insulating member 34, and a lifting pin 35 used for transferring and receiving the substrate G is inserted by a lifting mechanism 351 so as to be able to move up and down.

An upper electrode 4 is disposed on the ceiling of the vacuum container 21 so as to face the mounting table 3 . The upper electrode 4 serves as a gas shower head, is formed in a hollow shape, and has a gas discharge hole 41 disposed on its lower surface. The upper electrode 4 is connected to a gas supply source 44 for processing gas via a gas supply path 42 provided with a valve V1 and a flow rate adjusting unit 43 .

Here, processing of a substrate using the substrate processing apparatus 1 having the above configuration will be briefly described. The substrate G is taken out from the transport container 10 by the atmospheric transport mechanism 111 and delivered to the load lock chamber 13 in an atmospheric pressure atmosphere, and the load lock chamber 13 is adjusted to a vacuum atmosphere. Subsequently, the substrate G in the load lock chamber 13 is delivered to the loading table 3 of the substrate processing units 2A and 2B via the vacuum transfer chamber 12 by the vacuum transfer mechanism 121 . In the substrate processing units 2A and 2B, the substrate G is placed on the mounting table 3, and the inside of the vacuum container 21 is evacuated by the vacuum exhaust mechanism 23 to maintain a predetermined vacuum level. An etching gas serving as a processing gas is supplied.

On the other hand, high frequency for generating plasma and high frequency for attracting ions are applied to the mounting table 3, and the substrate G is etched using the plasma formed in the space above the substrate G. As a result, since the ions in the plasma are pulled closer to the mounting table 3 side by the high frequency for bias, the etching process with high verticality proceeds. The substrate G, which has been etched in the substrate processing units 2A and 2B, is conveyed to the vacuum processing unit 15 via the vacuum transfer chamber 12 by the vacuum transfer mechanism 121, and a treatment process after etching is performed. do. Subsequently, the substrate G is conveyed to the load lock chamber 13 in a vacuum atmosphere by the vacuum conveyance mechanism 121, and after adjusting the load lock chamber 13 to an atmospheric pressure atmosphere, to the atmospheric conveyance mechanism 111 and is returned to the transport container 10 via the atmospheric transport chamber 11. In the above embodiment, the mounting table 3 and the upper electrode 4 are described as a capacitive coupling type plasma generating mechanism that generates plasma as parallel electrodes facing each other, but is not limited to this. For example, plasma may be generated by an inductively coupled plasma generation mechanism.

<control computer>

The substrate processing apparatus 1 includes a control computer 5 and includes substrate processing units 2A and 2B, a vacuum processing unit 15, an atmospheric transport mechanism 111, a vacuum transport mechanism 121, and the like. It is structured so that command output to each part of (1) is performed. The control computer 5 includes, for example, a CPU (not shown), and is configured to execute the substrate processing described above based on the process recipe of the substrate processing apparatus 1 . The process recipe is a process in which control parameters such as the process sequence of the substrate processing apparatus 1 and the substrate processing units 2A and 2B, the pressure in the vacuum container 21, the flow rate of the processing gas, and the set temperature of the mounting table 3 are set. program.

In the process recipe, set values related to a plurality of setting items (control parameters) are set in association with a plurality of steps defined to progress over time. For example, in one step, the step time for executing the step, the processing temperature of the substrate G, the pressure setting value in the container containing the substrate G, etc. are set as setting items, and these setting values are stored. has been And, for example, in the process recipe of the substrate processing units 2A and 2B, set values of setting items (setting parameters) related to all operations performed in the substrate processing units 2A and 2B are associated with a plurality of steps. It is remembered.

In addition, as shown in FIG. 3, the control computer 5 has functions of a screen control unit 51 and a data extraction unit 52, and also has a storage unit 53 and a touch panel display 54 ( An example of "display") is connected. The storage unit 53 has a function as a recipe storage unit 531 in which process recipes are stored, and the touch panel display 54 serves both as a display screen 55 (an example of “screen”) and an input unit 56. will be. Accordingly, the input unit 56 is connected to the control computer 5 at the same time as the touch panel display 54 is connected to the control computer 5 . However, instead of providing the touch panel display 54, a display screen 55 and an input unit 56 independent of the display screen 55 may be provided separately, and the input unit 56 may be constituted by a keyboard.

The data extraction unit 52 reads the setting values set in the process recipe, which is data, from the recipe storage unit 531, or executes an operation of extracting the setting values for abbreviated display according to a display switching command described later. It consists of In addition, the screen control unit 51 has a function of displaying the setting values of the process recipe read by the data extraction unit 52 and extracted on the display screen 55 as a recipe setting table 7 described later. In addition, the screen control unit 51 is configured to receive a display switching command issued by an operator through the input unit 56 and execute a process of switching the display of the recipe setting table 7 . In addition, the control computer 5 is capable of performing an operation of accepting editing of setting values of the recipe setting table 7 and an operation of storing in the storage unit 53 a process recipe after accepting editing of setting values. Consists of.

<Setting of process recipe>

Subsequently, with reference to the flowchart shown in FIG. 4 , a method of setting a process recipe of the substrate processing apparatus 1 will be described. Setting of this process recipe is an operation of setting the set values of control parameters, and is performed when performing process evaluation such as changing operating conditions or when switching products.

Generally, when an operator reviews the setting items (control parameters) of a process recipe, the setting items to be reviewed are often the setting items edited in the past. The technique of the present disclosure focuses on this and provides a function of displaying only the setting items edited in the past on the display screen 55 . At this time, a function was devised in which the control computer 5 judges whether or not the setting item has been edited in the past, and automatically hides the unedited setting item by inputting a display switching command.

<Example 1>

As a first example of process recipe setting, a case where an operator changes a set value edited in the past for a process recipe will be described.

First, the operator selects a process recipe to be edited using the touch panel display 54 . As shown in FIG. 5 , the touch panel display 54 of this example includes, on the display screen 55, a table display unit 57 (an example of “display unit”) and six buttons forming a part of the input unit 56. (61 to 66) are provided. The buttons 61 to 66 may be displayed as images within the display screen 55, as shown in FIG. 5, or may be provided as physically pressable buttons on the outside of the display screen 55.

Of the buttons 61 to 66, the "open" button 61 is a button that opens a window 67 for selecting a process recipe. 67) indicates the open state. The window 67 is activated as a pop-up window, for example.

5 to 9, buttons whose names are displayed in gray on the display screen 55 indicate buttons during operation execution. Note that "pressing" here includes activating a corresponding function by contacting the "open" button 61 or the like displayed in the display screen 55 with an operator's finger or the like.

Here, "recipe 1" is set as the process recipe to be edited, and a case where this is selected will be described. When the control computer 5 accepts selection of a process recipe (step 101 in Fig. 4), it reads the setting value of the selected process recipe from the recipe storage unit 531 of the storage unit 53, and associates it with the process recipe. A process of displaying the configured recipe setting table 7 on the table display unit 57 in the display screen 55 of the touch panel display 54 is performed.

As shown in FIGS. 6 to 9, the recipe setting table 7 of this example associates a plurality of setting items 71 of the process recipe with a plurality of steps 72 defined to progress over time, This table shows each setting value. Regarding the substrate processing units 2A and 2B, the setting items 71 include the pressure of the vacuum container 21, the flow rate of the processing gas, the plasma power, and the bias power controlled in the processing in the substrate processing units 2A and 2B. , are control parameters such as the set temperature of the mounting table 3. In the recipe setting table 7 of this example, these setting items 71 are enumerated and displayed in the first column.

Further, the step 72 is displayed on the first row of the recipe setting table 7 and progresses from step 1 to step n (n is an integer greater than or equal to 1) over time according to the number of steps previously set in the process recipe. Step 72 to do is described. By this recipe setting table 7, it is comprised so that the setting value of the setting item 71 can be specified in correspondence with each step 72.

Further, on the display screen 55 of the touch panel display 54, scroll bars 73 and 74 are displayed as necessary. The control computer 5 moves the table display section 57 by scrolling the area protruding from the table display section 57 of the recipe setting table 7 in response to an instruction to move the display range using the scroll bars 73 and 74. ) can be displayed. In the process of displaying the recipe setting table 7 on the table display unit 57, the scroll bar 73 moves the display area related to the setting items 71 protruding from the table display unit 57 to a vertical scroll movement. As a result, it is displayed on the table display unit 57. Similarly, the scroll bar 74 displays the display area related to the step 72 protruding from the table display unit 57 on the table display unit 57 by scrolling in the left and right directions.

Returning to FIG. 4 and continuing the explanation, the operator determines whether or not to select the &quot;reduced display&quot; button 63 (step 102). The "reduced display" button 63 is a button for setting the recipe setting table 7 to the "reduced display state". The abbreviated display state indicates a state in which setting values associated with only setting items for which editing of setting values has been accepted in the past in the recipe setting table 7 are displayed. That is, in any step 72, setting items whose setting values have not been edited in the past are not displayed.

Here, the &quot;all display&quot; button 64 is also described. The "all display" button 64 is a button for setting the recipe setting table 7 to the "all display state". The overall display state indicates a state in which setting values associated with all setting items of the recipe setting table 7 are displayed. That is, all setting items are displayed regardless of whether or not setting values have been edited in the past in any step 72 .

The “reduced display” button 63 and the “all display” button 64 output a display switching command for switching the display state of the set value between the full display state and the reduced display state in the table display section 57 for display. will be. Therefore, when the “reduced display” button 63 is pressed (selected), the display switching command for the reduced display state is entered, and when the “full display” button 64 is pressed, the display switching command for the full display state is input. will do

When the “shortened display” button 63 is selected in step 102 of FIG. 4 , the control computer 5 determines whether or not all set values of the process recipe read from the recipe storage unit 531 are initial values. (Process 103). In step 103, the control computer 5 judges whether or not the setting item of the process recipe is a setting item that has received editing of setting values in the past. When it is determined that all of the set values are initial values, the process proceeds to step 105, and when it is determined that at least some of the set values are not initial values, the process proceeds to step 104.

Here, in the substrate processing apparatus 1 of this example, initial values are set in advance for all set values of the process recipe. 6 shows a recipe setting table 7 in which all setting values of process recipes are initial values. In this example, in the recipe setting table 7 displayed on the table display unit 57 of the display screen 55, for example, the setting item for inputting the set value in numbers is "0", and whether or not control is executed is indicated. For setting items input by ON/OFF, each initial value of "OFF" is set.

As described above, the data extraction unit 52 of the control computer 5 is configured to determine that editing of the setting value has been accepted in the past for a setting item including a setting value that does not coincide with the initial value. there is. Therefore, it is determined that the setting items in which a numerical value other than "0" is input as the setting value and the setting item in which "ON" is input are setting items that have received editing of the setting value in the past.

FIG. 7 shows a display screen 55 displaying the recipe setting table 7 of recipe 1 on the table display unit 57 in a full display state. This recipe setting table 7 includes the setting values edited in the past, and in the cells in which the setting values edited in the past are displayed, a identifiable display is given (in Figs. 7 and 8, the cells are grayed out). painted over).

Regarding this display, for example, the data extraction unit 52 compares the setting value of each step of each setting item in the selected process recipe with the initial value relating to the same step, and when these values do not match , an identification code representing it is appended, and the set value is output. When displaying the recipe setting table 7, the screen control unit 51 displays the cell in which the set value is displayed in an identifiable manner, when the acquired setting value is provided with the identification code.

Hereinafter, setting items for which editing of setting values related to any step has been accepted in the past are referred to as "edited setting items", and setting items for which setting values of any step have not been accepted for editing in the past are referred to as "unedited setting items". It may be described as "setting item".

When displaying the recipe setting table 7 on the display screen 55, if the entire display state is selected, both "edited setting items" and "unedited setting items" are displayed (FIG. 7). In addition, when the reduced display state is selected, in the recipe setting table 7, only "edited setting items" are displayed, and "unedited setting items" are not displayed. Therefore, when recipe 1 is selected in step 101 of FIG. 4 and the “reduced display” button 63 is pressed in step 102, in step 104 based on the display switching command, the recipe setting table 7 is in principle As , it is displayed on the display screen 55 in a reduced display state. That is, the screen control unit 51 determines that the setting items including setting values with an identification code indicating that they do not coincide with the initial values are "edited setting items" with respect to the setting values acquired from the extraction unit 52. and displayed on the recipe setting table (7).

8 shows a recipe setting table 7 displayed in a reduced display state. In such a reduced display state, setting items inputted with setting values different from the initial values are displayed, and unedited setting items are not displayed. For example, in the recipe setting table 7 shown in FIG. 7, if attention is paid to the setting item of "pressure", the setting value of "pressure" in step 4 is the initial value "0", but in other steps 1 and 2, In 5, a set value different from the initial value is input. In this way, for a setting item in which a setting value different from the initial value is input in any step, the setting value for all steps is displayed. In the recipe setting table 7 in the reduced display state shown in Fig. 8, the non-displayed setting items are filled in and displayed. For this reason, all setting items are displayed on the table display section 57, which is a display area set in the display screen 55, and there is no need to perform an up-down scrolling operation by the scroll bar 73.

When the "shortened display" button 63 is selected in this way, the recipe setting table 7 shown in Fig. 8 is displayed on the display screen 55 of the touch panel display 54, and the operator sets the editing target. Editing is performed by inputting the setting values for the items, and the control computer 5 accepts editing of the setting values (step 106 in FIG. 4 ). Editing of the setting value is performed after selecting a cell in which the step 72 and the setting item 71 are specified in the input unit 56 in the recipe setting table 7 displayed on the display screen 55 of the touch panel display 54. , by inputting a set value through a keyboard (not shown) or the like.

The keyboard may be displayed within the display screen 55, or may be provided independently of the display screen 55. In addition, selection of a cell by the input unit 56 may be performed by an operator directly touching and selecting a cell displayed on the table display unit 57 with a finger or the like, or by indicating a numerical value indicating a step for specifying a cell and setting items. A window or the like for inputting numerical values may be displayed. In this way, the process of accepting editing of the setting value is performed. Under the condition that the “reduced display” button 63 is selected, the recipe setting table 7 is displayed on the touch panel display 54 in a reduced display state during the period of performing the process of accepting editing of the setting values.

Next, the operator judges whether or not the editing of the setting values has been completed (step 107), and if the editing has not been completed, the process returns to step 102 and the editing work is executed again. On the other hand, if the editing is finished, the "Registration" button 62 is pressed to register the process recipe in which the setting values have been edited (Step 108). In this way, the step of storing the process recipe after receiving the edit in the recipe storage unit 531 of the storage unit 53 is performed, and editing of the process recipe settings is ended.

In addition, when the “reduced display” button 63 is not selected in step 102, the process proceeds to step 105, and the recipe setting table 7 is displayed on the display screen 55 in the full display state shown in FIG. . For example, when changing the setting value of the setting item of "Processing gas A", the recipe setting table 7 is displayed in an overall display state and the setting value is edited. This is because, in the example shown in FIG. 7 , the set value of “process gas A” remains at the initial value of “0” in all steps, so when switching to the reduced display state, the set item is not displayed. Also in this case, steps 106, 107, and 108 are performed in the same manner as in the first example described above.

<Example 2>

As a second example of setting a process recipe, a case where an operator newly creates a process recipe will be described.

First, the operator selects "new recipe" from the window 67 shown in FIG. 5 by means of the touch panel display 54 . Upon receiving the selection of the process recipe (step 101), the selected process recipe recipe setting table 7 is displayed on the display screen 55 of the touch panel display 54. As shown in Fig. 6, the recipe setting table 7 of "new recipe" is a recipe setting table 7 in which all setting values of process recipes are initial values.

Subsequently, the operator determines whether or not to select the &quot;reduced display&quot; button 63 (step 102 in FIG. 4). When creating a new recipe, the recipe setting table 7 is displayed in the full display state, and setting items 71 and steps 72 are associated and set values are input, but, for example, the “shortened display” button 63 If is selected, the control computer 5 judges whether or not all the set values are initial values (step 103). Here, the screen control unit 51, when the process recipe does not include setting values that have been edited in the past (when all setting values are not provided with identification codes), presses the "abbreviated display" button. Even if (63) is pressed, the setting value is displayed in the entire display state. Therefore, even if the “shortened display” button 63 is pressed by mistake, since all setting values are initial values, the recipe setting table 7 is displayed in a fully displayed state (step 105) and all setting items are not displayed. does not exist.

Then, in the state where the recipe setting table 7 is displayed on the display screen 55 in the full display state, the operator edits the set values, and the control computer 5 performs a process of accepting edits of the set values. It is carried out (step 106). Steps 107 and 108 are the same as in the first example described above.

Other buttons are explained here. The "selection setting" button 65 is a button that opens a window accepting an arbitrary selection of setting items displayed on the recipe setting table 7. When the button 65 is pressed, the window 68 for selecting setting items shown in Fig. 9 is opened as, for example, a pop-up window. In this window 68, it is possible to add/delete setting items displayed on the recipe setting table 7 in a fully displayed state, for example. The "close button" 66 is a button that closes the opened windows 67 and 68.

According to this embodiment, in setting the process recipe of the apparatus for processing the substrate, editing of the process recipe can be performed easily. That is, the recipe setting table 7 can be switched between the full display state and the reduced display state and displayed on the display screen 55 by a simple operation of inputting a display switching command in accordance with the editing content of the process recipe. . For this reason, since necessary setting items can be automatically selected using the process recipe whose set values have already been edited, the process recipe can be edited easily.

For example, in the case of changing the setting values of setting items edited in the past, a display switching command to put them in an abbreviated display state is input, and only the setting items to be edited are displayed as shown in FIG. 8 . In the reduced display state, since unedited setting items are not displayed, the number of setting items displayed on the display screen 55 is reduced and displayed. For this reason, it becomes easy to search for the input location of the setting value which associates the setting item to be edited with the step. On the other hand, in the case of changing the setting values for unedited setting items, as shown in Fig. 7, it is possible to edit the setting values by inputting a display switching command to display all setting items and displaying all setting items. can

Depending on the process recipe, if the reduced display state is selected, all the setting items edited in the past can be displayed on one screen, so scrolling is unnecessary, and the setting items to be edited and the setting values associated with the steps are displayed. Searching for an input location becomes easier. Further, if all of the setting items to be edited can be accommodated on one screen, it is also convenient when capturing and storing images by screen shots. In addition, even in the reduced display state, even in a process recipe in which all setting items cannot be displayed on the display screen 55, the area protruding from the table display portion 57 of the display screen 55 is reduced compared to the full display state can do. As a result, the burden of scroll movement for displaying the setting items in the table display section 57 of the display screen 55 is reduced, and the editing work of setting values is simplified.

In this way, since it is easy to search for the input location of the setting value, the time and effort required for editing the setting value can be reduced, and the setting value can be edited efficiently, and the occurrence of editing errors is also reduced. can be cut down

Conventionally, since the recipe setting table 7 is displayed in a full display state and setting values are edited, when there are many control parameters (setting items) and many unedited setting items, setting items to be edited. In order to display on the display screen 55, many scroll movements were required. In addition, since there are many setting items displayed on the display screen 55, it takes a lot of work to search for input points of setting values to be edited. However, the technology of the present disclosure can solve these problems.

Further, in the above-described embodiment, the control computer 5 (extraction unit 52) is configured to determine that setting items including setting values that do not coincide with the initial values are setting items that have been edited in the past. In this way, since the control computer 5 compares the initial value of the setting item with the current setting value and automatically determines the unedited setting item, the operator does not need to select the setting item displayed in the reduced display state in advance. . This also reduces the effort of editing the setting values, suppresses the occurrence of operation errors, and enables the process recipe to be set more efficiently.

In addition, the control computer 5 (screen control unit 51) is configured to always display the recipe setting table 7 in a full display state when the setting values of the setting items are all initial values. Therefore, as already explained, when creating a new process recipe, even if the "reduced display" button 63 is accidentally pressed, the recipe setting table 7 is displayed in the full display state. For this reason, it is possible to prevent occurrence of a trouble in which the recipe setting table 7 is not displayed at all because the "shortened display" button 63 is pressed by mistake, and the editing work can be started quickly. Also in this respect, the technology of the present disclosure can simplify editing of setting values.

In the above, in the above-described embodiment, the control computer 5 (extraction unit 52) determines whether or not the setting item is unedited based on whether or not the setting value matches the initial value. did However, the method by which the control computer 5 determines the presence or absence of unedited setting items is not limited to this example. For example, when editing of setting values is accepted, an editing completion flag may be associated with the edited setting values and stored in the storage unit 53 . In this example, it is judged that editing of the setting value has been accepted in the past for the setting item including the setting value stored in association with this edited completion flag. Also in this configuration, the control computer 5 (screen control unit 51) can determine the presence or absence of editing relating to the set values read from the storage unit 53. Accordingly, it is possible to automatically switch the display of the recipe setting table 7 to the reduced display state by receiving a display switching command from the operator. Also in this respect, the technology of the present disclosure can simplify editing of the set values of the process recipe.

In addition, since the display switching command is executed by pressing a button, the command can be easily input. In addition, the button for executing the display switching command is not limited to a configuration including a "shortened display" button 63 and a "display all" button 64, and a "display all" button 64 is not provided. A configuration in which only the button 63 is provided may be used. In this case, the recipe setting table 7 is normally displayed on the display screen 55 in full display, and the recipe setting table 7 is displayed in the reduced display only when the "abbreviated display" button 63 is pressed. do. In addition, when the recipe setting table 7 is displayed in the reduced display state, the "reduced display" button 63 may not be displayed, and only the "display all" button 64 may be displayed. In addition, the initial value of the set value of the process recipe is a value that can be set appropriately. Therefore, you may set an initial value different from the already-explained example of the recipe setting table 7 shown in FIG. 6 ("0" in the setting item to input numerical values, and "OFF" in the setting item to input the presence or absence of control). .

A substrate processing apparatus to which the present disclosure can be applied is not limited to the configuration described above. The technique of the present disclosure is a coating device provided in a coating/developing device that applies a resist solution to a glass substrate or a semiconductor wafer and develops after exposure, a developing device, a heating device, and a film forming process for performing film formation on these substrates. Applicable to various substrate processing devices controlled using a process recipe, such as a device.

Embodiment disclosed this time is an illustration in all points, and it should be thought that it is not restrictive. The embodiments described above may be omitted, substituted, or changed in various forms without departing from the scope of the appended claims and their main points.

Claims (10)

A method of setting a process recipe of a device for processing a substrate,
For the plurality of setting items of the process recipe, a plurality of setting values set in association with a plurality of steps defined to progress over time are read from the storage unit by the control computer of the apparatus, and the setting items and the above a recipe setting table configured to be able to specify the set value corresponding to the step, displaying on a display unit of a screen of a display connected to the control computer;
a step of accepting editing of the setting value selected by specifying the step and the setting item through an input unit connected to the control computer while displaying the recipe setting table by the step of displaying on the display unit;
A step of storing the process recipe after accepting editing of the setting value in the storage unit;
During a period in which the control computer performs the process of accepting editing of the setting values, all the setting items of the recipe setting table are changed to the recipe setting table according to a display switching command inputted through the input unit. Switching between an overall display state displaying the associated setting values and an abbreviated display state displaying setting values associated only with the setting items for which edits of the setting values have been received in the past are switched and displayed on the display unit. The method according to claim 1, wherein in the step of displaying on the display unit, the recipe setting table is configured such that an area protruding from the display unit can be displayed on the display unit by scrolling. The method of claim 1 or 2, wherein an initial value is set in advance for all setting values of the process recipe, and the control computer, for the setting items including the setting values that do not match the initial values, A method of judging that editing of the setting value has been accepted in the past. The method according to claim 1 or 2, wherein in the step of accepting editing of the setting value, the control computer associates an edited setting value with an edited flag and stores it in the storage unit, and stores the edited flag in the storing unit. judging that editing of the setting value has been accepted in the past for the setting item including the setting value stored in correspondence with each other. The method according to any one of claims 1 to 4, wherein the original process recipe of the recipe setting table displayed in the step of displaying on the display unit does not contain any of the setting values that have been edited in the past. otherwise, the recipe setting table is displayed in the full display state even when a display switching command for displaying the reduced display state is input. It is a device for processing a substrate,
a substrate processing unit for processing the substrate;
a control computer for controlling operation of the substrate processing unit based on a process recipe stored in a storage unit;
a display and an input unit connected to the control computer;
The control computer reads a plurality of setting values set in association with a plurality of steps defined to progress over time with respect to a plurality of setting items of the process recipe from a storage unit storing the process recipe, and As a recipe setting table configured to be able to specify setting items and the setting values corresponding to the steps, the operation of displaying on the display unit of the screen of the display and the display of the recipe setting table on the display unit, while performing the input through a unit, to perform an operation of accepting editing of the setting value selected by specifying the step and the setting item, and an operation of storing the process recipe after accepting the editing of the setting value in the storage unit;
In addition, the control computer, during a period in which the operation of accepting editing of the setting values is performed, with respect to the recipe setting table, according to a display switching command inputted through the input unit, all the setting items of the recipe setting table Execute an operation of switching between a full display state of displaying the associated setting values and a reduced display state of displaying the setting values associated only with the setting items for which edits of the setting values have been received in the past, and displaying them on the display unit. A device configured to do so. The apparatus according to claim 6, wherein the control computer is configured to be able to execute an operation of displaying an area of the recipe setting table protruding from the display unit on the display unit by scroll movement. The method of claim 6 or 7, wherein an initial value is set in advance for all setting values of the process recipe, and the control computer, for the setting items including the setting values that do not match the initial values, The apparatus which determines that editing of the setting value has been received in the past, and executes a switching operation of a display state of the recipe setting table. The method according to claim 6 or 7, wherein the control computer, in an operation of accepting editing of the setting value, associates an edited completion flag with the edited setting value and stores it in the storage unit, and stores the editing completion flag in the storage unit. An apparatus that determines that editing of the setting value has been accepted in the past for the setting item including the setting value stored in association with flags, and executes a switching operation of a display state of the recipe setting table. The method according to any one of claims 6 to 9, when the original process recipe of the recipe setting table displayed on the display unit does not contain any of the setting values that have been edited in the past, wherein the control computer executes an operation of displaying the recipe setting table in the full display state even when a display switching command for displaying the reduced display state is input.

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