KR20220151402A - Frame and mask integrated frame - Google Patents

Abstract

The present invention relates to a frame and a mask with an integrated frame, which can prevent deformation such as sagging or twisting masks and clearly align masks. According to the present invention, the frame is a frame for a mask with an integrated frame in which a plurality of masks and a frame supporting the masks are integrally formed. The frame comprises: an edge frame part including a hollow area; and a mask cell sheet part including a plurality of grid sheet parts separated from each other in a first direction and a second direction perpendicular to the first direction to be arranged. Both ends of the grid sheet parts are connected to the edge frame part. A mask cell area is formed between a grid sheet part and a neighboring grid sheet part, and a dummy cell area is formed between the grid sheet part and the edge frame part.

Description

Frame and frame integrated mask {FRAME AND MASK INTEGRATED FRAME}

The present invention relates to a frame and a frame-integrated mask. More specifically, it relates to a frame and a frame-integrated mask capable of forming a mask integral with a frame and clearly aligning each mask.

As a technology for forming pixels in the OLED manufacturing process, the FMM (Fine Metal Mask) method, which deposits organic materials on a desired location by attaching a thin metal shadow mask to the substrate, is mainly used.

In the existing OLED manufacturing process, a mask is manufactured in a stick shape, plate shape, etc., and then the mask is welded and fixed to the OLED pixel deposition frame. A plurality of cells corresponding to one display may be provided in one mask. In addition, several masks can be fixed to the OLED pixel deposition frame for manufacturing large-area OLEDs. In the process of fixing to the frame, each mask is tensioned so that it is flat. It is a very difficult task to adjust the tension so that the entire part of the mask is flat. In particular, in order to flatten each cell and align a mask pattern that is only a few to several tens of μm in size, a high level of work is required to check the alignment in real time while finely adjusting the tensile force applied to each side of the mask. do.

Nevertheless, in the process of fixing a plurality of masks to one frame, there is a problem in that alignment between masks and between mask cells is not good. In addition, in the process of fixing the mask to the frame by welding, the thickness of the mask film is too thin and has a large area, so the mask is sagging or distorted by the load, and wrinkles and burrs generated at the welded part during the welding process cause the mask cell to deteriorate. There was a problem with the alignment being staggered.

In the case of ultra-high-definition OLED, the current QHD picture quality is 500 to 600 PPI (pixel per inch), with a pixel size of about 30 to 50 μm, and 4K UHD and 8K UHD high-definition are higher than this, such as ~860 PPI and ~1600 PPI. has a resolution of In this way, considering the pixel size of ultra-high-definition OLED, the alignment error between each cell must be reduced to about several micrometers, and an error that deviate from this can lead to failure of the product, so the yield can be very low. Therefore, there is a need to develop a technology capable of preventing deformation such as drooping or twisting of the mask and clarifying the alignment, a technology of fixing the mask to the frame, and the like.

Accordingly, the present invention has been made to solve various problems of the prior art as described above, and the purpose of the present invention is to provide a frame and frame-integrated mask capable of preventing deformation such as drooping or twisting of the mask and clarifying alignment. to be

In addition, an object of the present invention is to provide a frame and a frame-integrated mask capable of clarifying the alignment of the mask by making the surrounding environment of all masks the same in the process of attaching the mask to the frame.

However, these tasks are illustrative, and the scope of the present invention is not limited thereby.

The above object of the present invention is a frame for a frame-integrated mask in which a plurality of masks and a frame supporting the mask are integrally formed, wherein the frame includes: an edge frame portion including a hollow region; A mask cell sheet portion including a plurality of grid sheet portions disposed at intervals along a first direction and a second direction perpendicular to the first direction, wherein both ends of the grid sheet portion are connected to the edge frame portion, A mask cell region is formed between the sheet portion and the neighboring grid sheet portion, and a dummy cell region is formed between the grid sheet portion and the edge frame portion.

The dummy cell region may be disposed inside the edge frame unit along a formation direction of the edge frame unit.

All edges of the mask cell region may be formed of grid sheet portions having the same width and thickness.

The dummy cell area may be formed to have a smaller size than the mask cell area.

The width of the unit edge frame constituting the edge frame portion may be greater than that of the grid sheet portion, and the thickness of the unit border frame constituting the edge frame portion may be thicker than that of the grid sheet portion.

The mask cell sheet unit may further include an edge sheet unit, the border sheet unit may be connected to the edge frame unit, and both ends of the grid sheet unit may be connected to the border sheet unit.

And, the above object of the present invention is a frame-integrated mask in which a plurality of masks and a frame supporting the mask are integrally formed, wherein the frame includes: an edge frame portion including a hollow region; A mask cell sheet portion including a plurality of grid sheet portions disposed at intervals along a first direction and a second direction perpendicular to the first direction; wherein both ends of the grid sheet portion are connected to the edge frame portion, A mask cell area is formed between the sheet part and the neighboring grid sheet part, a dummy cell area is formed between the grid sheet part and the edge frame part, and the mask on which one mask cell is formed corresponds to each mask cell area This is achieved by a frame-integrated mask in which the mask cell sheet portion is attached, and the dummy mask is attached to the mask cell sheet portion and the edge frame portion in correspondence with each of the dummy cell regions.

At least a portion of the dummy mask is attached to the edge frame portion, and the mask may be attached only to the mask cell sheet portion.

All masks can be attached on a grid sheet portion of the same width and thickness.

The dummy mask may have a smaller size than the mask.

The width of the unit edge frame constituting the edge frame portion may be greater than that of the grid sheet portion, and the thickness of the unit border frame constituting the edge frame portion may be thicker than that of the grid sheet portion.

The mask cell sheet unit may further include an edge sheet unit, the border sheet unit may be connected to the edge frame unit, and both ends of the grid sheet unit may be connected to the border sheet unit.

A plurality of dummy patterns may be formed on the dummy mask.

The tensile force applied to the edge of the mask and the tensile force applied to the edge of the dummy mask may be different.

According to the present invention configured as described above, the mask can be stably supported and moved without deformation, and deformation such as sagging or twisting of the mask can be prevented and alignment can be made clear.

In addition, according to the present invention, in the process of attaching the mask to the frame, there is an effect that the alignment of the mask can be clearly made by making the surrounding environment of all the masks the same.

Of course, the scope of the present invention is not limited by these effects.

1 is a schematic diagram showing a conventional process of attaching a mask to a frame.
2 is a front view and a side cross-sectional view illustrating a frame-integrated mask according to a comparative example.
3 is a front view and a side cross-sectional view illustrating a frame according to a comparative example.
4 is a partial schematic view showing an attachment form of a mask in a frame-integrated mask according to a comparative example.
5 is a front view and a side cross-sectional view showing a frame according to an embodiment of the present invention.
6 is a front view and a side cross-sectional view showing a frame according to another embodiment of the present invention.
7 is a front view and a side cross-sectional view illustrating a frame-integrated mask according to an embodiment of the present invention.
8 is a partial schematic view showing an attachment form of a mask in a frame-integrated mask according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The detailed description of the present invention which follows refers to the accompanying drawings which illustrate, by way of illustration, specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable one skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other but are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in one embodiment in another embodiment without departing from the spirit and scope of the invention. Additionally, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. Accordingly, the detailed description set forth below is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all equivalents as claimed by those claims. Similar reference numerals in the drawings denote the same or similar functions in various aspects, and the length, area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily practice the present invention.

1 is a schematic diagram showing a process of attaching a conventional mask 10 to a frame 20.

The conventional mask 10 is a stick-type or plate-type, and the stick-type mask 10 of FIG. 1 can be used by welding both sides of the stick to the OLED pixel deposition frame. A plurality of display cells C are provided on the body of the mask 10 (or the mask layer 11 ). One cell C corresponds to one display of a smartphone or the like. A pixel pattern P is formed in the cell C to correspond to each pixel of the display.

Referring to (a) of FIG. 1 , the stick mask 10 is loaded on the frame 20 in the form of a square frame in an extended state by applying a tensile force F in the direction of the long axis of the stick mask 10 . The cells C1 to C6 of the stick mask 10 are positioned in the blank area inside the frame 20 .

Referring to (b) of FIG. 1, after aligning the tension (F) applied to each side of the stick mask 10 finely, welding (W) a part of the side of the stick mask 10 stick The mask 10 and the frame 20 are interconnected. 1(c) shows a cross-sectional side view of the frame and the stick mask 10 connected to each other.

Although the tensile force F applied to each side of the stick mask 10 is finely adjusted, there is a problem in that the mask cells C1 to C6 are not well aligned with each other. For example, an example is that the distances between the patterns of the cells C1 to C6 are different from each other or the patterns P are distorted. Since the stick mask 10 has a large area including a plurality of cells C1 to C6 and has a very thin thickness of several tens of μm, it is easily hit or distorted by a load. In addition, it is very difficult to check the alignment between the cells C1 to C6 in real time through a microscope while adjusting the tensile force F to flatten each cell C1 to C6. In order to prevent the mask pattern P having a size of several to several tens of μm from adversely affecting the pixel process of the ultra-high-definition OLED, it is preferable that the alignment error does not exceed 3 μm. This alignment error between adjacent cells is referred to as pixel position accuracy (PPA).

As the size of the target substrate for forming OLED pixels increases, the size of the stick mask 10 increases, and as the thickness of the stick mask 10 becomes thinner to realize high resolution, it is difficult to tension and weld the stick mask 10 It's getting harder. In addition to this, while connecting the plurality of stick masks 10 to one frame 20, respectively, a state of alignment between the plurality of stick masks 10 and between the plurality of cells C to C6 of the stick mask 10 It is also a very difficult task to clarify, and the process time for alignment inevitably increases, which is a significant reason for reducing productivity.

Meanwhile, after the stick mask 10 is connected and fixed to the frame 20 , the tensile force F applied to the stick mask 10 may act as a reverse tension to the frame 20 . Such tension may deform the frame 20 minutely, and a problem in which an alignment state is distorted between the plurality of cells C1 to C6 may occur.

Accordingly, the present invention proposes a frame 200 and a frame-integrated mask enabling the mask 100 to form an integral structure with the frame 200 . The mask 100 integrally formed with the frame 200 can be prevented from deformation such as sagging or twisting, and can be clearly aligned with the frame 200 .

Figure 2 is a front view (Fig. 2 (a)) and a side cross-sectional view (Fig. 2 (b)) showing a frame-integrated mask according to a comparative example of the present invention. 3 is a front view (FIG. 3 (a)) and a side cross-sectional view (FIG. 3 (b)) showing a frame 200 according to a comparative example of the present invention.

As a comparative example described first for comparison with the embodiment of the present invention of FIGS. 5 to 8, the configuration of the frame-integrated mask is briefly described in FIGS. 2 to 4 and below, but the structure and manufacturing process of the frame-integrated mask are disclosed in Korean patents. It can be understood that the contents of Application No. 2018-0016186 are incorporated as a whole.

Referring to FIGS. 2 and 3 , the frame-integrated mask according to the comparative example may include a plurality of masks 100 and one frame 200 . In other words, it is a form in which a plurality of masks 100 are attached to the frame 200 one by one. Hereinafter, for convenience of description, a square mask 100 will be described as an example, but the masks 100 may be in the form of a stick mask having protrusions clamped on both sides before being attached to the frame 200, and the frame 200 ), then the protrusion can be removed.

A plurality of mask patterns P may be formed on each mask 100 , and one cell C may be formed on one mask 100 . One mask cell C may correspond to one display of a smartphone or the like.

The mask 100 may be made of a material such as invar, super invar, nickel (Ni), or nickel-cobalt (Ni-Co). The mask 100 may use a gold sheet produced by a rolling process or electroforming.

The frame 200 is formed to attach a plurality of masks 100 thereto. The frame 200 is preferably made of a material such as invar, super invar, nickel, or nickel-cobalt having the same coefficient of thermal expansion as that of the mask in consideration of thermal deformation. The frame 200 may include an edge frame portion 210 having a substantially rectangular shape or a rectangular frame shape. The inside of the edge frame unit 210 may be hollow.

In addition, the frame 200 includes a plurality of mask cell regions CR and may include a mask cell sheet portion 220 ′ connected to the edge frame portion 210 . The mask cell sheet portion 220' may include an edge sheet portion 221' and first and second grid sheet portions 223' and 225'. The edge sheet portion 221' and the first and second grid sheet portions 223' and 225' refer to portions partitioned from the same sheet, and are integrally formed with each other.

The thickness of the edge frame portion 210 may be several mm to several cm thicker than the thickness of the mask cell sheet portion 220'. The mask cell sheet portion 220 ′ may have a thickness of about 0.1 mm to 1 mm, which is thinner than the thickness of the edge frame portion 210 but thicker than the mask 100 . The first and second grid sheet portions 223' and 225' may have a width of about 1 to 5 mm.

A plurality of mask cell regions (CR: CR11 to CR56) may be provided on the flat sheet except for regions occupied by the edge sheet portion 221' and the first and second grid sheet portions 223' and 225'. have.

The frame 200 includes a plurality of mask cell regions CR, and each mask 100 may be attached such that one mask cell C corresponds to the mask cell region CR. The mask cell C corresponds to the mask cell region CR of the frame 200, and part or all of the dummy may be attached to the frame 200 (mask cell sheet portion 220). Accordingly, the mask 100 and the frame 200 can form an integral structure.

The mask 100 may include mask cells C on which a plurality of mask patterns P are formed and dummy DMs around the mask cells C. The mask 100 may be manufactured from a metal sheet produced through a rolling process, electroplating, or the like, and one cell C may be formed in the mask 100 . The dummy DM corresponds to a portion of the mask film 110 (mask metal film 110) excluding the cell C, and includes only the mask film 110 or a predetermined dummy having a shape similar to that of the mask pattern P. A patterned mask layer 110 may be included. A part or all of the dummy DM may be attached to the frame 200 (mask cell sheet portion 220) corresponding to the edge of the mask 100.

The width of the mask pattern P may be less than 40 μm, and the thickness of the mask 100 may be about 5 μm to 20 μm. Since the frame 200 includes a plurality of mask cell regions (CR: CR11 to CR56), the mask 100 has mask cells (C: C11 to C56) corresponding to each of the mask cell regions (CR: CR11 to CR56). ) may also be provided with a plurality.

4 is a partial schematic view showing an attachment form of a mask 100 in a frame-integrated mask according to a comparative example.

Referring to FIG. 4 , in the frame-integrated mask according to the comparative example of FIGS. 2 and 3 , the masks 100 should be tightly attached to the frames 200 (210, 220') so as not to cause sagging. Therefore, a predetermined tensile force is applied to the mask 100 so that it can be attached to the frame 200 in a taut state.

However, a difference in tensile properties appears in the frame 200 and the attached portion of each mask 100, that is, the edge portion of the mask 100.

For example, the upper edge 101 and the left edge 102 of the mask 100 including the mask cell C11 are attached to the border sheet portion 221', and the right edge and the lower edge 103 are attached to the border sheet portion 221'. 104 is a state attached to the first and second grid sheet parts 223' and 225', and the edge sheet part 221' is directly welded (W) attached to the thick edge frame part 210 with strong rigidity. state, since the first and second grid sheet portions 223' and 225' are relatively weak and in the form of thin sheets, the upper/left edges 101 and 102 and the right/lower edges (101, 102) among the four edges of the mask 100 103, 104), a difference appears in the tensile properties acting on them.

In addition, since the widths D1 and D2 of the edge sheet portion 221' and the widths D3 and D4 of the first and second grid sheet portions 223' and 225' may be different, each of the mask 100 may have different widths. There is bound to be a further difference in tensile properties for each frame.

On the other hand, the masks 100 that are not adjacent to the edge sheet portion 221', for example, the masks 100 including the cells C22, C23, C32, and C33 have upper/left/right/lower edges ( Since all 105, 106, 107, and 108 are attached only on the first and second grid sheet portions 223' and 225', the tensile properties of the four edges can be substantially uniform. However, the masks 100 adjacent to the edge sheet portion 221', that is, the masks 100 including the cells C11, C12, C13, C21, and C31, and the edge sheet portion 221' A problem of different tensile properties may occur between masks 100 including non-adjacent masks, that is, cells C22 , C23 , C32 , and C33 .

As a result, since the masks 100 cannot be attached to the frame 200 while having the same tensile properties, the masks 100 at least partially attached to the frame sheet portion 221' and the mask cell sheet portion 220 A problem in that the alignment of the mask cell C and the mask pattern P between the masks 100 is not constant may occur because the tensile properties are different from those of the masks 100 attached only to '). In a mask for ultra-high-definition pixel deposition, an alignment error of several micrometers or less can lead to product failure.

Accordingly, the present invention proposes a frame 200 and a frame-integrated mask allowing the masks 100 to have the same tensile properties as each other.

5 is a front view (FIG. 5 (a)) and a side cross-sectional view (FIG. 5 (b)) showing a frame 200 according to an embodiment of the present invention.

Referring to FIG. 5 , the frame 200 of the present invention includes an edge frame part 210 and a mask cell sheet part 230 . Since the edge frame unit 210 is substantially the same as the border frame unit 210 described above with reference to FIG. 2 , a detailed description thereof will be omitted.

The mask cell sheet part 230 includes a plurality of grid sheet parts 233 and 235 . The first grid sheet portion 233 may extend in a first direction (eg, a horizontal direction), and the second grid sheet portion 235 may extend in a second direction (eg, a vertical direction). Both ends of the plurality of grid sheet parts 233 and 235 may be connected to the edge frame part 210 .

The first and second grid sheet portions 233 and 235 may cross each other, and mask cell regions CR (CR11 to CR56) may be formed between the neighboring grid sheet portions 233 and 235 . In FIG. 5 , 6 × 5 mask cell regions CR are formed and are referred to as CR11 to CR56 in order.

In addition to this, in the present invention, dummy cell regions DR (DR11 to DR78) may be formed between the grid sheet parts 233 and 235 and the frame frame part 210 . The dummy cell region DR may be disposed inside the border frame unit 210 along a forming direction of the border frame unit 210, that is, along the edge frame unit 210 having a rectangular frame shape in which a hollow region is formed. From another point of view, it can be said that at least some of the edges of the dummy cell region DR are shared with the borders of the edge frame unit 210, and at least some of the borders are shared with the borders of the grid sheet parts 233 and 235.

The mask cell region CR may be formed only by the edges of the first and second grid sheet portions 233 and 235 without portions shared with the edges of the edge frame portion 210 . From another point of view, it can be said that all edges of the mask cell region CR are shared with the edges of the first and second grid sheet portions 233 and 235 .

The first and second grid sheet portions 233 and 235 may have different thicknesses and widths, but may have different directions in which they are extended. Accordingly, all edges of the mask cell region CR may be formed of the grid sheet portions 233 and 235 having the same width and thickness. Accordingly, the tensile characteristics of the four edges in each mask cell region CR may be the same, and the tensile characteristics of the respective masks 100 attached to each mask cell region CR may also be the same.

The dummy cell region DR serves to provide the same tensile characteristics and tensile environment for the four edges or four sides of the masks 100 attached to the mask cell region CR, so it does not need to occupy an excessively large area. Therefore, it is preferable that the dummy cell region DR is smaller in size than the mask cell region CR, which actually contributes to the pixel deposition process.

Since the edge frame part 210 must support the rigidity of the entire frame 200, it must be larger in scale than the mask cell sheet part 230 or the first and second grid sheet parts 233 and 235. Therefore, it is preferable that the unit frame frame constituting each edge of the frame frame unit 210 has a larger width and a thicker thickness than those of the grid sheet units 233 and 235 .

In the present invention, even though the size and rigidity of the edge frame unit 210 and the first and second grid sheet units 233 and 235 are different, the inner side of the border frame unit 210 and the first and second grid sheet units 233 and 235 Since dummy cell regions DR are disposed in ) and mask cell regions CR surrounded only by the first and second grid sheet portions 233 and 235 are disposed inside the dummy cell regions DR, each mask cell region Tensile properties around (CR) may be configured identically.

6 is a front view (FIG. 6 (a)) and a side cross-sectional view (FIG. 6 (b)) showing a frame 200 according to another embodiment of the present invention. FIG. 6 explains only differences from FIG. 5 .

Referring to FIG. 6 , in the frame 200 according to another embodiment, the mask cell sheet portion 230' may further include an edge sheet portion 231. The edge sheet unit 231 is connected to the edge frame unit 210 , and both ends of the first and second grid sheet units 233 and 235 may be connected to the edge sheet unit 231 .

Also, dummy cell regions DR (DR11 to DR78) may be formed between the grid sheet portions 233 and 235 and the edge sheet portion 231 . The dummy cell region DR may be disposed inside the edge sheet portion 231 along the forming direction of the edge sheet portion 231 , that is, along the edge sheet portion 231 having a rectangular frame shape in which a hollow region is formed. From another point of view, it can be said that at least some edges of the dummy cell region DR are shared with the borders of the border sheet portion 231, and at least some borders are shared with the borders of the grid sheet portions 233 and 235.

In the embodiment of FIG. 6 , since the mask cell region CR may be formed only by the edges of the first and second grid sheet parts 233 and 235 without a portion shared with the edge of the edge sheet part 231, each mask The tensile properties of the four edges in the cell region CR may be the same, and the tensile characteristics of the respective masks 100 attached to the respective mask cell regions CR may also be the same.

In addition, since the dummy cell regions DR are disposed inside the edge sheet portion 231 having the same thickness and the same or only a slight difference in width from the first and second grid sheet portions 233 and 235, the border frame Compared to the embodiment of FIG. 5 in which the dummy cell regions DR are directly disposed inside the portion 210 , a difference in tensile characteristics between the dummy cell region DR and the mask cell region CR can be reduced.

7 is a front view (FIG. 7 (b)) and a side cross-sectional view (FIG. 7 (c)) showing a frame-integrated mask according to an embodiment of the present invention. 8 is a partial schematic view showing an attachment form of a mask 100 in a frame-integrated mask according to an embodiment of the present invention.

Referring to FIGS. 7 and 8 , the mask 100 corresponds to each of the mask cell regions (CR: CR11 to CR56), so that the edge dummy portion of the mask 100 is the first and second grid sheet portions 233 and 235 can be attached by welding. A dummy mask 150 corresponds to each of the dummy cell regions DR: DR11 to DR78 so that an edge portion of the dummy mask 150 is attached to the frame portion 210 and the first and second grid sheet portions 233 and 235. Can be attached by welding. 7 and 8 , the mask 100 attached to each of the mask cell regions CR: CR11 to CR56 includes one mask cell C: C11 to C56, and each dummy cell region DR : The dummy mask 150 attached on DR11 to DR78 is illustrated as including dummy cells D: D11 to D78.

In order to uniformly control the tensile properties around the mask 100, it is preferable that a dummy pattern penetrating the dummy mask 150, like the mask pattern P, is formed. However, the through dummy pattern does not necessarily need to be formed on the dummy mask 150, and a half-etched pattern may be formed or a patternless mask may be attached. Since the dummy cell region DR is smaller than the mask cell region CR, it is preferable that the dummy mask 150 is also smaller than the mask 100 .

Since some edges of the dummy mask 150 are attached to the edge frame unit 210 and some edges are attached to the first and second grid sheet portions 233 and 235, the dummy mask 150 has tensile properties for each edge. can be different The tension applied to the edges of the mask 100 and the dummy mask 150 may also be different.

On the other hand, all of the masks 100 may be attached to the first and second grid sheet portions 233 and 235 having the same widths D1 to D4 and thickness. For example, all four edges 101, 102, 103, and 104 of the mask 100 including the mask cell C11 are attached to the first and second grid sheet portions 233 and 235, and the mask cells ( All four edges 105 , 106 , 107 , and 108 of the mask 100 including C22 may be attached to the first and second grid sheet portions 233 and 235 . Accordingly, the masks 100 attached to the outermost mask cell region CR11 or the central mask cell region CR22 may have the same tensile characteristics for four edges.

As described above, in the present invention, the frame 200 may be configured so that the edges of the masks 100 and the surrounding environment may have the same tensile characteristics and structural environment. Accordingly, mutual alignment of the mask cells C and the mask patterns P of the masks 100 having the same tensile characteristics can be clearly performed.

Although the present invention has been shown and described with preferred embodiments as described above, it is not limited to the above embodiments, and various variations can be made by those skilled in the art within the scope of not departing from the spirit of the present invention. Transformation and change are possible. Such modifications and variations are to be regarded as falling within the scope of this invention and the appended claims.

100: mask
110: mask film
200: frame
210: border frame part
230: mask cell sheet portion
231: border seat portion
233: first grid sheet portion
235: second grid sheet portion
230: deformation prevention unit
C: cell, mask cell
CR: mask cell area
D: dummy cell
DR: dummy cell area

Claims (14)

A frame for a frame-integrated mask in which a plurality of masks and a frame supporting the mask are integrally formed,
frame,
An edge frame portion including a hollow region;
a mask cell sheet portion including a plurality of grid sheet portions spaced apart from each other along a first direction and a second direction perpendicular to the first direction;
including,
Both ends of the grid sheet portion are connected to the frame portion,
A frame comprising: a mask cell region is formed between a grid sheet portion and an adjacent grid sheet portion, and a dummy cell region is formed between the grid sheet portion and an edge frame portion. According to claim 1,
The frame of claim 1 , wherein the dummy cell region is disposed inside the edge frame portion along a formation direction of the frame frame portion. According to claim 1,
A frame, wherein all borders of the mask cell area are composed of grid sheet portions of the same width and thickness. According to claim 1,
The dummy cell region is formed to have a smaller size than the mask cell region. According to claim 1,
The width of the unit frame constituting the frame frame portion is larger than that of the grid sheet portion,
A frame in which the thickness of the unit frame constituting the frame frame portion is thicker than that of the grid sheet portion. According to claim 1,
The mask cell sheet part further includes an edge sheet part,
A frame wherein the rim sheet portion is connected to the rim frame portion, and both ends of the grid sheet portion are connected to the rim sheet portion. A frame-integrated mask in which a plurality of masks and a frame supporting the mask are integrally formed,
frame,
An edge frame portion including a hollow region;
a mask cell sheet portion including a plurality of grid sheet portions spaced apart from each other along a first direction and a second direction perpendicular to the first direction;
including,
Both ends of the grid sheet portion are connected to the frame portion,
A mask cell region is formed between the grid sheet part and the neighboring grid sheet part, and a dummy cell region is formed between the grid sheet part and the edge frame part;
A frame in which one mask cell is formed is attached to the mask cell sheet portion corresponding to each mask cell region, and a dummy mask is attached to the mask cell sheet portion and the frame frame portion corresponding to each dummy cell region. All-in-one mask. According to claim 7,
At least a portion of the dummy mask is attached to the edge frame portion, and the mask is attached only to the mask cell sheet portion. According to claim 7,
A frame-integrated mask, wherein all masks are attached on a grid sheet portion of the same width and thickness. According to claim 7,
The dummy mask is a frame-integrated mask formed to have a smaller size than the mask. According to claim 7,
The width of the unit frame constituting the frame frame portion is larger than that of the grid sheet portion,
A frame in which the thickness of the unit frame constituting the frame frame portion is thicker than that of the grid sheet portion. According to claim 7,
The mask cell sheet part further includes an edge sheet part,
A frame-integrated mask, wherein the edge sheet portion is connected to the edge frame portion, and both ends of the grid sheet portion are connected to the edge sheet portion. According to claim 7,
A frame-integrated mask, wherein a plurality of dummy patterns are formed on the dummy mask. According to claim 7,
A frame-integrated mask in which the tensile force applied to the edge of the mask and the tensile force applied to the edge of the dummy mask are different.

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